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Study on nitride-based semiconductor photonic devices with nano-imprint technique

Research Project

Project/Area Number 20560302
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionThe University of Tokushima

Principal Investigator

NAOI Yoshiki  The University of Tokushima, 大学院・ソシオテクノサイエンス研究部, 准教授 (90253228)

Co-Investigator(Kenkyū-buntansha) SAKAI Shiro  徳島大学, 大学院・ソシオテクノサイエンス研究部, 教授 (20135411)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2010: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords薄膜・量子構造 / ナノインプリント / 発光ダイオード / 窒化物
Research Abstract

We have studied on the development and the improvement of device performance of nitride-based semiconductor photonic devices by using nano-imprint lithography technique. We have experimentally confirmed the diffraction effects for the sample with surface periodic structure on GaN surface fabricated by nano-imprint lithography technique. We fabricated the photodetector with this structure, and investigated the fundamental characteristics for the device. We also studied for the LED devices with the periodic structure on the surface and the interface between the GaN and the substrate, and investigated the effects on output light power and the directivility.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (46 results)

All 2010 2009 2008

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (38 results)

  • [Journal Article] Evaluation and re-growth of p-GaN on nano-patterned GaN on sapphire substrate2010

    • Author(s)
      Yuji Nariyuki, Masakazu Matsumoto, Takeshi Noda, Katsushi Nishino, Yoshiki Naoi, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Journal Title

      physica status solidi (c) Vol.7, No.7-8

      Pages: 2121-2123

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] GaN-based light emitting diodes with periodic nano-structures on the surface fabricated by nanoimprint lithography technique2010

    • Author(s)
      Yoshiki Naoi, Masakazu Matsumot, Tianya Tan, Mitsuaki Tohno, Shiro Sakai Jing Zhang, Atsuyuki Fukano, Satoru Tanaka
    • Journal Title

      physica status solidi (c) Vol.7, No.7-8

      Pages: 2154-2156

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] GaN surface nanostructure photodetector based on back side incidence2010

    • Author(s)
      Jing Zhang, Yoshiki Naoi, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Journal Title

      physica status solidi (c) Vol.7, No.7-8

      Pages: 1804-1806

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation and re-growth of p-GaN on nano-patterned GaN on sapphire substrate2010

    • Author(s)
      Nariyuki Y, et al.
    • Journal Title

      physica status solidi (c)

      Volume: 7巻 Pages: 2121-2123

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GaN-based light emitting diodes with periodic nano-structures on the surface fabricated by nanoimprint lithography technique2010

    • Author(s)
      Naoi Y, et al.
    • Journal Title

      physica status solidi (c)

      Volume: 7巻 Pages: 2154-2156

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GaN surface nanostructure photodetector based on back side incidence2010

    • Author(s)
      Zhang J, et al.
    • Journal Title

      physica status solidi (c)

      Volume: 7巻 Pages: 1804-1806

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Photovoltaic Measurements of Surface Nanostructure of A1GaInN-Based Photodetector2009

    • Author(s)
      Jing Zhang, Yoshiki Naoi, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Journal Title

      Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes) Vol.48

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Photovoltaic Measurements of Surface Nanostructure of AlGaInN-Based Photodetector2009

    • Author(s)
      Z.Zhang, et al.
    • Journal Title

      Japanese Journal of Applied Physics Vol.48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] GaN系UV-LEDの偏光特性2010

    • Author(s)
      松本将和, 福田弘之, 直井美貴, 酒井士郎
    • Organizer
      平成22年度電気関係学会四国支部連合大会,11-14
    • Place of Presentation
      愛媛大学
    • Year and Date
      2010-09-25
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノ微粒子技術を用いたGaN表面周期構造の作製2010

    • Author(s)
      楠貴大, 沼島明菜, 直井美貴, 酒井士郎
    • Organizer
      平成22年度電気関係学会四国支部連合大会,11-17
    • Place of Presentation
      愛媛大学
    • Year and Date
      2010-09-25
    • Related Report
      2010 Final Research Report
  • [Presentation] 金属マスクを施したサファイア表面周期構造へのGaN成長と評価2010

    • Author(s)
      和田祥吾, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      平成22年度電気関係学会四国支部連合大会,11-18
    • Place of Presentation
      愛媛大学
    • Year and Date
      2010-09-25
    • Related Report
      2010 Final Research Report
  • [Presentation] GaN系UV-LEDの偏光特性2010

    • Author(s)
      松本将和, 他
    • Organizer
      平成22年度電気関係学会四国支部連合大会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノ微粒子技術を用いたGaN表面周期構造の作製2010

    • Author(s)
      楠貴大, 他
    • Organizer
      平成22年度電気関係学会四国支部連合大会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] 金属マスクを施したサファイア表面周期構造へのGaN成長と評価2010

    • Author(s)
      和田祥吾, 他
    • Organizer
      平成22年度電気関係学会四国支部連合大会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] 表面・界面に周期構造を有するGaN系LEDの配向特性評価2010

    • Author(s)
      松本将和, 福田弘之, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      LED総合フォーラム,69
    • Place of Presentation
      あわぎんホール(徳島市)
    • Year and Date
      2010-04-17
    • Related Report
      2010 Final Research Report
  • [Presentation] 表面・界面に周期構造を有するGaN系LEDの配向特性評価2010

    • Author(s)
      松本将和, 他
    • Organizer
      LED総合フォーラム
    • Place of Presentation
      あわぎんホール(徳島県)
    • Year and Date
      2010-04-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノ加工GaN基板上再成長層のTEM観察2010

    • Author(s)
      西野克志, 澤井佑介, 成行祐児, 野田丈嗣, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第57回応用物理学関係連合講演会,19a-TB2
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-19
    • Related Report
      2010 Final Research Report
  • [Presentation] Front and Back Side Illumination of a Nano-Structured AlGaInN Photodetector2010

    • Author(s)
      Jing Zhang,, Takumi Taoka, Yoshiki Naoi, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Organizer
      2nd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials,PB064C
    • Place of Presentation
      Nagoya
    • Year and Date
      2010-03-10
    • Related Report
      2010 Final Research Report
  • [Presentation] GaN系表面ナノ構造光検出器2009

    • Author(s)
      張晶, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      電子情報通信学会電子デバイス研究会,Vol.109(No.288,83-87)
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-11-12
    • Related Report
      2010 Final Research Report
  • [Presentation] GaN-bled Light Emitting Diodes with Periodic Nano-structues on the Surface Fabricated by Nanoimprint Lithography Technique2009

    • Author(s)
      Yoshiki Naoi, Mitsuaki Tohno, Tianya Tan, Masakazu Matsmoto,, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Organizer
      The 8th International Conference on Nitride Semiconductors,ThP106
    • Place of Presentation
      Cheju, Oct.
    • Year and Date
      2009-10-22
    • Related Report
      2010 Final Research Report
  • [Presentation] GaN-Based Light Emitting Diodes with Periodic Nano-Structures on the Surface Fabricated by Nanoimprint Lithography Technique2009

    • Author(s)
      Y.Naoi, et al.
    • Organizer
      The 8th International Conference on Nitride Semiconductors (ICNS 2009)
    • Place of Presentation
      済州(韓国)
    • Year and Date
      2009-10-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluation and Re-growth of GaN on Nano-patterned GaN on a Sapphire Substrate2009

    • Author(s)
      Yuji Nariyuki, Masakazu Matsmoto, Yoshiki Naoi, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Organizer
      The 8th International Conference on Nitride Semiconductors,TP113
    • Place of Presentation
      Cheju, Oct.
    • Year and Date
      2009-10-20
    • Related Report
      2010 Final Research Report
  • [Presentation] GaN Surface Nanostructure Photodetector Based on Back Side Incidence2009

    • Author(s)
      張晶, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      The 8th International Conference on Nitride Semiconductors,TP145
    • Place of Presentation
      Cheju, Oct.
    • Year and Date
      2009-10-20
    • Related Report
      2010 Final Research Report
  • [Presentation] Evaluation and Re-Growth of GaN on Nano-Patterned GaN on a Sapphire Substrate2009

    • Author(s)
      Y.Nariyuki, et al
    • Organizer
      The 8th International Conference on Nitride Semiconductors (ICNS 2009)
    • Place of Presentation
      済州(韓国)
    • Year and Date
      2009-10-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] GaN Surface Nanostructure Photodetector Based on Back Side Incidence2009

    • Author(s)
      Z.Zhang, et al.
    • Organizer
      The 8th International Conference on Nitride Semiconductors (ICNS 2009)
    • Place of Presentation
      済州(韓国)
    • Year and Date
      2009-10-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] 紫外線LEDの開発動向と今後の応用について2009

    • Author(s)
      直井美貴
    • Organizer
      徳島ビジネスチャレンジメッセ2009LEDコンソーシアム基調講演
    • Place of Presentation
      アスティ徳島
    • Year and Date
      2009-10-15
    • Related Report
      2010 Final Research Report
  • [Presentation] 表面ナノ周期構造を有するlnGaN-LEDからの輻射光空間分布特性2009

    • Author(s)
      直井美貴, 松本将和, 諦天亜, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第70回応用物理学会学術講演会(11a-X-8)
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-11
    • Related Report
      2010 Final Research Report
  • [Presentation] 裏面入射GaN系表面ナノ構造光検出器2009

    • Author(s)
      張晶, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第70回応用物理学会学術講演会,11a-E-9
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-11
    • Related Report
      2010 Final Research Report
  • [Presentation] 表面ナノ周期構造を有するInGaN-LEDからの輻射光空間分布特性2009

    • Author(s)
      直井美貴, 他
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] 裏面入射GaN系表面ナノ構造光検出器2009

    • Author(s)
      張晶, 他
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノ加工を施したGaN上への再成長及びその評価2009

    • Author(s)
      成行祐児, 松本将和, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第70回応用物理学会学術講演会,8D-F-2
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノ加工を施したGaN上への再成長及びその評価2009

    • Author(s)
      成行祐児, 他
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] The surface nanostructure photo-voltaic property of GaN-based photodetector2009

    • Author(s)
      Jing Zang, S.Okuno, Yoshiki Naoi, Shiro Sakai, Atsuyuki Fukano, Satoru Tanaka
    • Organizer
      Asia-Pacific Workshop on wide gap Semiconductors (APWS 2009),M03-7
    • Place of Presentation
      Zhangjiajie (China)
    • Year and Date
      2009-05-25
    • Related Report
      2010 Final Research Report
  • [Presentation] LEDの光出力改善技術2009

    • Author(s)
      直井美貴
    • Organizer
      技術情報協会LED照明の高輝度・長寿命化技術セミナー
    • Place of Presentation
      大田区産業プラザ
    • Year and Date
      2009-05-21
    • Related Report
      2010 Final Research Report
  • [Presentation] サファイア上周期的ナノ構造を形成するためのナノインプリント技術開発とGaN系LED2009

    • Author(s)
      直井美貴, 酒井士郎, 深野敦之, 田中覚, 納田卓, 木村真大, 川野俊輔, 村本宜彦
    • Organizer
      第56回応用物理学関係連合講演会,1p-ZJ-10
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-01
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノインプリント技術により周期的ナノ構造を形成したGaN系光デバイスからのEL特性2009

    • Author(s)
      遠野充明, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第56回応用物理学関係連合講演会,1p-ZJ-11
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-01
    • Related Report
      2010 Final Research Report
  • [Presentation] GaNナノ加工pnダイオード光検出器2009

    • Author(s)
      張晶, 遠野充明, 奥野誠亮, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第56回応用物理学関係連合講演会,1a-ZJ-30
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-01
    • Related Report
      2010 Final Research Report
  • [Presentation] GaNナノ加工pnダイオード光検出器2009

    • Author(s)
      張晶, 他
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(茨城県)
    • Year and Date
      2009-04-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] サファイア上周期的ナノ構造を形成するためのナノインプリント技術開発とGaN系LED2009

    • Author(s)
      直井美貴, 他
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(茨城県)
    • Year and Date
      2009-04-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノインプリント技術により周期的ナノ構造を形成したGaN系光デバイスからのEL特性2009

    • Author(s)
      遠野充明, 他
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(茨城県)
    • Year and Date
      2009-04-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノ加工を用いたGaNのC-V特性2009

    • Author(s)
      成行祐児, 松本将和, 遠野充明, 直井美貴, 酒井士郎, 深野敦之, 田中覚
    • Organizer
      第56回応用物理学関係連合講演会,30p-ZJ-3
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノ加工を用いたGaNのC-V特性2009

    • Author(s)
      成行, 他
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] ナノインプリント技術により周期的微細構造を施したGaN系デバイスからの電流注入発光特性2008

    • Author(s)
      遠野, 他
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2008-11-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] ナノインプリント技術により周期的微細構造を施したGaN系デバイスからの電流注入発光特性2008

    • Author(s)
      遠野充明, 張晶, 直井美貴, 酒井士郎, 和地順蔵
    • Organizer
      電子情報通信学会電子デバイス研究会,Vo1.ED2008-158
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2008-11-20
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノインプリント技術によるサファイア基板上へのナノ構造の形成2008

    • Author(s)
      遠野充明, 直井美貴, 酒井士郎, 和地順蔵
    • Organizer
      平成20年度電気関係学会四国支部連合大会,11-3
    • Place of Presentation
      徳島大学
    • Year and Date
      2008-09-27
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノインプリント技術によるサファイア基板上へのナノ構造の形成2008

    • Author(s)
      遠野, 他
    • Organizer
      平成20年度電気関係学会四国支部連合大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2008-09-27
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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