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Formation of lower order cluster molecules by a precise control of low energy electron plasma

Research Project

Project/Area Number 21340167
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionTohoku University

Principal Investigator

IIZUKA Satoru  東北大学, 大学院・工学研究科, 准教授 (20151227)

Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2010: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2009: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Keywordsプラズマ応用 / クラスター / 電子エネルギー / インパルスプラズマ / 高分子 / ナノ粒子 / エネルギー制御 / ナノ構造 / スパッタリング / 金属酸化物 / 炭素重合反応 / 酸化亜鉛
Research Abstract

For a precise control of low electron energy plasma, gas stream-type plasma was newly developed, and the formation process of low order clusters, which proceeded continuously in plasma, was measured in detail. Formation mechanism of nanoparticles and nanorods through the reaction among the metal oxide clusters were clarified. Moreover, the initial process of the carbon polymerization reaction was investigated. The role of the oxygen, which disturbed polymerization reaction, was also clarified. Formation mechanism of nanoparticles through low order cluster molecules was elucidated.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (66 results)

All 2013 2012 2011 2010 2009 2008

All Journal Article (26 results) (of which Peer Reviewed: 20 results) Presentation (35 results) Book (2 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Production of nanoparticles of titanium dioxide in a low-pressure O_2/Ar plasma2013

    • Author(s)
      Yousuke Yamazaki, Satoru Iizuka
    • Journal Title

      31^<st> International Conference on Ionized Gases

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Conversion of carbon dioxide to methane by low-pressure pulse discharge2013

    • Author(s)
      Keisuke Arita
    • Journal Title

      30th Simposium on Plasma Processing

      Volume: 30 Pages: 203-204

    • Related Report
      2012 Annual Research Report
  • [Journal Article] A Novel method for a production of low electron temperature plasma by a grid cage RF discharge2013

    • Author(s)
      Kohgi Kato
    • Journal Title

      30th Simposium on Plasma Processing

      Volume: 30 Pages: 121-122

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Diamond particles deposited among nickel/cupper particles in energy controlled CH_4/H_2 RF discharge plasmas2012

    • Author(s)
      Junichi Emi, Satoru Iizuka
    • Journal Title

      Journal of Surface Engineered Materials and Advanced Technology

      Volume: 2 Pages: 158-162

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Single- crystal MgO hollow-nanospheres formed in RF impulse discharge plasmas, Journal of Nanomaterials2012

    • Author(s)
      Satoru Iizuka, Takumasa Muraoka
    • Journal Title

      Journal of Nanomaterials

      Volume: 2 Issue: 1 Pages: 6-6

    • DOI

      10.1155/2012/691874

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 水素プラズマ改質による二酸化炭素のメタンへの変換2012

    • Author(s)
      有田圭介
    • Journal Title

      化学工業

      Volume: 63 Pages: 41-45

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Conversion of CO2 to methane by a low-pressure hollow-cathode discharge2012

    • Author(s)
      Toshitsugu Gunji
    • Journal Title

      Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2012)

      Volume: 1

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ZnO nanowire formation by two-step deposition method using energy-controlled hollow-type magnetron RF plasma2011

    • Author(s)
      Hideki Ono and Satoru Iizuka
    • Journal Title

      Journal of Nanomaterials

      Volume: 2011 Pages: 7-7

    • DOI

      10.1155/2011/850930

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Conversion of methane to gaseous and/or solid carbon materials by control of plasma reaction in RF discharge2011

    • Author(s)
      Takayuki Tsuchiya, Satoru Iizuka
    • Journal Title

      30th International Conference on Phenomena of Ionized Gases

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characteristics of carbon-related materials deposited in electron-energy controlled CH4/H2 RF discharge plasmas2011

    • Author(s)
      Junichi Emi, Satoru Iizuka
    • Journal Title

      Diamond & Related Materials

      Volume: 20 Pages: 568-572

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characteristics of carbon-related materials deposited in electron-energy controlled CH_4/H_2 RF discharge plasmas2011

    • Author(s)
      Junichi Emi, Satoru Iizuka
    • Journal Title

      Diamond & Related Materials

      Volume: 20 Pages: 568-572

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reforming of carbon dioxide to methane and methanol by electric impulse low-pressure discharge with hydrogen2011

    • Author(s)
      Masaki Kano, Genki Satoh, Satoru Iizuka
    • Journal Title

      Plasma Chemistry and Plasma Processing

      Volume: non Issue: 2 Pages: 1-9

    • DOI

      10.1007/s11090-011-9333-0

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Conversion of methane to gaseous and/or solid carbon materials by control of plasma reaction in RF discharge2011

    • Author(s)
      Takayuki Tsuchiya, Satoru Iizuka
    • Journal Title

      30^<th> International Conference on Phenomena of Ionized Gases

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Two-step formation of ZnO nanowires using energy-controlled hollow-type magnetron RF plasma2011

    • Author(s)
      Hideki Ono, Satoru Iizuka
    • Journal Title

      30^<th> International Conference on Phenomena of Ionized Gases

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasma2010

    • Author(s)
      Keisuke Kumeta, Hideki Ono, Satoru Iizuka
    • Journal Title

      Thin Solid Films

      Volume: 518 Pages: 3522-3525

    • Related Report
      2012 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes2010

    • Author(s)
      Keiji Ohara
    • Journal Title

      Diamond & Related Materials

      Volume: 19 Pages: 908-910

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Conversion from carbon dioxide to organic materials by RF impulse discharges with hydrogen2010

    • Author(s)
      Masaki Kano
    • Journal Title

      International Symposium on Non-Thermal/Thermal Plasma Pollution Control Technology & Sustainable Energy

      Volume: ISNTP-7

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasma2010

    • Author(s)
      Keisuke Kumeta
    • Journal Title

      Thin Solid Films 8

      Pages: 3522-3525

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dependence of ZnO nanorods formation on discharge parameters in hollow magnetron RF plasma2010

    • Author(s)
      Keisuke Kumeta
    • Journal Title

      The 27^<th> Symposium on Plasma Processing

      Pages: 283-284

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Reduction of carbon dioxide by RF impulse discharge2010

    • Author(s)
      Masaki Kano
    • Journal Title

      The 27^<th> Symposium on Plasma Processing

      Pages: 265-266

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Production control of carbon-related nano-materials by Ar/CH4 RF discharges2010

    • Author(s)
      Takayuki Tsuchiya
    • Journal Title

      The 27^<th> Symposium on Plasma Processing

      Pages: 267-268

    • Related Report
      2009 Annual Research Report
  • [Journal Article] MgO microparticle deposition by RF impulse discharge in a small-diameter tube2009

    • Author(s)
      Takumasa Muraoka
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrode2009

    • Author(s)
      Takumasa Muraoka
    • Journal Title

      Thin Solid Films 518

      Pages: 1012-1015

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of ZnO nanowires in hollow-type magnetron O2/Ar RF plasma2009

    • Author(s)
      Hideki Ono
    • Journal Title

      Thin Solid Films 518

      Pages: 1016-1019

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] RF impulse barrier discharge for MgO microparticle formation in sub-atmospheric pressure regime2009

    • Author(s)
      Takumasa Muraoka
    • Journal Title

      J.Plasma Fusion Res.SERIES 8

      Pages: 1335-1338

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron temperature control by applying dc voltage to amesh grid blanketed with thin films in reactive plasmas2009

    • Author(s)
      Kohgi Kato
    • Journal Title

      J.Plasma Fusion Res.SERIES 8

      Pages: 1287-1290

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 低圧矩形波パルス放電による二酸化炭素のメタンへの変換2013

    • Author(s)
      有田圭介
    • Organizer
      第60回応用物理学会学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Conversion of carbon dioxide to methane by low-pressure pulse discharge2013

    • Author(s)
      Keisuke Arita
    • Organizer
      30th Simposium on Plasma Processing
    • Place of Presentation
      アクトシティ浜松
    • Related Report
      2012 Annual Research Report
  • [Presentation] A Novel method for a production of low electron temperature plasma by a grid cage RF discharge2013

    • Author(s)
      Kohgi Kato
    • Organizer
      30th Simposium on Plasma Processing
    • Place of Presentation
      アクトシティ浜松
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低圧Ar/O_2プラズマによる二酸化チタンの球形微粒子の生成および膜質制御2012

    • Author(s)
      山崎陽介,飯塚哲
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2012-09-12
    • Related Report
      2012 Final Research Report
  • [Presentation] 低圧Ar/O_2プラズマによる二酸化チタンの構造制御2012

    • Author(s)
      山崎陽介,飯塚哲
    • Organizer
      第59回応用物理学関連連合講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-16
    • Related Report
      2012 Final Research Report
  • [Presentation] 低圧Ar/O_2プラスマによる二酸化チタンの構造制御2012

    • Author(s)
      山崎陽介, 飯塚哲
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学,東京
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Control of Nanostructures of Titanium Dioxide in a Low-Pressure O_2/Ar plasma2012

    • Author(s)
      Yosuke Yamasaki, Satoru Iizuka
    • Organizer
      International Conference on Plasma Nanotechnology and Science (IC-PLANTS)
    • Place of Presentation
      Freude, Inuyama International Sightseeing Center, Aichi
    • Year and Date
      2012-03-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Nanostructures of titanium dioxide controlled by sputtering method in a low-pressure O_2/Ar plasma2012

    • Author(s)
      Yosuke Yamazaki, Satoru Iizuka
    • Organizer
      11th APCPST and 25th SPSM, 2P86, p.320
    • Place of Presentation
      Kyoto University
    • Related Report
      2012 Final Research Report
  • [Presentation] Synthesis of methanol by a low-pressure steam-methane plasma2012

    • Author(s)
      Takayuki Tsuchiya, Satoru Iizuka
    • Organizer
      International Symposium on Non- hermal/Thermal Plasma Pollution ControlTechnology & Sustainable Energy (ISNTP-8)
    • Place of Presentation
      Camaret Sur Mer, France
    • Related Report
      2012 Final Research Report
  • [Presentation] Nanostructures of titanium dioxide controlled by sputtering method in a low-pressure O2/Ar plasma2012

    • Author(s)
      Yosuke Yamazaki
    • Organizer
      11th APCPST and 25th SPSM
    • Place of Presentation
      Kyoto University
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水素プラズマ改質による二酸化炭素のメタンへの変換2012

    • Author(s)
      有田圭介
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低圧Ar/O2プラズマによる二酸化チタンの球形微粒子の生成および膜質制御2012

    • Author(s)
      山崎陽介
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Conversion of CO2 to methane by a low-pressure hollow-cathode discharge2012

    • Author(s)
      Toshitsugu Gunji
    • Organizer
      Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2012)
    • Place of Presentation
      Viana do Castelo, Portugal
    • Related Report
      2012 Annual Research Report
  • [Presentation] Synthesis of Methanol by a Low-Pressure Steam-Methane Plasma2012

    • Author(s)
      Takayuki Tsuchiya
    • Organizer
      International Symposium on Non-Thermal/Thermal Plasma Pollution Control Technology & Sustainable Energy (ISNTP-8)
    • Place of Presentation
      Camaret Sur Mer, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Control of Crystalline Structures of Titanium Dioxide in a Low-Pressure O_2/Ar plasma2011

    • Author(s)
      Yousuke Yamazaki, Satoru Iizuka
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      Ishikawa Ongakudo, Kanazawa
    • Year and Date
      2011-11-23
    • Related Report
      2011 Annual Research Report
  • [Presentation] Reforming of Methane to Methanol by a Low-Pressure Steam Plasma2011

    • Author(s)
      Takayuki Tsuchiya, Satoru Iizuka
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      Ishikawa Ongakudo, Kanazawa
    • Year and Date
      2011-11-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] Biased-Modulation of Dust Velocity Shear Flow in RF Plasma2011

    • Author(s)
      Takuma Gohda, Satoru Iizuka
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      Ishikawa Ongakudo, Kanazawa
    • Year and Date
      2011-11-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] Diamond particles deposited among nickel/cupper particles in energy controlled CH4/H2 RF discharge plasmas2011

    • Author(s)
      Jyunichi Emi, Satoru Iizuka
    • Organizer
      The 22^<st> European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, and Nitrides
    • Place of Presentation
      Garmisch-Partenkirchen, Germany
    • Year and Date
      2011-09-04
    • Related Report
      2011 Annual Research Report
  • [Presentation] Spherical MgO nanoparticle deposition by RF impulse discharge with small coaxial electrodes2011

    • Author(s)
      Satoru Iizuka
    • Organizer
      EPS Montreal International Conference on Advanced Materials and Processing
    • Place of Presentation
      Montreal, Canada(invited)
    • Year and Date
      2011-08-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] メタンガスの水蒸気プラズマ処理によるメタノール合成2011

    • Author(s)
      土屋貴之
    • Organizer
      応用物理学会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] エネルギー制御型ホローマグネトロンプラズマによるZnOナノ構造形成制御2010

    • Author(s)
      久米田啓介
    • Organizer
      第27回プラズマ・核融合学会
    • Place of Presentation
      北海道大学交流会館
    • Year and Date
      2010-11-30
    • Related Report
      2010 Annual Research Report
  • [Presentation] 低圧メタンプラズマ処理によるメタノールの合成2010

    • Author(s)
      土屋貴之
    • Organizer
      第27回プラズマ・核融合学会
    • Place of Presentation
      北海道大学交流会館
    • Year and Date
      2010-11-30
    • Related Report
      2010 Annual Research Report
  • [Presentation] Production of ZnO nanostructures in energy-controlled holloe-type magnetron plasma2010

    • Author(s)
      Keisuke Kumeta
    • Organizer
      The 3rd Student Organizing International Mini-Conference on Information Electronics Systems
    • Place of Presentation
      Sendai Excel Hotel
    • Year and Date
      2010-10-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] Reforming of methane to gas and solid carbon materials by control of plasma reaction2010

    • Author(s)
      Takayuki Tsuchiya
    • Organizer
      The 3rd Student Organizing International Mini-Conference on Information Electronics Systems
    • Place of Presentation
      Sendai Excel Hotel
    • Year and Date
      2010-10-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] メタンガスのプラズマ処理によるメタノール生成2010

    • Author(s)
      土屋貴之
    • Organizer
      応用物理学会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] エネルギー制御型ホローマグネトロン型高周波放電によるZnOナノ構造の成長2010

    • Author(s)
      久米田啓介
    • Organizer
      応用物理学会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Characteristics of carbon-related materials deposited in electron-energy controlled CH4/H2 RF discharge plasmas2010

    • Author(s)
      Satoru Iizuka
    • Organizer
      The 21^<st> European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, and Nitrides
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2010-09-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Conversion from carbon dioxide to organic materials by RF impulse discharges with hydrogen2010

    • Author(s)
      Satoru Iizuka
    • Organizer
      International Symposium on Non-Thermal/Thermal Plasma Pollution Control Technology & Sustainable Energy
    • Place of Presentation
      St.John's, Newfoundland, Canada
    • Year and Date
      2010-06-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Production control of carbon-related nano-materials by Ar/GH4 RF discharges2010

    • Author(s)
      土屋貴之
    • Organizer
      The 27^<th> Symposium on Plasma Processing
    • Place of Presentation
      横浜開港記念会館
    • Year and Date
      2010-02-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Reduction of carbon dioxide by RF impulse discharge2010

    • Author(s)
      鹿野優毅
    • Organizer
      The 27^<th>_Symposium on Plasma Processing
    • Place of Presentation
      横浜開港記念会館
    • Year and Date
      2010-02-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Dependence of ZnO nanorods formation on discharge parameters in hollow magnetron RF plasma2010

    • Author(s)
      久米田啓介
    • Organizer
      The 27^<th> Symposium on Plasma Processing
    • Place of Presentation
      横浜開港記念会館
    • Year and Date
      2010-02-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Deposition of spherical single-crystal MgO hollow-microparticles in RF impulse discharge plasmas2009

    • Author(s)
      飯塚哲
    • Organizer
      TACT 2009 International Thin Films Conference
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2009-12-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasmas2009

    • Author(s)
      久米田啓介
    • Organizer
      The 19^<th> Academic Symposium of Material Research Society of Japan
    • Place of Presentation
      横浜開港記念会館
    • Year and Date
      2009-12-07
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth of ZnO nanostructures in energy controlled hollow-type magnetron RF plasma2009

    • Author(s)
      久米田啓介
    • Organizer
      プラズマ・核融合学会第26回年会
    • Place of Presentation
      京都国際交流会館
    • Year and Date
      2009-12-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes2009

    • Author(s)
      飯塚哲
    • Organizer
      The 20^<th> European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, and Nitrides
    • Place of Presentation
      Athens, Greece
    • Year and Date
      2009-09-06
    • Related Report
      2009 Annual Research Report
  • [Book] プラズマ理工学基礎2012

    • Author(s)
      畠山力三,飯塚哲,金子俊郎
    • Publisher
      朝倉書店
    • Related Report
      2012 Final Research Report
  • [Book] 1.2シースの物理,ナノテク時代のプラズマ技術,プラズマ・核融合学会編2012

    • Author(s)
      飯塚哲, 他
    • Publisher
      森北出版
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 酸化物中空粒子,その製造方法及び酸化物中空粒子製造装置2013

    • Inventor(s)
      飯塚哲
    • Industrial Property Rights Holder
      飯塚哲
    • Industrial Property Number
      2013-004356
    • Filing Date
      2013-01-15
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 酸化物中空粒子,その製造方法及び酸化物中空粒子製造装置2013

    • Inventor(s)
      飯塚哲
    • Industrial Property Rights Holder
      飯塚哲
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-004356
    • Filing Date
      2013-01-15
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 酸化物中空粒子,その製造方法及び酸化物中空粒子製造装置2008

    • Inventor(s)
      飯塚哲
    • Industrial Property Rights Holder
      飯塚哲
    • Industrial Property Number
      2008-293788
    • Filing Date
      2008-11-17
    • Related Report
      2012 Final Research Report

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Published: 2009-04-01   Modified: 2019-07-29  

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