High Q-factor ultra-thin Si nano-resonators for ultra-sensitive gas-sensing applications

• Project/Area Number: 21K14513
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 28050:Nano/micro-systems-related
• Research Institution: Kyoto University
• Principal Investigator: BANERJEE Amit 京都大学, 工学研究科, 講師 (20894794)
• Project Period (FY): 2021-04-01 – 2024-03-31
• Project Status: Granted (Fiscal Year 2021)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2023: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2022: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2021: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: Nano-resonator / Gas-sensing / e-beam lithography

Outline of Research at the Start

Goal of this research is to develop nano-scale resonator devices to perform ultra-sensitive detection of targeted gases. Gas-sensing is performed by a vibrating nano-beam of Silicon with ~10 nm thickness. Frequency-shift of first resonance mode is monitored as the molecules of a target gas are adsorbed on the vibrating nano-beam. Frequency shift thus achieved reveals the concentration of the exposed target gas. We expect these sensors to find useful applications for building portable devices for detecting early onset of diseases (e.g., diabetes mellitus, H. Pylori infection in stomach, etc.).