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The development of high permeability FeCo nanocrystalline films for GHz applications by means of acetylene mixtured gas reactive sputtering

Research Project

Project/Area Number 19760214
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionShinshu University

Principal Investigator

LIU Xiaoxi  Shinshu University, 工学部, 准教授 (10372509)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,720,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥420,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2007: ¥1,900,000 (Direct Cost: ¥1,900,000)
Keywords軟磁性薄膜 / 高周波デバイス / ナノ結晶薄膜 / 飽和磁束密度 / 保磁力 / ナノ結晶 / 透磁率 / 高透磁率
Research Abstract

無線LANやBluetoothに代表される高速、大容量通信機器の集積化、小型化および省エネルギー化のため、現在の空芯インダクタに替わって、薄膜磁芯インダクタの実用化が急務である。しかし、通常の磁性薄膜はGHz帯域では共鳴損失が大幅に増加するため、その適用は困難である。この問題を克服のために、FeCo/NiFe積層薄膜、FeCo/反磁性体積層薄膜、FeCo/酸化物グラニュラー薄膜など薄膜構造の提案がある。一方、本課題では、これまでに例のない、アセチレンガス導入による反応性スパッタ法を用いて形成するFeCo磁性薄膜を、薄膜インダクタ用磁芯材料として提案する。高飽和磁化を示すFeCo合金薄膜は,異方性磁界Hkを大きくすることによって,共鳴周波GHzまでの広帯域化が可能となる。本研究の目標は、共鳴周波数は3GHz以上、比透磁率実部は1000以上、4πMsは20kG以上の高性能薄膜磁芯の開発である。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (6 results)

All 2008 2007

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (3 results)

  • [Journal Article] Magnetic Properties of FeCo Films Prepared by Co-Sputtering and Hydrogenous Gas Reactive Sputtering2008

    • Author(s)
      Xiaoxi Liu, Akimitsu Morisako
    • Journal Title

      IEEE TRANSACTIONS ON MAGNETICS 44

      Pages: 3910-3912

    • Related Report
      2008 Annual Research Report 2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Soft magnetic properties of FeCo films with high saturation magnetization2008

    • Author(s)
      Xiaoxi Liu, Akimitsu Morisako
    • Journal Title

      JOURNAL OF APPLIED PHYSICS 103

    • Related Report
      2008 Annual Research Report 2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Soft magnetic properties of FeCo films with high saturation magnetization2008

    • Author(s)
      Xiaoxi Liu, Akimitsu Morisako
    • Journal Title

      Journal of Applied Physics 103

      Pages: 7726-7726

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Magnetic Properties of FeCo Films Prepared by Co-Sputtering and Hydrogenous Gas Reactive Sputtering2008

    • Author(s)
      Xiaoxi Liu, Akimitsu Morisako
    • Organizer
      IEEE International Conference on Magnetics
    • Place of Presentation
      Municipal Conference Center, Madrid, Spain
    • Year and Date
      2008-05-05
    • Related Report
      2008 Final Research Report
  • [Presentation] Magnetic Properties of FeCo Films Prepared by Co-Sputtering and Hydrogenous Gas Reactive Sputtering2008

    • Author(s)
      Xiaoxi Liu, Akimitsu Morisako
    • Organizer
      IEEE International Magnetics Conference
    • Place of Presentation
      Municipal Conference Center, Madrid, Spain
    • Year and Date
      2008-05-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] Soft magnetic properties of FeCo films with high saturation magnetization2007

    • Author(s)
      Xiaoxi Liu, Akimitsu Morisako
    • Organizer
      52^<nd> Annual Conference on Magnetism and Magnetic Materials
    • Place of Presentation
      Tampa, Florida, USA
    • Year and Date
      2007-11-05
    • Related Report
      2008 Final Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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