| Project/Area Number |
21K14513
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| Research Category |
Grant-in-Aid for Early-Career Scientists
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| Allocation Type | Multi-year Fund |
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| Review Section |
Basic Section 28050:Nano/micro-systems-related
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| Research Institution | Kyoto University |
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Principal Investigator |
BANERJEE AMIT 京都大学, 工学研究科, 講師 (20894794)
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| Project Period (FY) |
2021-04-01 – 2024-03-31
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| Project Status |
Completed (Fiscal Year 2023)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2023: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2022: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2021: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Keywords | Nanoresonator / NEMS / Si microfabrication / frequency tuning / Q-factor / gas sensing / EBL / DRIE / Nanomechanical resonator / Quality-factor / Gas-sensing / Nano-resonator / e-beam lithography |
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| Outline of Research at the Start |
Goal of this research is to develop nano-scale resonator devices to perform ultra-sensitive detection of targeted gases. Gas-sensing is performed by a vibrating nano-beam of Silicon with ~10 nm thickness. Frequency-shift of first resonance mode is monitored as the molecules of a target gas are adsorbed on the vibrating nano-beam. Frequency shift thus achieved reveals the concentration of the exposed target gas. We expect these sensors to find useful applications for building portable devices for detecting early onset of diseases (e.g., diabetes mellitus, H. Pylori infection in stomach, etc.).
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| Outline of Final Research Achievements |
Nanoresonator are vibrating nano-mechanical structures that can work as ultrasensitive gas sensors for novel applications in healthcare, environmental, industrial monitoring, etc. Smaller mass and higher Q-factor generally enhances the performance of nanoresonator-based sensors. In this research we have developed ultrathin Si nanoresonators for gas sensing applications.
We developed a scalable fabrication process to make ~ 10 nm wide, ~ 100 micron long ultrathin Si nanoresonator. We achieved remarkable electrostatic tunability in resonance frequency and nonlinearity comparable to atomically-thin resonators. We theoretically and experimentally studied the Q-factor reduction phenomena in nanoscale and identified a cause and potential ways to enhance it. Finally, we conducted high sensitivity CO2 gas sensing experiments with our Si nanoresonators. In summary, we successfully developed scalable, tunable, high Q-factor, ultrathin Si nanoresonators for gas-sensing.
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| Academic Significance and Societal Importance of the Research Achievements |
Nanotechnology can help us build a technologically improved society, for example, by making efficient devices like nanoresonators that are ultrasensitive, small, cheap, and energy efficient. We improved Si nanoresonators so they can be more sensitive, versatile, and easy to make in large numbers.
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