Nano/microstructure control of silicon using electrochemical tools
| Project/Area Number |
22350092
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Inorganic industrial materials
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| Research Institution | Kyoto University |
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Principal Investigator |
OGATA Yukio 京都大学, エネルギー理工学研究所, 教授 (30152375)
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| Co-Investigator(Kenkyū-buntansha) |
SAKKA Tetsuo 京都大学, 大学院・工学研究科, 教授 (10196206)
FUKAMI Kazuhiro 京都大学, エネルギー理工学研究所, 助教 (60452322)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2012: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2011: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2010: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
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| Keywords | 電気化学 / 多孔質シリコン / 微細孔形成 / 多層膜 / 陽極酸化 / センサー応用 / 表面増強ラマン散乱 |
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| Research Abstract |
Structural development of porous silicon in the electrochemicalformation was studied. (1) The macropore formation is not an independent event, but the formation is closely related to the other porous structures: the micro- and skeletonstructures. (2) Rugate-type porous silicon is a good candidate for sensing materials. The structure can be readily and finely controlled by electrochemical methods.
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Report
(4 results)
Research Products
(53 results)
