チタン酸ジルコン酸鉛単結晶モデル粒界を用いたナノドーパントの圧電制御機構の解明

• Project/Area Number: 20047004
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 舟窪 浩 Tokyo Institute of Technology, 大学院・総合理工学研究科, 准教授 (90219080)
• Co-Investigator(Kenkyū-buntansha): 山田 智明 東京工業大学, 大学院・総合理工学研究所, 特任助教 (80509349)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,800,000 (Direct Cost: ¥4,800,000); Fiscal Year 2009: ¥2,400,000 (Direct Cost: ¥2,400,000); Fiscal Year 2008: ¥2,400,000 (Direct Cost: ¥2,400,000)
• Keywords: 分極軸配向膜 / 強誘電体 / 圧電体 / 特性制御 / MOCVD

Research Abstract

本研究の目的は、最も重要な圧電体でありながら、これまで単結晶合成の難しさから多結晶体での研究に限られていたPb(Zr, Ti)O_3[PZT]について、申請者が世界で初めて合成に成功したPZT単結晶を用いた人工モデル粒界を作製し、ナノドーパントの圧電特性に及ぼす効果をin-situで解明することである。
MOCVD法を用いて、Zr/(Zr+Ti)比を変化させて作製した分極軸に単一配向した正方晶のエピタキシャル膜を作製した。その結果以下の結論を得た。
1. Zr/(Zr+Ti)比にかかわらず歪みの少ない膜が作製できることが明らかになった。
2. 得られた膜の強誘電性を評価したところ、Zr/(Zr+Ti)比の減少に伴う自発分極値の低下が観察された。
3. Spring8での電界下その場観察の結果、膜の圧電性はZr/(Zr+Ti)比の減少に伴って減少し、その変化は、理論から予測されたものと良く一致した。
4. ラマン分光測定によって、初めてソフトモードと自発分極値の間に直線関係があることが実験的に確認された。
5. 得られた膜の自発分極値とソフトモードの関係は、温度を変えて測定したデータでも良く一致しており、本研究で得られた結果が広い範囲に適用できる可能性を明らかにした。

Research Products

• [Journal Article] Polarized Raman study for epitaxial PZT thick film with the mixture orientation of(100)/(001) (2010)
  • Author(s): Mitsumasa Nakajima, Takashi Fujisawa, Ken Nishida, Takashi Yamamoto, Minoru Osada, Hiroshi Naganuma, Soichiro Okamura, Hiroshi Funakubo
  • Journal Title: Key Eng.Mater. 421-422 Pages: 99-102
  • Peer Reviewed
• [Journal Article] Experimental evidence for orientation property of Pb(Zr_<0.35>Ti_<0.65>)O_3 by manipulating polar axis angle using CaF_2 substrate (2010)
  • Author(s): Satoru Utsugi, Takashi Fujisawa, Yoshitaka Ehara, Tomoaki Yamada, Masaaki Matsushima, Hiroshi Funakubo, Hitoshi Morioka
  • Journal Title: Appl.Phys.Lett. 96
  • Peer Reviewed
• [Journal Article] Effect of film thickness on ferroelectric domain structure and properties of Pb(Zr_<0.35>Ti_<0.65>)O_3/SrRuO_3/SrTiO_3 heterostructures (2009)
  • Author(s): Hitoshi Morioka, Keisuke Saito, Shintaro Yokoyama, Takahiro Oikawa, Toshiyuki Kurosawa, Hiroshi Funakubo
  • Journal Title: J.Mater.Sci. 44 Pages: 5318-5324
  • Peer Reviewed
• [Journal Article] Composition dependency of epitaxial Pb(Zr, Ti)O_3 films with different film thickness (2009)
  • Author(s): Shintaro Yokoyama, Hiroshi Funakubo, Hitoshi Morioka, Keisuke Saito, Tomoaki Yamada, Mutsuo Ishikawa
  • Journal Title: Ferroelectrics 389(1) Pages: 10-17
  • Peer Reviewed
• [Journal Article] 巨大圧電性を目指したPb(Zr, Ti)O_3単結晶膜の作成 (2009)
  • Author(s): 舟窪浩、藤澤隆志、山田智明、石河睦生
  • Journal Title: 自動車技術 63(4) Pages: 94-95
• [Journal Article] 分極軸配向正方晶Pb(Zr, Ti)O_3厚膜の作製と評価 (2009)
  • Author(s): 舟窪浩、藤澤隆志、宇津木覚、山田智明、石河睦生
  • Journal Title: マテリアルインテグレーション 22(9, 10) Pages: 17-24
• [Journal Article] Domain structure of (100)/(001) oriented epitaxial PbTiO_3 thick films with various volume fraction of (001) orientation grown by metal organic chemical vapor deposition (2009)
  • Author(s): Satoru Utsugi, Takashi Fujisawa, Rikyu Ikariyama, Shintaro Yasui, Hiroshi Nakaki, Tomoaki Yamada, Mutsuo Ishikawa, Masaaki Matsushima, and Hiroshi Funakubo
  • Journal Title: Appl. Phys. Lett 94
  • Peer Reviewed
• [Journal Article] Crystal Structure and Electrical Property Comparisons of Epitaxial Pb(Zr, Ti)O_3 Thick Films Grown on (100)CaF_2 and (100)SrTiO_3 Substrates (2009)
  • Author(s): Takashi Fujisawa, Hiroshi Nakaki Rikyu Ikariyama, Tomoaki Yamada, Mutsuo Ishikawa, Hiroshi Funakubo, and Hitoshi Morio ka
  • Journal Title: J. Appl. Phys 105
  • Peer Reviewed
• [Journal Article] Growth of Epitaxial Pb(Zr,Ti)O_3 Thick Films on (100)CaF_2 Substrates with Perfect Polar-axis-orientation and Their Electrical and Mechanical Property Characterization (2009)
  • Author(s): Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Mitsumasa Nakajima, Tomoaki Yamada, Mutsuo Ishikawa, Hitoshi Morioka, Takashi Iijima, and Hiroshi Funakubo
  • Journal Title: Mater. Res. Soc. Symp. Proc 1129
  • Peer Reviewed
• [Journal Article] Thick Epitaxial Pb(Zr_<0.35>, Ti_<0.65>)O_3 Films Grown on (100)CaF_2 Substrates with Polaraxis-oentation (2008)
  • Author(s): Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Hitoshi Morioka, Tomoaki Yamada, Keisuke Saito, and Hiroshi Funakubo
  • Journal Title: Apply. Phy. Express 1
  • Peer Reviewed
• [Journal Article] Experimental evidence of strain relaxed domain structure,in (100)/(001) oriented epitaxial lead titanate thick films grown by metalorganic the mical vapor deposition (2008)
  • Author(s): Hiroshi Nakaki, Yong Kwan Kim, Shintaro Yokoyama, Rikyu Ikariyama, Hiroshi Funakubo, S.K. Streiffer, Ken Nishida, Keisuke Saito, and Alexei Gruverman
  • Journal Title: J. Appl. Phys 104
  • Peer Reviewed
• [Presentation] CaF_2基板上の作製した菱面体組成エピタキシャルPb(Zr, Ti)O_3膜の結晶構造および強誘電特性 (2010)
  • Author(s): 江原祥隆、宇津木覚、中島光雅、森岡仁、山田智明、舟窪浩
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-18
• [Presentation] 分極軸単一配向した歪みの少ないエピタキシャル正方晶Pb(Zr, Ti)O_3厚膜を用いたソフトモードによる強誘電性の見積もり (2010)
  • Author(s): 江原祥隆、宇津木覚、中島光雅、山田智明、飯島高志、舟窪浩
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-17
• [Presentation] Characterization of Polar-axis-oriented Epitaxial Pb(Zr, Ti)O_3 Thick Films (2009)
  • Author(s): Hiroshi Funakubo, Takashi Fujisawa, Hiroshi Nakaki, Satoru Utsugi, Hitoshi Morioka, Takashi Iijima, Osami Sakata, Mutsuo Ishikawa, Tomoaki Yamada
  • Organizer: 2009 MRS Fall Meeting
  • Place of Presentation: Hynes Convention Center and Sheraton Boston Hotel, Boston, MA, U.S.A.
  • Year and Date: 2009-12-03
• [Presentation] (001), (101), (111)-Single-oriented Epitaxial Pb(Zr, Ti)O_3 Films Grown on CaF_2 Substrates and their Characterization (2009)
  • Author(s): 宇津木覚, 藤澤隆志, 江原祥隆, 山田智明, 安井伸太郎, 森岡仁, 飯島高志, 舟窪浩
  • Organizer: 2009 MRS Fall Meeting
  • Place of Presentation: Hynes Convention Center and Sheraton Boston Hotel, Boston, MA, U.S.A.
  • Year and Date: 2009-11-30
• [Presentation] In-situ Observation of Piezoresponse and Electrical Property by Time-Resolved Synchrotron X-Ray Diffraction (2009)
  • Author(s): Hiroshi Funakubo, Shitaro Yasui, Takashi Fujsawa, Takafumi Kamo, Mitsumasa Nakajima, Satoru Utsugi, Tomoaki Yamada, Osami Sakata
  • Organizer: Materials Science & Technology 2009 Conference & Exhibition, (MS&T'09)
  • Place of Presentation: David L.Lawrence Convention Center, Pittsburg, PA, USA
  • Year and Date: 2009-10-27
• [Presentation] Characterization of Polar axis oriented Epitaxial Pb(Zr, Ti)O_3 Thick Films Grown on(100)CaF_2 Substrates (2009)
  • Author(s): Hiroshi Funakubo, Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Satoru Utsugh, Hitoshi Morioka, Mutsuo Ishikawa, Takashi Iijima, Tomoaki Yamada
  • Organizer: 14th US-Japan Seminar on Dielectric and Piezoelectric Materials
  • Place of Presentation: Resort at the Mountain, Welches, OR, USA
  • Year and Date: 2009-10-11
• [Presentation] Strained-Relaxed Novel Domain Structure of Epitaxially Grown Pb(Zr, Ti)O_3 Thick Films and their Contribution to Piezoelectric Property Response (2009)
  • Author(s): Hiroshi Funakubo, Hiroshi Nakaki, Rikyu Ikariyama, Satoru Utsugi, Mitsumasa Nakajima, Tomoaki Yamada, Mutsuo Ishikawa, Hitoshi Morioka, Ken Nishida
  • Organizer: ISIF^2 2009
  • Place of Presentation: Antlers Hilton Colorado Springs, Corolado Springs, CO, USA
  • Year and Date: 2009-09-28
• [Presentation] CaF_2基板上に作製したPbTiO_3膜で観察される巨大強誘電性 (2009)
  • Author(s): 舟窪浩、宇津木覚、藤澤隆志、安井伸太郎、石河睦生、松島正明、山田智明、森岡仁
  • Organizer: 日本セラミックス協会第22回秋季シンポジウム
  • Place of Presentation: 愛媛大学
  • Year and Date: 2009-09-17
• [Presentation] CaF_2基板上への(001), (101), (111)配向エピタキシャルPb(Zr_<0.35>, Ti_<0.65>)O_3膜の作製と評価 (2009)
  • Author(s): 宇津木覚、藤澤隆志、江原祥隆、安井伸太郎、森岡仁、石河睦生、山田智明、飯島高志、舟窪浩
  • Organizer: 2009年秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-11
• [Presentation] CaF_2基板上に作製したエピタキシャルPb(Zr, Ti)O_3膜の強誘電特性の組成依存 (2009)
  • Author(s): 江原祥隆、宇津木覚、中島光雅、森岡仁、山田智明、舟窪浩
  • Organizer: 2009年秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-11
• [Presentation] Impact of residual strain on electrical properties in epitaxial PbTiO_3 films grown by MOCVD (2009)
  • Author(s): 宇津木覚, 藤澤隆志, 安井伸太郎, 森岡仁, 石河睦生, 山田智明, 舟窪浩
  • Organizer: 3rd International Conference on Science and Technology for Advanced Ceramics(STAC3)
  • Place of Presentation: Mielparque-Yokohama, Yokohama, Japan
  • Year and Date: 2009-06-18
• [Presentation] Growth of Polar-axis-oriented Epitaxial Pb(Zr, Ti)O_3 Thick Films Grown on(100)CaF_2 Substrates (2009)
  • Author(s): Hiroshi Funakubo, Takashi Fujisawa, Hiroshi Nakaki, Satoru Utsugi, Rikyu Ikariyama, Hitoshi Morioka, Mutsuo Ishikawa, Tomoaki Yamada
  • Organizer: 8th Pacific Rim Conference on Ceramic and Glass Technology
  • Place of Presentation: Hyatt Regency Vancouver, Vancouver, British Columbia, Canada
  • Year and Date: 2009-06-02
• [Presentation] Growth of Polar-axis-oriented Epitaxial Pb(Zr, Ti)O_3 Thick Films with Small Sirain (2009)
  • Author(s): Hiroshi Funakubo, Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Satoru Utsugi, Hitoshi Morioka, Mutsuo Ishikawa, Tomoaki Yamada
  • Organizer: 5th Fulrath Memorial International Symposium on Advanced Ceramics
  • Place of Presentation: Tokyo Big Sight, Tokyo, Japan
  • Year and Date: 2009-04-08
• [Presentation] エピタキシャルPbTiO_3膜のドメイン構造と電気特性の膜厚依存 (2009)
  • Author(s): 宇津木覚、藤澤隆志、安井伸太郎、森岡仁、石河睦生、山田智明、舟窪浩
  • Organizer: 2009年春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-03-31
• [Presentation] 分極軸配向したジルコン酸チタン酸鉛厚膜の結晶構造と特性評価 (2009)
  • Author(s): 舟窪浩、藤澤隆志、山田智明、石河睦生、加茂嵩史、中島光雅、安井伸太郎、森岡仁、坂田修身、飯島高志
  • Organizer: 日本金属学会2009年春期大会
  • Place of Presentation: 東京工業大学(大岡山)
  • Year and Date: 2009-03-29
• [Presentation] エピタキシャルPb(Zr, Ti)O_3膜のドメイン構造と電気特性の膜厚依存 (2009)
  • Author(s): 宇津木覚、藤澤隆志、安井伸太郎、森岡仁、石河睦生、山田智明、舟窪浩
  • Organizer: 第47回セラミックス基礎科学討論会
  • Place of Presentation: グランキューブ大阪(大阪国際会議場)
• [Presentation] Growth of Epitaxial Pb(Zr, Ti)O_3 Thick Films on (100)CaF_2 Substrates with Perfectly Polar-axis-orientation and their Electrical and Mechanical Property Characterization (2008)
  • Author(s): Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Tomoaki Yamada, Mutsuo Ishikawa,Hitoshi Morioka, Keisuke Saito, and Hiroshi Funakubo
  • Organizer: 2008 MRS Fall Meeting
  • Place of Presentation: Hynes Convention Center and Sheraton Boston Hotel, Boston, MA, USA
  • Year and Date: 2008-12-03
• [Presentation] Novel Mechanism for Large Piezoelectric Response Observed in Epitaxial Pb(Zr, Ti)O_3 Thick Films (2008)
  • Author(s): Hiroshi Funakubo, Hiroshi Nakaki, Rikyu Ikariyama, Nicolas Menou, Ken Nishida, Minoru Osada, Hitoshi Morioka, Keisuke Saito, Osami Sakata, Kazunori Fukuda, and Shigeru Kimura
  • Organizer: 6th Asian Meeting on Electroceramics(AMEC-6)
  • Place of Presentation: NIMS, Tsukuba, Japan
  • Year and Date: 2008-10-22
• [Presentation] Metal-Organic Chemical Vapor Deposition and Property of High Quality Dielectric Thin Films (2008)
  • Author(s): Hiroshi Funakubo
  • Organizer: Materials Science & Technology 2008 Conference
  • Place of Presentation: David L. Lawrence Convention Center, PA, USA
  • Year and Date: 2008-10-07
• [Presentation] Growth of Perfectly Unipolar-Axis-Oriented Epitaxial Pb(Zr, Ti)O_3 Thick Films on Single Crystal Substrates with Large Thermal Expansion Coefficient (2008)
  • Author(s): Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Hitoshi Morioka, Keisuke Saito, and Hiroshi Funakubo
  • Organizer: International Symposium on Integrated Ferroelectrics (ISIF 2008)
  • Place of Presentation: One-north Biopohs, Singapole
  • Year and Date: 2008-06-12
• [Presentation] Strained-relaxed Novel Domain Structure of Epitaxial Pb(Zr,Ti)O_3 Thick Films Grown by Metal Organic Chemical Vapor Deposition and Their Contribution to Piezoresponse (2008)
  • Author(s): H. Funakubo, H. Nakaki, R. Ikariyama, N. Menou, K. Nishida, H. Morioka, K. Saito, K. Fukuda, O. Sakata, and S. Kimura
  • Organizer: 2008 U. S. Navy Workshop on Acoustic Transducti on Materials and Devices The Penn State Conference Center Hotel, State College, PA, USA
  • Place of Presentation: The Penn State Conference Center Hotel, State College, PA, USA
  • Year and Date: 2008-05-13
• [Presentation] 分極軸配向エピタキシャル正方晶Pb(Zr_<0.35>, Ti_<0.65>)O_3膜の膜厚依存性 (2008)
  • Author(s): 藤澤隆志, 中木寛, 碇山理究, 石河睦生, 山田智明, 森岡仁、斎藤啓介, 舟窪浩
  • Organizer: 2008年秋季第69回応用物理学関係連合講演会
  • Place of Presentation: 中部大学
• [Remarks]
  • URL: http://f-lab.iem.titech.ac.jp/f-lab.htm
• [Remarks]
  • URL: http://f-lab.iem.titech.ac.jp/f-lab.htm