• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Systematic Study Analyses of radical-surface interaction in plasma bio-processing

Research Project

Project/Area Number 22244075
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionOsaka University

Principal Investigator

HAMAGUCHI Satoshi  大阪大学, 大学院・工学研究科, 教授 (60301826)

Co-Investigator(Renkei-kenkyūsha) YOSHIMURA Satoru  大阪大学, 大学院・工学研究科, 准教授 (40294029)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥44,330,000 (Direct Cost: ¥34,100,000、Indirect Cost: ¥10,230,000)
Fiscal Year 2012: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2011: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2010: ¥20,670,000 (Direct Cost: ¥15,900,000、Indirect Cost: ¥4,770,000)
Keywords反応性プラズマ / プラズマ表面相互作用 / プラズマ / 表面・界面物性 / たんぱく質 / バイオ関連機器 / シミュレーション / 蛋白質 / 細胞外マトリックス / PMMA / イオンビーム / 大気圧プラズマ
Research Abstract

A better understanding of surface reaction processes and their physicochemical mechanisms in surface modification ofbiomaterials and living organs by atmospheric-pressure plasmas is consideredto contribute greatly to the future development of artificial organs and other medical devices. In this research, elementary reaction processes of plasma-surface interactions for organic polymers such as proteins by atmospheric-pressureplasmas were examined with the use of multi-beam experiments and atomic-level numerical simulations.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report

Research Products

(211 results)

All 2013 2012 2011 2010 Other

All Journal Article (50 results) (of which Peer Reviewed: 50 results) Presentation (151 results) (of which Invited: 14 results) Book (2 results) Remarks (3 results) Patent(Industrial Property Rights) (5 results) (of which Overseas: 2 results)

  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Urisu, and Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci

      Volume: 276 Pages: 1-6

    • DOI

      10.1016/j.apsusc.2013.02.001

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Uris, and Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci.

      Volume: 未定

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quantum Cascade Laser (QCL) Absorption Spectroscopy with the Amplitude-to-Time Conversion (ATTC) Technique for Atmospheric-Pressure Plasmas2013

    • Author(s)
      Takayoshi Yumii, Noriaki Kimura and Satoshi Hamaguchi
    • Journal Title

      J. Appl. Phys.

      Volume: 未定

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oxidation of Nitric Oxide by Atmospheric Pressure Plasma in a Resonant Plasma Reactor2013

    • Author(s)
      Takayoshi Yumii, Takashi Yoshida,Kyoji Doi,Noriaki Kimura, and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 46

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characteristics of silicon etching by silicon chloride ions2013

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Technol. A.

      Volume: 31

    • NAID

      120006955427

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2013

    • Author(s)
      Satoshi Hamaguchi
    • Journal Title

      AIP Conf. Proc.

      Volume: 未定

    • NAID

      120006957321

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 8S1 Pages: 08HB01-08HB01

    • DOI

      10.1143/jjap.51.08hb01

    • NAID

      210000141076

    • ISSN
      0021-4922, 1347-4065
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy, Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012

    • Author(s)
      S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S.Sugimoto, and S. Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45 Pages: 1-10

    • DOI

      10.1088/0022-3727/45/50/505201

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012

    • Author(s)
      S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S. Sugimoto, S. Hamaguchi,.
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sputtering yields of magnesium hydroxide [Mg(OH)2] by noble-gas ion bombardment2012

    • Author(s)
      Kazumasa Ikuse, Satoru Yoshimura, Masato Kiuchi, Masaharu Terauchi, Mikihiko Nishitani, and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Efficient modification of the surface properties of interconnected porous hydroxyapatite by low-pressure low-frequency plasma treatment to promote its biological performance2012

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Akira Myoui, Hideki Yoshikawa and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microcavity array plasma system for remote chemical processing at atmospheric pressure2012

    • Author(s)
      Dae-Sung Lee, Satoshi Hamaguchi, Osamu Sakai, Sung-Jin Park and J Gary Eden,
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi,
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000141076

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      Thin Solid Films

      Volume: 520

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012

    • Author(s)
      S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M.Nishitani, and S. Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000072700

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      e-J. Surf. Sci. Nanotech.

      Volume: 10 Pages: 139-144

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] プラズマの医療応用2012

    • Author(s)
      浜口智志
    • Journal Title

      パリティ

      Volume: 1月号 Pages: 16-17

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kane, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (掲載予定)

    • NAID

      210000141076

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012

    • Author(s)
      S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      Thin Solid Films

      Volume: (掲載予定)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (掲載予定)

    • NAID

      210000072700

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012

    • Author(s)
      S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      e-J.Surf.Sci.Nanotech.(2012)

      Volume: (掲載予定)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Extracellular Matrix Patterning for Cell Alignment by Atmospheric Pressure Plasma Jets2012

    • Author(s)
      Ayumi Ando, Toshifumi Asano, Md.Abu Saved, Ryugo Tero, Katsuhisa Kitano, Tsuneo Urisu, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 51

    • NAID

      40019199845

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride: Beam study with CF+, CF2+, CHF2+, and CH2F+ ions2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 29

    • DOI

      10.1116/1.3610981

    • NAID

      120006955424

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure2011

    • Author(s)
      Chieh-Wen Lo and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys

      Volume: 44

    • DOI

      10.1088/0022-3727/44/37/375201

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Experimental evaluation of CaO, SrO, and BaO sputtering yields by Ne or Xe ions2011

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys

      Volume: 44

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)2011

    • Author(s)
      Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
    • Journal Title

      J.Appl.Phys.

      Volume: 110

    • NAID

      120006955425

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro pattern formation of extracellular-matrix (ECM) layers by atmospheric-pressure plasmas and cell culture on the patterned EGMs2011

    • Author(s)
      Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys.

      Volume: 44

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Arrangement of PC12 cells on a silicon chip via extracellular matrix (ECM) layer patterning by atmospheric pressure plasmas2011

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Toshifumi Asano, Tsuneo Urisu, Satoshi Hamaguchi
    • Journal Title

      Plasma Fusion Res.

      Volume: 6

    • NAID

      130002059489

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plasma Microchannel and Jet Enhanced by an Array of Ellipsoidal Microcavities2011

    • Author(s)
      D.-S.Lee, O.Sakai, S.-J.Park, J.G.Eden, S.Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci.

      Volume: 39 Pages: 2690-2691

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of Hydrophilicity of Interconnected Porous Hydroxyapatite by Dielectric Barrier Discharge Plasma Treatment2011

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Kiyoshi Okada, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci.

      Volume: 39 Pages: 2166-2167

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dynamics of Near-Atmospheric Pressure Hydrogen Plasmas Driven by Pulsed High Voltages2011

    • Author(s)
      Chieh-Wen Lo, Satoshi Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci

      Volume: 39 Pages: 2100-2101

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Rapid Breakdown Mechanisms of Open Air Nanosecond Dielectric Barrier Discharges2011

    • Author(s)
      Tsuyohito Ito, Tatsuya Kanazawa, Satoshi Hamaguchi
    • Journal Title

      Phys.Rev.Lett.

      Volume: 107

    • NAID

      120006955423

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride : Beam study with CF^+, CF2^+, CHF_2^+, and CH_2F^+ ions2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      J.Vac.Sci.Technol.A

      Volume: 29

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure2011

    • Author(s)
      Chieh-Wen Lo, Satoshi Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys.

      Volume: 44

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si recess of Poly-Si Gate Etching : Damage Enhanced by Ion Assisted Oxygen Diffusion2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] プラズマ医療におけるプラズマ生体相互作用2011

    • Author(s)
      浜口智志
    • Journal Title

      J.Plasma Fusion Res.

      Volume: 87 Pages: 696-703

    • NAID

      110008750649

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 講座原子分子データベースの構築と利用:はじめに:-原子分子データベースの概要とプラズマ研究への応用-2011

    • Author(s)
      村上泉, 長壁正樹, 池田勝則, 西浦正樹, 小田昭紀, 菅原広剛, 浜口智志
    • Journal Title

      J.Plasma Fusion Res

      Volume: 88 Pages: 35-47

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes2010

    • Author(s)
      Y. Murakami, S. Horiguchi, and S. Hamaguchi
    • Journal Title

      Phys. Rev. E

      Volume: 81

    • DOI

      10.1103/physreve.81.041602

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reverse Propagation of Atmospheric Pressure Plasma Jets2010

    • Author(s)
      Tsuyohito Ito, Aurelien Raddenzati, Artabaze Shams, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      40017341196

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plasma-surface Interactions in Material Processing2010

    • Author(s)
      S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 257

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel catalysts : indium implanted SiO2 thin films2010

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      Appl.Surf.Sci.

      Volume: 257 Pages: 192-196

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Protein pattering by atmospheric-pressure plasmas2010

    • Author(s)
      A.Ando, A.Sayed, T.Asano, R.Tero, K.Kitano, T.Urisu, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 227

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Hydrogen Incorporation in the Formation of Hydrogenated Diamond-like Carbon Films2010

    • Author(s)
      Y.Murakami, K.Hosaka, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 232

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Si etching yields by Cl^+, Br^+, and HBr^+ ion irradiation2010

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, Satoshi Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 232

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Particle-in-Cell Simulations of High-Pressure Hydrogen Plasmas Driven by Nano-second Pulsed High-Voltages2010

    • Author(s)
      C.W.Lo, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 232

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO_2 film by CF_3 ion beam injections2010

    • Author(s)
      S.Yoshimura, Y.Tsukazaki, K.Ikuse, M.Kiuchi, S.Hamaguchi
    • Journal Title

      J.Phys. : Conference Series

      Volume: 232

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron density measurement for plasmas by Terahertz time-domain spectroscopy2010

    • Author(s)
      A.Ando, H.Kitahara, T.Kurose, K.Kitano, K.Takano, M.Tani, M.Hangyo, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 227

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electric field measurements in near-atmospheric pressure nitrogen and air based on a four-wave mixing scheme2010

    • Author(s)
      S.Mueller, T.Ito, K.Kobayashi, D.Luggenholscher, U.Czarnetzki, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 227

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes2010

    • Author(s)
      Y.Murakami, S.Horiguchi, S.Hamaguchi
    • Journal Title

      Phys.Rev.E.

      Volume: 81

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Facile Creation of Biointerface on Commodity Plastic Surface by Combination of Atmospheric Plasma and Reactive Polymer Coating2010

    • Author(s)
      Naoki Kanayama, Swapan Kumar Saha, Naoki Nakayama, Jun Nakanishi, Katsuhisa Kitano, Satoshi Hamaguchi, Yukiko Nagasaki
    • Journal Title

      J.Photopolymer Sci.Tech.

      Volume: 23 Pages: 579-583

    • NAID

      130004833370

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA-8)
    • Place of Presentation
      Gaithersburg, MD, USA
    • Year and Date
      2012-09-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Numerical analysis of nano-second pulsed discharge near atmospheric pressure2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Workshop "Physics of Microplasmas"
    • Place of Presentation
      Bochum, Germany
    • Year and Date
      2012-05-30
    • Related Report
      2012 Final Research Report
  • [Presentation] 低エネルギーイオンビーム照射によるPMMAエッチングイールドの測定と水素プラズマ暴露のエッチングイールドへの影響2012

    • Author(s)
      吉村智
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] 大気圧放電に接した水中における活性酸素・活性窒素種の化学反応シミュレーション2012

    • Author(s)
      金澤龍也
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] ヘテロエピタキシャルダイヤモンド成長のためのIr(100)/MgOへの低エネルギー炭素イオン照射2012

    • Author(s)
      井谷司
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] 水素イオン入射によるシリコン中の増速酸化プロセスの入射エネルギー依存性2012

    • Author(s)
      溝谷浩平
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] メタノールプラズマプロセス中のイオン照射によるFeCoBエッチング反応2012

    • Author(s)
      唐橋一浩
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] フロロカーボンイオン照射におけるSiNx:H膜中の水素の含有率の違いによるエッチング反応への影響2012

    • Author(s)
      伊藤智子
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ion beam studies on plasma-surface interactions2012

    • Author(s)
      S.Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) & Tokyo Electron (TEL) Workshop on Future Materials and Processes for Nanotechnology
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-02-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] 磁気抵抗メモリ(MRAM)高集積化のための選択性エッチング機構の解明2012

    • Author(s)
      伊藤智子
    • Organizer
      STARCフォーラム/シンポジウム2011「ライフ&グリーンイノベーション領域への挑戦」
    • Place of Presentation
      新横浜国際ホテル(神奈川)
    • Year and Date
      2012-02-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] Applications of non-equilibrium plasmas in medicine2012

    • Author(s)
      S.Hamaguchi
    • Organizer
      International Symposium for 25th Anniversary of H-mode Bifurcation Theory
    • Place of Presentation
      Fukuoka, Japan(招待講演)
    • Year and Date
      2012-01-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Numerical analysis of silicon oxidation processes enhanced by energetic hydrogen ion injections2012

    • Author(s)
      Kohei Mizotani
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Effects of Thermostat Algorithms for Cooling and Relaxation Processes in MD Simulation2012

    • Author(s)
      Keita Miyake
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Etching reactions of magnetic materials (Ni, Co) in methanol plasma etching processes2012

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Si damage by grazing ion incidence during plasma etching processes2012

    • Author(s)
      Tomoko Ito
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Low-energy carbon-ion injection into Ir(100)/MgO for hetero-epitaxial growth of diamond2012

    • Author(s)
      T.Itani
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Low energy mass-selected metal ion beam production with a modified Freeman-type ion source2012

    • Author(s)
      Y.Yoshimura
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Trapping of hydrogen in silicon near the surface resulting from simultaneous bombardment of argon and hydrogen ions2012

    • Author(s)
      C.Thomas
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Mass-selected ion beam system for the study of beam-surface inter action2012

    • Author(s)
      Hu Li
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Arrangement of PC12 cells on extracellular matrix (ECM) layers patterned by atmospheric pressure plasmas2012

    • Author(s)
      Ayumi Ando
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Zero-Dimensional Reaction Simulations of Reactive Oxygen Species in Water2012

    • Author(s)
      Tatsuya Kanazawa
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular dynamic simulation for enhancement of Si_3N_4/SiO_2 etching selectivity by incorporation of hydrogen in fluorocarbon-based plasmas2012

    • Author(s)
      Ryota Shigekawa
    • Organizer
      The 8^<th> EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] Plasma-Tissue Interaction-Roles of Bio-interfaces in Plasma Medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      21st Material Research Society Japan
    • Place of Presentation
      Yokohama, Japan(招待講演)
    • Year and Date
      2011-12-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Extracellular matrix (ECM) patterning by atmospheric-pressure plasmas for arranging neuronal cells on silicon substrates2011

    • Author(s)
      Ayumi Ando
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      Kanazawa, Japan(招待講演)
    • Year and Date
      2011-11-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] Study of plasma-surface reactions by a multi beam system2011

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      Kanazawa, Japan(招待講演)
    • Year and Date
      2011-11-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] Etching reactions of magnetic thin films by ion irradiation Etching reactions of magnetic thin films by ion irradiation2011

    • Author(s)
      Tomoko Ito
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2011-11-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] 新しいプラズマ科学技術:ライフイノベーションへの挑戦:イントロダクション2011

    • Author(s)
      浜口智志
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      石川県立音楽堂(金沢市)
    • Year and Date
      2011-11-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] Enhancement of hydrogen trapping by heavier ion bombardment in silicon (111) surfaces2011

    • Author(s)
      C.Thomas
    • Organizer
      64th Annual Gaseous Electronics Conference
    • Place of Presentation
      Salt Lake City, Utah, USA
    • Year and Date
      2011-11-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Laser electric field measurement in open-air dielectric barrier discharges2011

    • Author(s)
      Tsuyohito Ito
    • Organizer
      64th Annual Gaseous Electronics Conference
    • Place of Presentation
      Salt Lake City, Utah, USA
    • Year and Date
      2011-11-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Low energy mass-selected metal ion beam production with a modifled Freeman-type ion source for the development of novel catalysts2011

    • Author(s)
      S.Yoshimura
    • Organizer
      6^<th> International Symposium on Surface Science and Nanotechnology
    • Place of Presentation
      Tokyo Japan
    • Year and Date
      2011-11-11
    • Related Report
      2011 Annual Research Report
  • [Presentation] Etching reactions of Ni and Ta films by CO^+, C^+, O^+ and OH^+ ion irradiation2011

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      The 33nd International Symposium on Dry Process
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-11-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Si damage due to oblique-angle icm impact relevant for vertical gate etching processes2011

    • Author(s)
      Tomoko Ito
    • Organizer
      The 33nd International Symposium on Dry Process
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-11-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Enhancement of Si_3N_4/SiO_2 etching selectivity by incorporation of hydrogen in fluorocarbon-based plasmas : comparison of numerical simul ation with beam experiments2011

    • Author(s)
      Ryota Shigekawa
    • Organizer
      The 33nd International Symposium on Dry Process
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-11-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Measurement of MgO, CaO, SrO, and BaO sputtering yields by noble gas ions for plasma display panel cells2011

    • Author(s)
      S.Yoshimura
    • Organizer
      The 33nd International Symposium on Dry Process
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-11-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Optimization and characterization of surface properties of interconnected porous hydroxyapatite via plasma treatment2011

    • Author(s)
      D.-S.Lee
    • Organizer
      The 33nd International Symposium on Dry Process
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-11-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] Plasma Surface Treatment of Artificial Bones and its Application to Regenerative Medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      8th International Conference on Flow Dynamics
    • Place of Presentation
      Sendai, Japan(招待講演)
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ion beam studies on plasma-surface interactions2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) CEMPI Back End Processes Review
    • Place of Presentation
      Denton, TX, USA
    • Year and Date
      2011-11-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] Mechanisms of selective etching for magnetic materials : Ni, Co and Ta etching by carbon monoxide/methyl alcohol based plasmas2011

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      American Vacuum Society 58th International Symposium & Exhibition
    • Place of Presentation
      Nashville, USA
    • Year and Date
      2011-10-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Characteristics of silicon nitride etching by reactive plasmas containing CHxFy ions2011

    • Author(s)
      Tomoko Ito
    • Organizer
      American Vacuum Society 58th International Symposium & Exhibition
    • Place of Presentation
      Nashville, USA
    • Year and Date
      2011-10-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Numerical Simulation of Enhanced Oxygen Diffusion in Silicon as a Cause of Si Recess2011

    • Author(s)
      Kohei Mizotani
    • Organizer
      American Vacuum Society 58th International Symposium & Exhibition
    • Place of Presentation
      Nashville, USA
    • Year and Date
      2011-10-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular dynamic simulation for selective etching of silicon nitride and silicon oxide by hydrofluorocarbon ions2011

    • Author(s)
      Ryota Shigekawa
    • Organizer
      American Vacuum Society 58th International Symposium & Exhibition
    • Place of Presentation
      Nashville, USA
    • Year and Date
      2011-10-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Recent development of plasma medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      2011 Northeastern Asian Symposium on Plasma Fusion
    • Place of Presentation
      Daejeon, Korea(招待講演)
    • Year and Date
      2011-09-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular dynamics (MD) simulation for semiconductor nanotechnology2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      International Symposium on Renewable Energy & Materials Tailoring
    • Place of Presentation
      Kyoto, Japan(招待講演)
    • Year and Date
      2011-09-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ionization-front propagation in nano-second pulsed plasmas near atmospheric pressure: analyses by particle-in-cell (PIC) simulation2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 22nd International Conference on Numerical Simulation of Plasmas
    • Place of Presentation
      Long Branch, NJ. USA
    • Year and Date
      2011-09-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Ionization-front propagation in nano-second pulsed plasmas near atmospheric pressure : analyses by particle-in-cell (PIC) simulation2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 22nd International Conference on Numerical Simulation of Plasmas
    • Place of Presentation
      Long Branch, NJ.USA(招待講演)
    • Year and Date
      2011-09-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] プラズマ医療の現状と課題2011

    • Author(s)
      浜口智志
    • Organizer
      第885回Technical Seminar
    • Place of Presentation
      総評会館(東京)(招待講演)
    • Year and Date
      2011-08-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] HCl^+,HB^+およびSiCl_x^+イオン照射によるSiエッチング反応の評価2011

    • Author(s)
      伊藤智子
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] メタノールプラズマエッチングプロセス中のイオン照射によるNi薄膜酸化過程の解析2011

    • Author(s)
      唐橋一浩
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] 水素イオン入射によるシリコン中の増速酸化プロセスの数値解析2011

    • Author(s)
      溝谷浩平
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] 低圧誘電体バリア放電プラズマ処理による連通多孔体ハイドロキシアパタイトの効果的表面改質2011

    • Author(s)
      Daesung Lee
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] 大気圧プラズマによる培養液中の長寿命ラジカル生成と細胞増殖効果2011

    • Author(s)
      増田一仁
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] SiNエッチングにおける水素反応:分子動力学シミュレーション解析2011

    • Author(s)
      重川遼太
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] インジウム照射SiO2基板の触媒効果の入射エネルギー依存性2011

    • Author(s)
      吉村智
    • Organizer
      第72回応用物理学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] Plasma medicine in orthopaedics2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 1st International Symposium for Plasma Biosciences
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2011-08-14
    • Related Report
      2012 Final Research Report
  • [Presentation] Plasma medicine in orthopaedics2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 1st International Symposium for Plasma Biosciences
    • Place of Presentation
      Seul, Korea(招待講演)
    • Year and Date
      2011-08-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Dielectric barrier discbarge plasma treatment of biomaterial surfaces for orthopaedic applications2011

    • Author(s)
      D.-S.Lee
    • Organizer
      the 1st International Symposium for Plasma Biosciences
    • Place of Presentation
      Seul, Korea
    • Year and Date
      2011-08-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Patterning of an extracellular matrix (ECM) layer on silicon by atmos pheric-pressure plasmas for living neuron network chip fabrication2011

    • Author(s)
      Ayumi Ando
    • Organizer
      The 20th International Symposium on Plasma Chemistry
    • Place of Presentation
      Philadelphia, USA
    • Year and Date
      2011-07-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Plasma Irradiation Effects on Cells, Tissues, and Biomaterials in Orthopaedic Applications2011

    • Author(s)
      Kazuto Masuda
    • Organizer
      The 20th International Symposium on Plasma Chemistry
    • Place of Presentation
      Philadelphia, USA
    • Year and Date
      2011-07-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Particle-in-cell (PIC) simulation analysis of the ionization-front propagation in the formation phase of a nano-second pulsed atmospheric-pressure hydrogen plasma2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 20th International Symposium on Plasma Chemistry
    • Place of Presentation
      Philadelphia, USA
    • Year and Date
      2011-07-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Helium-Oxygen Plasma Treatment of Interconnected Porous Hydroxya patite as a Material for Artificial Bones2011

    • Author(s)
      Dae-Sung Lee
    • Organizer
      the 24th Symposium on Plasma Science for Materials
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-07-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Hydrogen trapping enhanced by ion induced damages in silicon2011

    • Author(s)
      C.Thomas
    • Organizer
      the 3rd International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Dalian, China
    • Year and Date
      2011-07-04
    • Related Report
      2011 Annual Research Report
  • [Presentation] Discharge Formation Mechanisms of Nano-Second High-Pressure Hydrogen Discharges2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 3rd International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Dalian, China
    • Year and Date
      2011-07-04
    • Related Report
      2011 Annual Research Report
  • [Presentation] カーボン堆積膜の密着性解析2011

    • Author(s)
      松隈正明
    • Organizer
      第1回マルチスケールマテリアルモデリングシンポジウム・第16回分子動力学シンポジウム
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-05-23
    • Related Report
      2011 Annual Research Report
  • [Presentation] 水素希釈炭化水素プラズマによるDLC薄膜堆積プロセスの分子動力学シミュレーション解析2011

    • Author(s)
      村上泰夫
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si酸化反応における水素イオン照射効果2011

    • Author(s)
      伊藤智子
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] CO+イオンによるCo,NiおよびTaエッチング反応2011

    • Author(s)
      唐橋一浩
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] フロロカーボンプラズマからのイオン照射によるPMMAのエッチングイールド2011

    • Author(s)
      塚崎泰裕
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] PMMA(ポリメチルメタクリレート)のビームエッチング分子動力学シミュレーション2011

    • Author(s)
      森田泰光
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 分子動力学法を用いたシリコン窒化膜のエッチングシミュレーション2011

    • Author(s)
      重川遼太
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 整形外科分野におけるプラズマ技術応用の可能性2011

    • Author(s)
      浜口智志
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] Surface modification of interconnected porous hydroxyapatite by dielectric barrier discharge (DBD) plasma treatment2011

    • Author(s)
      Dae-Sung Lee
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 大気圧プラズマ照射による細胞増殖促進プロセス2011

    • Author(s)
      増田一仁
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 大気圧低温プラズマによる神経細胞ネットワーク用細胞外マトリックスパターニング技術の開発2011

    • Author(s)
      安藤あゆみ
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 最近のプラズマ医療研究の動向2011

    • Author(s)
      浜口智志
    • Organizer
      第1回プラズマ医療・健康産業シンポジウム/第5回光・プラズマプロセスのバイオ応用ワークショップ
    • Place of Presentation
      大阪大学中之島センター、大阪市
    • Year and Date
      2011-03-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] Molecular Dynamics Simulation of enhanced oxygen diffusion in silicon by energetic hydrogen ion injections2011

    • Author(s)
      Kouhei Mizotani
    • Organizer
      2011 Japan-Taiwan Symposium on Polyscale Technologies for Biomedical Engineering and Environmental Sciences/The 5th Polyscale Technology Workshop (PT-BMES 2011/PTW-5)
    • Place of Presentation
      Noda, Chiba, Japan
    • Year and Date
      2011-03-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effects of Low-Temperature Atmospheric-Pressure Plasmas Application on Cell Proliferation and Biomaterial Surface Modification2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2011 Japan-Taiwan Symposium on Polyscale Technologies for Biomedical Engineering and Environmental Sciences/The 5th Polyscale Technology Workshop (PT-BMES 2011/PTW-5)
    • Place of Presentation
      Noda, Chiba, Japan
    • Year and Date
      2011-03-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] 磁性体およびSi系材料反応性イオンエッチングの表面反応解析2011

    • Author(s)
      浜口智志
    • Organizer
      応用物理学会シリコンテクノロジー分科会第133会研究会「最先端プラズマプロセスにおけるダメージ/バラつき/異物制御」
    • Place of Presentation
      東京大学弥生キャンパス、東京都文京区(招待講演)
    • Year and Date
      2011-02-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] Interactions of Low-Temperature Atmospheric-Pressure Plasmas with Cells, Tissues, and Biomaterials for Orthopaedic Applications2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 40th Winter AnnualConference of the Korean Vacuum Society
    • Place of Presentation
      Gangwon-do, Korea
    • Year and Date
      2011-02-09
    • Related Report
      2012 Final Research Report
  • [Presentation] Interactions of Low-Temperature Atmospheric-Pressure Plasmas with Cells, Tissues, and Biomaterials for Orthopaedic Applications2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 40th Winter Annual Conference of the Korean Vacuum Society
    • Place of Presentation
      Gangwon-d, Korea(invited)
    • Year and Date
      2011-02-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] イオン・ラジカルビームによる表面反応解析2010

    • Author(s)
      唐橋一浩
    • Organizer
      第10回インテリジェント・ナノプロセス研究会
    • Place of Presentation
      東北大学流体科学研究所、仙台市(招待講演)
    • Year and Date
      2010-12-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] 大気圧プラズマによる神経細胞ネットワークチップ用細胞外マトリックスパターニング2010

    • Author(s)
      安藤あゆみ
    • Organizer
      第27回プラズマ・核融合学会年会
    • Place of Presentation
      北海道大学,札幌市
    • Year and Date
      2010-11-30
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si recess of poly-Si gate etching : damage enhanced by ion assisted oxygen diffusion2010

    • Author(s)
      Tomoko Ito
    • Organizer
      The 32nd International Symposium on Dry Process (DPS)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] Mechanisms of selective etching for magnetic thin films by reactive plasmas for MRAM applications2010

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      The 32nd International Symposium on Dry Process (DPS)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] Propagation of an Ionization Front of Hydrogen Plasma Driven by Pulsed High Voltage under High Pressure2010

    • Author(s)
      Chieh-Wen Lo
    • Organizer
      The 52nd Annual Meeting of the Division of Plasma Physics, American Physical Society
    • Place of Presentation
      Chicago, IL, USA
    • Year and Date
      2010-11-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] Etching mechanisms of Pt, Co and PtCo magnetic films by chemically reactive energetic ion injections2010

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      American Vacuum Society 57th International Symposium & Exhibition
    • Place of Presentation
      Albuquerque, New Mexico, USA
    • Year and Date
      2010-10-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Characteristics of silicon nitride etching by reactive plasmas containing CHxFy ions2010

    • Author(s)
      Tomoko Ito
    • Organizer
      American Vacuum Society 57th International Symposium & Exhibition
    • Place of Presentation
      Albuquerque, New Mexico, USA
    • Year and Date
      2010-10-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Molecular dynamics simulation of fluorocarbon/hydrogen ion beam interaction with a PMMA (polymethyl methacrylate) surface2010

    • Author(s)
      Yasumitsu Morita
    • Organizer
      American Vacuum Society 57th International Symposium & Exhibition
    • Place of Presentation
      Albuquerque, New Mexico, USA
    • Year and Date
      2010-10-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Extracellular matrix patterning by atmospheric pressure plasma jets2010

    • Author(s)
      Ayumi Ando
    • Organizer
      the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference (ICRP-7/SPP-28/GEC-63)
    • Place of Presentation
      Paris, France
    • Year and Date
      2010-10-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] Plasma Stimulation for Cell Proliferation and Their Possible Applications in Orthopedics2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 3rd International Conference on Plasma Medicine (ICPM-3)
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      2010-09-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] CHxFy+イオンエッチングにおける水素の効果2010

    • Author(s)
      伊藤智子
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学文教キャンパス、長崎市
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] CO+イオンによるPt,CoおよびPtCoエッチング反応2010

    • Author(s)
      唐橋一浩
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学文教キャンパス、長崎市
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] フロロカーボンおよび水素イオン入射によるPMMA(ポリメチルメタクリレート)表面の改質に関する分子動力学シミュレーション2010

    • Author(s)
      森田泰光
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学文教キャンパス、長崎市
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Diagnosis of Atmospheric Pressure Plasmas by using Terahertz Time-Domain Spectroscopy2010

    • Author(s)
      Hideaki Kitahara
    • Organizer
      The 35th International Conference on Infrared, Millimeter and THz Waves (IRMMW-THz 2010)
    • Place of Presentation
      Rome, Italy
    • Year and Date
      2010-09-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Plasma surface interactions in material processing2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 25th Summer School and International Symposium on the Physics of Ionized Gases (SPIG 2010)
    • Place of Presentation
      Donji Milanovac, Serbia
    • Year and Date
      2010-08-30
    • Related Report
      2012 Final Research Report
  • [Presentation] PLASMA SURFACE INTERACTIONS IN MATERIAL PROCESSING2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 25th Summer School and International Symposium on the Physics of Ionized Gases (SPIG2010)
    • Place of Presentation
      Donji Milanovac, Serbia(invited)
    • Year and Date
      2010-08-30
    • Related Report
      2010 Annual Research Report
  • [Presentation] 次世代磁性体デバイス高精度超微細加工プロセスの開発2010

    • Author(s)
      伊藤智子
    • Organizer
      STARCフォーラム/シンポジウム2010「アプリを拡大する設計技術と半導体の未来」
    • Place of Presentation
      新横浜国際ホテル、横浜市
    • Year and Date
      2010-08-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 低エネルギーイオンビームを用いたポリマーのエッチングとその表面分析2010

    • Author(s)
      塚崎泰裕
    • Organizer
      第5回三大学(東京理科大・筑波大・大阪大)連携学生研究会「アトミック/ポリスケールテクノロジー連携研究会」
    • Place of Presentation
      東京理科大学・長万部キャンパス,北海道長万部
    • Year and Date
      2010-08-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 質量分離イオンビームを用いた反応性イオンによる磁性体膜エッチング反応の評価2010

    • Author(s)
      唐橋一浩
    • Organizer
      第30回スピンエレクトロニクス専門研究会:スピントロニクスデバイスを支えるプラズマ技術
    • Place of Presentation
      東京都千代田区 化学会館(招待講演)
    • Year and Date
      2010-07-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 低温大気圧プラズマを用いる汎用高分子基板上へのバイオ界面の構築2010

    • Author(s)
      金山直樹
    • Organizer
      27th International Conference of Photopolymer Science and Technology (ICPST-27)
    • Place of Presentation
      千葉大学、千葉市
    • Year and Date
      2010-06-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] Molecular dynamics simulation study on sputtering of graphite or amorphous carbon by low-energy hydrogen or its isotope ion beams2010

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 37th IEEE International Conference on Plasma Science (ICOPS2010)
    • Place of Presentation
      Norfolk, Virginia, USA
    • Year and Date
      2010-06-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] Dynamics of near-atmospheric-pressure hydrogen plasmas driven by pulsed high voltages2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 37th IEEE International Conference on Plasma Science (ICOPS2010)
    • Place of Presentation
      Norfolk, Virginia, USA
    • Year and Date
      2010-06-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] Analyses of elementary ion-surface interactions for low-damage plasma etching processes

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Korean Physical Society (KPS) 2012 Spring Meeting
    • Place of Presentation
      Daejeon Convention Center, Daejeon, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Numerical analysis of nano-second pulsed discharge near atmospheric pressure

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Workshop “Physics of Microplasmas”
    • Place of Presentation
      Bochum, Germany
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Plasma Surface Modification of Artificial Bones for Bone Regeneration

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Oreleans, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Cell proliferation enhanced by atmospheric-pressure plasma application for cells of interest in orthopedics

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Oreleans, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Numerical Simulation of Reactive Species in Liquids in Contact with Atmospheric Pressure Plasmas

    • Author(s)
      Tatsuya Kanazawa
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      oreleans, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Analyses of plasma-surface interactions by numerical simulations and multi-beam experiments

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Microelectronics and Plasma Technology 2012 (ICMAP2012)
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Oxidization of Nitric Oxide by Atmospheric Plasmas Generated by a Radio-Frequency (RF) driven High Q-factor Resonator

    • Author(s)
      Takayoshi Yumii
    • Organizer
      4th International Conference on Microelectronics and Plasma Technology 2012 (ICMAP2012)
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2012 Annual Research Report
  • [Presentation] Plasma treatment of artificial bones

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2nd International Symposium for Plasma Biosciences (SPB2012)
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA-8)
    • Place of Presentation
      National Institute of Standards and Technology (NIST), Gaithersburg, MD, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Study on plasma-surface interaction in LIA336

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      CNRS-LIA336 Workshop
    • Place of Presentation
      Kyushu University, Hakozaki Campus, Japan
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Ion-bombardment-induced diffusion and drift of impurity atoms in solids

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      IUMRS (International Union of Materials Research Societies)-International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Ion beam studies on plasma-surface interactions SRC

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) NMS (Nanomanufacturing Sciences) Patterning Annual Review
    • Place of Presentation
      Chicago, Il, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Plasma Biomedicine in Orthopedics

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Workshop on Plasma Biomedicine, 65th Annual Gaseous Electronics Conference
    • Place of Presentation
      Austin, TX, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Low energy metal iom beam injection to SiO2 thin films for development of novel catalysts

    • Author(s)
      S. Yoshimura
    • Organizer
      25th International Conference on Atomic Collisions in Solids (ICACS-25), (21-25 October, 2012) & 8th International Symposium on Swift Heavy Ions in Matter (SHIM2012)
    • Place of Presentation
      Kyoto University, Kyoto, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Roles of hydrogen for hydrofluorocarbon (HFC) plasma etching of silicon nitride (SiN)

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium & Exhibition
    • Place of Presentation
      Tampa, Fl, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Analysis of target oxidation in reactive sputter deposition processes of silicon dioxide

    • Author(s)
      Kazuhiro Hoshino
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium & Exhibition
    • Place of Presentation
      Tampa, Fl, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Etching reaction of CoFeB by carbon monoxide /methyl alcohol based plasmas

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium & Exhibition
    • Place of Presentation
      Tampa, Fl, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Molecular Dynamic Simulation of Possible Damage Formation at Vertical Walls of finFET Devices during Plasma Etching Processes

    • Author(s)
      Kohei Mizotani
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium & Exhibition
    • Place of Presentation
      Tampa, Fl, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Reactive etching or deposition properties of silicon halide ions in gate etching processes

    • Author(s)
      Tomoko Ito
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium & Exhibition
    • Place of Presentation
      Tampa, Fl, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Evaluation of sputtering yields of silicon nitride by fluoro/hydrofluorocarbon ions by molecular dynamics (MD) simulations: modeling of thermal relaxation processes for polymer formation

    • Author(s)
      Keita Miyake
    • Organizer
      International Symposium on Dry Process (DPS)
    • Place of Presentation
      U. Tokyo, Tokyo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Etching reaction of CoFeB by carbon monoxide /methyl alcohol based plasmas

    • Author(s)
      Kazuhiro Karahashi
    • Organizer
      International Symposium on Dry Process (DPS)
    • Place of Presentation
      U. Tokyo, Tokyo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Plasma surface modification of porous hydroxyapatite artificial bones

    • Author(s)
      Yu Moriguchi
    • Organizer
      Orthopaedic Research Society (ORS) 2013 Annual Meeting
    • Place of Presentation
      San Antonio, TX, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマ科学技術の建築分野での活用

    • Author(s)
      浜口智志
    • Organizer
      建築研究開発コンソーシアム(CBRD) テクニカルフォーラム
    • Place of Presentation
      晴海トリトンスクエア、東京都中央区
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ハイドロキシアパタイト人工骨に対する低温プラズマ処理

    • Author(s)
      森口悠
    • Organizer
      第6回連通多孔体セラミックス学術研究会
    • Place of Presentation
      京都センチュリーホテル、京都府京都市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 希ガスイオン照射による水酸化マグネシウムのスパッタ率測定

    • Author(s)
      幾世和将
    • Organizer
      第73回応用物理学学術講演会
    • Place of Presentation
      松山大学、愛媛県松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] SiFx+イオン照射によるSi, Si3N4およびSiO2エッチング反応解析

    • Author(s)
      伊藤智子
    • Organizer
      第73回応用物理学学術講演会
    • Place of Presentation
      松山大学、愛媛県松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 大気圧プラズマにより水中に誘起される化学種の反応シミュレーション

    • Author(s)
      金澤龍也
    • Organizer
      第73回応用物理学学術講演会
    • Place of Presentation
      松山大学、愛媛県松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] メタノールプラズマ中のイオン照射によるCoFeB エッチング反応 (2)

    • Author(s)
      唐橋一浩
    • Organizer
      第73回応用物理学学術講演会
    • Place of Presentation
      松山大学、愛媛県松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] ビーム表面相互作用分子動力学(MD)シミュレーションにおける基板熱緩和過程の解析

    • Author(s)
      三宅啓太
    • Organizer
      第73回応用物理学学術講演会
    • Place of Presentation
      松山大学、愛媛県松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマエッチングにおけるゲートダメージ層形成機構の数値解析

    • Author(s)
      溝谷浩平
    • Organizer
      第73回応用物理学学術講演会
    • Place of Presentation
      松山大学、愛媛県松山市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Silicon Etching Characteristics by Ions of Desorbed Species (SiClx+)

    • Author(s)
      李虎
    • Organizer
      第6回プラズマエレクトロニクスインキュベーションホール
    • Place of Presentation
      国立中央青少年交流の家、静岡県名御殿場市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 磁気抵抗メモリ(MRAM)高集積化のための選択性エッチング反応の研究

    • Author(s)
      村木裕
    • Organizer
      第6回プラズマエレクトロニクスインキュベーションホール
    • Place of Presentation
      国立中央青少年交流の家、静岡県名御殿場市
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマエッチングによるFinFET側壁ダメージ層形成機構の数値解析

    • Author(s)
      溝谷浩平
    • Organizer
      第6回プラズマエレクトロニクスインキュベーションホール
    • Place of Presentation
      国立中央青少年交流の家、静岡県名御殿場市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低圧酸素プラズマを用いた人工骨表面処理

    • Author(s)
      斉宮大
    • Organizer
      第6回プラズマエレクトロニクスインキュベーションホール
    • Place of Presentation
      国立中央青少年交流の家、静岡県名御殿場市
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマ技術の紹介と現況

    • Author(s)
      浜口智志
    • Organizer
      建築研究開発コンソーシアム(CBRD) プラズマの建築利用研究会第一回研究会
    • Place of Presentation
      晴海区民館、東京都中央区
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低エネルギーイオンビーム照射によるPMMAエッチングイールドへの紫外線照射および水素プラズマ暴露の影響

    • Author(s)
      吉村智
    • Organizer
      第53回真空に関する連合講演会
    • Place of Presentation
      甲南大学ポートアイランドキャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマ医療研究の最前線」

    • Author(s)
      浜口智志
    • Organizer
      プラズマ・核融合学会第29回年会
    • Place of Presentation
      クローバープラザ 福岡県春日市
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 量子カスケードレーザーを用いた大気圧RFプラズマリアクター内の赤外吸収分光計測

    • Author(s)
      弓井孝佳
    • Organizer
      プラズマ・核融合学会第29回年会
    • Place of Presentation
      クローバープラザ 福岡県春日市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 大気圧放電に接する液中に生成される活性酸素・活性窒素

    • Author(s)
      浜口智志
    • Organizer
      2012年度原子分子データ応用フォーラムセミナー:高Zプラズマの原子過程と、酸素分子が関係する原子分子過程とその応用
    • Place of Presentation
      核融合科学研究所 岐阜県土岐市
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 大気圧・液中プラズマ照射によるバイオ・ナノプロセス

    • Author(s)
      浜口智志
    • Organizer
      応用物理理学会励起ナノプロセス研究会主催第8回励起ナノプロセス研究会
    • Place of Presentation
      大阪大学中之島センター 大阪市北区
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 大気圧プラズマにより誘起される水中における活性酸素・活性窒素種の生成

    • Author(s)
      金澤龍也
    • Organizer
      第30回プラズマプロセシング研究会
    • Place of Presentation
      アクトシティ―浜松 静岡県浜松市
    • Related Report
      2012 Annual Research Report
  • [Presentation] ゲートエッチングプロセスにおけるハロゲン化シリコンイオン(SiFx+, SiClx+ )による表面反応

    • Author(s)
      伊藤智子
    • Organizer
      第30回プラズマプロセシング研究会
    • Place of Presentation
      アクトシティ―浜松 静岡県浜松市
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマエッチングにおけるナノメートル表面層反応機構の解明

    • Author(s)
      伊藤智子
    • Organizer
      第156回 応用物理学会シリコンテクノロジー分科会研究会:「プラズマプロセスの最前線」
    • Place of Presentation
      東京大学本郷キャンパス、東京都文京区
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Numerical Analysis of Damage Formation in Vertical-Walls Gate Etching Processes

    • Author(s)
      Kohei Mizotani
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)
    • Place of Presentation
      名古屋大学、 愛知県名古屋市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低エネルギーインジウム照射SiO2の触媒効果の基板温度依存性

    • Author(s)
      吉村智
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学 神奈川県厚木市
    • Related Report
      2012 Annual Research Report
  • [Presentation] ハイドロフルオロカーボン(HFC)プラズマによるSiNエッチングにおける表面ポリマー形成過程の解析

    • Author(s)
      三宅啓太
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学 神奈川県厚木市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 酸素ガスクラスタービーム照射によるシリコン表面酸化プロセスの分子動力学シミュレーション

    • Author(s)
      溝谷浩平
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学 神奈川県厚木市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Taマスクの形状制御のための斜め入射イオンによるスパッタリング解析

    • Author(s)
      李虎
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学 神奈川県厚木市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 磁性体エッチングプロセスにおけるN+イオン照射効果

    • Author(s)
      村木裕
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学 神奈川県厚木市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 浜口智志 プラズマ・ラジカルの物理とその医療応用

    • Author(s)
      浜口智志
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      広島大学東広島キャンパス 広島県東広島市
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Book] プラズマ原子分子過程ハンドブック2011

    • Author(s)
      浜口智志、村上 泉、加藤太治
    • Total Pages
      394
    • Publisher
      大阪大学出版会
    • Related Report
      2012 Final Research Report
  • [Book] プラズマ原子分子過程ハンドブック2011

    • Author(s)
      浜口智志、村上泉、加藤太治
    • Total Pages
      394
    • Publisher
      大阪大学出版会
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.camt.eng.osaka-u.ac.jp/hamaguchi/

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://www.camt.eng.osaka-u.ac.jp/hamaguchi/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.camt.eng.osaka-u.ac.jp/hamaguchi/

    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] バイオセラミックスを含む人工骨の改質方法と、その方法で改質された人工骨2012

    • Inventor(s)
      浜口智志 吉川秀樹 他
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2012-085854
    • Filing Date
      2012-04-04
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] バイオセラミックスを含む人工骨の改質方法と、その方法で改質された人工骨2012

    • Inventor(s)
      浜口智志 吉川秀樹 他
    • Industrial Property Rights Holder
      浜口智志 吉川秀樹 他
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-085854
    • Filing Date
      2012-04-04
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 人工骨、人工骨製造装置及び人工骨製造方法2011

    • Inventor(s)
      浜口智志 吉川秀樹 他、
    • Industrial Property Rights Holder
      大阪大学
    • Filing Date
      2011-09-16
    • Related Report
      2012 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 人工骨、人工骨製造装置及び人工骨製造方法2011

    • Inventor(s)
      浜口智志、森口悠、増田一仁、岡田潔、名井陽、吉川秀樹、李大成
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Filing Date
      2011-09-16
    • Related Report
      2011 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 人工骨、人工骨製造装置及び人工骨製造方法2010

    • Inventor(s)
      浜口智志、森口悠、増田一仁、岡田潔、名井陽、吉川秀樹
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Number
      2010-207645
    • Filing Date
      2010-09-16
    • Related Report
      2010 Annual Research Report

URL: 

Published: 2010-08-22   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi