A Deep-Trench Optical-Detector Integrated Early Vision Processor and an Application to Motion Detection
| Project/Area Number |
20686024
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Tokyo |
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Principal Investigator |
MITA Yoshio 東京大学, 大学院・工学系研究科, 准教授 (40323472)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000)
Fiscal Year 2010: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2009: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
Fiscal Year 2008: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
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| Keywords | 電子デバイス・集積回路 / MEMS / マイクロ・ナノデバイス / 光物性 / 三次元形状検出 / スマートセンサ情報システム |
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| Research Abstract |
An integration scheme is proposed to provide active electron devices (such as diodes and transistors) integrated MEMS-fabricated vertical 3-D surfaces, which have long been used just as a mechanical structure. The team believes that integration of active devices is the key technology to provide much higher functionality to MEMS. A special attention has been paid to the special-DRIE-fabricated nanometric (100nm-class) surface-corrugated PN-junctions to obtain light polarization dependence. An extinction ratio 1:4 has been reported in the conference then ameliorated up to 1:20.
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Report
(4 results)
Research Products
(48 results)
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[Journal Article] Demonstration of a wireless driven MEMS pond skater that uses EWOD technology2009
Author(s)
Yoshio Mita, Y. Li, M. Kubota, S. Morishita, W. Parkes, L.I. Haworth, B.W. Flynn, J.G. Terry, T.-B. Tang, A.D. Ruthven, S. Smith and A.J. Walton
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Journal Title
Journal of Solid-State Electronics
Volume: Vol. 53
Pages: 798-802
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[Presentation] La Methode "Swing-Probing" Pour la Profilom\`etrie de Microtrous Tr\`es Profonds2009
Author(s)
Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Shaojun Ma, Akio Higo, Agnes Tixier-Mita, Satoshi Morishita, Masakazu Sugiyama, et Takahisa Masuzawa
Organizer
Journee Francophone de laRecherche (フランス語による科学シンポジウム)
Place of Presentation
Maison Franco-Japonaise, Tokyo, Japon
Year and Date
2009-11-14
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[Presentation] An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler2009
Author(s)
Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, and Takahisa Masuzawa
Organizer
20^<th> Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009)
Place of Presentation
Toulouse, France(D12)
Related Report
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[Presentation] An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler2009
Author(s)
Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, Takahisa Masuzawa
Organizer
20th Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009)
Place of Presentation
Toulouse, France
Related Report
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[Presentation] Wireless Driven EWOD Technology for MEMS Pond Skater Application2008
Author(s)
Yoshio Mita, Yifan Li, Masanori Kubota, William Parkes, Leslie I. Haworth, Brian W. Flynn, Jonathan G. Terry, T.B. Tang, Alec Ruthven, Stewart Smith, and Anthony J. Walton
Organizer
38^<th> European Solid-State Device Research Conference (ESSDERC 2008)
Place of Presentation
Edinburgh, UK, (pp.306-309)
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