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Development of a novel method for investigating radical species produced by electron-molecule collisions

Research Project

Project/Area Number 19K21862
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 14:Plasma science and related fields
Research InstitutionTohoku University

Principal Investigator

Watanabe Noboru  東北大学, 多元物質科学研究所, 准教授 (90312660)

Project Period (FY) 2019-06-28 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2021: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2020: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2019: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Keywords電子散乱分光 / 解離化学種 / 電子励起 / 原子・分子物理 / 原子分子物理
Outline of Research at the Start

プラズマエッチングを利用した半導体微細加工の精密化に対する要求は日々高度になっており、プラズマ制御に必要な種々の反応素過程に対するデータの蓄積が進められている。プラズマ中では様々な化学種が生じているが、反応に主として関与するのはフッ素原子ラジカルなどの電気的に中性なラジカルである。しかしながら、イオンとは異なり電場による操作が不可能な中性ラジカルの計測は難しく、その生成に関する知見が著しく欠如しているのが現状である。そこで本研究では、電子衝撃分光技術と共鳴多光子イオン化法を組み合わせ、電子衝突で生成する中性ラジカル種の新規状態分析法を開発する。

Outline of Final Research Achievements

Dissociative chemical species which are released in plasmas as a result of electronic excitation induced by electron collisions in plasmas play a central role in semiconductor microfabrication. The purpose of this study is to develop a method for state analysis of dissociated fragments and to elucidate the formation mechanism. In addition to attempting the realization of momentum imaging for neutral radicals, we have conducted scattered electron-fragment ion coincidence measurements to investigate the electron-induced dissociative ionization and also performed theoretical studies on electronic excitation of molecules. Our findings revealed a peculiar phenomenon in which dissociative ion emission from a symmetric molecule is asymmetric in the direction of emission.

Academic Significance and Societal Importance of the Research Achievements

本研究では、電子-分子衝突で放出される高活性ラジカルの分析技術の開発を目指すとともに、中性解離種の計測に先行した解離イオンと散乱電子の同時計測実験により、工業的に重要な六フッ化硫黄などの分子に対する解離性イオン化の詳細な調査を行った。また、ハロゲン含有分子を対象とした電子励起断面積の理論研究からは、四塩化炭素の価電子励起を引き金とした上層大気中でのCl生成において非対称伸縮振動が大きな影響を持つことを明らかにするなど、大気環境への影響理解にも資する知見が得られている。

Report

(6 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (25 results)

All 2024 2023 2022 2021 2020 2019

All Journal Article (11 results) (of which Peer Reviewed: 11 results,  Open Access: 1 results) Presentation (14 results) (of which Int'l Joint Research: 6 results,  Invited: 3 results)

  • [Journal Article] Theoretical study of valence excitations in fluoromethanes by high energy electron impact2024

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Journal Title

      Chemical Physics

      Volume: 581 Pages: 112265-112265

    • DOI

      10.1016/j.chemphys.2024.112265

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron-impact dissociative ionization of SF6 studied by angle-resolved (e, e+ion) spectroscopy2023

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Journal Title

      Physical Review A

      Volume: 108 Issue: 4

    • DOI

      10.1103/physreva.108.042814

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical Study of Valence Shell Excitation by Electron Impact in CCl<sub>4</sub>2023

    • Author(s)
      Watanabe Noboru、Takahashi Masahiko
    • Journal Title

      The Journal of Physical Chemistry A

      Volume: 127 Issue: 8 Pages: 1866-1873

    • DOI

      10.1021/acs.jpca.2c08619

    • Related Report
      2022 Research-status Report
    • Peer Reviewed
  • [Journal Article] A joint experimental and theoretical study of the valence electron momentum distributions of trans-stilbene2022

    • Author(s)
      Watanabe Noboru、Kume Kenichi、Takahashi Masahiko
    • Journal Title

      Journal of Electron Spectroscopy and Related Phenomena

      Volume: 259 Pages: 147240-147240

    • DOI

      10.1016/j.elspec.2022.147240

    • Related Report
      2022 Research-status Report
    • Peer Reviewed
  • [Journal Article] Theoretical study of generalized oscillator strengths for the low-lying electronic excitations of CH<sub>3</sub>Cl and CF<sub>3</sub>Cl2022

    • Author(s)
      Watanabe Noboru、Takahashi Masahiko
    • Journal Title

      Journal of Physics B: Atomic, Molecular and Optical Physics

      Volume: 55 Issue: 1 Pages: 015201-015201

    • DOI

      10.1088/1361-6455/ac4a22

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Vibrational effects on generalized oscillator strengths of ammonia2021

    • Author(s)
      Watanabe Noboru、Takahashi Masahiko
    • Journal Title

      Journal of Physics B: Atomic, Molecular and Optical Physics

      Volume: 54 Issue: 13 Pages: 135202-135202

    • DOI

      10.1088/1361-6455/ac0769

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Symmetry breaking in electron-impact dissociative ionization of linear symmetric molecules2021

    • Author(s)
      Watanabe Noboru、Takahashi Masahiko
    • Journal Title

      Physical Review A

      Volume: 104 Issue: 3

    • DOI

      10.1103/physreva.104.032812

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Relation between the spatial shape of excited molecular orbital and molecular-frame electron scattering cross section2020

    • Author(s)
      Noboru Watanabe, So Yamada, and Masahiko Takahashi
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 1412 Issue: 14 Pages: 142017-142017

    • DOI

      10.1088/1742-6596/1412/14/142017

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Temperature-Dependent Electron Momentum Spectroscopy on the Molecular Orbitals of Dimethyl Ether2020

    • Author(s)
      Noboru Watanabe, Keita Takahashi, Kimihiro Sato, and Masahiko Takahashi
    • Journal Title

      The Journal of Physical Chemistry A

      Volume: 124 Issue: 49 Pages: 10258-10265

    • DOI

      10.1021/acs.jpca.0c08799

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Forward-backward asymmetry in electron impact ionization of CO2020

    • Author(s)
      Watanabe Noboru、Takahashi Masahiko
    • Journal Title

      The Journal of Chemical Physics

      Volume: 152 Issue: 16

    • DOI

      10.1063/5.0006256

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Generalized oscillator strengths of low-lying electronic excitations in acetylene2020

    • Author(s)
      Watanabe Noboru、Takahashi Masahiko
    • Journal Title

      Journal of Physics B: Atomic, Molecular and Optical Physics

      Volume: 53 Issue: 7 Pages: 075202-075202

    • DOI

      10.1088/1361-6455/ab6cc5

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] Symmetry breaking in dissociative ionization of symmetric molecules by electron impact2023

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Organizer
      XXXIII International Conference on Photonic, Electronic and Atomic Collisions (ICPEAC 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Symmetry breaking in electron-impact dissociative ionization of symmetric molecules2023

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Organizer
      22nd International Symposium on Correlation, Polarization and Ionization in Atomic and Molecular Collisions (COPIAMC 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Theoretical electronic excitation cross sections of CCl42023

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Organizer
      XXXIII International Conference on Photonic, Electronic and Atomic Collisions (ICPEAC 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] CCl4の価電子励起と遷移断面積に対する分子振動効果2023

    • Author(s)
      渡邉昇, 髙橋正彦
    • Organizer
      第17回分子科学討論会
    • Related Report
      2023 Annual Research Report
  • [Presentation] CCl4 の価電子励起に対する分子振動の影響2023

    • Author(s)
      渡邉昇, 髙橋正彦
    • Organizer
      原子衝突学会第48回年会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Symmetry breaking in electron-impact dissociative ionization of CO<sub>2</sub> and N<sub>2</sub>2022

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Organizer
      37th Symposium on Chemical Kinetics and Dynamics
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] CO<sub>2</sub>とN<sub>2</sub>の電子衝撃イオン化解離おける対称性の破れ2022

    • Author(s)
      渡邉昇, 髙橋正彦
    • Organizer
      原子衝突学会第47回年会
    • Related Report
      2022 Research-status Report
  • [Presentation] 対称分子の電子衝撃イオン化解離に現れる対称性の破れ2022

    • Author(s)
      渡邉昇, 髙橋正彦
    • Organizer
      第16回分子科学討論会
    • Related Report
      2022 Research-status Report
  • [Presentation] 多原子分子に対する原子運動量分布の量子化学計算法の開発2022

    • Author(s)
      金谷諭, 立花佑一, 鬼塚侑樹, 渡邉昇, 髙橋正彦
    • Organizer
      日本物理学会第77回年次大会
    • Related Report
      2021 Research-status Report
  • [Presentation] Forward-backward asymmetry in electron-impact ionization of CO studied by (e, e+ion) spectroscopy2021

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Organizer
      (virtual) International Symposium on Correlation, Polarization and Ionization in Atomic and Molecular Collisions
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Measurement of the forward-backward asymmetry in electron impact ionization of CO2021

    • Author(s)
      Noboru Watanabe, Masahiko Takahashi
    • Organizer
      (virtual) International Conference on Photonic, Electronic and Atomic Collisions in 2021,
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] COの電子衝撃イオン化における分子配向依存性:前方・後方異方性の観測2021

    • Author(s)
      渡邉昇、髙橋正彦
    • Organizer
      第15回分子科学討論会
    • Related Report
      2021 Research-status Report
  • [Presentation] 電子散乱分光で探る分子内電子挙動2020

    • Author(s)
      渡邉昇
    • Organizer
      第7回森野ディスカッション
    • Related Report
      2020 Research-status Report
    • Invited
  • [Presentation] 電子散乱分光を用いたSF6の価電子励起における振電相互作用効果の研究2019

    • Author(s)
      渡邉昇、平山司、高橋正彦
    • Organizer
      第13回分子科学討論会
    • Related Report
      2019 Research-status Report

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Published: 2019-07-04   Modified: 2025-01-30  

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