Nano/microstructure control of silicon using electrochemical tools

• Project/Area Number: 22350092
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic industrial materials
• Research Institution: Kyoto University
• Principal Investigator: OGATA Yukio 京都大学, エネルギー理工学研究所, 教授 (30152375)
• Co-Investigator(Kenkyū-buntansha): SAKKA Tetsuo 京都大学, 大学院・工学研究科, 教授 (10196206) ; FUKAMI Kazuhiro 京都大学, エネルギー理工学研究所, 助教 (60452322)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000); Fiscal Year 2012: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2011: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2010: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
• Keywords: 電気化学 / 多孔質シリコン / 微細孔形成 / 多層膜 / 陽極酸化 / センサー応用 / 表面増強ラマン散乱

Research Abstract

Structural development of porous silicon in the electrochemicalformation was studied. (1) The macropore formation is not an independent event, but the formation is closely related to the other porous structures: the micro- and skeletonstructures. (2) Rugate-type porous silicon is a good candidate for sensing materials. The structure can be readily and finely controlled by electrochemical methods.

Research Products

• [Journal Article] Pore formation in p-type silicon in solutions containing different types of alcohol (2012)
  • Author(s): T. Urata, K. Fukami, T. Sakka, Y.H. Ogata
  • Journal Title: Nanoscale Research Letters Volume: Vol.7 Issue: 1
  • DOI: 10.1186/1556-276x-7-329
  • NAID: 120004754386
  • Peer Reviewed
• [Journal Article] Thermally promoted addition of undecylenic acid on thermally hydrocarbonized porous silicon optical reflectors (2012)
  • Author(s): T. Jalkanen, E. Makila, T. Sakka, J. Salonen, Y.H. Ogata
  • Journal Title: Nanoscale Research Letters Volume: Vol.7 Issue: 1
  • DOI: 10.1186/1556-276x-7-311
  • NAID: 120005540416
  • Peer Reviewed
• [Journal Article] Studies on chemical modification of porous silicon-based graded-index optical microcavities for improved stability under alkaline condition (2012)
  • Author(s): T. Jalkanen, E. Makila, Y.-I. Suzuki, T. Urata, K. Fukami, T. Sakka, J. Salonen, Y.H. Ogata
  • Journal Title: Advanced Functional Materials Volume: Vol.22 Issue: 18 Pages: 3890-3898
  • DOI: 10.1002/adfm.201200386
  • Peer Reviewed
• [Journal Article] Preparation and applications of porous silicon-based one-dimensional photonic band gap structures (2011)
  • Author(s): T. Jalkanen, J. Salonen, V. Torres-Costa, K. Fukami, T. Sakka, Y.H. Ogata
  • Journal Title: ptics Express Volume: Vol.19 Issue: 14 Pages: 13291-13305
  • DOI: 10.1364/oe.19.013291
  • Peer Reviewed
• [Journal Article] Gold electrodeposition into porous silicon: Comparison between meso- and macroporous silicon (2011)
  • Author(s): M.L. Chourou, K. Fukami, T. Sakka, Y.H. Ogata
  • Journal Title: Physica Status Solidi C Volume: Vol. 8 Issue: 6 Pages: 1783-1786
  • DOI: 10.1002/pssc.201000094
  • Peer Reviewed
• [Journal Article] Surface-enhanced Raman scattering from gold deposited mesoporous silicon (2011)
  • Author(s): R. Miyagawa, K. Fukami, T. Sakka, Y.H. Ogata
  • Journal Title: Physica Status Solidi A Volume: Vol.208 Issue: 6 Pages: 1471-1474
  • DOI: 10.1002/pssa.201000157
  • Peer Reviewed
• [Journal Article] Numerical simulation of copper filling within mesoporous silicon by electrodeposition (2011)
  • Author(s): K. Fukami, M.L. Chourou, T. Sakka, Y.H. Ogata
  • Journal Title: Physica Status Solidi A Volume: Vol.208 Issue: 6 Pages: 1407-1411
  • DOI: 10.1002/pssa.201000087
  • Peer Reviewed
• [Journal Article] Gold nanostructures for surface-enhanced Raman spectroscopy, prepared by electrodeposition in porous silicon (2011)
  • Author(s): K. Fukami, M.L. Chourou, R. Miyagawa, A. Munoz-Noval, T. Sakka, M. Manso-Silvan, R.J. Martin-Palma, Y.H. Ogata
  • Journal Title: Materials Volume: Vol.4 Pages: 790-799
  • Peer Reviewed
• [Journal Article] Structural considerations on multistopband mesoporous silicon rugate filters prepared for gas sensing purposes (2011)
  • Author(s): T.Jalkanen, J.Salonen, V.Torres-Costa, K.Fukami, T.Sakka, Y.H.Ogata
  • Journal Title: Optics Express Volume: 19 Pages: 13291-13305
  • Peer Reviewed
• [Journal Article] Gold electrodeposition into mesoporous silicon: The effect of solution composition (2010)
  • Author(s): M.L. Chourou, K. Fukami, T. Sakka, Y.H. Ogata
  • Journal Title: ECS Transactions Volume: Vol.33 Issue: 16 Pages: 117-123
  • DOI: 10.1149/1.3553163
  • Peer Reviewed
• [Journal Article] ano-branched Au prepared by electrochemical deposition using mesoporous silicon (2010)
  • Author(s): R. Miyagawa, K. Fukami, M.L. Chourou, T. Sakka, Y.H. Ogata
  • Journal Title: ECS Transactions Volume: Vol.33 Issue: 16 Pages: 109-116
  • DOI: 10.1149/1.3553162
  • Peer Reviewed
• [Journal Article] Pt filling within mesoporous silicon by electrodeposition (2010)
  • Author(s): K. Fukami, D. Shiojima, T. Sakka, Y.H. Ogata
  • Journal Title: ECS Transactions Volume: Vol.33 Issue: 16 Pages: 87-94
  • DOI: 10.1149/1.3553159
  • Peer Reviewed
• [Journal Article] Gold electrodeposition into mesoporous silicon : The effect of solution composition (2010)
  • Author(s): M.L.Chourou, K.Fukami, T.Sakka, Y.H.Ogata
  • Journal Title: ECS Transactions Volume: 33 Pages: 117-123
  • Peer Reviewed
• [Journal Article] Nano-branched Au prepared by electrochemical deposition using mesoporous silicon (2010)
  • Author(s): R.Miyagawa, K.Fukami, M.L.Chourou, T.Sakka, Y.H.Ogata
  • Journal Title: ECS Transactions Volume: 33 Pages: 109-116
  • Peer Reviewed
• [Journal Article] Pt filling within mesoporous silicon by electrodeposition (2010)
  • Author(s): K.Fukami, D.Shiojima, T.Sakka, Y.H.Ogata
  • Journal Title: ECS Transactions Volume: 33 Pages: 87-94
  • Peer Reviewed
• [Presentation] p型シリコンの陽極酸化で形成する多孔質構造の分類 (2013)
  • Author(s): 浦田智子、山本光洋、深見一弘、作花哲夫、尾形幸生
  • Organizer: 表面技術協会第127回講演大会
  • Place of Presentation: 日本工業大学・埼玉県宮代町
  • Year and Date: 2013-03-19
• [Presentation] p型シリコンの陽極酸化で形成する多孔質構造の分類 (2013)
  • Author(s): 浦田智子, 山本光洋, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第127回講演大会
  • Place of Presentation: 日本工業大学, 埼玉県宮代町
• [Presentation] Morphological development from uniform microporous structure to macropore-like structure (2012)
  • Author(s): T. Urata, K. Fukami, T. Sakka, Y.H. Ogata
  • Organizer: PRiME 2012 (日米合同電気化学大会)
  • Place of Presentation: Honolulu, Hawaii, USA
  • Year and Date: 2012-10-08
• [Presentation] Spontaneous groove formation on silicon during anodic dissolution induced by Turing instability (2012)
  • Author(s): K. Fukami, T. Urata, T. Sakka, K. Krischer, Y.H. Ogata
  • Organizer: PRiME 2012 (日米合同電気化学大会)
  • Place of Presentation: Honolulu, Hawaii, USA
  • Year and Date: 2012-10-08
• [Presentation] Thinking again of porous Si formation (Invited) (2012)
  • Author(s): Y.H. Ogata
  • Organizer: PRiME 2012 (日米合同電気化学大会)
  • Place of Presentation: Honolulu, Hawaii, USA
  • Year and Date: 2012-10-08
• [Presentation] p型シリコンの陽極酸化による微細溝の自己組織化形成 (2012)
  • Author(s): 深見一弘、浦田智子、作花哲夫、K. Krischer、尾形幸生
  • Organizer: 表面技術協会第126回講演大会
  • Place of Presentation: 室蘭工業大学・北海道室蘭市
  • Year and Date: 2012-09-27
• [Presentation] Spontaneous micro-groove formation during anodic dissolution of p-type silicon (2012)
  • Author(s): K. Fukami, T. Urata, T. Sakka, K. Krischer, Y.H. Ogata
  • Organizer: 6th KIFEE International Symposium on Environment, Energy and Materials
  • Place of Presentation: Trondheim, Norway
  • Year and Date: 2012-09-11
• [Presentation] Porous silicon and its pore filling (Invited) (2012)
  • Author(s): Y.H. Ogata
  • Organizer: 4th International Symposium of Kyoto University GCOE of Energy Science
  • Place of Presentation: Bangkok, Thailand
  • Year and Date: 2012-05-22
• [Presentation] Pore formation in p-type silicon in solutions containing different types of alcohol (2012)
  • Author(s): T. Urata, K. Fukami, T. Sakka, Y.H. Ogata
  • Organizer: 8th International Conference on Porous Semiconductors - Science and Technology
  • Place of Presentation: Malaga, Spain
  • Year and Date: 2012-03-28
• [Presentation] Pore formation in p-type silicon in solutions containing different types of alcohol (2012)
  • Author(s): T.Urata, K.Fukami, T.Sakka, Y.H.Ogata
  • Organizer: 8th International Conference on Porous Semiconductors-Science and Technology
  • Place of Presentation: Malaga, Spain
  • Year and Date: 2012-03-28
• [Presentation] Thermally promoted addition of undecylenic acid on thermally hydrocarbonized porous silicon optical reflectors (2012)
  • Author(s): T. Jalkanen, E. Makila, K. Fukami, T. Sakka, J. Salonen, Y.H. Ogata
  • Organizer: 8th International Conference on Porous Semiconductors - Science and Technology
  • Place of Presentation: Malaga, Spain
  • Year and Date: 2012-03-26
• [Presentation] Thermally promoted addition of undecylenic acid on thermally hydrocarbonized porous silicon optical reflectors (2012)
  • Author(s): T.Jalkanen, E.Makila, K.Fukami, T.Sakka, J.Salonen, Y.H.Ogata
  • Organizer: 8th International Conference on Porous Semiconductors-Science and Technology
  • Place of Presentation: Malaga, Spain
  • Year and Date: 2012-03-26
• [Presentation] Porous silicon and its pore filling (2012)
  • Author(s): Y.H. Ogata
  • Organizer: 4th International Symposium of Kyoto University GCOE of Energy Science
  • Place of Presentation: Bangkok, Thailand
  • Invited
• [Presentation] p型シリコンの陽極酸化による微細溝の自己組織化形成 (2012)
  • Author(s): 深見一弘, 浦田智子, 作花哲夫, K. Krischer, 尾形幸生
  • Organizer: 表面技術協会第126回講演大会
  • Place of Presentation: 室蘭工業大学, 室蘭市
• [Presentation] Thinking again of porous Si formation (2012)
  • Author(s): Y.H. Ogata
  • Organizer: PRiME 2012 (日米合同電気化学大会)
  • Place of Presentation: Honolulu, Hawaii
  • Invited
• [Presentation] Spontaneous groove formation on silicon during anodic dissolution induced by Turing instability (2012)
  • Author(s): K. Fukami, T. Urata, T. Sakka, K. Krischer, Y.H. Ogata
  • Organizer: PRiME 2012 (日米合同電気化学大会)
  • Place of Presentation: Honolulu, Hawaii
• [Presentation] Morphological development from uniform microporous structure to macropore-like structure (2012)
  • Author(s): T. Urata, K. Fukami, T. Sakka, Y. H. Ogata
  • Organizer: PRiME 2012 (日米合同電気化学大会)
  • Place of Presentation: Honolulu, Hawaii
• [Presentation] 多孔質シリコン孔形成過程の動的シミュレーション (2011)
  • Author(s): 山本光洋、深見一弘、作花哲夫、尾形幸生
  • Organizer: 平成23年度第3回関西電気化学研究会
  • Place of Presentation: 関西大学・大阪府吹田市
  • Year and Date: 2011-12-10
• [Presentation] 多孔質シリコン孔形成過程の動的シミュレーション (2011)
  • Author(s): 山本光洋, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 平成23年度第3回関西電気化学研究会
  • Place of Presentation: 関西大学,大阪府吹田市
  • Year and Date: 2011-12-10
• [Presentation] Preparation of multistopband mesoporous silicon rugate filters for gas sensing purposes (2011)
  • Author(s): T. Jalkanen, J. Salonen, K. Fukami, T. Sakka, Y.H. Ogata
  • Organizer: 62nd Annual Meeting of the International Society of Electrochemistry
  • Place of Presentation: 朱鷺メッセ・新潟市
  • Year and Date: 2011-09-15
• [Presentation] Preparation of multistopband mesoporous silicon rugate filters for gas sensing purposes (2011)
  • Author(s): T.Jalkanen, J.Salonen, K.Fukami, T.Sakka, Y.H.Ogata
  • Organizer: 62nd Annual Meeting of the International Society of Electrochemistry
  • Place of Presentation: 朱鷺メッセ,新潟市
  • Year and Date: 2011-09-15
• [Presentation] Effect of solvent polarity on stable macropore growth in p-type silicon (2011)
  • Author(s): T. Urata, N. Takeda, K. Fukami, T. Sakka, Y.H. Ogata
  • Organizer: 62nd Annual Meeting of the International Society of Electrochemistry
  • Place of Presentation: 鷺メッセ・新潟市
  • Year and Date: 2011-09-12
• [Presentation] Effect of solvent polarity on stable macropore growth in p-type silicon (2011)
  • Author(s): T.Urata, N.Takeda, K.Fukami, T.Sakka, Y.H.Ogata
  • Organizer: 62nd Annual Meeting of the International Society of Electrochemistry
  • Place of Presentation: 朱鷺メッセ,新潟市
  • Year and Date: 2011-09-12
• [Presentation] 多孔質シリコンに基づくマイクロキャビティ作製およびバイオセンシングへの応用 (2011)
  • Author(s): T. Jalkanen、J. Salonen、深見一弘、作花哲夫、尾形幸生
  • Organizer: 電気化学会第79回大会
  • Place of Presentation: 朱鷺メッセ・新潟市
  • Year and Date: 2011-09-09
• [Presentation] 多孔質シリコンに基づくマイクロキャビティ作製およびバイオセンシングへの応用 (2011)
  • Author(s): T.Jalkanen, J.Salonen, K.Fukami, T.Sakka, Y.H.Ogata
  • Organizer: 電気化学会第79回大会
  • Place of Presentation: 朱鷺メッセ,新潟市
  • Year and Date: 2011-09-09
• [Presentation] Preparation and applications of porous silicon-based one-dimensional photonic band gap structures (2011)
  • Author(s): T. Jalkanen, J. Salonen, K. Fukami, T. Sakka, Y.H. Ogata
  • Organizer: 3rd International Symposium of Kyoto University GCOE of Energy Science
  • Place of Presentation: Suwon, South Korea
  • Year and Date: 2011-08-18
• [Presentation] Porous silicon in sensing applications (2011)
  • Author(s): T. Jalkanen、J. Salonen、深見一弘、作花哲夫、尾形幸生
  • Organizer: 電気化学会第78回大会
  • Place of Presentation: 横浜国立大学・横浜市
  • Year and Date: 2011-03-31
• [Presentation] Porous silicon in sensing applications (2011)
  • Author(s): Tero Jalkanen, Jarno Salonen, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 電気化学会第78回大会
  • Place of Presentation: 横浜国立大学, 横浜市
  • Year and Date: 2011-03-31
• [Presentation] Gold nanorod arrays formed by electrodeposition using porous silicon and their SERS activities (2011)
  • Author(s): M.L. Chourou、宮川竜平、深見一弘、作花哲夫、尾形幸生
  • Organizer: 電気化学会第78回大会
  • Place of Presentation: 横浜国立大学・横浜市
  • Year and Date: 2011-03-29
• [Presentation] 成長界面のモデル化による多孔質シリコン形成過程のシミュレーション (2011)
  • Author(s): 深見一弘、作花哲夫、尾形幸生
  • Organizer: 電気化学会第78回大会
  • Place of Presentation: 横浜国立大学・横浜市
  • Year and Date: 2011-03-29
• [Presentation] 成長界面のモデル化による多孔質シリコン形成過程のシミュレーション (2011)
  • Author(s): 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 電気化学会第78回大会
  • Place of Presentation: 横浜国立大学, 横浜市
  • Year and Date: 2011-03-29
• [Presentation] Gold nanorod arrays formed by electrodeposition using porous silicon and their SERS activities (2011)
  • Author(s): M.L.Chourou, 宮川竜平, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 電気化学会第78回大会
  • Place of Presentation: 横浜国立大学, 横浜市
  • Year and Date: 2011-03-29
• [Presentation] ミクロ多孔質シリコンへの金属めっき:親水化・疎水化処理の影響 (2011)
  • Author(s): 幸田吏央、浦田智子、深見一弘、作花哲夫、尾形幸生
  • Organizer: 表面技術協会第123回講演大会
  • Place of Presentation: 関東学院大学・横浜市
  • Year and Date: 2011-03-17
• [Presentation] ミクロ多孔質シリコンへの金属めっき:親水化・疎水化処理の影響 (2011)
  • Author(s): 幸田吏央, 浦田智子, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第123回講演大会
  • Place of Presentation: 関東学院大学, 横浜市
  • Year and Date: 2011-03-17
• [Presentation] メソ多孔質シリコンを電極とした白金めっき (2010)
  • Author(s): 深見一弘、塩島大地、作花哲夫、尾形幸生
  • Organizer: 表面技術協会第122回講演大会
  • Place of Presentation: 東北大学・仙台市
  • Year and Date: 2010-09-06
• [Presentation] メソ多孔質シリコンを電極とした白金めっき (2010)
  • Author(s): 深見一弘, 塩島大地, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第122回講演大会
  • Place of Presentation: 東北大学, 仙台市
  • Year and Date: 2010-09-06
• [Book] 第6版電気化学便覧(電気化学会編)14章14.4.3節 半導体のアノード酸化 (2013)
  • Author(s): 尾形幸生
  • Total Pages: 4
  • Publisher: 丸善出版
• [Book] 第6版電気化学便覧（電気化学会編）14章14.4.3節 半導体のアノード酸化 (2013)
  • Author(s): 尾形幸生
  • Total Pages: 4
  • Publisher: 丸善出版