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Development of new type sensor structures using epitaxial-thin-film growth technology

Research Project

Project/Area Number 22360289
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHINOZAKI Kazuo  東京工業大学, 大学院・理工学研究科, 教授 (00196388)

Co-Investigator(Kenkyū-buntansha) CROSS Jeffrey  東京工業大学, 理工学研究科, 教授 (90532044)
SAKURAI Osamu  東京工業大学, 理工学研究科, 准教授 (20108195)
Co-Investigator(Renkei-kenkyūsha) WAKIYA Naoki  静岡大学, 工学部, 教授 (40251623)
KIGUCHI Takanori  東北大学, 金属材料研究所, 准教授 (70311660)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2011: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2010: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Keywordsセンサー材料 / 光機能材料 / ガスセンサー / 酸化物薄膜 / エピタキシャル / エピタキシャル薄膜 / ガス拡散型センサー / ガス吸着型センサー / ガス拡散センサー / ガス吸着センサー
Research Abstract

There are commercially available two types of gas sensors. One is the adsorption type gas sensor that isporous structure with sintered fine particles of gas sensitive semiconductor oxide. The other is thediffusion type gas sensor that is composed of the sintered oxide solid electrolyte. We apply epitaxialthin film growth technology into the new type gas sensor structures. In case of gas adsorption type sensor, applying the epitaxial thin film to the gas sensor structure bringsthe excellent sensing ability at lower concentration of the target gas and improved the response time. Tidoped Zn ferrite (ZFTO) epitaxial films were deposited on Y2O3 doped ZrO substrate by introducing Znferrite (ZFO) homo-epitaxial buffer layer using pulsed laser deposition (PLD). Homo-epitaxialZFTO/ZFO/YSZ films showed higher conductivity then hetero-epitaxial ZFTO/YSZ films. Resistivityof the homo-epitaxial ZFTO films changed with NO22 gas concentration. Sensitivity of the ZFTO filmswere changed with film thickness and NO gas concentration. The maximum sensitivity was obtained atthe 3 nm of ZFTO film thickness. The Cr doped SrTiO23 epitaxial thin film deposited on the SrTiOsingle crystal substrate showed high sensitivity even at 10-23 atm of O partial pressure. The maximumsensitivity was obtained at the 2.5 nm of Cr doped SrTiOIn case of gas diffusion type gas sensor, Y doped ZrO232 film thickness. (YSZ) epitaxial thin film was deposited on (100)Si substrate. This film did not contain the grain boundary which disturbs the oxide ion diffusion. Thethinner film thickness compared with sintered body reduced the internal resistivity. The calculated EMFvalue was obtained at 350oC using YSZ epitaxial film on Si with porous Pt electrode. AC impedancemeasurement revealed the oxide ion in the YSZ thin film diffused at 150La0.6Sr0.4Co0.98Ni0.02 O (LSCNO) electrode to YSZ epitaxial film reduces the working temperature at180℃

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report

Research Products

(32 results)

All 2013 2012 2011 2010

All Journal Article Presentation

  • [Journal Article] Effect of step edges on the growth of Pt thin films on oxide single-crystal substrates2013

    • Author(s)
      Tadashi Shiota, Hiroki Ito, Naoki Wakiya, Jeffrey Cross, Osamu Sakurai, Kazuo Shinozaki
    • Journal Title

      J. Ceram. Soc. Japan

      Volume: 121 Issue: 1411 Pages: 278-282

    • DOI

      10.2109/jcersj2.121.278

    • NAID

      130004950829

    • ISSN
      1348-6535, 1882-0743
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of step edges on the growth of Pt thin films on oxide single-crystal substrates2013

    • Author(s)
      Tadashi SHIOTA, Hiroki ITO, Naoki WAKIYA, Jeffrey CROSS, Osamu SAKURAI, Kazuo SHINOZAKI
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 121 Pages: 278-282

    • NAID

      130004950829

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Oxygen Adsorption on Polaron Conduction in Nanometer-Scale Nb5+-, Fe3+-, and Cr3+-Doped SrTiO3Thin Films2011

    • Author(s)
      Toru Hara, Kazuo Shinozaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50 Issue: 6 Pages: 065807-065807

    • DOI

      10.1143/jjap.50.065807

    • ISSN
      0021-4922, 1347-4065
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Aging Effect on Oxygen-Sensitive Electrical Resistance of SrTiO3Thin Films2011

    • Author(s)
      Toru Hara, Takashi Ishiguro, Kazuo Shinozaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50, 3 Issue: 6 Pages: 061501-061501

    • DOI

      10.1143/jjap.50.061501

    • ISSN
      0021-4922, 1347-4065
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ultraviolet- light- induced desorption of oxygen from SrTiO surfaces2011

    • Author(s)
      Toru Hara, Takashi Ishiguro, Kazuo Shinozaki
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 50 Pages: 415021-415026

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ultraviolet-light-induced desorption of oxygen from SrTiO3 surfaces2011

    • Author(s)
      Toru Hara, Takashi Ishiguro, Kazuo Shinozaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50 Pages: 415021-415026

    • NAID

      40018800872

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oxygen-Concentration-Dependent Electrical Resistances of SrTiO3-Based Thin Films2010

    • Author(s)
      Toru Hara, Takashi Ishiguro, and Kazuo Shinozaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49 Issue: 4 Pages: 041104-041104

    • DOI

      10.1143/jjap.49.041104

    • ISSN
      0021-4922, 1347-4065
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Annealing Effects on Sensitivity of Atomic-Layer-Deposited SrTiO3-Based Oxygen Sensors2010

    • Author(s)
      Toru Hara, Takashi Ishiguro, Kazuo Shinozaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      210000069222

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oxygen-Concentration-Dependent Electrical Resistances of SrTiO3-Based Thin Films2010

    • Author(s)
      Toru Hara, Takashi Ishiguro, Kazuo Shinozaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49 Pages: 411041-411045

    • NAID

      40017085045

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] YSZ酸素センサーの低温駆動を目指した(La,Sr)(Co,Ni)O薄膜電極の電気特性評価2013

    • Author(s)
      永原,海老澤,浜崎,塩田、脇谷,櫻井,篠崎
    • Organizer
      日本セラミックス協会2013年3年会
    • Place of Presentation
      東京工業大学(東京)
    • Related Report
      2012 Final Research Report
  • [Presentation] YSZ酸素センサーの低温駆動を目指した (La,Sr)(Co,Ni)O3 薄膜電極の電気特性評価2013

    • Author(s)
      永原和聡・海老沢琢・浜崎純一・塩田忠・脇谷尚樹・櫻井修・篠崎和夫
    • Organizer
      日本セラミックス協会2013年年会
    • Place of Presentation
      東京工業大学西9号館(東京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ti添加ZnFe_2O_4エピタキシャル薄膜のNO_2ガスセンシング特性評価2012

    • Author(s)
      荒井悠美, 佐藤聡真, Jeffrey Cross, 塩田忠, 櫻井修, 篠崎和夫, 木口賢紀, 脇谷尚樹
    • Organizer
      日本セラミックス協会2012年年会講演予稿集,2B26,175
    • Place of Presentation
      京都大学、京都
    • Year and Date
      2012-03-20
    • Related Report
      2011 Annual Research Report 2010 Annual Research Report
  • [Presentation] PLD 法によるエピタキシャル YSZ薄膜を用いた酸素センサーの作製と評価2012

    • Author(s)
      海老澤, 永原, 浜崎, 塩田, 櫻井, J. Cross, 篠崎, 脇谷
    • Organizer
      日本セラミックス協会エレクトロセラミックス研究討論会
    • Place of Presentation
      東京工業大学 (東京)
    • Related Report
      2012 Final Research Report
  • [Presentation] YSZ薄膜酸素センサー状に形成した(La,Sr)(Co,Ni)O電極の低温動作特性評価2012

    • Author(s)
      永原,海老澤,塩田,櫻井,篠崎,脇谷
    • Organizer
      日本セラミックス協会関東支部研究発表会
    • Place of Presentation
      静岡大学(静岡)
    • Related Report
      2012 Final Research Report
  • [Presentation] Ti添加物ZnFe_2O_4エピタキシャル薄膜へのガス吸着特性に及ぼす光照射の影響2012

    • Author(s)
      佐藤,荒井,塩田,櫻井,篠崎,脇谷
    • Organizer
      日本セラミック協会関東支部研究発表会
    • Place of Presentation
      静岡大学(静岡)
    • Related Report
      2012 Final Research Report
  • [Presentation] Ti添加ZnFe_2O_4エピタキシャル薄膜のNO_2ガスセンシング特性評価2012

    • Author(s)
      荒井,佐藤,J.Cross,塩田,櫻井,篠崎,木口,脇谷
    • Organizer
      日本セラミックス協会2012年年会講演予稿集
    • Place of Presentation
      京都大学(京都)
    • Related Report
      2012 Final Research Report
  • [Presentation] YSZ薄膜酸素センサー上に形成した(La,Sr)(Co,Ni)O3 電極の低温動作特性評価2012

    • Author(s)
      永原和聡、海老沢琢、塩田忠、櫻井修、篠崎和夫、脇谷尚樹
    • Organizer
      日本セラミックス協会関東支部研究発表会
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ti添加ZnFe2O4エピタキシャル薄膜への ガス吸着特性に及ぼす光照射の影響2012

    • Author(s)
      佐藤聡真,荒井悠美,塩田忠,櫻井修,篠崎和夫,脇谷尚樹
    • Organizer
      日本セラミックス協会関東支部研究発表会
    • Place of Presentation
      静岡大学浜松キャンパス(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] PLD法によるエピタキシャルYSZ薄膜を用いた酸素センサーの作製と評価2012

    • Author(s)
      海老澤琢・永原和聡・浜崎純一・塩田忠・櫻井修・Jeffrey Cross・篠崎和夫・脇谷尚樹
    • Organizer
      日本セラミックス協会エレクトロセラミックス研究討論会
    • Place of Presentation
      東京工業大学西9号館(東京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ti添加ZnFe_2O_4エピタキシャル薄膜のNO_2ガスセンシング特性評価2011

    • Author(s)
      荒井悠美, 稲葉悠介, 佐藤総真, 脇谷尚樹, 木口賢紀, Jeffrey Cross, 櫻井修, 篠崎和夫
    • Organizer
      第31回エレクトロセラミックス研究討論会講演予稿集,2P-28,68
    • Place of Presentation
      東京大学、東京
    • Year and Date
      2011-10-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] Control of crystal orientations in epitaxial thin-films by introducing atomic layer buffers on Si and oxide substrates2011

    • Author(s)
      K.Shinozaki, H.-Y.Go, T.Kiguchi, N.Wakiya, J.S.Cross, O.Sakurai
    • Organizer
      The 1^<st> International Conference on CIGS Solar Cells and Electronic Materials
    • Place of Presentation
      National Taiwan University, Taiwan
    • Year and Date
      2011-10-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Control of crystal 3 orientations in epitaxial thin-films by introducing atomic layer buffers on Si and oxide substrates2011

    • Author(s)
      K. Shinozaki, H.-Y. Go, T. Kiguchi, N. Wakiya, J.S. Cross, O. Sakurai
    • Organizer
      The 1st International Conference on CIGS SolarCells and Electronic Materials (招待講演)
    • Place of Presentation
      National Taiwan University (Taipei,Taiwan)
    • Year and Date
      2011-10-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Si基板上にエピタキシャル成長したYSZ薄膜の電気伝導度の温度依存性2011

    • Author(s)
      海老澤琢, 永原和聡, 木口賢紀, 脇谷尚樹, Cross Jeffrey, 櫻井修, 篠崎和夫
    • Organizer
      第27回日本セラミックス協会関東支部研究発表会講演要旨集,1B12,34
    • Place of Presentation
      千葉大学、千葉県
    • Year and Date
      2011-09-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] エピタキシャルYSZ薄膜を用いた酸素センサの特性におよぼす残留応力の影響2011

    • Author(s)
      篠崎和夫, 村上晃浩, 海老沢琢, 脇谷尚樹, 木口賢紀, Cross Jeffrey, 櫻井修
    • Organizer
      日本セラミックス協会第24回秋季シンポジウム講演予稿集,2D05,92
    • Place of Presentation
      北海道大学、北海道
    • Year and Date
      2011-09-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] PLD法で作製したZnIn2O4薄膜の結晶構造2011

    • Author(s)
      種村和幸, 坂元尚紀, 篠崎和夫, 鈴木久男, 脇谷尚樹
    • Organizer
      日本セラミックス協会2011年年会講演予稿集,3B22,262
    • Place of Presentation
      静岡大学、静岡
    • Year and Date
      2011-03-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effect of Annealing Conditions on NO2 Gas Sensing Characteristics of Ti doped Zinc Ferrite Thin Films by PLD2011

    • Author(s)
      Y.Arai, Y.Inaba, N.Wakiya, T.Kiguchi, J.Cross, O.Sakurai, K.Shinozaki
    • Organizer
      Fourth International Conference on Science and Technology of Advanced Ceramics, PP19
    • Place of Presentation
      Mielparque-Yokohama、Kanagawa
    • Year and Date
      2011-03-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effect of Residual Stress on Ionic Conductivity of YSZ Thin Films" Akihiro Murakami (1), Naoki Wakiya (2), Takanori Kiguchi (3), Jeffrey2011

    • Author(s)
      A.Murakami, N.Wakiya, T.Kiguchi, J.Cross, O.Sakurai, K.Shinozaki
    • Organizer
      Fourth International Conference on Science and Technology of Advanced Ceramics, PP55
    • Place of Presentation
      Mielparque-Yokohama、Kanagawa
    • Year and Date
      2011-03-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ti添加ZnFe_2O_4エピタキシャル薄膜のNO_2ガスセンシング特性評価2011

    • Author(s)
      荒井,稲葉,佐藤,脇谷,木口,J.Cross,櫻井,篠崎
    • Organizer
      第31回エレクトロセラミックス研究討論会講演予稿集
    • Place of Presentation
      東京大学(東京)
    • Related Report
      2012 Final Research Report
  • [Presentation] Si基板上にエピタキシャル成長したYSZ薄膜の電気伝導度の温度依存性2011

    • Author(s)
      海老澤,永原,木口,脇谷,C.Jeffrey,櫻井,篠崎
    • Organizer
      第27回日本セラミックス協会関東支部研究発表会講演要旨集
    • Place of Presentation
      千葉大学(千葉)
    • Related Report
      2012 Final Research Report
  • [Presentation] エピタキシャルYSZ薄膜を用いた酸素センサの特性におよぼす残留応力の影響2011

    • Author(s)
      篠崎,村上,海老沢,脇谷,木口,C.Jeffrey,櫻井
    • Organizer
      日本セラミックス協会第24回秋季シンポジウム
    • Place of Presentation
      北海道大学(札幌)
    • Related Report
      2012 Final Research Report
  • [Presentation] Effect of Residual Stress on Ionic Conductivity of YSZ Thin Films2010

    • Author(s)
      A. Murakami, N. Wakiya, T. Kiguchi, J. Cross, O.Sakurai, K. Shinozaki
    • Organizer
      Fourth International Conference on Science and Technology of Advanced Ceramics
    • Place of Presentation
      Mielparque Yokohama (Kanagawa)
    • Related Report
      2012 Final Research Report
  • [Presentation] Effect of Annealing Conditions on NO Gas Sensing Characteristics of Ti doped Zinc Ferrite Thin Films by PLD2010

    • Author(s)
      Y. Arai, Y. Inaba, N. Wakiya, T. Kiguchi, J.Cross, O.Sakurai,K.Shinozaki
    • Organizer
      Fourth International Conference on Science and Technology of Advanced Ceramics
    • Place of Presentation
      Mielparque Yokohama (Kanagawa)
    • Related Report
      2012 Final Research Report

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Published: 2010-08-22   Modified: 2019-07-29  

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