Diagnostics of debris from laser-produced plasma with tin droplet target for EUV light source

• Project/Area Number: 20760025
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Kyushu University
• Principal Investigator: NAKAMURA Daisuke Kyushu University, システム情報科学研究院, 助教 (40444864)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2009: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2008: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: EUV / レーザー生成プラズマ / ドロップレット / LIF

Research Abstract

The ablation dynamics of tin micro-droplet target irradiated by double pulses was investigated for extreme ultraviolet lithography source. Debris from Sn droplet target was visualized by the laser-induced fluorescence imaging and shadowgraph imaging.

Research Products

• [Journal Article] Dynamics of Laser-Irradiated Tin Micro-Droplet for EUV Light Source (2009)
  • Author(s): K.Okazaki, D.Nakamura, T.Akiyama, K.Toya, A.Takahashi, T.Okada
  • Journal Title: Proc.the 5^<th> International Congress on Laser Advanced Materials Processing Pages: 298-298
• [Journal Article] Diagnostics of Ablation Dynamics of Tin micro-Droplet for EUV Lithography Light Source (2009)
  • Author(s): D.Nakamura, K.Okazaki, T.Akiyama, K.Toya, A.Takahashi, T.Okada, T.Yanagida, Y.Ueno, Y.Sasaki, T.Suganuma, M.Nakano, H.Komori, A.Sumitani, A.Endo
  • Journal Title: Proc.CLEO Pacific Rim 2009
• [Journal Article] Dynamics of debris from laserirradiated Sn droplet for EUV lithography light source (2009)
  • Author(s): K. Okazaki, D. Nakamura, T. Akiyama, K. Toya, A. Takahashi, T. Okada
  • Journal Title: SPIE 7201
  • Peer Reviewed
• [Journal Article] Ablation Dynamics of Tin Micro-Droplet Irradiated by Double Pulse Laser used for Extreme Ultraviolet Lithography Source (2008)
  • Author(s): D. Nakamura, T. Akiyama, K. Okazaki, A. Takahashi, T. Okada
  • Journal Title: Journal of Physics D: Applied Physics Vol.41 Pages: 245210-245210
  • Peer Reviewed
• [Journal Article] Investigation of Debris Dynamics from Laser-Produced Tin Plasma for EUV Lithography Light Source (2008)
  • Author(s): D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada
  • Journal Title: Applied Physics A Vol.92 Pages: 767-772
  • Peer Reviewed
• [Journal Article] Comparative Study on EUV and Debris Emission from CO_2 and Nd : YAG LaserProduced Tin Plasmas (2008)
  • Author(s): A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, T. Okada
  • Journal Title: Journal of Physics, Conference Series 112 Pages: 42059-42059
  • Peer Reviewed
• [Journal Article] Emission Characteristics of Debris from CO_2 and Nd : YAG LaserProduced Tin Plasmas for Extreme Ultraviolet Lithography Light Source (2008)
  • Author(s): A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, T. Okada
  • Journal Title: Applied Physics B 92 Pages: 73-77
  • Peer Reviewed
• [Journal Article] Imaging Diagnostics of Debris from LaserProduced Tin Plasma with Droplet Target for EUV Light Source (2008)
  • Author(s): D. Nakamura, T. Akiyama, A. Takahashi. T. Okada
  • Journal Title: Journal of Laser Micro/Nanoengineering 3 Pages: 196-200
  • Peer Reviewed
• [Journal Article] Ablation Dynamics of Tin MicroDroplet Irradiated by Double Pulse Laser used for Extreme Ultraviolet Lithography Source (2008)
  • Author(s): D. Nakamura, T. Akiyama, K. Okazaki, A. Takahashi, T. Okada
  • Journal Title: Journal of Physics D : Applied Physics 41 Pages: 245210-245210
  • Peer Reviewed
• [Journal Article] 錫ターゲットを用いたレーザー生成プラズマEUV光源からのデブリ放出特性 (2008)
  • Author(s): 中村大輔, 秋山智哉, 高橋昭彦, 岡田龍雄
  • Journal Title: レーザー研究 36 Pages: 721-725
  • Peer Reviewed
• [Journal Article] Investigation of Debris Dynamics from LaserProduced Tin Plasma for EUV Lith ography Light Source (2008)
  • Author(s): D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada
  • Journal Title: Applied Physics A 192 Pages: 767-772
  • Peer Reviewed
• [Presentation] Diagnostics of Ablation Dynamics of Tin micro-Droplet for EUV Lithography Light Source (2009)
  • Author(s): D.Nakamura, K.Okazaki, T.Akiyama, K.Toya, A.Takahashi, T.Okada, T.Yanagida, Y.Ueno, Y.Sasaki, T.Suganuma, M.Nakano, H.Komori, A.Sumitani, A.Endo
  • Organizer: CLEO Pacific Rim 2009
  • Place of Presentation: 中国・上海
  • Year and Date: 2009-09-01
• [Presentation] Dynamics of Laser-Irradiated Tin Micro-Droplet for EUV Light Source (2009)
  • Author(s): K.Okazaki, D.Nakamura, T.Akiyama, K.Toya, A.Takahashi, T.Okada
  • Organizer: The 5^<th> International Congress on Laser Advanced Materials Processing
  • Place of Presentation: 神戸
  • Year and Date: 2009-07-01
• [Presentation] Laser diagnostics of laserablated tin particles from droplet targets (2009)
  • Author(s): T. Yanagida, Y. Ueno, Y. Sasaki, T. Suganuma, M. Nakano, H. Komor, A. Sumitani, A. Endo, D. Nakamura, T. Akiyama, K. Okazaki, T. Okada
  • Organizer: SPIE Advanced Lithography
  • Place of Presentation: San Jose, USA
  • Year and Date: 2009-02-26
• [Presentation] Dynamics of debris from laserirradiated Sn droplet for EUV lithography light source (2009)
  • Author(s): K. Okazaki, D. Nakamura, T. Akiyama, K. Toya, A. Takahashi, T. Okada
  • Organizer: ISPIE Photonics West
  • Place of Presentation: San Jose, USA
  • Year and Date: 2009-01-28
• [Presentation] Diagnostics of Ablation Dynamics of Tin micro-Droplet for EUV Lithography Light Source (2009)
  • Author(s): D. Nakamura, K. Okazaki, T. Akiyama, K. Toya, A. Takahashi, T. Okada, T. Yanagida, Y. Ueno, Y. Sasaki, T. Suganuma, M. Nakano, H. Komori, A. Sumitani, A. Endo
  • Organizer: CLEO Pacific Rim 2009
• [Presentation] Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source (2009)
  • Author(s): K. Okazaki, D. Nakamura, T. Akiyama, K. Toya, A. Takahashi, T. Okada
  • Organizer: SPIE Photonics West
• [Presentation] スズドロップレットを用いたレーザー生成プラズマEUV光源からのデブリ放出特性イメージング (2008)
  • Author(s): 中村大輔, 秋山智哉, 遠矢和勇騎, 岡崎功太, 高橋昭彦, 岡田龍雄
  • Organizer: 応用物理学会九州支部学術講演会
  • Place of Presentation: 宮崎
  • Year and Date: 2008-11-29
• [Presentation] スズドロップレットを用いたレーザー生成EUV光源のデブリ挙動 (2008)
  • Author(s): 秋山智哉, 岡崎功太, 中村大輔, 高橋昭彦, 岡田龍雄
  • Organizer: 電気関係学会九州支部連合大会
  • Place of Presentation: 大分
  • Year and Date: 2008-09-24
• [Presentation] Imaging Diagnostics of Debris from Double Pulse LaserProduced Tin Plasma for EUV Light Source (2008)
  • Author(s): T. Akiyama, K. Okazaki, D. Nakamura, A. Takahashi, T. Okada
  • Organizer: International Congress on Plasma Physics
  • Place of Presentation: Fukuoka
  • Year and Date: 2008-09-11
• [Presentation] スズドロップレットを用いたレーザー生成プラズマEUV光源のデブリ挙動計測 (2008)
  • Author(s): 中村大輔, 秋山智哉, 岡崎巧太, 高橋昭彦, 岡田龍雄
  • Organizer: 西日本放電懇談会
  • Place of Presentation: 福岡
  • Year and Date: 2008-08-04
• [Presentation] Imaging Diagnostics of Debris from LaserProduced Tin Plasma with Droplet Target for EUV Light Source (2008)
  • Author(s): D. Nakamura, T. Akiyama, A. Takahashi, T. Okada
  • Organizer: International Symposium on Laser Precision Microfabrication
  • Place of Presentation: Quebec, Canada
  • Year and Date: 2008-06-19
• [Presentation] Ablation Dynamics of Tin MicroDroplet Target used in LPP-Based EUV Light Source (2008)
  • Author(s): D. Nakamura, T. Akiyama, K. Tamaru, A. Takahashi, T. Okada
  • Organizer: International Workshop on EUV Lithography
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2008-06-16
• [Presentation] スズターゲットからのイオン・中性原子デブリダイナミクス計測 (2008)
  • Author(s): 中村大輔, 秋山智哉, 高橋昭彦, 岡田龍雄
  • Organizer: 文部科学省リーディングプロジェクト最終研究成果報告会
  • Place of Presentation: 東京
  • Year and Date: 2008-05-15
• [Presentation] ダブルパルス照射におけるスズドロップレットターゲットのアブレーション挙動計測 (2008)
  • Author(s): 中村大輔, 秋山智哉, 岡崎功太, 高橋昭彦, 岡田龍雄
  • Organizer: 応用物理学会学術講演会