Development of an assembly-free fabrication process for microsystems driven by distributed actuators on a chip
| Project/Area Number |
21760201
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Kagawa University |
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Principal Investigator |
SUZUKI Takaaki Kagawa University, 工学部, 准教授 (10378797)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2009: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | マイクロ・ナノデバイス / マイクロマシン / フォトリソグラフィ / 流体工学 / ナノコンポジット |
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| Research Abstract |
Composite material made of magnetic nanoparticles/SU-8 is expected to be a material of microactuators which can be controlled by external magnetizing field and easily fabricated by only photolithography. In this study, we evaluated the dispersivity of the proposed nanocomposites mixed by a planetary and an ultrasonic stirrers. As a result, the planetary stirrer achieves higher dispersivity than the ultrasonic one. Moreover, we propose assembly-free integration method for driving elements internally fabricated by infusing liquid nanocomposite and sacrificial resist into a microchannel before exposing. By a magnetic driving test in the microchannel, it is confirmed that the fabricated element made of the proposed nanocomposite moved with the external magnetic field applied by an electromagnet.
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Report
(3 results)
Research Products
(40 results)
