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Research of single mode semiconductor membrane laser on SOI waveguide

Research Project

Project/Area Number 19760231
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionKanazawa University (2008)
Tokyo Institute of Technology (2007)

Principal Investigator

MARUYAMA Takeo  Kanazawa University, 電子情報学系, 准教授 (60345379)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,380,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥180,000)
Fiscal Year 2008: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2007: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywords半導体レーザ / 集積レーザ / シリコンフォトニクス / 光集積回路 / 分布帰還形レーザ / ウエハボンディング / 光導波路 / SOI
Research Abstract

チップ間光インターコネクションを行うためには、電子デバイスと光デバイスとをチップ内に集積する必要があり、そのための技術開発が急務となる。本研究は、これまで半導体レーザとして実績のあるIII-V族化合物半導体(GaInAsP/InP)をSOI基板に直接貼り付けることによりシリコンLSI上での集積化に適した単一モード半導体レーザの作製を行った。その結果、SOI基板上への光励起における単一モード発振および高温(80℃)動作、さらに電流注入構造を試作し、LEDおよびレーザ発振を実現した。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (78 results)

All 2009 2008 2007

All Journal Article (20 results) (of which Peer Reviewed: 20 results) Presentation (58 results)

  • [Journal Article] Loss reduction of Si wire waveguide fabricated by edge-enhancement writing for electron beam lithography and reactive ion etching using double layered resist mask with C602009

    • Author(s)
      K. Inoue, D. Plumwongrot, N. Nishiyama, S. Sakamoto, H. Enomoto, S. Tamura, T. Maruyama and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 48, no. 3

    • NAID

      120006581968

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Injection-type GaInAsP-InP-Si distributed-feedback laser directly bonded on silicon-on-insulator substrate2009

    • Author(s)
      T. Okumura, T. Maruyama, H. Yonezawa, N. Nishiyama and S. Arai
    • Journal Title

      IEEE Photon. Technol. Lett. vol. 21, no. 5

      Pages: 283-285

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Injection-type GaInAsP-InP-Si distributed-feedback laser directly bonded on silicon-on-insulator substrate2009

    • Author(s)
      T. Okumura
    • Journal Title

      IEEE Photon. Technol. Left 21

      Pages: 283-285

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Loss reduction of Si wire waveguide fabricated by edge-enhancement writing for electron beam lithography and reactive ion etching using double layered resist mask with C_<60>2009

    • Author(s)
      K. Inoue
    • Journal Title

      Jpn. J. Appl. Phys. 48

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Polarization anisotropy of spontaneous emission spectra in GaInAsP/InP quantum-wire structures2008

    • Author(s)
      D. Plumwongrot, T. Maruyama, A. Haque, H. Yagi, K. Miura, Y. Nishimoto and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 47, no. 5

      Pages: 3735-3741

    • NAID

      40016057279

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Polarization anisotropy of spontaneous emission spectra in GaInAsP/InP quantum-wire structures2008

    • Author(s)
      D. Plumwongrot
    • Journal Title

      Jpn. J. Appl. Phys. 47

      Pages: 3735-3741

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Single-mode operation of GaInAsP/InP-membrane distributed feedback (DFB) lasers bonded on silicon-on-insulator (SOI) substrate with rib-waveguide structure2007

    • Author(s)
      T. Okumura, T. Maruyama, M. Kanemaru, S. Sakamoto and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 46, no. 48

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] GaInAsP/InP membrane BH-DFB laser with air-bridge structure2007

    • Author(s)
      H. Naitoh, S. Sakamoto, M. Ohtake, T. Okumura, T. Maruyama, N. Nishiyama and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 46, no. 47

    • NAID

      110006344314

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 85℃ continuous-wave operation of GaInAsP/InP-membrane buried heterostructure distributed feedback lasers with polymer cladding Layer2007

    • Author(s)
      S. Sakamoto, H. Naitoh, M. Ohtake, Y. Nishimoto, T. Maruyama, N. Nishiyama and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 46, no. 47

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Bragg wavelength detuning in GaInAsP/InP DFB lasers with wirelike active regions2007

    • Author(s)
      D. Plumwongrot, Y. Nishimoto, S. M. Ullah, Y. Tamura, M. Kurokawa, T. Maruyama, N. Nishiyama and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 46, no. 45

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Micro-photoluminescence characterizations of GaInAsP/InP single quantum wires fabricated by dry etching and regrowth2007

    • Author(s)
      H. Itoh, M. Yoshita, H. Akiyama, D. Plumwongrot, T. Maruyama and S. Arai
    • Journal Title

      J. Appl. Phys. vol. 102, no. 9

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Strongly index-coupled membrane BH-DFB lasers with surface corrugation grating2007

    • Author(s)
      S. Sakamoto, H. Naitoh, M. Ohtake, Y. Nishimoto, S. Tamura, T. Maruyama, N. Nishiyama and S. Arai
    • Journal Title

      IEEE J. Sel. Topics Quantum. Electron. vol. 13, no. 5

      Pages: 1135-1141

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] High T0 operation of 1590 nm GaInAsP/InP quantum-wire distributed feedback lasers by Bragg wavelength detuning2007

    • Author(s)
      Y. Nishimoto, H. Yagi, K. Miura, D. Plumwongrot, K. Ohira, T. Maruyama and S. Arai
    • Journal Title

      Jpn. J. Appl. Phys. vol. 46, no. 17

    • NAID

      210000063947

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] High T_0 Operation of 1590 nm GaInAsP/InP Quantum-Wire Distributed Feedback lasers by Bragg Waveleength Detuning2007

    • Author(s)
      Y.Nishimoto
    • Journal Title

      Jpn.J.Appl.Phys. 46

      Pages: 411-413

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strongly Index-Coupled Membrant BH-DFB Lasers Wtih Surface Corrugation Grating2007

    • Author(s)
      S.Sakamoto
    • Journal Title

      IEEE J.Select.Topics Quantum Elcctron. 13

      Pages: 1135-1141

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro-Photoluminesecence Characterizations of GnInAsP/InP Single Quantum Wires Fabricated by Dry Etching and Regrowth2007

    • Author(s)
      H.Itoh
    • Journal Title

      J.Appl.Phys. 102

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] D.Plumwongrot Bragg Wavelength Detuning in CaInAsP/InP Distributed Feedback Lasers with Wirelike Active Regions2007

    • Author(s)
      D, Plumwongrot
    • Journal Title

      Jpn.J.Appl.Phys. 46

      Pages: 1090-1092

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 85^0C Continuous-Wave Operation of GaInAsP/-Membrane Buried Heterostructure Distributed Feedback Lasers with Polymer Cladding Layer2007

    • Author(s)
      S.Sakamoto
    • Journal Title

      Jpn.J.Appl.Phys 46

      Pages: 1155-1157

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GaInAsp/InP membrane Buried Heterostructure Distributed Feedback Laser with Air-Bridge Structure2007

    • Author(s)
      H.Naitoh
    • Journal Title

      Jpn.J.Appl.Phys 46

      Pages: 1158-1160

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Single-Mode Operation of GaInAsP/InP-Membrane Distributed Feedback Lasers Bonded on Silicon-on-Insulator Substrate with Rib-Waveguide Structure2007

    • Author(s)
      T.Okumura
    • Journal Title

      Jpn.J.Appl.Phys 46

      Pages: 12061208-12061208

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] シリコン基板上半導体レーザ・発光デバイスの現状2009

    • Author(s)
      西山伸彦、丸山武男、荒井滋久
    • Organizer
      2009年電子情報通信学会総合大会, CI-2-4
    • Place of Presentation
      愛媛
    • Year and Date
      2009-03-18
    • Related Report
      2008 Final Research Report
  • [Presentation] シリコン基板上半導体レーザ・発光デバイスの現状2009

    • Author(s)
      西山伸彦
    • Organizer
      2008年電子情報通信学会総合大会
    • Place of Presentation
      愛媛
    • Year and Date
      2009-03-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] SOI上の半導体薄膜レーザ2008

    • Author(s)
      荒井滋久、丸山武男、西山伸彦、奥村忠嗣、黒川宗高、白尾瑞基、米澤英徳、近藤大介、伊藤瞳
    • Organizer
      第10回電子情報通信学会 シリコンフォトニクス研究会, SIPH2008-15, 招待講演
    • Place of Presentation
      東京
    • Year and Date
      2008-11-07
    • Related Report
      2008 Final Research Report
  • [Presentation] SOI上の半導体薄膜レーザ2008

    • Author(s)
      荒井滋久
    • Organizer
      電子情報通信学会シリコンフォトニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2008-11-07
    • Related Report
      2008 Annual Research Report
  • [Presentation] Loss reduction of Si wire waveguide on SOI substrate prepared by parallel plate RIE using double layered resist mask with C602008

    • Author(s)
      K. Inoue, D. Plumuwongrot, N. Nishiyama, S. Sakamoto, H. Enomoto, S. Tamura, T. Maruyama and S. Arai
    • Organizer
      the IEEE Nanotechnology Materials and Devices Conference 2008(NMDC 2008), Mo P20
    • Place of Presentation
      Kyoto(Japan)
    • Year and Date
      2008-10-20
    • Related Report
      2008 Final Research Report
  • [Presentation] Loss reduction of Si wire waveguide on SOI substrate prepared by parallel plate RIE using double layered resist mask with C_<60>2008

    • Author(s)
      K. Inoue
    • Organizer
      NMDC 2008
    • Place of Presentation
      Kyoto (Japan)
    • Year and Date
      2008-10-20
    • Related Report
      2008 Annual Research Report
  • [Presentation] CMOSプロセスによるアバランシェフォトダイオード2008

    • Author(s)
      高松英輝、山王紀明、丸山武男、飯山宏一
    • Organizer
      平成20年度電気関係学会北陸支部連合大会, D-22
    • Place of Presentation
      富山
    • Year and Date
      2008-09-13
    • Related Report
      2008 Final Research Report
  • [Presentation] PETをコア層に用いた有機光導波路の検討2008

    • Author(s)
      小野裕佑、高村俊裕、丸山武男、飯山宏一
    • Organizer
      平成20年度電気関係学会北陸支部連合大会, D-29
    • Place of Presentation
      富山
    • Year and Date
      2008-09-13
    • Related Report
      2008 Final Research Report
  • [Presentation] PETをコア層に用いた有機光導波路の検討2008

    • Author(s)
      小野裕佑
    • Organizer
      電気関係学会北陸支部連合大会
    • Place of Presentation
      富山
    • Year and Date
      2008-09-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] CMOSプロセスによるアバランシェフォトダイオード2008

    • Author(s)
      高松英輝
    • Organizer
      電気関係学会北陸支部連合大会
    • Place of Presentation
      富山
    • Year and Date
      2008-09-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] Injection type GaInAsP/InP DFB lasers directly bonded on SOI substrate2008

    • Author(s)
      H. Yonezawa, T. Maruyama, T. Okumura, N. Nishiyama and S. Arai
    • Organizer
      International Nano-Optoelectronic Workshop 2008(iNOW 2008), P4-16
    • Place of Presentation
      Tokyo, Saiko and Shonan(Japan)
    • Year and Date
      2008-08-08
    • Related Report
      2008 Final Research Report
  • [Presentation] GaInAsP/InP DFB lasers directly bonded on SOI substrate2008

    • Author(s)
      H. Yonezawa
    • Organizer
      i-NOW 2008
    • Place of Presentation
      Lake Saiko (Japan)
    • Year and Date
      2008-08-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Evaluation of Si wire waveguide fabricated by parallel plate RIE process using double layered EB resist containing C602008

    • Author(s)
      K. Inoue, N. Nishiyama, H. Enomoto, S. Tamura, T. Maruyama and S. Arai
    • Organizer
      International Nano-Optoelectronic Workshop 2008(iNOW 2008), P3-24
    • Place of Presentation
      Tokyo, Saiko and Shonan(Japan)
    • Year and Date
      2008-08-07
    • Related Report
      2008 Final Research Report
  • [Presentation] CH4/H2-RIE induced optical property degradation in GaInAsP/InP quantum-well structures2008

    • Author(s)
      M. Kurokawa, D. Plumwonrot, T. Maruyama, N. Nishiyama and S. Arai
    • Organizer
      International Nano-Optoelectronic Workshop 2008(iNOW 2008), P3-19
    • Place of Presentation
      Tokyo, Saiko and Shonan(Japan)
    • Year and Date
      2008-08-07
    • Related Report
      2008 Final Research Report
  • [Presentation] CH4/H2-RIE induced optical property degradation in GaInAsP/InP quantum-well structures2008

    • Author(s)
      M. Kurokawa
    • Organizer
      i-NOW 2008
    • Place of Presentation
      Lake Saiko (Japan)
    • Year and Date
      2008-08-07
    • Related Report
      2008 Annual Research Report
  • [Presentation] Evaluation of Si wire waveguide fabricated by parallel plate ME process using double layered EB resist containing C_<60>2008

    • Author(s)
      K. Inoue
    • Organizer
      i-NOW 2008
    • Place of Presentation
      Lake Saiko (Japan)
    • Year and Date
      2008-08-07
    • Related Report
      2008 Annual Research Report
  • [Presentation] SOI基板への直接貼り付け法によるGaInAsP/InP DFBレーザ2008

    • Author(s)
      奥村忠嗣、丸山武男、米澤英徳、西山伸彦、荒井滋久
    • Organizer
      電子情報通信学会レーザ・量子エレクトロニクス研究会, LQE2008-29, pp. 45-50
    • Place of Presentation
      東京
    • Year and Date
      2008-06-27
    • Related Report
      2008 Final Research Report
  • [Presentation] SOI基板への直接貼り付け法によるGaInAsP/InP DFBレーザ2008

    • Author(s)
      奥村忠嗣
    • Organizer
      電子情報通信学会レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2008-06-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] RIE-plasma induced optical property degradation in GaInAsP/InP quantum-well structures2008

    • Author(s)
      M. Kurokawa, D. Plumwongrot, K. Ozawa, T. Maruyama, S. Arai and N. Nishiyama
    • Organizer
      The 20th International Conference on Indium Phosphide and Related Materials(IPRM2008), WeP39
    • Place of Presentation
      Versailles(France)
    • Year and Date
      2008-05-28
    • Related Report
      2008 Final Research Report
  • [Presentation] RIE-plasma induced optical property degradation in GaInAsP/InP quantum-well structures2008

    • Author(s)
      M. Kurokawa
    • Organizer
      IPRM 2008
    • Place of Presentation
      Versailles (France)
    • Year and Date
      2008-05-28
    • Related Report
      2008 Annual Research Report
  • [Presentation] Injection type GaInAsP/InP/Si DFB lasers directly bonded on SOI substrate2008

    • Author(s)
      T. Okumura, T. Maruyama, H. Yonezawa, N. Nishiyama, S. Arai
    • Organizer
      The 20th International Conference on Indium Phosphide and Related Materials(IPRM2008), TuA1.6
    • Place of Presentation
      Versailles(France)
    • Year and Date
      2008-05-27
    • Related Report
      2008 Final Research Report
  • [Presentation] Injection type GaInAsP/InP/Si DFB lasers directly bonded on SOI substrate2008

    • Author(s)
      T. Okumura
    • Organizer
      IPRM 2008
    • Place of Presentation
      Versailles (France)
    • Year and Date
      2008-05-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] C60含有と非含有EBレジストZEPの重ね塗りによるSi導波路ドライエッチング形状の向上2008

    • Author(s)
      井上敬太、プルームウォンロート・タノーム、西山伸彦、阪本真一、榎本晴基、田村茂雄、丸山武男、荒井滋久
    • Organizer
      第55回応用物理学関係連合講演会, 29p-ZG-15
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-29
    • Related Report
      2008 Final Research Report
  • [Presentation] 直接貼付法によるSOI基板上注入形GaInAsP/InP DFBレーザ2008

    • Author(s)
      奥村忠嗣、丸山武男、米澤英徳、西山伸彦、荒井滋久
    • Organizer
      第55回応用物理学関係連合講演会, 29p-ZQ-4
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-29
    • Related Report
      2008 Final Research Report
  • [Presentation] 直接貼付法によるSOI基板上注入形GaInAsP/InP DFB リーザ2008

    • Author(s)
      奥村忠嗣
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] C^60含有と非含有EBレジストZEPの重ね塗りによるSi導波路ドラ仁ッチング形状の向上2008

    • Author(s)
      井上敬太
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] GaInAsP/InP量子井戸構造のRIEプラズマによるPL強度劣化とアニールによる回復2008

    • Author(s)
      黒川宗高、プルームウォンロート・タノーム、小沢浩二、丸山武男、西山伸彦、荒井滋久
    • Organizer
      第55回応用物理学関係連合講演会, 28p-P9-7
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-28
    • Related Report
      2008 Final Research Report
  • [Presentation] 低温現像によるGaInAsP/InP量子細線構造の線幅ばらつきの低減2008

    • Author(s)
      プルームウォンロート・タノーム、小沢浩二、黒川宗高、田村茂雄、丸山武男、西山伸彦、荒井滋久
    • Organizer
      第55回応用物理学関係連合講演会, 28p-E-18
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-28
    • Related Report
      2008 Final Research Report
  • [Presentation] 低温現像によるGaInAsP/lnp量子細線構造の線幅ばらつきの低減2008

    • Author(s)
      プルームウォンロート・タノーム
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] GaInAsP/Inp量子井戸構造のRIEプラズマによるPL強度劣化とアニールによる回復2008

    • Author(s)
      黒川宗高
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] Reduction of RIE Induced Damage on Lasing Properties of GaInAsP/InP DQW Lasers Fabricated by 2-step Growths2008

    • Author(s)
      D. Plumwongrot, M. Kurokawa, T. Okumura, Y. Nishimoto, T. Maruyama, N. Nishiyama, and S. Arai
    • Organizer
      OPTO2008(part of SPIE Photonics West 2008)
    • Place of Presentation
      San Jose(USA)
    • Year and Date
      2008-01-24
    • Related Report
      2008 Final Research Report
  • [Presentation] Reduction of RIE Induced Damage on Lasing Properties of GaInAsP/InP DQW Lases Fabricated by 2-step Growths2008

    • Author(s)
      D.Plumwongrot
    • Organizer
      OPTO 2007
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2008-01-24
    • Related Report
      2007 Annual Research Report
  • [Presentation] Length dependencies of in-plane polarizations anisotropy in GaInAsP/InP quantum-wire structures fabricated by dry etching and regrowth process2008

    • Author(s)
      D. Plumwongrot, Y. Tamura, Y. Nishimoto, M. Kurokawa, T. Maruyama, N. Nishiyama, and S. Arai
    • Organizer
      OPTO2008(part of SPIE Photonics West 2008), 6902-4
    • Place of Presentation
      San Jose(USA)
    • Year and Date
      2008-01-21
    • Related Report
      2008 Final Research Report
  • [Presentation] Photoluminescence of GaInAsP/InP Single Quantum Wire with Lateral Widths down to 6 nm Fabricated by Dry Etching and Regrowth Process2008

    • Author(s)
      D.Plumwongrot
    • Organizer
      OPTO 2007
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2008-01-21
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fabrication of GaInAsP/InP Arbitrary Shaped Low Dimensional Quantum Structures2007

    • Author(s)
      D. Plumwongrot, Y. Tamura, T. Maruyama, N. Nishiyama, and S. Arai
    • Organizer
      The 20th International Microprocesses and Nanotechnology Conference(MNC2007), 6A-4-51
    • Place of Presentation
      Kyoto(Japan)
    • Year and Date
      2007-11-06
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication of GaInAsP/InP Arbitrary Shaped Low Dimensional Structures,2007

    • Author(s)
      D.Plumwongrot
    • Organizer
      MNC 2007
    • Place of Presentation
      Kyoto (Japan)
    • Year and Date
      2007-11-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] Observation of RIE Induced Damage on Lasing Properties of GaInAsP/InP MQW Lasers Fabricated by 2-step Growths2007

    • Author(s)
      D. Plumwongrot, M. Kurokawa, T. Okumura, Y. Nishimoto, T. Maruyama, N. Nishiyama, and S. Arai
    • Organizer
      The 34th International Symposium on Compound Semiconductors(ISCS2007), ThC-P9
    • Place of Presentation
      Kyoto(Japan)
    • Year and Date
      2007-10-18
    • Related Report
      2008 Final Research Report
  • [Presentation] Observation of RIE Induced Damage on Lasing Properties of GaInAsP/InPMQW Lasers Fabricated by 2-step Growths2007

    • Author(s)
      D.Plumwongrot
    • Organizer
      ISCS 2007
    • Place of Presentation
      Kyoto (Japan)
    • Year and Date
      2007-10-18
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリコン上レーザ実現への展望2007

    • Author(s)
      丸山武男、奥村忠嗣、荒井滋久
    • Organizer
      2007年電子情報通信学会エレクトロニクスソサィエティ大会, CK-1-8, 招待講演
    • Place of Presentation
      鳥取
    • Year and Date
      2007-09-10
    • Related Report
      2008 Final Research Report
  • [Presentation] シリコン上レーザ実現への展望2007

    • Author(s)
      丸山武男
    • Organizer
      2007年電子情報通信学会エレクトロニクスソサイエティ大会
    • Place of Presentation
      鳥取
    • Year and Date
      2007-09-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] 2段階OMVPE 成長GaInAsP/InP量子井戸レーザにおけるRIEプラズマ損傷とその低減2007

    • Author(s)
      黒川宗高、Dhanorm Plumwongrot、西本頼史、丸山武男、西山伸彦、荒井滋久
    • Organizer
      第68回応用物理学会学術講演会,7p-C-6, Digest III -p. 1162
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
    • Related Report
      2008 Final Research Report
  • [Presentation] 直接貼付法によるSOI基板上GaInAsP/InP-LED2007

    • Author(s)
      奥村忠嗣、丸山武男、金丸正樹、荒井滋久
    • Organizer
      第68回応用物理学会学術講演会, 7a-C-13, Digest III -p. 1160
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
    • Related Report
      2008 Final Research Report
  • [Presentation] Wire-Length Dependence ofPolarization Anisotropy in GaInAsP/InPQuantum-Wire Structures2007

    • Author(s)
      Dhanorm Plumwongrot、田村洋介、西本頼史、黒川宗高、丸山武男、西山伸彦、荒井滋久
    • Organizer
      第68回応用物理学会学術講演会, 7a-N-11, Digest III -p.1421
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
    • Related Report
      2008 Final Research Report
  • [Presentation] Wire-length Dependence of Polarization Anisotropy in GaInAsP/InP Quantum-Wire Structures2007

    • Author(s)
      Dhanorm Plumwongrot
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] 直接貼付法によるSOI基板上GalhAsP/InP-LED2007

    • Author(s)
      奥村忠嗣
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] 2段階OMVPE成長GalnAsP/InP量子井戸トーザにおけるRIEプラズマ損傷とその低減2007

    • Author(s)
      黒川宗高
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] GaInAsP/InP Membrane DFB lasers directly boded on SOI substrate with rib-waveguide structure2007

    • Author(s)
      T. Maruyama, T. Okumura, M. Kanemaru, S. Sakamoto, S. Tamura, and S. Arai
    • Organizer
      12th OptoElectronics and Communications Conference/16th Intl Conference on Integrated Optics & Optical Fiber Communication(OECC/IOOC 2007), 12D1-3
    • Place of Presentation
      Yokohama(Japan)
    • Year and Date
      2007-07-12
    • Related Report
      2008 Final Research Report
  • [Presentation] GaInAsP/InP Membrane DFB Lasers Dricetly Boded on SOI Substrate with Rib-Waveguide Structure2007

    • Author(s)
      T.Maruyama
    • Organizer
      OECC/IOOC 2007
    • Place of Presentation
      Yokohama (Japan)
    • Year and Date
      2007-07-12
    • Related Report
      2007 Annual Research Report
  • [Presentation] エアブリッジ構造を用いたGalnAsP/InP半導体薄膜BH-DFBレーザ2007

    • Author(s)
      内藤秀幸
    • Organizer
      電子情報通信学会レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2007-06-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 80℃ CW operation of GaInAsP/InP membrane BH-DFB laser with air-bridge structure2007

    • Author(s)
      H. Naitoh, S. Sakamoto, M. Ohtake, T. Okumura, T. Maruyama, N, Nishiyama, and S. Arai
    • Organizer
      The 19th International Conference on Indium Phosphide and Related Materials(IPRM 2007), no.ThB1-2, pp.476-479
    • Place of Presentation
      Matsue(Japan)
    • Year and Date
      2007-05-17
    • Related Report
      2008 Final Research Report
  • [Presentation] Improved temperature dependence of GaInAsP/InP DFB lasers with wirelike active regions by Bragg wavelength detuning2007

    • Author(s)
      Y. Nishimoto, D. Plumwongrot, S. M. Ullah, Y. Tamura, M. Kurokawa, T. Maruyama, N. Nishiyama, and S. Arai
    • Organizer
      The 19th International Conference on Indium Phosphide and Related Materials(IPRM2007), no.ThB2-3, pp.513-516
    • Place of Presentation
      Matsue(Japan)
    • Year and Date
      2007-05-15
    • Related Report
      2008 Final Research Report
  • [Presentation] Fundamental-mode operation of GaInAsP/InP membrane DFB lasers bonded on SOI substrate and its waveguide integration2007

    • Author(s)
      T. Okumura, T. Maruyama, M. Kanemaru, S. Sakamoto, S. Tamura, and S. Arai
    • Organizer
      The 19th International Conference on Indium Phosphide and Related Materials(IPRM 2007), TuB2-2, pp.35-38
    • Place of Presentation
      Matsue(Japan)
    • Year and Date
      2007-05-15
    • Related Report
      2008 Final Research Report
  • [Presentation] Fundamental-Mode Operation of GaInAsp/InP membrane DFB Lasers Bonded on SOI Substrate and Its Waveguide Integration2007

    • Author(s)
      T.Okumura
    • Organizer
      IPRM 2007
    • Place of Presentation
      Matsue(Japan)
    • Year and Date
      2007-05-15
    • Related Report
      2007 Annual Research Report
  • [Presentation] Inproved Temperature Dependence of GaInAsP/InP DFB Lasers with Wirelike Active Regions by Bragg Wavelength Detuning2007

    • Author(s)
      D.Plumwongrot
    • Organizer
      IPRM 2007
    • Place of Presentation
      Matsue(Japan)
    • Year and Date
      2007-05-15
    • Related Report
      2007 Annual Research Report
  • [Presentation] 80^0C CW Opteration of GaInAsP/InP membrane BH-DFB Laser with Air-Bridge Structure2007

    • Author(s)
      H.Naitoh
    • Organizer
      IPRM 2007
    • Place of Presentation
      Matsue(Japan)
    • Year and Date
      2007-05-15
    • Related Report
      2007 Annual Research Report
  • [Presentation] Photoluminescence of GaInAsP/InP single quantum wires with lateral widths down to 6 nm fabricated by dry etching and regrowth2007

    • Author(s)
      H. Itoh, M. Yoshita, H. Akiyama, D. Plumwongrot, T. Maruyama, S. Arai
    • Organizer
      Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference(CLEO/QELS 2007), CThGG3
    • Place of Presentation
      Baltimore(USA)
    • Year and Date
      2007-05-10
    • Related Report
      2008 Final Research Report
  • [Presentation] Photoluminescence of GaInAsP/InP Single Quantum Wire with Lateral Widths down to 6 nm Fabricated by Dry Etching and Regrowth2007

    • Author(s)
      H.Itoh
    • Organizer
      CLEO/QELS 2007
    • Place of Presentation
      Baltimore(USA)
    • Year and Date
      2007-05-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] エアブリッジ構造を用いたGaInAsP/InP半導体薄膜BH-DFBレーザ2007

    • Author(s)
      内藤秀幸、阪本真一、大竹守、奥村忠嗣、丸山武男、西山伸彦、荒井滋久
    • Organizer
      電子情報通信学会レーザ・量子エレクトロニクス研究会, LQE2007-21, pp. 19-22
    • Place of Presentation
      東京
    • Year and Date
      2007-01-29
    • Related Report
      2008 Final Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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