| Project/Area Number |
22246016
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TAKAMASU Kiyoshi 東京大学, 工学(系)研究科(研究院), 教授 (70154896)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAHASHI Satoru 東京大学, 大学院工学系研究科, 教授 (30283724)
MATSUMOTO Hirokazu 東京大学, 大学院工学系研究科, 教授 (00358045)
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| Co-Investigator(Renkei-kenkyūsha) |
FURUTANI Ryoshu 東京電機大学, 工学部, 教授 (50219119)
MISUMI Ichiko 独立行政法人産業技術総合研究所, 計測標準研究部門, 主任研究員 (40358099)
SATO Osamu 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究員 (60392619)
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| Project Period (FY) |
2010-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥28,730,000 (Direct Cost: ¥22,100,000、Indirect Cost: ¥6,630,000)
Fiscal Year 2013: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2012: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Fiscal Year 2011: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2010: ¥8,060,000 (Direct Cost: ¥6,200,000、Indirect Cost: ¥1,860,000)
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| Keywords | ナノメートル計測 / 三次元計測 / 不確かさ推定 / 形状測定 |
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| Outline of Final Research Achievements |
We conducted four research tasks shown below for uncertainty systematization of the nanometer three dimensional measurement in nanoscale production system, and systematized the uncertainty estimation technique.
(1) In the theory of the uncertainty of nanometer three dimensional measurement, we developed the software which estimates uncertainty by propagation from the kinematic errors of a measuring machine, and checked the validity of the estimation. (2) In optical nanometer three dimensional form measurement, we developed the aspheric surface measurement technique in which we used the angle sensor, and performed the uncertainty estimation. (3) In the standard development for nanoscale, we carried out three dimensional form measurement of the semiconductor structure of using Si lattice as a scale. (4) In the pulse interferometer by an optical comb, we built the pulse interferometer and performed accuracy evaluation of the coordinate measuring machine.
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