Study on growth of nanoparticle in spatio-temporal electric field fluctuation

• Project/Area Number: 19K03809
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 14030:Applied plasma science-related
• Research Institution: Kyushu University
• Principal Investigator: KAMATAKI Kunihiro 九州大学, システム情報科学研究院, 助教 (60582658)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Project Status: Completed (Fiscal Year 2021)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2021: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2020: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2019: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
• Keywords: プラズマプロセス / 電場 / ナノ粒子生業 / プラズマCVD / AM変調放電 / PIC-MCC / 機械学習 / ナノ粒子成長 / 電場揺動 / 反応生プラズマ / 反応性プラズマ / 時空間揺動 / 変調放電

Outline of Research at the Start

私達が日常的に使用しているPC、スマートフォンやIoTデバイスの中の半導体創成工程の多くをプラズマプロセスが占めている。そのプラズマプロセスにおける重要技術の一つは、ナノ粒子サイズの制御である。申請者らは、プラズマに電場揺らぎを印加することで、通常の放電時と比べ、サイズ及びサイズ分散も小さいナノ粒子を製成できることを見出した。しかし、この現象のメカニズムの詳細は明らかになっていない。本研究では、プラズマ中の電場構造に注目し、ナノ粒子量、プラズマ密度の時空間構造を同時計測行うことで、上記メカニズム解明を行う。これにより半導体プラズマプロセス技術の向上や微粒子プラズマ物理への貢献に繋がる。

Outline of Final Research Achievements

We investigate effects of amplitude modulation (AM) discharge method on the growth of nanoparticles and the relation between growth of nanoparticles and plasma generation in TEOS/O2/Ar plasma. The amount of nanoparticles decreases as AM level increases. On the other hand, the plasma density is higher than that for CW discharge. Thus, AM discharges suppress growth of nanoparticles in TEOS plasma. We have shown oscillations of axial electric field Ez with AM frequency for AM discharge by the electric field measurement using an electro-optic probe. We have discussed that these fluctuations of Ez mainly lead to the vertically oscillation of the levitation position of nanoparticles trapped in the plasma sheath boundary region. Moreover, the AM discharge method enhances the dissociation rate in TEOS which leads to the high deposition rate of SiO2 film and decreases the amount of O-H bonds in the films. Namely, the AM method improves the deposition rate and film quality of SiO2 in PECVD.

Academic Significance and Societal Importance of the Research Achievements

本研究は、AM変調放電による電場振動励起を明らかにし、変調周波数および変調レベルによって制御できるプラズマプラメータを選択できることは学術的・社会的に意義がある。これらの成果は、半導体プラズマプロセスなどにおけるイオンエネルギー分布とイオン角度分布の制御につながる。イオンのエネルギー及び角度の制御は、高いアスペクト比を持つトレンチ構造の側壁膜の膜質向上につながり、AM変調放電が、より精密な成膜方法になりうることを示した。さらに、電場振動とナノ粒子の浮遊位置の関係を明らかにしたことは、AM変調放電手法が、ナノ粒子成長制御だけでなく、ナノ粒子の輸送、成膜技術の向上につながることを示した。

Research Products

• [Journal Article] Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma (2019)
  • Author(s): (1)Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunoni Koga and Masaharu Shiratani
  • Journal Title: Plasma and Fusion Research Volume: 14 Issue: 0 Pages: 4406120-4406120
  • DOI: 10.1585/pfr.14.4406120
  • NAID: 130007723651
  • ISSN: 1880-6821
  • Year and Date: 2019-09-09
  • Peer Reviewed / Open Access
• [Presentation] Investigation of relationship between growth of nanoparticle and plasma generation due to amplitude modulated discharge voltage in TEOS plasma (2022)
  • Author(s): Kunihiro Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
  • Organizer: The 39th Symposium on Plasma Processing/The 34th Symposium on Plasma Science for Materials (SPP-39/SPSM34)
  • Int'l Joint Research
• [Presentation] Predictive analytics in plasma process using machine learning tools and techniques (2021)
  • Author(s): Kunhiro KAMATAKI, Chen Feiyu, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
  • Organizer: 1st Workshop on Artificial Intelligence in Plasma Science - Satellite Workshop of EU-Japan Joint Symposium on Plasma Processing
  • Int'l Joint Research / Invited
• [Presentation] Particle-In-Cellモンテカルロ衝突モデルによる容量結合型Arプラズマにおける下部バイアス電圧印加シミュレーション (2021)
  • Author(s): 阿部滉平, 山本晃大, 長尾伊織, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 令和3年度日本表面真空学会 九州支部学術講演会
• [Presentation] Better step coverage of TEOS-PECVD SiO2 films realized by amplitude modulation of RF discharge voltage (2021)
  • Author(s): K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani, S. Tahara, Y. Mizokami, Y. Miyata, K. Tabuchi, T. Tanikuni, S. Hiyama, K. Nagahata
  • Organizer: DPS2021, 42nd International Symposium on Dry Process
  • Int'l Joint Research
• [Presentation] Study on growth of nanoparticle in TEOS plasma-CVD using amplitude modulation discharge method (2021)
  • Author(s): K.Abe, A.Yamamoto, I.Nagao, M.Otaka, D.Yamashita, K.Kamataki, T.Okumura, N.Itagaki, K.Koga, M.Shiratani
  • Organizer: 5th Asia-Pacific Conference on Plasma Physics(AAPPS-DPP2021)
  • Int'l Joint Research
• [Presentation] Study of effect of amplitude modulated discharge on growth of nanoparticles in TEOS plasma (2021)
  • Author(s): M.Shiratani, K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga
  • Organizer: DPS2021, 42nd International Symposium on Dry Process
  • Int'l Joint Research
• [Presentation] Investigation of growth suppression mechanism of nanoparticles through amplitude modulation discharge method in TEOS plasma (2021)
  • Author(s): Kunihiro. Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani
  • Organizer: The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
  • Int'l Joint Research
• [Presentation] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model (2021)
  • Author(s): Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
  • Organizer: MRM2021, Materials Research Meeting
  • Int'l Joint Research
• [Presentation] Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique (2021)
  • Author(s): Chen Feiyu, Kunihiro Kamataki, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
  • Organizer: MRM2021, Materials Research Meeting
  • Int'l Joint Research
• [Presentation] Measurement of Radial and Vertical Electric Field in Capacitively Coupled Plasma (2021)
  • Author(s): Tao Yang, Daiki Nagamatsu, Kunihiro Kamataki, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
  • Organizer: MRM2021, Materials Research Meeting
  • Int'l Joint Research
• [Presentation] Effect of rf bias on properties of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition (2021)
  • Author(s): Akihiro Yamamoto, Kohei Abe, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga1, Masaharu Shiratani
  • Organizer: MRM2021, Materials Research Meeting
  • Int'l Joint Research
• [Presentation] N2/SiH4 flow rate ratio dependence of nanoparticle incorporation in SiNx films deposited by plasma CVD (2021)
  • Author(s): M. Shiratani, Y. Sasaki, K. Kamataki, N. Itagaki, K. Koga
  • Organizer: MRM2021, Materials Research Meeting
  • Int'l Joint Research
• [Presentation] PIC-MCCMを用いた平行平板容量結合プラズマに対する放電周波数依存性に関する研究 (2021)
  • Author(s): 陶陽，阿部滉平，鎌滝晋礼，山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲，白谷正治
  • Organizer: プラズマ・核融合学会 九州・沖縄・山口支部 第 25 回 支部大会
• [Presentation] 平行平板容量結合高周波放電プラズマのAM変調周波数依存性に関するPIC-MCCシミュレーション (2021)
  • Author(s): 長尾伊織，阿部滉平，山本晃大，鎌滝晋礼，山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲，白谷正治
  • Organizer: プラズマ・核融合学会 九州・沖縄・山口支部 第 25 回 支部大会
• [Presentation] SiH4+N2 プラズマによる SiNx の低温高品質成膜 (2021)
  • Author(s): 鎌滝晋礼 , 佐々木勇輔 , 奥村賢直 ，板垣奈穂 ，古閑一憲 ，白谷正治
  • Organizer: シリコンテクノロジー分科会 第227回 研究集会
  • Invited
• [Presentation] Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films (2020)
  • Author(s): Kunihiro Kamataki, Tomoaki Yoshida, Yusuke Sasaki, Kohei Abe, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani
  • Organizer: AAPPS-DPP2020 e-conference
  • Int'l Joint Research / Invited
• [Presentation] 光ピンセットによる捕捉微粒子の揺動解析 (2020)
  • Author(s): 鎌滝 晋礼, 奥永 冴京, 岩本 亮介, 富田 健太郎, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] 反応性プラズマ中のナノ粒子制御によるSiNx膜の低温作製 (2020)
  • Author(s): 鎌滝 晋礼, 吉田知晃, 阿部滉平, 佐々木勇輔, 永石翔太, 岩本亮介, 山下大輔，板垣奈穂，古閑一憲，白谷正治
  • Organizer: 日本物理学会第75回年次大会
• [Presentation] Investigation of Impact of Plasma Fluctuation Driven by Amplitude Modulated VHF Discharge on Growth of Nanoparticles in Reactive Plasma (2019)
  • Author(s): K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: Materials Research Meeting 2019 (MRM2019）
  • Int'l Joint Research / Invited
• [Presentation] 反応性プラズマにおけるナノ粒子生成制御 (2019)
  • Author(s): 鎌滝晋礼, 永石翔大, 佐々木勇輔, 原尚志, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第36回プラズマ・核融合学会年会
  • Invited
• [Presentation] Low temperature fabrication of passivation films by plasma enhanced CVD (2019)
  • Author(s): Kunihiro KAMATAKI
  • Organizer: 7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020& 4th International Symposium on Energy Research and Application
  • Int'l Joint Research / Invited
• [Presentation] Predictive insight based on grey box analysis of plasma process data (2019)
  • Author(s): Kunihiro Kamataki, Masaharu Shiratani
  • Organizer: 2nd International Conference on Data-Driven Plasma Science(ICDDPS2019)
  • Int'l Joint Research / Invited
• [Presentation] Investigation of Spatiotemporal Structure of Fluctuation Related with Nanoparticle Growth in Amplitude-Modulated VHF Discharge Reactive Plasma (2019)
  • Author(s): Kunihiro Kamataki, Ryosuke Iwamoto, Hayate Tanaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani
  • Organizer: The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)
  • Int'l Joint Research
• [Presentation] Developing Prediction of Key Plasma Processing Parameter from Small Data of Experimental Results by Machine Learning Method (2019)
  • Author(s): K. Kamataki, R. Iwamoto, S. Okunaga, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)
  • Int'l Joint Research
• [Presentation] Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma (2019)
  • Author(s): K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: XXXIV ICPIG & ICRP-10
  • Int'l Joint Research
• [Presentation] Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD (2019)
  • Author(s): K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: XXXIV ICPIG & ICRP-10
  • Int'l Joint Research
• [Presentation] Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method (2019)
  • Author(s): K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: Materials Research Meeting 2019 (MRM2019）
  • Int'l Joint Research
• [Presentation] AM変調反応性プラズマにおけるナノ粒子成長揺動に関する時空間情報解析 (2019)
  • Author(s): 鎌滝 晋礼, 田中 颯,山下 大輔,板垣 奈穂,古閑 一憲,白谷 正治
  • Organizer: 第80回応用物理学会秋季学術講演会
• [Remarks] 九州大学 プラズマ工学研究室
  • URL: http://plasma.ed.kyushu-u.ac.jp/index.html