Tube-type micropump by using MEMS technology
| Project/Area Number |
21760108
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
KIM Joon-wan Tokyo Institute of Technology, 精密工学研究所, 助教 (40401517)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2009: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | マイクロマシン / MEMS / 電界共役流体(ECF) / マイクロポンプ / 平面集積化 / 機能性流体 / 液体マイクロレンズ / 液体マイクロレートジャイロ / 管路形ポンプ |
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| Research Abstract |
A high power tube-type ECF (Electro-Conjugate Fluid) micropump that consists of triangular prism and slit electrode pairs was proposed and fabricated by MEMS. As advanced ECF micropumps, they were in-plane integrated for high performance by the serialization and parallelization, achieving output power density of the world top class.
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Report
(3 results)
Research Products
(23 results)
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[Presentation] Tube-type ECF Pump2009
Author(s)
Joon-wan Kim, Toshiya Suzuki, Shinichi Yokota, Kazuya Edamura
Organizer
The 3rd International Conference on Manufacturing, Machine Design and Tribology (ICMDT2009)
Place of Presentation
Jeju Island, Korea
Year and Date
2009-06-25
Related Report
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