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Formation of wafer-scale graphene by molecular beam epitaxy

Research Project

Project/Area Number 22310077
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionNTT Basic Research Laboratories

Principal Investigator

MAEDA Fumihiko  日本電信電話株式会社NTT物性科学基礎研究所, 機能物質科学研究部, 主幹研究員 (70393741)

Co-Investigator(Kenkyū-buntansha) HIBINO Hiroki  日本電信電話株式会社NTT物性科学基礎研究所, 機能物質科学研究部, 部長 (60393740)
Co-Investigator(Renkei-kenkyūsha) KOBAYASHI Yasuyuki  日本電信電話株式会社NTT物性科学基礎研究所, 機能物質科学研究部, 主幹研究員 (90393727)
Project Period (FY) 2010-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Fiscal Year 2010: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Keywordsナノ構造形成・制御 / グラフェン / 結晶成長 / 分子線エピタキシャル成長 / 六方晶窒化硼素 / 欠陥 / ヘテロ成長 / 相互作用 / 拡散長 / X線光電子分光 / 分子線エピタキシャル成長法 / 界面反応 / ヘテロエピタキシャル成長 / 単結晶領域 / 表面拡散 / X線光電子分光 / 分子線エピタキシ法 / エチレン / 成長過程 / ホモエピタキシャル成長 / 供給律速 / 微傾斜基板 / エタノール / エッチング
Research Abstract

To form large-area graphene in wafer size by employing gas-source molecular beam epitaxy, we investigated the growth process of graphene and the formation of heterostructure of graphene on semiconducting substrates. We found that competitive reactions, growth and etching, occur when ethanol is used for the growth gas and the suppression of etching is crucial for the high quality graphene. In addition, the migration enhancement of growth material is the key to enlarge the single-crystal domain of graphene. For the heterostructure formation, when we select the substrate, in addition to lattice-match with graphene, the interaction between adsorbates of growth material and a substrate is significant factor.

Report

(5 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (57 results)

All 2014 2013 2012 2011 2010 Other

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (30 results) (of which Invited: 3 results) Remarks (10 results) Patent(Industrial Property Rights) (7 results)

  • [Journal Article] Core-level photoelectron spectroscopy study of interface structure of hydrogen-intercalated graphene on n-type 4H-SiC(0001)2013

    • Author(s)
      Fumihiko Maeda, Shinichi Tanabe, Shingo Isobe and Hiroki Hibino
    • Journal Title

      Phys. Rev. B

      Volume: Vol. 88 Pages: 85422-85422

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Molecular beam epitaxial growth of graphene using cracked ethylene2013

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Journal Title

      J. Crystal Growth

      Volume: Vol. 378 Pages: 404-409

    • DOI

      10.1016/j.jcrysgro.2012.12.073

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Core-level photoelectron spectroscopy study of interface structure of hydrogen-intercalated graphene on n-type 4H-SiC(0001)2013

    • Author(s)
      Fumihiko Maeda, Shinichi Tanabe, Shingo Isobe, and Hiroki Hibino
    • Journal Title

      Physical Review B

      Volume: 88 Issue: 8 Pages: 85422-85422

    • DOI

      10.1103/physrevb.88.085422

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural Instability of Transferred Graphene Grown by Chemical Vapor Deposition against Heating2013

    • Author(s)
      Satoru Suzuki, Carlo Orofeo, Shengnan Wang, Fumihiko Maeda, Makoto Takamura, and Hiroki Hibino
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: 117 Issue: 42 Pages: 22123-22130

    • DOI

      10.1021/jp407734k

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular beam epitaxial growth of graphene using cracked ethylene ― Advantage over ethanol in growth2013

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Journal Title

      Diamond & Related Materials

      Volume: 34 Pages: 84-88

    • DOI

      10.1016/j.diamond.2013.02.007

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular beam epitaxial growth of graphene using cracked ethylene2013

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Journal Title

      Journal of Crystal Growth

      Volume: 未定

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Graphene Nanofin Networks on Graphene/SiC(0001) by Molecular Beam Epitaxy2012

    • Author(s)
      Fumihiko Maeda, Hiroki Hibino
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51(未定)(印刷中)

    • NAID

      210000140732

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular beam epitaxial growth of graphene and ridge-structure networks of graphene2011

    • Author(s)
      F. Maeda and H. Hibino
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 44 Issue: 43 Pages: 435305-435305

    • DOI

      10.1088/0022-3727/44/43/435305

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Few-Layer Graphene Grown by Gas-Source Molecular Beam Epitaxy Using Cracked Ethanol2011

    • Author(s)
      Fumihiko Maeda, Hiroki Hibino, Ichiro Hirosawa, Yoshio Watanabe
    • Journal Title

      e-J.Surf.Sci.Nanotech.

      Volume: 9 Pages: 58-62

    • NAID

      130004934129

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of graphene growth by gas-source molecular beam epitaxy using cracked ethanol : Influence of gas flow rate on graphitic material deposition2011

    • Author(s)
      Fumihiko Maeda, Hiroki Hibino
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50(未定(印刷中))

    • NAID

      210000070680

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] SiC (0001)に形成したバッファー層上へのMBEによるグラフェン成長2014

    • Author(s)
      前田文彦,高村真琴,日比野浩樹
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学(相模原市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] SiC 上バッファ層の水素雰囲気下でのアニール - グラフェンリッジの生成とエッチング -2014

    • Author(s)
      高村 真琴, 高木 翔平, 前田 文彦, 日比野 浩樹
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学(相模原市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] グラフェン 積層 接合の電気特性2014

    • Author(s)
      茶谷洋光,奥村俊夫,伊澤輝記,井口宗明,中島健志,小林慶祐,呉龍錫,有月琢哉,松本卓也,永瀬雅夫,前田 文彦,日比野 浩樹
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学(相模原市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Heating-induced disorder of graphene transferred to a substrate2014

    • Author(s)
      Satoru Suzuki, Carlo M. Orofeo, Shengnan Wang, Fumihiko Maeda, Makoto Takamura, and Hiroki Hibino
    • Organizer
      41st Conference on the Physics & Chemistry of Surface & Interface
    • Place of Presentation
      La Fonda Hotel, Santa Fe, New Mexico, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Growth of graphene by molecular beam epitaxy using cracked ethanol and ethylene2013

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Organizer
      Paul-Drude-Institut Topical Workshop on MBE-Grown Graphene 2013
    • Place of Presentation
      Paul-Drude-Institut, Berlin, Germany
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Invited
  • [Presentation] 大気中通電が誘起するグラフェン/水素終端SiC(0001)における界面酸化反応と移動度の低下2013

    • Author(s)
      前田文彦,磯部真吾,日比野浩樹
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学(京都府京田辺市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ru(0001)表面に成長したグラフェンの凹凸構造II2013

    • Author(s)
      村田 祐也,鈴木 哲,前田 文彦,日比野 浩樹
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学(京都府京田辺市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] 基板上に転写された CVD グラフェンの加熱に対する構造不安定性2013

    • Author(s)
      鈴木 哲, 前田 文彦, Shengnan Wang, Carlo M. Orofeo, 日比野 浩樹
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学(京都府京田辺市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Photoelectron spectroscopy study of interface structure of hydrogen intercalated graphene/SiC(0001)2013

    • Author(s)
      F. Maeda, S. Tanabe, and H. Hibino
    • Organizer
      The 40th International Symposium on Compound Semiconductors
    • Place of Presentation
      Kobe Convention Center, Kobe, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Graphene growth on graphene by molecular beam epitaxy2013

    • Author(s)
      F. Maeda
    • Organizer
      Crystal & Graphene Science Symposium
    • Place of Presentation
      Hilton Garden Inn, Waltham, MA, USA
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Current-induced oxidation at the interface of hydrogen-intercalated graphene/SiC(0001) under atmospheric ambient and mobility degradation2013

    • Author(s)
      F. Maeda, S. Isobe, and H. Hibino
    • Organizer
      5th International Conference on Research Progress in Graphene Research
    • Place of Presentation
      Tokyo Tech Front, Tokyo Institute of Technology, Tokyo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Current-induced modulation of hydrogenated graphene/SiC(0001): Difference between current applied in vacuum and air2013

    • Author(s)
      F. Maeda, S. Isobe, and H. Hibino
    • Organizer
      12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
    • Place of Presentation
      Tsukuba International Congress Center, Tsukuba, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] エチレンを用いたガスソースMBEによるグラフェン成長2012

    • Author(s)
      前田文彦, 日比野浩樹
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都新宿区)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular beam epitaxial growth of graphene using cracked ethylene -Advantage over ethanol in growth-2012

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Organizer
      International Conference on Diamond and Carbon Materials 2012 (ICDCM 2012)
    • Place of Presentation
      Palacio de Exposiciones y Congresos, Granada, Spain (口頭発表)
    • Related Report
      2013 Final Research Report
  • [Presentation] Formation ot Fin-like Ridge-structures of Graphene on Graphene/SiC(0001) by Molecular Beam Epitaxy2011

    • Author(s)
      Fumihiko Maeda, Hiroki Hibino
    • Organizer
      24rd International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      NA Hotel Kyoto, Kyoto, Japa
    • Year and Date
      2011-10-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] エピタキシャルグラフェン成長のSiC基板面方位依存性2011

    • Author(s)
      日比野浩樹, 田邉真一, 前田文彦, 影島博之, 鶴田和弘
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形市)
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] ガスソースMBEによるグラフェンの成長-フィン状構造の形成2011

    • Author(s)
      前田文彦, 日比野浩樹
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形市)
    • Year and Date
      2011-08-31
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular Beam Epitaxy Growth of Graphene and Ridge-Structure Network of Graphene Using Cracked Ethanol2011

    • Author(s)
      Fumihiko Maeda, Hiroki Hibino
    • Organizer
      Graphene 2011
    • Place of Presentation
      Bilbao Exhibition Centre, Bilbao, Spain
    • Year and Date
      2011-04-13
    • Related Report
      2011 Annual Research Report
  • [Presentation] エタノールを用いたガスソースMBEによるグラフェンの成長-成長温度依存性-2011

    • Author(s)
      前田文彦, 日比野浩樹
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(厚木市)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルグラフェン成長とLEEM評価技術2011

    • Author(s)
      日比野浩樹, 田邉真一, 影島博之, 前田文彦
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(厚木市)(招待講演)
    • Year and Date
      2011-03-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルグラフェンの成長とLEEMによる評価2011

    • Author(s)
      日比野浩樹,田邉真一,影島愽之,前田文彦
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形市)
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Invited
  • [Presentation] Study on graphene growth by gas-source molecular beam epitaxy using cracked ethanol; Influence of gas flow rate on graphitic material deposition2010

    • Author(s)
      Fumihiko Maeda, Hiroki Hibino
    • Organizer
      23rd International Microprocesses and Nanotechnology Conference(MNC 2010)
    • Place of Presentation
      Kokura, Fukuoka, Japan
    • Year and Date
      2010-11-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] Evaluation of Few-Layer Graphene Grown by Gas-source Molecular Beam Epitaxy Using Cracked Ethanol2010

    • Author(s)
      Fumihiko Maeda, Hiroki hibino, Ichiro Hirosawa, Yoshio Watanabe
    • Organizer
      The 6th International Workshop on Nano-scale Spectroscopy and Nanotechnology(NSS6)
    • Place of Presentation
      Kobe University, Kobe, JAPAN
    • Year and Date
      2010-10-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] エタノールを用いたガスソースMBEによるグラフェンの成長-流量の変化が成長に及ぼす影響-2010

    • Author(s)
      前田文彦, 日比野浩樹
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎市)
    • Year and Date
      2010-09-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Molecular beam epitaxial growth of graphene using cracked ethylene -Advantage over ethanol in growth

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Organizer
      International Conference on Diamond and Carbon Materials 2012 (ICDCM 2012)
    • Place of Presentation
      Palacio de Exposiciones y Congresos , Granada, Spain
    • Related Report
      2012 Annual Research Report
  • [Presentation] Molecular beam epitaxial growth of graphene using cracked ethylene

    • Author(s)
      Fumihiko Maeda and Hiroki Hibino
    • Organizer
      The 17th International Conference on Molecular Beam Epitaxy (MBE 2012)
    • Place of Presentation
      Nara Prefectural New Public Hall, Nara, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Photoelectron spectroscopy study of interface structure of hydrogen intercalated graphene/SiC(0001)

    • Author(s)
      Fumihiko Maeda, Shinichi Tanabe, and Hiroki Hibino
    • Organizer
      The 40th International Symposium on Compound Semiconductors
    • Place of Presentation
      Kobe Convention Center, Kobe, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] エチレンを用いたガスソースMBEによるグラフェン成長

    • Author(s)
      前田文彦,日比野浩樹
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学・松山大学(愛媛県松山市)
    • Related Report
      2012 Annual Research Report
  • [Presentation] グラフェン/SiC(0001)の水素処理と真空中加熱過程

    • Author(s)
      前田文彦,田邉真一,磯部真吾,日比野浩樹
    • Organizer
      第60回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(厚木市)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ru(0001)表面に成長したグラフェンの凹凸構造

    • Author(s)
      村田祐也,鈴木哲,前田文彦,日比野浩樹
    • Organizer
      第60回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(厚木市)
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/people/fmaeda/Publication_List_NTT_J.html

    • Related Report
      2013 Final Research Report
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/group/shitsuko-g/Publication%20List%202010.html

    • Related Report
      2013 Final Research Report
  • [Remarks] NTTにおけるPublication List

    • URL

      http://www.brl.ntt.co.jp/people/fmaeda/index-j.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] 研究発表リスト

    • URL

      http://www.brl.ntt.co.jp/group/shitsuko-g/publication.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] NTTにおけるPublicaiton List

    • URL

      http://www.brl.ntt.co.jp/people/fmaeda/Publication_List_NTT_J.html

    • Related Report
      2012 Annual Research Report
  • [Remarks] Publication List 2012

    • URL

      http://www.brl.ntt.co.jp/group/shitsuko-g/pub2012.html

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/people/fmaeda/Publication_List_NTT_J.html

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/group/shitsuko-g/pub2011.html

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/people/fmaeda/Publication_List_NTT_J.html

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/group/shitsuko-g/Publication%20List%202010.html

    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] グラフェンの作製方法2013

    • Inventor(s)
      前田文彦,田邉 真一,日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-035493
    • Filing Date
      2013-02-26
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] グラフェンの作製方法2013

    • Inventor(s)
      前田文彦,田邉真一,日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-035493
    • Filing Date
      2013-03-26
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 電界効果トランジスタ、製造用基板、およびその製造方法2012

    • Inventor(s)
      前田文彦,日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-079785
    • Filing Date
      2012-03-30
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] グラファイト薄膜の製造方法2012

    • Inventor(s)
      前田文彦,日比野浩樹,高村真琴
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-025925
    • Filing Date
      2012-02-09
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] グラファイト薄膜の製造方法2012

    • Inventor(s)
      前田文彦, 日比野浩樹, 高村真琴
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      2012-025925
    • Filing Date
      2012-02-09
    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] 電界効果トランジスタ,製造用基板,およびその製造方法2012

    • Inventor(s)
      前田文彦, 日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      2012-079785
    • Filing Date
      2012-03-30
    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] 電界効果トランジスタ、製造用基板、およびその製造方法2011

    • Inventor(s)
      前田文彦, 日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      2011-085106
    • Filing Date
      2011-04-07
    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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