Fabrication of functional surface of micro dies and development of equipment for evaluation of its tribological characteristics

• Project/Area Number: 20360336
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Tokyo Metropolitan University
• Principal Investigator: YANG Ming Tokyo Metropolitan University, 大学院・システムデザイン研究科, 教授 (90240142)
• Co-Investigator(Kenkyū-buntansha): MANABE Kenーichi 首都大学東京, 大学院・理工学研究科, 教授 (10145667)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000); Fiscal Year 2010: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2009: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2008: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
• Keywords: 精密造形プロセス / マイクロ金型 / 表面処理 / 精密計測 / トライボロジー

Research Abstract

Surface treatments technology including surface finishing and surface coating on micro dies for the micro metal forming were developed in this study. Equipment for evaluation tribological characteristics during micro forming processes was developed. Various tribological phenomena according to down-sizing of the materials and dies were analyzed. Experiments with various materials and conditions were carried out to clarify the issues in micro forming processes and to be applied to a highly accurate, low-cost micro devices processing technology in the future.

Research Products

• [Journal Article] Deformation Behavior of Ultra-Thin Metal Foils in Strip Drawing Friction Test (2010)
  • Author(s): T. Shimizu, K. Manabe, M. Yang
  • Journal Title: Key Engineering Materials Vol.443 Pages: 110-115
  • Peer Reviewed
• [Journal Article] Deformation Behavior of Ultra-Thin Metal Foils in Strip Drawing Friction Test (2010)
  • Author(s): T.Shimizu, K.Manabe, M.Yang
  • Journal Title: Key Engineering Materials Volume: Vol.443 Pages: 110-115
  • Peer Reviewed
• [Journal Article] Deformation Behavior of Ultra-thin Metal Foils in Strip Drawing Friction Test (2010)
  • Author(s): T.Shimizu, K.Manabe, M.Yang
  • Journal Title: Key Engineering Materials Vol.443 Pages: 110-115
  • Peer Reviewed
• [Journal Article] Influence of Surface Topographical Interaction between Tool and Material in Micro-deep Drawing (2009)
  • Author(s): T. Shimizu, Y. Murashige, K. Ito,,K. Manabe
  • Journal Title: Journal of Solid Mechanics and Materials Engineering Vol.3-2 Pages: 397-408
  • NAID: 130000667673
  • Peer Reviewed
• [Journal Article] Influence of Surface Topographical Interaction between Tool and Material in Micro-deep Drawing (2009)
  • Author(s): T.Shimizu, Y.Murashige, K.Ito, K.Manabe
  • Journal Title: Journal of Solid Mechanics and Materials Engineering Vol.3-2 Pages: 397-408
  • NAID: 130000667673
  • Peer Reviewed
• [Journal Article] Application of Ion Irradiation for Surface Finish of Micro Forming Die (2008)
  • Author(s): Ming Yang, Atsushi Osako
  • Journal Title: Journal of Materials Processing Technology Vol.201 Pages: 315-318
  • Peer Reviewed
• [Journal Article] Validation of FE Simulation Based on Surface Roughness Model in Micro Deep Drawing (2008)
  • Author(s): K. Manabe, T. Shimizu, H. Koyama, M. Yang K. Ito
  • Journal Title: Journal of Materials Processing Technology Vol.204 Pages: 89-93
  • Peer Reviewed
• [Journal Article] Surface Treatment of Micro Dies for Improving Tribological Properties (2008)
  • Author(s): Ming Yang
  • Journal Title: Journal of Steel research International Vol.2 Pages: 421-426
  • Peer Reviewed
• [Journal Article] Application of Ion Irradiation for Surface Finish of Micro Forming Die (2008)
  • Author(s): Ming Yang, Atsushi Osako
  • Journal Title: Journal of Materials Processing Technology Vol. 201 Pages: 315-318
  • Peer Reviewed
• [Journal Article] Validation of FE Simulation Based on Surface Roughness Model in Micro Deep Drawing (2008)
  • Author(s): K. Manabe, T. Shimizu, H. Koyama, M. Yang, K. Ito
  • Journal Title: Journal of Materials Processing Technology Vol. 204 Pages: 89-93
  • Peer Reviewed
• [Presentation] Surface Modification of Metallic Foils by Vibration-Assisted Micro Forging (2011)
  • Author(s): 西川顕二
  • Organizer: The 6th International Conference of MicroManufacturing (ICOMM2011)
  • Place of Presentation: 東京電機大学(東京都)
  • Year and Date: 2011-03-09
• [Presentation] Transitional Adhesion Behavior of Stainless Steel Foils in Dry Progressive Micro Deep Drawing Process (2011)
  • Author(s): 清水徹英
  • Organizer: The 6th International Conference of MicroManufacturing (ICOMM2011)
  • Place of Presentation: 東京電機大学(東京都)
  • Year and Date: 2011-03-09
• [Presentation] Transitional Adhesion Behavior of Stainless Steel Foils in Dry Progressive Micro Deep Drawing Process (2011)
  • Author(s): Tetsuhide Shimizu, Yushiro Murashige, Ming Yang, Ken-ichi Manabe
  • Organizer: the 6th International Conference of MicroManufacturing (ICOMM2011)
  • Place of Presentation: 東京電機大学(東京都)
  • Year and Date: 2011-03-09
• [Presentation] Welding of metallic foil and thin wire with electron beam (2010)
  • Author(s): S.Fujioka, M.YANG
  • Organizer: International Conference on Advances in Materials and Processing Technologies (ANPT2010)
  • Place of Presentation: Arts et Metiers ParisTech(パリ・フランス)
  • Year and Date: 2010-10-25
• [Presentation] EVALUATION OF TRIBOLOGICAL CHARACTERISTICS FOR MICRO DIES (2010)
  • Author(s): Ming YANG
  • Organizer: International Forum on Micro Manufacturing 2010 (IFMM'10)
  • Place of Presentation: 長良川国際会議場(岐阜県)
  • Year and Date: 2010-10-22
• [Presentation] EVALUATION OF TRIBOLOGICAL CHARACTERISTICS FOR MICRODIES (2010)
  • Author(s): Ming YANG, Yu Kimura, Kazuo Morikawa
  • Organizer: International Forum on Micro Manufacturing 2010 (IFMM'10)
  • Place of Presentation: 長良川国際会議場(岐阜県)
  • Year and Date: 2010-10-22
• [Presentation] Surface Modification of Sheets Metal by Vibration-Assisted Micro Forging (2010)
  • Author(s): M. Yang
  • Organizer: The 3rd Asian Workshop on Nano/Micro Forming Technology (AWMDT-2010)
  • Place of Presentation: ラマダ・プラザ・ホテル(済州・韓国)
  • Year and Date: 2010-10-08
• [Presentation] Suface Modification of Sheets Metal by Vibration-Assisted Micro Forging (2010)
  • Author(s): K.Nishikawa, M.K.Roy, M.Yang
  • Organizer: The 3rd Asian Workshop on Nano/Micro Formingtechnology (AWMDT-2010)
  • Place of Presentation: ラマダ・プラザ・ホテル(済州・韓国)
  • Year and Date: 2010-10-08
• [Presentation] 鍛造によるチタン薄材表面の微細成形 (2010)
  • Author(s): 西川顕二
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋工業大学(愛知県)
  • Year and Date: 2010-09-08
• [Presentation] 電子ビームによる金属箔材溶接に関する研究 (2010)
  • Author(s): 藤岡正治, 楊明
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋工業大学(愛知県)
  • Year and Date: 2010-09-07
• [Presentation] Plastic Deformation in Surface Layer of Metal Foil in Strip Drawing Test (2010)
  • Author(s): 清水徹英
  • Organizer: The 4th International Conference on Tribology in Manufacturing Processes (ICTMP2010)
  • Place of Presentation: Acropolis exhibition centre(ニース・フランス)
  • Year and Date: 2010-06-14
• [Presentation] Plastic Deformation in Surface Layer of Metal Foil in Strip Drawing Test (2010)
  • Author(s): T.Shimizu, K.Manabe, M.Yang, K.Ito
  • Organizer: The 4th International Conference on Tribology in Manufacturing Processes (ICTMP2010)
  • Place of Presentation: Acropolis, exhibition centre(フランス・ニース)
  • Year and Date: 2010-06-14
• [Presentation] Deformation Behavior of Ultra-thin Metal Foils in Strip Drawing Friction Test (2010)
  • Author(s): 清水徹英
  • Organizer: The 9th Asia-Pacific Conference on Materials Processing (APCMP2010)
  • Place of Presentation: University of New South Wales,(シドニー・オーストラリア)
  • Year and Date: 2010-06-09
• [Presentation] Deformation Behavior of Ultra-thin Metal Foils in Strip Drawing Friction Test (2010)
  • Author(s): T.Shimizu, K.Manabe, M.Yang
  • Organizer: The 9th Asia-Pacific Conference on Materials Processing (APCMP2010)
  • Place of Presentation: University of New South Wales(オーストラリア・シドニー)
  • Year and Date: 2010-06-09
• [Presentation] 金属極薄材の帯板引抜き型摩擦試験における変形挙動の実験的評価 (2010)
  • Author(s): 清水徹英
  • Organizer: 平成22年度塑性加工春季講演会
  • Place of Presentation: 電気通信大学(東京都)
  • Year and Date: 2010-05-29
• [Presentation] Surface Modification of Titanium Sheets Metal by Micro-forging (2010)
  • Author(s): 西川顕二
  • Organizer: The 5th International Conference on MicroManufacturing (ICOMM/4M 2010)
  • Place of Presentation: University of Wisconsin(マディソン・アメリカ)
  • Year and Date: 2010-04-07
• [Presentation] Surface Modification of Titallium Sheets Metal by Micro-forging (2010)
  • Author(s): K.Nishikawa, M.Yang, M.K.Roy, K.Morikawa
  • Organizer: The 5th International Conference on MicroManufacturing (ICOMM/4M 2010)
  • Place of Presentation: University of Wisconsin-(アメリカ・マディソン)
  • Year and Date: 2010-04-07
• [Presentation] Adhesive Wear on Dry Sliding Surface in Miniaturization of Deep-drawing Process (2010)
  • Author(s): 清水徹英
  • Organizer: International Conference on Materials Processing Technology 2010, MAPT2010
  • Place of Presentation: バンコク・タイ
• [Presentation] Adhesive Wear on Dry Sliding Surface in Miniaturization of Deep-drawing Process (2010)
  • Author(s): T.Shimizu, Y.Murashige, K.Ito, M.Yang, K.Manabe
  • Organizer: International Conference on Materials Processing Technology 2010, MAPT2010
  • Place of Presentation: タイ・バンコク市
• [Presentation] りん青銅極薄箔材のマイクロ深絞り性に及ぼす内部結晶組織の影響 (2009)
  • Author(s): 清水徹英
  • Organizer: 日本伸銅協会 銅及び銅合金技術研究会第49回講演大会
  • Place of Presentation: 京都テルサ(京都府)
• [Presentation] A Precise Forming System for Fabrication of Micro Metallic Devices (2009)
  • Author(s): M. Yang
  • Organizer: AWNFT-2009
  • Place of Presentation: 長沙市・中国
• [Presentation] マイクロ金型のトライボロジー特性評価 (2009)
  • Author(s): 木村悠
  • Organizer: 日本機械学会2009年度年次大会
  • Place of Presentation: 岩手大学(岩手県)
• [Presentation] マイクロ金型のトライボロジー特性評価 (2009)
  • Author(s): 木村悠, 楊明
  • Organizer: 日本機械学会2009年度年次大会
  • Place of Presentation: 岩手大学(盛岡市)
• [Presentation] A Precise Forming System for Fabrication of Micro Metallic Devices (2009)
  • Author(s): M.Yang, K.Ito, S.Nakano
  • Organizer: AWNFT-2009
  • Place of Presentation: 中国・長沙市
• [Presentation] Fabrication of Micro Metallic Valve and Pump (2009)
  • Author(s): Ming Yang, Yasunori Kabasawa, Kuniyoshi Ito
  • Organizer: The 4th Inernational Conference on Experimental Mechanics (ICEM2009)
  • Place of Presentation: シンガポール
• [Presentation] マイクロ一体成形による金属バルブの創製 (2009)
  • Author(s): 楊明, 伊藤國吉, 椛澤康成
  • Organizer: 第60回塑性加工連合講演会
  • Place of Presentation: 信州大学(長野市)
• [Presentation] りん青銅極薄箔材のマイクロ深絞り性に及ぼす内部結晶組織の影響 (2009)
  • Author(s): 清水徹英, 小川真弘, 真鍋健一, 伊藤國吉
  • Organizer: 日本伸銅協会 銅及び銅合金技術研究会第49回講演大会
  • Place of Presentation: 京都テルサ(京都市)
• [Presentation] アルミニウム合金箔材の表面特性が及ぼすマイクロ深絞り性への影響 (2008)
  • Author(s): 清水徹英
  • Organizer: 第59回塑性加工連合講演会
  • Place of Presentation: 広島大学(広島県)
  • Year and Date: 2008-11-09
• [Presentation] アルミニウム合金箔材の表面特性が及ぼすマイクロ深絞り性への影響 (2008)
  • Author(s): 清水徹英, 小川真弘, 楊明
  • Organizer: 第59回塑性加工連合講演会
  • Place of Presentation: 広島
  • Year and Date: 2008-11-09
• [Presentation] Surface Treatment of Micro Dies for Improving Tribologica Properties (2008)
  • Author(s): Ming Yang
  • Organizer: The 12th International Conference METAL FORMING 2008
  • Place of Presentation: ポーランド
  • Year and Date: 2008-09-23
• [Presentation] Design and Fabrication of Metallic MEMS (2008)
  • Author(s): Ming Yang
  • Organizer: The 9th International Conference on Technology of Plasticity (ICTP 2008)
  • Place of Presentation: Hotel Hyundai(慶州・韓国)
  • Year and Date: 2008-09-10
• [Presentation] Design and Fabrication of Metallic MEMS (2008)
  • Author(s): Ming Yang
  • Organizer: The 9th International Conference on Technology of Plasticity (ICTP 2008)
  • Place of Presentation: 慶州, 韓国
  • Year and Date: 2008-09-10
• [Presentation] マイクロ深絞り成形性に及ぼす金型表面性状の影響に関する実験的検討 (2008)
  • Author(s): 清水徹英
  • Organizer: 平成20年度塑性加工春季講演会
  • Place of Presentation: 日本大学津田沼キャンパス(千葉県)
  • Year and Date: 2008-05-24
• [Presentation] マイクロ深絞り成形性に及ぼす金型表面性状の影響に関する実験的検討 (2008)
  • Author(s): 清水徹英, 真鍋健一, 伊藤國吉, 楊明
  • Organizer: 平成20年度塑性加工春季講演会
  • Place of Presentation: 津田沼
  • Year and Date: 2008-05-24