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Demonstration of innovative Germanium optoelectronic devices and developments of simulation technologies

Research Project

Project/Area Number 21246003
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTokyo City University

Principal Investigator

SHIRAKI Yasuhiro  東京都市大学, 総合研究所, 教授 (00206286)

Co-Investigator(Kenkyū-buntansha) MARUIZUMI Takuya  東京都市大学, 工学部, 教授 (00398893)
NOHIRA Hiroshi  東京都市大学, 工学部, 教授 (30241110)
SAWANO Kentarou  東京都市大学, 工学部, 准教授 (90409376)
SETO Kenshu  東京都市大学, 工学部, 講師 (10420241)
XU Xuejun  東京都市大学, 総合研究所, 研究員 (80593334)
XIA Jinsong  東京都市大学, 総合研究所, 助手 (00434184)
Co-Investigator(Renkei-kenkyūsha) NAKAGAWA Kitokazu  山梨大学, 医学工学総合研究部, 教授 (40324181)
MATSUI Toshiaki  独立行政法人情報通信研究機構, 専攻研究員 (20358922)
MIYATA Noriyuki  独立行政法人産業技術総合研究所, エレクトロニクス研究部門, 主任研究員 (40358130)
USAMI Noritaka  東北大学, 金属材料研究所, 准教授 (20262107)
Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥40,820,000 (Direct Cost: ¥31,400,000、Indirect Cost: ¥9,420,000)
Fiscal Year 2012: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2011: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
Fiscal Year 2010: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2009: ¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
Keywordsゲルマニウム / 量子ドット / フォトニック結晶 / シミュレーション / 歪み / 微小共振器 / 導波路 / 光電子融合デバイス / マイクロディスク / 高誘電率絶縁膜
Research Abstract

We established essential technologies for realization of Ge optoelectronic devices on the Si platform, which are promising innovative devices with high performances and low power consumption toward next-generation LSI (Large Scale Integration), along with simulation technologies. We succeeded in formation of novel strained Ge channel structures and strained Ge-on-Insulator, room-temperature strong electroluminescence from photonic crystal and microdisk maicrocavities with Ge quantum dots and their coupling with optical waveguide.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (147 results)

All 2013 2012 2011 2010 2009 Other

All Journal Article (63 results) (of which Peer Reviewed: 61 results) Presentation (79 results) (of which Invited: 1 results) Book (4 results) Remarks (1 results)

  • [Journal Article] Enhancement of light emission from Ge quantum dots by photonic crystal nanocavities at room-temperature2013

    • Author(s)
      Xuejun Xu
    • Journal Title

      Journal of Crystal Growth

      Volume: - Pages: 636-639

    • DOI

      10.1016/j.jcrysgro.2012.11.002

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stable position of a B12 cluster near the Si surface and its STM images2013

    • Author(s)
      Shunsuke Ito
    • Journal Title

      Electronic and Communications in Japan

      Volume: 96 Issue: 2 Pages: 50-56

    • DOI

      10.1002/ecj.10405

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Surface segregation behavior of B, Ga, Sb, and As dopant atoms on Ge(100) and Ge(111) examined with a first-principles method2013

    • Author(s)
      F.Iijima
    • Journal Title

      J. Physics:Conf, Series

      Volume: 417 Pages: 12008-12008

    • DOI

      10.1088/1742-6596/417/1/012008

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] On the origin of the uniaxial strain induced in Si/Ge heterostructures with selective ion implantation technique2013

    • Author(s)
      K. Sawano
    • Journal Title

      Journal of Crystal Growth

      Volume: - Pages: 251-253

    • DOI

      10.1016/j.jcrysgro.2012.12.100

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Tensilely Strained Germanium- on- Insulator2012

    • Author(s)
      Yusuke Hoshi, Kentarou Sawano, Kohei Hamaya
    • Journal Title

      Masanobu Miyao, and Yasuhiro Shiraki Applied Physics Express

      Volume: 5 Issue: 1 Pages: 15701-15701

    • DOI

      10.1143/apex.5.015701

    • NAID

      10030155011

    • Related Report
      2012 Annual Research Report 2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Upper limit of two-dimensional hole gas mobility in strained Ge/SiGe Heterostructures2012

    • Author(s)
      T. Tanaka, Y. Hoshi, K. Sawano, N. Usami, Y. Shiraki, and K. M. Itoh
    • Journal Title

      Appl. Phys. Lett.

      Volume: 100 Issue: 22 Pages: 222102-222102

    • DOI

      10.1063/1.4723690

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Acceptor-Like States in SiGe Alloy Related to Point Defects Induced by Si+ Ion Implantation2012

    • Author(s)
      Motoki Satoh, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, and Yasuhiro Shiraki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 10R Pages: 105801-105801

    • DOI

      10.1143/jjap.51.105801

    • NAID

      210000141389

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Silicon-based current-injected light emitting diodes with Ge self-assembled quantum dots embedded in photonic crystal nanocavities2012

    • Author(s)
      Xuejun Xu, Toshiki Tsuboi, Taichi Chiba, Noritaka Usami, Takuya Maruizumi, and Yasuhiro Shiraki
    • Journal Title

      Optics Express

      Volume: 20(13) Issue: 13 Pages: 14714-14721

    • DOI

      10.1364/oe.20.014714

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Silicon-based light emitting devices based on Ge self-assembled quantum dots embedded in optical cavity2012

    • Author(s)
      Xuejun Xu, Sho Narusawa, Taichi Chiba, Toshiki Tsuboi, Jinsong Xia, Noritaka Usami, Takuya Maruizumi, and Yasuhiro Shiraki
    • Journal Title

      IEEE Journal of Selected Topics inQuantum Electronics

      Volume: 18(6) Issue: 6 Pages: 1830-1838

    • DOI

      10.1109/jstqe.2012.2206802

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Room temperature electroluminescence from Ge quantum dots embedded in photonic crystal microcavities2012

    • Author(s)
      Toshiki Tsuboi, Xuejun Xu, Jinsong Xia,Noritaka Usami, Takuya Maruizumi, andYasuhiro Shiraki
    • Journal Title

      Applied Physics Express

      Volume: 5 Issue: 5 Pages: 052101-052101

    • DOI

      10.1143/apex.5.052101

    • NAID

      10030593466

    • Related Report
      2012 Annual Research Report 2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-quality-factor light-emitting diodes with modified photonic crystal nanocavities including Ge self-assembled quantum dots on silicon-on-insulator substrates2012

    • Author(s)
      Xuejun Xu, Taichi Chiba, Tatsuya Nakama, Takuya Maruizumi, and Yasuhiro Shiraki
    • Journal Title

      Applied Physics Express

      Volume: 5 Issue: 10 Pages: 102101-102101

    • DOI

      10.1143/apex.5.102101

    • NAID

      10031117543

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electroluminescence from micro-cavities of photonic crystals, micro-disks and rings including Ge dots formed on SOI substrates2012

    • Author(s)
      Y. Shiraki
    • Journal Title

      ECS Transactions

      Volume: 45(5) Issue: 5 Pages: 235-246

    • DOI

      10.1149/1.3700432

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Angle-Resolved PES Studies on Transition Layers at SiO2/SiC Interfaces2012

    • Author(s)
      Hazuki Okada
    • Journal Title

      ECS Transactions

      Volume: 50(3) Issue: 3 Pages: 243-250

    • DOI

      10.1149/05003.0243ecst

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Valence number transition and silicate formation of cerium oxide films on Si(100)2012

    • Author(s)
      M. Mamatrishat
    • Journal Title

      Vacuum

      Volume: 86(10) Issue: 10 Pages: 1513-1516

    • DOI

      10.1016/j.vacuum.2012.02.050

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Uniaxially Strained Si/Ge Channels on SiGe Buffers Strain-controlled with Selective Ion Implantation2012

    • Author(s)
      K. Sawano
    • Journal Title

      ECS Transactions

      Volume: 50(9) Issue: 9 Pages: 815-820

    • DOI

      10.1149/05009.0815ecst

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Experimental and theoretical analysis of the temperature dependence of the two-dimensional electron mobility in a strained Si quantum well2012

    • Author(s)
      Takahisa Tanaka
    • Journal Title

      Journal of Applied Physics

      Volume: 111 Issue: 7 Pages: 73715-73715

    • DOI

      10.1063/1.3702464

    • Related Report
      2012 Annual Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Room-Temperature Observation of Size Effects in Photoluminescence of Si0.8Ge0.2/Si Nanocolumns Prepared by Neutral Beam Etching2012

    • Author(s)
      Rii Hirano
    • Journal Title

      Applied Physics Express

      Volume: 5 Issue: 8 Pages: 82004-82004

    • DOI

      10.1143/apex.5.082004

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-plane magnetic field dependence of cyclotron relaxation time in a Si two-dimensional electron system2012

    • Author(s)
      T. Chiba, R. Masutomi, K. Sawano, Y. Shiraki, and T. Okamoto
    • Journal Title

      Physical Review B

      Volume: 86 Issue: 4 Pages: 45310-45310

    • DOI

      10.1103/physrevb.86.045310

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Line width dependence of anisotropic strain state in SiGe films induced by selective ion implantation2011

    • Author(s)
      Y. Hoshi, K. Sawano, A. Yamada, S. Nagakura, N. Usami, K. Arimoto, K. Nakagawa, and Y. Shiraki
    • Journal Title

      Applied Physics Express

      Volume: 4 Pages: 95701-95701

    • NAID

      10029622735

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Metallic Behavior of Cyclotron Relaxation Time in Two-Dimensional Systems2011

    • Author(s)
      R. Masutomi, K. Sasaki, I. Yasuda, A. Sekine, K. Sawano, Y. Shiraki, and T. Okamoto
    • Journal Title

      Physical Review Letters

      Volume: 106 Issue: 19 Pages: 196404-196404

    • DOI

      10.1103/physrevlett.106.196404

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical detection of cross relaxation between electron spins of phosphorus and oxygen-vacancy centers in silicon2011

    • Author(s)
      W.Akhtar, H.Morishita, K.Sawano, Y.Shiraki, L.S.Vlasenko, K.M.Itoh
    • Journal Title

      Physical Review B

      Volume: 84 Issue: 4 Pages: 45204-45204

    • DOI

      10.1103/physrevb.84.045204

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-diffusion in compressively strained Ge2011

    • Author(s)
      Yoko Kawamura, Masashi Uematsu, Yusuke Hoshi, Kentarou Sawano, Maksym Myronov, Yasuhiro Shiraki, Eugene E.Haller, Kohei M.Itoh
    • Journal Title

      Journal of Applied Physics

      Volume: 110 Issue: 1

    • DOI

      10.1115/1.4004462

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Line width dependence of anisotropic strain state in SiGe films induced by selective ion implantation2011

    • Author(s)
      Y.Hoshi, K.Sawano, A.Yamada, S.Nagakura, N.Usami, K.Arimoto, K.Nakagawa, Y.Shiraki
    • Journal Title

      Applied Physics Express

      Volume: 4 Issue: 9 Pages: 095701-095701

    • DOI

      10.1143/apex.4.095701

    • NAID

      10029622735

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Various Surface Treatments on Chemical Bonding State at La_2O_3/In_<0.53>Ga_<0.47>As and on In_<0.53>Ga_<0.47>As Surface2011

    • Author(s)
      Koji Yamashita, Arata Komatsu, Masato Watanabe, Yuuya Numajiri, Darius Zade, Kuniyuki Kakushima, Hiroshi Iwai, Hiroshi Nohira
    • Journal Title

      Electrochemical Society Inc., ECS Transactions

      Volume: 41 Pages: 265-272

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of High-κ/In_<0.53>Ga_<0.47>As Interface by Hard X-ray Photoemission Spectroscopy2011

    • Author(s)
      Koji Yamashita, Yuuya Numajiri, Masato Watanabe, Kuniyuki Kakushima, Hiroshi Iwai, Hiroshi Nohira
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50 Issue: 10S Pages: 10PD02-10PD02

    • DOI

      10.1143/jjap.50.10pd02

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ハフニウム酸化物への元素添効果2011

    • Author(s)
      中山利紀、川崎裕、丸泉琢也
    • Journal Title

      信学技報

      Volume: 111 Pages: 75-80

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Si表面近傍におけるボロンクラスタの安定位置とそのSTM像2011

    • Author(s)
      伊藤俊祐、丸泉琢也、諏訪雄二
    • Journal Title

      電気学会論文誌(A編)

      Volume: 131 Pages: 478-483

    • NAID

      10030522265

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Linewidth of Low-Field Electrically Detected Magnetic Resonance of Phosphorus in Isotopically Controlled Silicon2011

    • Author(s)
      Hiroki Morishita, Eisuke Abe, Waseem Akhtar, Leonid S.Vlasenko, Akira Fujimoto, Kentarou Sawano, Yasuhiro Shiraki, Lukas Dreher, Helge Riemann, Nikolai V.Abrosimov, Peter Becker, Hans-J.Pohl, Mike L.W.Thewalt, Martin S.Brandt, Kohei M.Itoh
    • Journal Title

      Applied Physics Express

      Volume: 4

    • NAID

      10027782881

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Aluminum oxide for an effective gate in Si/SiGe two-dimensional electron gas systems2011

    • Author(s)
      Yun-Sok Shin, Roland Brunner, Akihiro Shibatomi, Toshiaki Obata, Tomohiro Otsuka, Jun Yoneda, Yasuhiro Shiraki, Kentarou Sawano, Yasuhiro Tokura, Yuichi Harada, Koji Ishibashi, Seigo Tarucha
    • Journal Title

      Semiconductor Science and Technology

      Volume: 26

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of increased compressive strain on hole effective mass and scattering mechanisms in strained Ge channels2011

    • Author(s)
      K.Sawano, K.Toyama, R.Masutomi, T.Okamoto, K.Arimoto, K.Nakagawa, N.Usami, Y.Shiraki
    • Journal Title

      Microelectronic Engineering

      Volume: 88 Pages: 465-468

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Uniaxially Strained SiGe by Selective Ion Implantation Technique2010

    • Author(s)
      Kentarou Sawano, Yusuke Hoshi, AtsunoriYamada, Yoshiyasu Hiraoka, Noritaka Usami, Keisuke Arimoto, Kiyokazu Nakagawa, and Yasuhiro Shiraki
    • Journal Title

      Thin Solid Films

      Volume: 518 Pages: 2454-2454

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ultrashallow Ohmic contacts for n-type Ge by Sb --doping2010

    • Author(s)
      K. Sawano, Y. Hoshi, K. Kasahara, K. Yamane, K. Hamaya, M. Miyao, and Y. Shiraki
    • Journal Title

      Appl. Phys. Lett.

      Volume: 97 Pages: 162108-162108

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Room-temperature electroluminescence from Si microdisks with Ge quantum dots2010

    • Author(s)
      J. Xia, Y. Takeda, N. Usami, T. Maruizumi, and Y. Shiraki
    • Journal Title

      Optics Express

      Volume: 18 Pages: 13945-13950

    • Related Report
      2012 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ion dose, energy, and species dependencies of strain relaxation of SiGe buffer layers fabricated by ion implantation technique2010

    • Author(s)
      Y. Hoshi, K. Sawano, A. Yamada, N. Usami,K. Arimoto, K. Nakagawa, and Y. Shiraki
    • Journal Title

      J. Appl. Phys.

      Volume: 107 Pages: 103509-103509

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Stable position of B_<12> Cluster Near Si(001) Surface and Its STM images2010

    • Author(s)
      T.Maruizumi, S.Ito
    • Journal Title

      ECS Transactions

      Volume: 33 Pages: 253-274

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of dislocation accumulation in ULSI cells of reduced gate length2010

    • Author(s)
      M.Sato, T.Ohashi, K.Aikawa, T.Maruizumi, I.Kitgawa
    • Journal Title

      Materials Science Forum

      Volume: 654-656 Pages: 1682-1685

    • NAID

      120004226665

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultrashallow Ohmic contacts for n-type Ge by Sb δ-doping2010

    • Author(s)
      K.Sawano, Y Hoshi, K.Kasahara, K.Yamane, K.Hamaya, M.Miyao, Y.Shiraki
    • Journal Title

      Applied Physics Letters

      Volume: 97

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quantum Transport and Cyclotron Resonance Study of Ge/SiGe Quantum Wells in High Magnetic Fields2010

    • Author(s)
      N.Miura, N.V.Kozlova, K.Dorr, J.Freudenberger, L.Schultz, O.Drachenko, K.Sawano, Y Shiraki
    • Journal Title

      Journal of Low Temperature Physics

      Volume: 159 Pages: 222-225

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Landau level crossing and pseudospin phase transitions in Si quantum wells2010

    • Author(s)
      Kohei Sasaki, Ryuichi Masutomi, Kiyohiko Toyama, Kentarou Sawano, Yasuhiro Shiraki, Tohru Okamoto
    • Journal Title

      Physica E : Low-dimensional Systems and Nanostructures

      Volume: 42 Pages: 1018-1021

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Cyclotron resonance of two-dimensional electrons in a Si quantum well2010

    • Author(s)
      R.Masutomi, A.Sekine, K.Sasaki, K.Sawano, Y.Shiraki, T.Okamoto
    • Journal Title

      Physica E : Low-dimensional Systems and Nanostructures

      Volume: 42 Pages: 1184-1187

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical anisotropies of Si grown on step-graded SiGe(110) layers2010

    • Author(s)
      R.E.Balderas-Navarro, L.F.Lastras-Martinez, K.Arimoto, R.Castro-Garcia, O.Villalobos-Aguilar, A.Lastras-Martinez, K.Nakagawa, K.Sawano, Y.Shiraki, N.Usami, K.Nakajima
    • Journal Title

      Applied Physics Letters

      Volume: 96

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ion dose, energy, and species dependencies of strain relaxation of SiGe buffer layers fabricated by ion implantation technique2010

    • Author(s)
      Y.Hoshi, K.Sawano, A.Yamada, N.Usami, K.Arimoto, K.Nakagawa, Y.Shiraki
    • Journal Title

      Journal of Applied Physics

      Volume: 107

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparison of Nonlocal and Local Magnetoresistance Signals in Laterally Fabricated Fe3Si/Si Spin-Valye Devices2010

    • Author(s)
      Yuichiro Ando, Kenji Kasahara, Kazutaka Yamane, Kohei Hamaya, Kentarou Sawano, Takashi Kimura, Masanobu Miyao
    • Journal Title

      Applied Physics Express

      Volume: 3

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Excitonic Aharonov-Bohm effect in isotopically pure 70GeO Si self-assembled type-II quantum dots2010

    • Author(s)
      Satoru Miyamoto, Oussama Moutanabbir, Toyofumi Ishikawa, Mikio Eto, Eugene E.Haller, Kentarou Sawano, Yasuhiro Shiraki, Kohei M.Itoh
    • Journal Title

      Physical Review B

      Volume: 82

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of HfO_2/Si/Strained-Ge/SiGe Using Angle Resolved X-ray Photoelectron Spectroscopy2010

    • Author(s)
      Arata Komatsu, Kentarou Nasu, Yusuke Hoshi, Toru Kurebayashi, Kentarou Sawano, Maksym Myronov, Hiroshi Nohira, Yasuhiro Shiraki
    • Journal Title

      ECS Transaction

      Volume: 33 Pages: 467-472

    • NAID

      110008900164

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ion energy and dose dependence of strain relaxation for thin SiGe buffer layers using Si+ implantation2010

    • Author(s)
      Y.Hoshi, K.Sawano, A.Yamada, K.Arimoto, N.Usami, K.Nakagawa, Y.Shiraki
    • Journal Title

      Thin Solid Films 518

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Uniaxially Strained SiGe by Selective Ion Implantation Technique2010

    • Author(s)
      Kentarou Sawano, Yusuke Hoshi, Atsunori Yamada, Yoshiyasu Hiraoka, Noritaka Usami, Keisuke Arimoto, Kiyokazu Nakagawa, Yasuhiro Shiraki
    • Journal Title

      Thin Solid Films 518

      Pages: 2454-2456

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Local Control of Strain in SiGe by IonImplantation Technique2009

    • Author(s)
      K. Sawano, Y. Hoshi, Y. Hiraoka, N. Usami , K. Nakagawa, Y. Shiraki
    • Journal Title

      Journal of Crystal Growth

      Volume: 311 Pages: 806-808

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Strain dependence of hole effective mass and scattering mechanism in strained Ge channel structures2009

    • Author(s)
      K. Sawano, K. Toyama, R. Masutomi, T. Okamoto, N. Usami, K. Arimoto, K. Nakagawa, and Y. Shiraki
    • Journal Title

      Appl. Phys. Lett.

      Volume: 95 Pages: 122109-122109

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Local Control of Strain in SiGe by Ion Implantation Technique2009

    • Author(s)
      K.Sawano, Y.Hoshi, Y.Hiraoka, N.Usami, K.Nakagawa, Y.Shiraki
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 806-808

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain dependence of hole effective mass and scattering mechanism in strained Ge channel structures2009

    • Author(s)
      K.Sawano, K.Toyama, R.Masutomi, T.Okamoto, N.Usami, K.Arimoto, K.Nakagawa, Y.Shiraki
    • Journal Title

      Applied Physics Letters 95

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of thin strain-relaxed SiGe buffer layers with high Ge composition by ion implantation method2009

    • Author(s)
      Y.Hoshi, K.Sawano, Y.Hiraoka, Y.Sato, Y.Ogawa, A.Yamada, N.Usami, K.Nakagawa, Y.Shiraki
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 825-828

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain relaxation mechanisms in step-graded SiGe/Si(110) heterostructures grown by gas-source MBE at high temperatures2009

    • Author(s)
      Keisuke Arimoto, Masato Watanabe, Junji Yamanaka, Kiyokazu Nakagawa, Noritaka Usami, Kazuo Nakajima, Kentarou Sawano, Yasuhiro Shiraki
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 819-824

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystalline morphologies of step-graded SiGe layers grown on exact and vicinal (110) Si substrates2009

    • Author(s)
      Keisuke Arimoto, Masato Watanabe, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Noritaka Usami, Kazuo Nakajima
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 809-813

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural and transport properties of strained SiGe grown on V-groove patterned Si(110) substrates2009

    • Author(s)
      Keisuke Arimoto, Genki Kawaguchi, Kana Shimizu, Masato Watanabe, Junji Yamanaka, Kiyokazu Nakagawa, Noritaka Usami, Kazuo Nakajima, Kentarou Sawano, Yasuhiro Shiraki
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 814-818

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical injection and detection of spin-polarized electrons in silicon through an Fe3Si/Si Schottky tunnel barrier2009

    • Author(s)
      Y.Ando, K.Hamaya, K.Kasahara, Y.Kishi, K.Ueda, K.Sawano, T.Sadoh, M.Miyao
    • Journal Title

      Applied Physics Letters 94

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Insulating phases induced by crossing of partially filled Landau levels in a Si quantum well2009

    • Author(s)
      Tohru Okamoto, Kohei Sasaki, Kiyohiko Toyama, Ryuichi Masutomi, Kentarou Sawano, Yasuhiro Shiraki
    • Journal Title

      Physical Review B 79

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain relaxation mechanisms in compositionally uniform and step-graded SiGe films grown on Si(110) substrates2009

    • Author(s)
      Keisuke Arimoto, Masato Watanabe, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Noritaka Usami, Kazuo Nakajima
    • Journal Title

      Solid-State Electronics 53

      Pages: 1135-1143

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Probing the Behaviors of Point Defects in Silicon and Germanium Using Isotope Superlattices2009

    • Author(s)
      Masashi Uematsu, Miki Naganawa, Yasuo Shimizu, Kohei M.Itoh, Kentarou Sawano, Yasuhiro Shiraki, Eugene E.Haller
    • Journal Title

      ECS Transaction 25

      Pages: 51-54

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Well-width dependence of valley splitting in Si/SiGe quantum wells2009

    • Author(s)
      Kohei Sasaki, Ryuichi Masutomi, Kiyohiko Toyama, Kentarou Sawano, Yasuhiro Shiraki, Tohru Okamoto
    • Journal Title

      Applied Physics Letters 95

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical detection and magnetic-field control of spin states in phosphorus-doped silicon2009

    • Author(s)
      H.Morishita, L.S.Vlasenko, H.Tanaka, K.Semba, K.Sawano, Y.Shiraki, M.Eto, K.M.Itoh
    • Journal Title

      Physical Review B 80

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 不純物がドープされたULSIセルに生じる転位の結晶塑性解析2009

    • Author(s)
      佐藤満弘、大橋鉄也、丸泉琢也、北川功
    • Journal Title

      日本機械学会論文集(A編) 75

      Pages: 1057-1062

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Generation and Wavelength Control of Resonant Luminescence from Silicon Photonic Crystal Microcavities with Ge Dots2009

    • Author(s)
      Jinsong Xia, Ryuichiro Tominaga, Seiji Fukamitsu, Noritaka Usami, Yasuhiro Shiraki
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      40016464751

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] On the origin of the uniaxial strain induced in Si/Ge heterostructures with selective ion implantation technique2012

    • Author(s)
      K. Sawano
    • Organizer
      The 17th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-09-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Electroluminescence from micro- cavities of photonic crystals, micro- disks and rings including Ge dots formed on SOI substrates2012

    • Author(s)
      Yasuhiro Shiraki
    • Organizer
      Invited221st ECS Meeting
    • Place of Presentation
      Seattle, Washington, USA
    • Related Report
      2012 Final Research Report
  • [Presentation] Room-temperature photonic crystal nanocavity light emitting diodes based on Ge self-assembled quantum dots2012

    • Author(s)
      Xuejun Xu
    • Organizer
      2012 IEEE International Electron Devices Meeting (IEDM)
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2012 Final Research Report
  • [Presentation] Room-temperature photonic crystal nanocavity light emitting diodes based on Ge self-assembled quantum dots2012

    • Author(s)
      Xuejun Xu
    • Organizer
      2012 IEEE International Electron Devices Meeting (IEDM)
    • Place of Presentation
      San Francisco, US
    • Related Report
      2012 Annual Research Report
  • [Presentation] Combination of Ge self-assembled quantum dots and photonic crystal for silicon photonic devices2012

    • Author(s)
      Xuejun Xu
    • Organizer
      The 5th International Photonics and OptoElectronics Meetings (POEM 2012)
    • Place of Presentation
      Wuhan, China
    • Related Report
      2012 Annual Research Report
  • [Presentation] Room temperature 1.55 μm electroluminescence from Ge quantum dots embedded in H1-type photonic crystal nanocavities using lateral current injection2012

    • Author(s)
      Xuejun Xu
    • Organizer
      2012 International Conference on Solid State Devices and Materials (SSDM 2012)
    • Place of Presentation
      Kyoto
    • Related Report
      2012 Annual Research Report
  • [Presentation] Enhancement of light emission from Ge quantum dots by photonic crystal nanocavities at room temperature2012

    • Author(s)
      Xuejun Xu
    • Organizer
      The 17th International Conference on Molecular Beam Epitaxy (MBE2012)
    • Place of Presentation
      Nara
    • Related Report
      2012 Annual Research Report
  • [Presentation] Lateral PIN current-injected photonic crystal nanocavity light emitting diodes based on Ge quantum dots2012

    • Author(s)
      Xuejun Xu
    • Organizer
      The 9th IEEE International Conference on Group IV Photonics (GFP)
    • Place of Presentation
      San Diego, US
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electroluminescence from micro-cavities of photonic crystals, micro-disks and rings including Ge dots formed on SOI substrates2012

    • Author(s)
      Yasuhiro Shiraki
    • Organizer
      221st ECS Meeting
    • Place of Presentation
      Seattle, Washington, US
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Angle-Resolved XPS Studies on Transition Layers at SiO2/SiC Interfaces2012

    • Author(s)
      Hazuki Okada
    • Organizer
      222nd Meeting of The Electrochemical Society (PRiME 2012)
    • Place of Presentation
      Honolulu, HI, US
    • Related Report
      2012 Annual Research Report
  • [Presentation] On the origin of the uniaxial strain induced in Si/Ge heterostructures with selective ion implantation technique2012

    • Author(s)
      K. Sawano
    • Organizer
      The 17th International Conference on Molecular Beam Epitaxy (MBE2012)
    • Place of Presentation
      Nara
    • Related Report
      2012 Annual Research Report
  • [Presentation] Formation of high-quality Ge(111) layers on Si (111) substrates2012

    • Author(s)
      Y. Hoshi
    • Organizer
      The 17th International Conference on Molecular Beam Epitaxy (MBE2012)
    • Place of Presentation
      Nara
    • Related Report
      2012 Annual Research Report
  • [Presentation] Formation of Uniaxially Strained Si/Ge Channels on SiGe Buffers Strain-controlled with Selective Ion Implantation2012

    • Author(s)
      K. Sawano
    • Organizer
      222nd Meeting of The Electrochemical Society (PRiME 2012)
    • Place of Presentation
      Honolulu, HI, US
    • Related Report
      2012 Annual Research Report
  • [Presentation] Magnetotransport properties of 20-nm-thick strained Ge with various compressive stresses2012

    • Author(s)
      Y. Hoshi
    • Organizer
      2012 International Conference on Solid State Devices and Materials (SSDM 2012)
    • Place of Presentation
      Kyoto
    • Related Report
      2012 Annual Research Report
  • [Presentation] Surface segregation behavior of B, Ga, Sb, and As dopant atoms on Ge(100) and Ge(111) examined with a first-principles method2011

    • Author(s)
      F.Iijima, K.Sawano, T.Maruizumi, Y.Shiraki
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ、京都
    • Year and Date
      2011-11-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ion Implantation for Strain Engineering of Si-based Semiconductor2011

    • Author(s)
      Kentarou Sawano
    • Organizer
      Invited BIT's 1st Annual World Congress ofNano-S&T 2011
    • Place of Presentation
      Dalian, China
    • Year and Date
      2011-10-26
    • Related Report
      2012 Final Research Report
  • [Presentation] XPS Study on Chemical Bonding States of high-kappa/high-k Gate Stacks for Advanced CMOS2011

    • Author(s)
      Hiroshi Nohira
    • Organizer
      Invited220th Meeting of The ElectrochemicalSociety
    • Place of Presentation
      Boston, USA
    • Year and Date
      2011-10-11
    • Related Report
      2012 Final Research Report
  • [Presentation] XPS Study on Chemical Bonding States of high-kappa/high-k Gate Stacks for Advanced CMOS2011

    • Author(s)
      Hiroshi Nohira, Arata Komatsu, Koji Yamashita, Kuniyuki Kakushima, Hiroshi Iwai, Yusuke Hoshi, Kentarou Sawano, Yasuhiro Shiraki
    • Organizer
      220th Meeting of The Electrochemical Society
    • Place of Presentation
      Boston, MA, USA(招待講演)
    • Year and Date
      2011-10-11
    • Related Report
      2011 Annual Research Report
  • [Presentation] Surface segregation behavior of Sb, B, Ga, and As dopant atoms on Ge(100) and Ge(111) surface examined with afirst-principles method2011

    • Author(s)
      T. Maruizumi
    • Organizer
      7th International Conference on Si Epitaxy and Heterostructures
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2011-08-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Surface segregation behavior of Sb, B, Ga, and As dopant atoms on Ge(100) and Ge(111) surface examined with a first-principles method2011

    • Author(s)
      T.Maruizumi, Jiro Ushio, Shotaro Abe, Kentarou Sawano, Yasuhiro Shiraki
    • Organizer
      7th International Conference on Si Epitaxy and Heterostructures
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] A novel RCE waveguide photodetector based on SiGe/Si multiple-QWs2011

    • Author(s)
      Xuejun Xu, Jinsong Xia, Takuya Maruizumi, Yasuhiro Shiraki
    • Organizer
      7th International Conference on Si Epitaxy and Heterostructures
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2011-08-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Room temperature electroluminescence from Ge quantum dots embedded in photonic crystal microcavity2011

    • Author(s)
      Toshiki Tsuboi, Jinsong Xia, Xuejun Xu, Yuuki Takeda, Noritaka Usami, Takuya Maruizumi, Yasuhiro Shiraki
    • Organizer
      7th International Conference on Si Epitaxy and Heterostructures
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2011-08-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of strained thin-film GOT based on wafer bonding2011

    • Author(s)
      Yusuke Hoshi, Kentarou Sawano, Kohei Hamaya, Masanobu Miyao, Yasuhiro Shiraki
    • Organizer
      7th International Conference on Si Epitaxy and Heterostructures
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2011-08-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Microstructure Change of Si0.99C0.01 Thin Films Caused by Arsenic-Ion-, Boron-Ion-, and Silicon-Ion-Implantation and Successive Rapid Thermal Annealing Treatment2011

    • Author(s)
      Shigenori Inoue, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa Kentarou Sawano, Yasuhiro Shiraki, Atsushi Moriya, Yasuhiro Inokuchi, Yasuo Kunii
    • Organizer
      7th International Conference on Si Epitaxy and Heterostructures
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2011-08-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Temperature dependence of two-dimensional hole gas mobility in a strained Ge quantum well2011

    • Author(s)
      T.Tanaka, K.Sawano, Y.Hoshi, Y.Shiraki, K.M.Itoh
    • Organizer
      The 19th international conference on Electronic Properties of Two-Dimensional Systems (EP2DS19)
    • Place of Presentation
      Florida, USA
    • Year and Date
      2011-07-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Surface segregation behavior of Sb, B, and As dopant atoms on Ge(111) surface2011

    • Author(s)
      T. Maruizumi
    • Organizer
      E-MRS 2011 Spring & Bilateral Meeting
    • Place of Presentation
      Nice, France
    • Year and Date
      2011-05-10
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] Electroluminescence of a Si-based light emitting device using photonic crystal microcavity with self-assembled Ge dots2011

    • Author(s)
      T.Tsuboi, J.S.Xia, X.Xu, N.Usami, T.Maruizumi, Y.Shiraki
    • Organizer
      E-MRS 2011 Spring Meeting
    • Place of Presentation
      Nice, France
    • Year and Date
      2011-05-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Stripe line width dependence of anisotorpic strain states induced into SiGe films by selective ion implantation technique2011

    • Author(s)
      Y.Hoshi, K.Sawano, N.Usami, K.Arimoto, K.Nakagawa, Y.Shiraki
    • Organizer
      E-MRS 2011 Spring Meeting
    • Place of Presentation
      Nice, France
    • Year and Date
      2011-05-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Si微小共振器中Ge量子ドットによる発光素子の開発2011

    • Author(s)
      丸泉琢也、夏金松、白木靖寛
    • Organizer
      電子通信情報学会2011年総合大会
    • Place of Presentation
      東京都市大(東京都)(招待講演)
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Stable position of B12 Cluster NearSi(001) Surface and Its STM images2010

    • Author(s)
      T. Maruizumi
    • Organizer
      218th Meeting of The ElectrochemicalSociety
    • Place of Presentation
      Las Vegas, USA
    • Year and Date
      2010-10-12
    • Related Report
      2012 Final Research Report
  • [Presentation] Stable position of B_<12> Cluster Near Si(001) Surface and Its STM images2010

    • Author(s)
      T.Maruizumi, S.Ito
    • Organizer
      218th Meeting of The Electrochemical Society
    • Place of Presentation
      Las Vegas (USA)
    • Year and Date
      2010-10-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] Study of HfO2/Si/Strained-Ge/SiGe Using Angle Resolved X-ray Photoelectron2010

    • Author(s)
      Arata Komatsu, Kentarou Nasu, Yusuke Hoshi, Toru Kurebayashi, Kentarou Sawano, Maksym Myronov, Hiroshi Nohira, Yasuhiro Shiraki
    • Organizer
      218th Meeting of The Electrochemical Society
    • Place of Presentation
      Las Vegas (USA)
    • Year and Date
      2010-10-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ge量子ドットを有する1次元フォトニック結晶微小共振器による1,3μm帯での単一ピーク発光2010

    • Author(s)
      小林正人、夏金松、武田雄貴、宇佐美徳隆、丸泉琢也、白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] フォトニック結晶微小共振器を用いたSi系発光デバイスのエレクトロルミネッセンス2010

    • Author(s)
      坪井俊紀、夏金松、深水聖司、宇佐美徳隆、丸泉琢也、白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 角度分解X線光電子分光法によるHfO_2/Si/歪Ge/SiGe構造の評価II2010

    • Author(s)
      小松新, 那須賢太郎, 星裕介, 榑林徹, 澤野憲太郎, ミロノフマクシム, 野平博司, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si表面近傍におけるボロンクラスタの安定位置とそのSTM像(3)2010

    • Author(s)
      伊藤俊祐、丸泉琢也、諏訪雄二
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] HfO_2中への元素添加の第一原理計算2010

    • Author(s)
      中山利紀、丸泉琢也
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si/SiGe系2DEGのPdショットゲート制御による結合量子ドットの作製2010

    • Author(s)
      福岡佑二, 小寺哲夫, 大塚朋廣, 武田健太, 小幡利顕, 吉田勝治, 澤野憲太郎, 内田 建, 白木靖寛, 樽茶清悟, 小田俊理
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] CVDにより作製した歪みGeチャネルの電気伝導特性2010

    • Author(s)
      榑林徹, 星裕介, 那須賢太郎, 澤野憲太郎, 宇佐美徳隆, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] (110)面を表面に有する歪みSiの正孔移動度と結晶モフォロジーとの関係2010

    • Author(s)
      八木聡介, 有元圭介, 中川清和, 宇佐美徳隆, 中嶋一雄, 澤野憲太郎, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ar^+およびSi^+イオン注入欠陥がSiGe層の歪緩和に与える影響2010

    • Author(s)
      星裕介, 澤野憲太郎, 宇佐美徳隆, 有元圭介, 中川清和, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] イオン注入法によるSi(111)基板上緩和SiGeバッファ層の作製2010

    • Author(s)
      久保智史, 澤野憲太郎, 星裕介, 中川清和, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 選択的イオン注入法により作製される一軸性歪みSiGeの表面構造評価2010

    • Author(s)
      永倉壮, 星裕介, 澤野憲太郎, 宇佐美徳隆, 中川清和, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ge(111)への高濃度Sbデルタドーピングによる低抵抗コンタクト形成2010

    • Author(s)
      竹田圭吾, 星裕介, 笠原健司, 山根一高, 澤野憲太郎, 浜屋宏平, 宮尾正信, 白木靖寛
    • Organizer
      2010年秋季<第71回>応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effects of increased compressive strain on hole effective mass and scattering mechanisms in strained Ge channels2010

    • Author(s)
      K.Sawano, K.Toyama, R.Masutomi, T.Okamoto, N.Usami, K.Arimoto, K.Nakagawa, Y.Shiraki
    • Organizer
      E-MRS 2010 Spring Meeting, Symposium H
    • Place of Presentation
      Strasbourg (France)
    • Year and Date
      2010-06-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Stable position of a boron cluster near Si surface2010

    • Author(s)
      S.Ito, T.Maruizumi
    • Organizer
      18th International Conference on Ion Implantation Technology
    • Place of Presentation
      京都大学(京都府)
    • Year and Date
      2010-06-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] First-principles Examination of As 3d5/2 X-ray Photoelectron Spectrum for Heavily Doped Arsenic Shallow Junctions Prepared by Plasma Doping2010

    • Author(s)
      K.Ban-I, T.Maruizumi
    • Organizer
      18th International Conference on Ion Implantation Technology
    • Place of Presentation
      京都大学(京都府)
    • Year and Date
      2010-06-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effect of line width on uniasial strain states of SiGe layers fabricated by selective ion implantation2010

    • Author(s)
      Y.Hoshi, K.Sawano, A.Yamada, N.Usami, K.Arimoto, K.Nakagawa, Y.Shiraki
    • Organizer
      5th International SiGe Technology and Device Meeting (ISTDM)
    • Place of Presentation
      Stockholm (Sweden)
    • Year and Date
      2010-05-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] マイクロディスク共振器を用いたSi系発光デバイスのエレクトロルミネッセンス2010

    • Author(s)
      武田雄貴
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Siキャップ層による歪みGeチャネルの歪み安定性向上2010

    • Author(s)
      那須賢太郎
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si表面近傍におけるボロンクラスタの安定位置(3)2010

    • Author(s)
      伊藤俊祐
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] 角度分解X線光電子分光法によるHfO_2/Si/歪Ge/SiGe構造の評価2010

    • Author(s)
      小松新
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Ge濃縮層/SiGe層/Si(100)構造の形成と素子応用2010

    • Author(s)
      奥村景星
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 選択的イオン注入法により作製された一軸性歪みSiGeの歪み状態に与えるメサエッチの影響2010

    • Author(s)
      星裕介
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 熱処理の歪みSi_<1-y>C_y/Siヘテロ構造と素子特性に与える影響2010

    • Author(s)
      長葭一利
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 低抵抗コンタクト形成へ向けたGeへのSbデルタドーピングとその偏析現象2010

    • Author(s)
      澤野憲太郎
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si-Based Light Emitting Devices Based onGe Self-Assembled Quantum Dots2009

    • Author(s)
      J. Xia
    • Organizer
      Invited2009 International Symposium on Crystal Science and Technologies
    • Place of Presentation
      Kofu, Yamanashi
    • Year and Date
      2009-12-04
    • Related Report
      2012 Final Research Report
  • [Presentation] Si-Based Light Emitting Devices Based on Ge Self-Assembled Quantum Dots (invited)2009

    • Author(s)
      夏金松
    • Organizer
      2009 International Symposium on Crystal Science and Technologies
    • Place of Presentation
      山梨大学(甲府)
    • Year and Date
      2009-12-04
    • Related Report
      2009 Annual Research Report
  • [Presentation] Material aspects and characterization of Si/Ge hetero-structures on nano-scale for electronic and optical deviceapplications2009

    • Author(s)
      Y. Shiraki
    • Organizer
      Invited1st International Workshop on Si based nano-electronics and -photonics (SiNEP-09)
    • Place of Presentation
      Vigo, Spain
    • Year and Date
      2009-09-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Material aspects and characterization of Si/Ge hetero-structures on nano-scale for electronic and optical device applications (Invited)2009

    • Author(s)
      白木靖寛
    • Organizer
      1st International Workshop on Si based nano-electronics and -photonics (SiNEP-09)
    • Place of Presentation
      Vigo, Spain
    • Year and Date
      2009-09-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] HfO_2/歪みGeチャネル変調ドープ構造における正孔移動度の正孔密度依存性2009

    • Author(s)
      星裕介
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si(111)基板上へのSiGe層のMBE成長と結晶性評価2009

    • Author(s)
      小川佑太
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] As^+,B^+,Si^+イオン注入したSi-C混晶半導体膜のRTA処理による組織変化2009

    • Author(s)
      井上樹範
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] (110)面上に形成された歪みSi薄膜の結晶性の改善2009

    • Author(s)
      八木聡介
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Introduction of Uniaxial Strain into Si/Ge Heterostructures by Selective Ion Implantation (Invited)2009

    • Author(s)
      澤野憲太郎
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 第一原理計算によるSi中のAsドーパントのXPS解析2009

    • Author(s)
      伴井香苗
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si表面近傍におけるボロンクラスタの安定位置とそのSTM像(2)2009

    • Author(s)
      伊藤俊祐
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] フォトニック結晶共振器を用いたSi系電流注入型発光デバイスの作製2009

    • Author(s)
      深水聖司
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Current-injected Si microdisk with Ge self-assembled quantum dots2009

    • Author(s)
      J. Xia
    • Organizer
      Invited2nd Photonics and OptoElectronics Meetings (POEM 2009)
    • Place of Presentation
      Wuhan, China
    • Year and Date
      2009-08-10
    • Related Report
      2012 Final Research Report
  • [Presentation] Current-injected Si microdisk with Ge self-assembled quantum dots (Invited)2009

    • Author(s)
      夏金松
    • Organizer
      2nd Photonics and OptoElectronics Meetings (POEM 2009)
    • Place of Presentation
      Wuhan, China
    • Year and Date
      2009-08-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Landau level crossing and pseudospin phase transitions in Si quantum wells2009

    • Author(s)
      佐々木恒平
    • Organizer
      The 18th International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-18)
    • Place of Presentation
      神戸
    • Year and Date
      2009-07-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] Identification of scattering mechanisms limiting the mobility of two-dimensional electron gas in Si/SiGe heterostructures2009

    • Author(s)
      土屋豪
    • Organizer
      The 18th International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-18)
    • Place of Presentation
      神戸
    • Year and Date
      2009-07-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Cyclotron resonance of two-dimensional electrons in a Si quantum well2009

    • Author(s)
      枡富龍一
    • Organizer
      The 18th International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-18)
    • Place of Presentation
      神戸
    • Year and Date
      2009-07-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Formation of Uniaxially Strained SiGe by Selective Ion Implantation Technique2009

    • Author(s)
      澤野憲太郎
    • Organizer
      E-MRS 2009 Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Year and Date
      2009-06-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Absence of Transient Enhanced Diffusion in Ion-Implanted Ge Investigated by Isotope Superlattices2009

    • Author(s)
      植松真司
    • Organizer
      E-MRS 2009 Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Year and Date
      2009-06-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Stable position of B12 cluster near Si(001) surfaces and its STM images2009

    • Author(s)
      伊藤俊祐
    • Organizer
      13^<th> International Workshop on Computaional Electronics
    • Place of Presentation
      Beijing, China
    • Year and Date
      2009-05-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] Ion dose and species dependence of strain relaxation of SiGe buffer layers formed by ion-implantation technique2009

    • Author(s)
      星裕介
    • Organizer
      6th International Conference on Silicon Epitaxy and Heterostructures
    • Place of Presentation
      Los Angeles, USA
    • Year and Date
      2009-05-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] CMP for high mobility strained Si/GeChannels2009

    • Author(s)
      Kentarou Sawano
    • Organizer
      Invited2009 MRS (Materials Research Society) Spring Meeting, Symposium E : Science andTechnology of Chemical Mechanical Planarization (CMP)
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2009-04-16
    • Related Report
      2012 Final Research Report
  • [Presentation] CMP for high mobility strained Si/Ge Channels (Invited)2009

    • Author(s)
      澤野憲太郎
    • Organizer
      2009 MRS (Materials Research Society) Spring Meeting
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2009-04-16
    • Related Report
      2009 Annual Research Report
  • [Book] Silicon germanium (SiGe)nanostructures2011

    • Author(s)
      Y. Shiraki and N. Usami
    • Total Pages
      627
    • Publisher
      Woodhead Publishing
    • Related Report
      2012 Final Research Report
  • [Book] 量子ドット‐エレクトロ ニクス最前線2011

    • Author(s)
      丸泉琢也、夏金松
    • Publisher
      エヌティーエス社
    • Related Report
      2012 Final Research Report
  • [Book] Silicon-germanium (SiGe) nanostructures2011

    • Author(s)
      Y.Shiraki N.Usami
    • Total Pages
      627
    • Publisher
      Woodhead Publishing
    • Related Report
      2011 Annual Research Report
  • [Book] 量子ドット-エレクトロニクス最前線(分担執筆)2011

    • Author(s)
      丸泉琢也、夏金松, 他
    • Publisher
      エヌティーエス社
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.arl.tcu.ac.jp/sns.html

    • Related Report
      2012 Final Research Report

URL: 

Published: 2009-04-01   Modified: 2019-07-29  

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