| Budget Amount *help |
¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2011: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2010: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
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| Research Abstract |
In this study, basic understandings of oxide semiconductor toward establishment of micro gas sensors for environmental protection have been investigated. Especially depletion state of semiconductors due to controlling grain size and donor density, relationship between donor density and amount of oxygen adsorption, masking effect on oxide surface, receptor function and its optimal loading method, etc. were researched. As one of the results, the VOC sensor in ppb level to toluene was prepared based on the obtained theories and experiments.
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