| Budget Amount *help |
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2011: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2010: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Fiscal Year 2009: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
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| Research Abstract |
We developed three-dimensional nanostructure fabrication methods using a self-assembly phenomena of diblock copolymer, polystyrene-polymethyl methacrylate that forms pillar, pore and lamella structures at 30-100nm order scale. Concretely speaking, we proposed and demonstrated the following four methods :(1) Arrangement of the self-assembled nanostructures on three-dimensional nanostructures.(2) Alignment of the self-assembled nanostructures in three-dimensional space by using nano templates.(3) Fabrication of multilayer nanostructures using the self-assembled nanostructures as templates.(4) Fabrication of free standing self-assembled nanostructures using three-dimensional nano frames.(5) Nano patterning method of the self-assembled nanostructures by energy beam irradiation.(6) Thin film jointing method using focused ion beam irradiation.
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