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Development of High Performance Thin Film Encapsulation by VUV Photochemical Gel Conversion

Research Project

Project/Area Number 20K05317
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 29020:Thin film/surface and interfacial physical properties-related
Research InstitutionYamagata University

Principal Investigator

Yoshida (Sun) Lina  山形大学, 有機エレクトロニクスイノベーションセンター, 研究員 (30813555)

Project Period (FY) 2020-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2022: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2021: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2020: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
KeywordsPhotochemical conversion / gas barrier / solution process / VUV irradiation / Polydimethylsiloxane / perhydropolysilazane / metal oxide / thin film encapsulation / solution processing / SiN layer / WVTR / polymeric precursor / high gas barrier / thin film devices / amorphous TiOx films / Titanium(IV) alkoxides / Titanocene Dichloride / water vapor treatment / photochemical conversion / polydimethylsiloxane / metal oxide thin films / low temperature / VUV光照射 / 低温溶液プロセス / 塗布製膜 / 薄膜封止層 / ゲルコンバージョン
Outline of Research at the Start

軽く柔軟で、R2R製造による大幅な低コスト化が可能なフィルムデバイスを実用するための、高性能薄膜封止(Thin Film Encapsulation = TFE) の低温高速溶液プロセスとして、Vacuum Ultra Violet (VUV)光ゲルコンバージョン法を開発する。溶液中の有機金属原料の重合度、塗布条件制御によって前駆体ゲル膜を得、種々のセラミクス緻密連続薄膜に変換する手法を確立、さらに界面密着、VUV光照射条件による傾斜構造導入、柔軟な有機ポリマーとの交互積層による応力緩和で、多層TFEを有機デバイス上に直接形成し、その耐久性を実証する。

Outline of Final Research Achievements

This research has successfully developed a low temperature solution-processed high performance gas barrier thin-film using perhydropolysilazane (PHPS)-derived SiNy layers by VUV irradiation under N2. It was found that the density of SiNy layers increased with increasing VUV dose due to the formation of Si-N networks accompanied by removal of H2. The denser and the thicker the film, the higher its barrier performance became. However, cracks widened as the VUV irradiation dose and film thickness increased due to the internal strain caused by the volume shrinkage, eventually resulting in poor barrier performance. By optimizing the conditions with a film thickness of 200 nm and a VUV dose of 12 J/cm2, the best barrier properties in terms of WVTR value of 4.8×10-5 g/m2/day were achieved with a total layer thickness less than 1 um, thus making them suitable for use in flexible organic devices, as well as in other applications.

Academic Significance and Societal Importance of the Research Achievements

これらの研究成果には、国内外の論文や学会で発表され、2020年の薄膜材料デバイス研究会、2021年の第59回高分子と水に関する討論会(高分子学会)、2022年の第83回応用物理学会秋季学術講演会、国際会議IDW(The 29th International Display Workshops)では、奨励賞を受賞する等の高い評価を得た。この研究成果は、印刷で作った薄膜のバリアとしては世界最高性能であり、長期的にはエレクトロニクスデバイスのみならず、食品や医療などの包装分野でも応用が期待される。

Report

(4 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • Research Products

    (22 results)

All 2023 2022 2021 2020

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Open Access: 4 results) Presentation (18 results) (of which Int'l Joint Research: 6 results,  Invited: 5 results)

  • [Journal Article] Tuning of Morphological, Crystallographic and Optoelectronic Properties of CuSCN By Electrodeposition2023

    • Author(s)
      Kyota Uda, Yuki Tsuda, Tensho Nakamura, Lina Sun, Yoshiyuki Suzuri, Tsukasa Yoshida
    • Journal Title

      Applied Research

      Volume: e202200097 Issue: 5 Pages: 1-6

    • DOI

      10.1002/appl.202200097

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Solution‐Processed Gas Barriers with Glass‐Like Ultrahigh Barrier Performance2022

    • Author(s)
      Sasaki Tatsuki、Sun Lina、Kurosawa Yu、Takahashi Tatsuhiro、Suzuri Yoshiyuki
    • Journal Title

      Advanced Materials Interfaces

      Volume: 9 Issue: 34 Pages: 2201517-2201517

    • DOI

      10.1002/admi.202201517

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Nanometer-Thick SiN Films as Gas Barrier Coatings Densified by Vacuum UV Irradiation2021

    • Author(s)
      T. Sasaki, L. Sun, Y. Kurosawa, T. Takahashi and Y. Suzuri
    • Journal Title

      ACS Appl. Nano Mater.

      Volume: 4(10) Issue: 10 Pages: 10344-10353

    • DOI

      10.1021/acsanm.1c01862

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Photochemical Conversion of Ethanolamine-Zn2+ Complex Gel under Vacuum Ultraviolet Irradiation Associated with Color-Tunable Photoluminescence2021

    • Author(s)
      Sun Lina、Uda Kyota、Yoshida Tsukasa、Suzuri Yoshiyuki
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: 125 Issue: 9 Pages: 5417-5424

    • DOI

      10.1021/acs.jpcc.1c00318

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Solution processing of functional thin films and their device applications2023

    • Author(s)
      孫 麗娜
    • Organizer
      第90回電気化学会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] ガラス並みの高バリア性能を有する塗布型PHPSガスバリア膜2023

    • Author(s)
      佐々木 樹, 孫 麗娜, 黒澤 優, 高橋 辰宏, 硯里 善幸
    • Organizer
      映像情報メディア学会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Photochemical room temperature solution processing of functional thin films2022

    • Author(s)
      L. Sun, T. Sasaki, T. Takahashi, T. Yoshida, Y. Suzuri
    • Organizer
      E-MRS 2022 Falling Meeting, Warsaw, Poland
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Solution processing of functional thin films and their device applications2022

    • Author(s)
      孫 麗娜
    • Organizer
      2022化学系学協会東北大会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Solution-Processed Ultrahigh PHPS Gas Barriers with Glass-like Performance2022

    • Author(s)
      Tatsuki Sasaki, Lina Sun, Yu Kurosawa, Tatsuhiro Takahashi, Yoshiyuki Suzuri
    • Organizer
      The 29th International Display Workshops(IDW’22)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ガラス並みの高バリア性能を有する塗布型PHPSバリア膜2022

    • Author(s)
      佐々木 樹, 孫 麗娜, 黒澤 優, 高橋 辰宏, 硯里 善幸
    • Organizer
      第35回例会有機EL討論会
    • Related Report
      2022 Annual Research Report
  • [Presentation] ガラス並みの高バリア性能を有する塗布型 PHPS バリア膜の開発2022

    • Author(s)
      佐々木 樹, 孫 麗娜, 黒澤 優, 高橋 辰宏, 硯里 善幸
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] チタノセン塩化物の光化学分解による酸化チタン薄膜合成2021

    • Author(s)
      長岡歩、宇田恭太、孫麗娜、硯里善幸、吉田司
    • Organizer
      2021 年電気化学会 東海支部-東北支部合同シンポジウム
    • Related Report
      2021 Research-status Report
  • [Presentation] 塗布型 PHPS 水蒸気バリア膜における VUV 光焼成緻密化プロセスの解明2021

    • Author(s)
      佐々木 樹, 孫 麗娜, 黒澤 優, 高橋 辰宏, 硯里 善幸
    • Organizer
      第59回高分子と水に関する討論会(高分子学会)
    • Related Report
      2021 Research-status Report
  • [Presentation] Photochemical Gel Conversion of Titanocene Dichloride Precursor Layers to Titanium Oxide Thin films2021

    • Author(s)
      Ayumu Nagaoka, Kyota Uda, Lina Sun, Yoshiyuki Suzuri, Tsukasa Yoshida
    • Organizer
      2021 The 4DMS+SoRo International Summer School
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Tuning of Morphological, Crystallographic and Optoelectronic Properties in Electrodeposition of CuSCN for Device Applications2021

    • Author(s)
      K. Uda, Y. Tsuda, T. Nakamura, L. Sun, Y. Suzuri, and T. Yoshida
    • Organizer
      First International Conference on Technologies for Smart Green Connected Society 2021 (ICTSGs-1)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Photochemical conversion of ethanolamine-Zn2+ complex gel under vacuum ultraviolet irradiation associated with color tunable photoluminescence2021

    • Author(s)
      Sun Lina、Uda Kyota、Yoshida Tsukasa、Suzuri Yoshiyuki
    • Organizer
      2021年電気化学会第88回大会
    • Related Report
      2020 Research-status Report
  • [Presentation] 塗布型PHPS薄膜におけるVUV光焼成緻密化プロセスの解明2020

    • Author(s)
      佐々木 樹, 上村 佳歩, 孫 麗娜, 高橋 辰宏, 硯里 善幸
    • Organizer
      2020年第31回有機EL討論会
    • Related Report
      2020 Research-status Report
  • [Presentation] OLED素子上へのウェットプロセスによるハイバリア構造の開発2020

    • Author(s)
      孫麗娜, 佐々木 樹, 上村 佳歩, 高橋 辰宏, 硯里 善幸
    • Organizer
      薄膜材料デバイス研究会第17回研究会
    • Related Report
      2020 Research-status Report
    • Invited
  • [Presentation] Photoluminescent ZnO Thin Films by Photochemical Gel Conversion under VUV irradiation2020

    • Author(s)
      Sun Lina、Uda Kyota、Yoshida Tsukasa、Suzuri Yoshiyuki
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid State Science (PRiME) 2020 of the Electrochemical Society (ECS)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Tuning of Morphological, Crystallographic and Optoelectronic Properties of Cuscn By Electrodeposition2020

    • Author(s)
      K. Uda, Y. Tsuda, T. Nakamura, L. Sun, Y. Suzuri, and T. Yoshida
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid State Science (PRiME) 2020 of the Electrochemical Society (ECS)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Highly luminescent ZnO Thin Films Obtained by VUV-assisted Sol-Gel Processing2020

    • Author(s)
      Sun Lina、Uda Kyota、Yoshida Tsukasa、Suzuri Yoshiyuki
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 塗布型・高バリア性PHPS薄膜におけるVUV光焼成プロセスの解明2020

    • Author(s)
      佐々木 樹, 上村 佳歩, 孫 麗娜, 高橋 辰宏, 硯里 善幸
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report

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Published: 2020-04-28   Modified: 2024-01-30  

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