Structure and fabrication process to apply shape memory polymers to MEMS actuators

• Project/Area Number: 22560253
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Nihon University
• Principal Investigator: IMAI Satomitsu 日本大学, 理工学部, 教授 (20369953)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2012: ¥130,000 (Direct Cost: ¥100,000、Indirect Cost: ¥30,000); Fiscal Year 2011: ¥130,000 (Direct Cost: ¥100,000、Indirect Cost: ¥30,000); Fiscal Year 2010: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
• Keywords: マイクロ / ナノメカトロニクス / 形状記憶ポリマー / アクチュエータ / MEMS / 2方向動作 / 薄膜 / ＭＥＭＳ / 駆動方法 / ダイアフラム / 梁 / ガラス転移点 / 熱サイクル / ガラス遷移点 / 熱駆動

Research Abstract

A method to realize two-way behavior for a shape memory polymer actuator has been proposed. Two kinds of SMPs with different glass transition temperatures are used. The memory shape appears at the lower Tg, and then this memory shape is canceled by the other memory shape generated at the higher Tg. We confirmed the effectiveness ofthe proposed method experimentally.

Research Products

• [Journal Article] Operating methods for two-Way behavior shape memory polymer actuators without using external stress (2014)
  • Author(s): 今井郷充
  • Journal Title: 電気学会共通英文論文誌 Volume: Vol.9,No.1(掲載確定)
  • Peer Reviewed
• [Journal Article] Operating methods for two-way behavior shape memory polymer actuators without using external stress (2014)
  • Author(s): 今井 郷充
  • Journal Title: 電気学会共通英文論文誌（ページ未定） Volume: 9 (No.1) Pages: 1-6
  • Peer Reviewed
• [Journal Article] An actuator of two-way behavior by using two kinds of shape memory polymers with different Tgs (2013)
  • Author(s): 今井郷充,櫻井航生
  • Journal Title: Precision Engineering (Elsevier) Volume: Vol.37 Issue: 3 Pages: 572-579
  • DOI: 10.1016/j.precisioneng.2013.01.002
  • Peer Reviewed
• [Presentation] A MEMS actuator using two kinds of shape memory polymers to activate only by heating and cooling (2012)
  • Author(s): 今井 郷充
  • Organizer: IWPMA (International Workshop on Piezoelectric Materials and Applications)
  • Place of Presentation: 弘前文化センター
• [Presentation] ガラス転移点温度の異なる2種類の形状記憶ポリマーを用いて変形・回復を行うアクチュエータ (2012)
  • Author(s): 今井 郷充
  • Organizer: 精密工学会
  • Place of Presentation: 九州工業大学
• [Presentation] 薄膜形状記憶ポリマーを用いた梁型MEMSアクチュエータの動作特性 (2011)
  • Author(s): 今井郷充
  • Organizer: 日本機械学会
  • Place of Presentation: 東京工業大学
  • Year and Date: 2011-09-13
• [Presentation] 形状記憶ポリマーを用いたダイアフラム型アクチュエータの開発 (2010)
  • Author(s): 今井郷充,櫻井航生,小島健三,田邉慶典
  • Organizer: 電気学会全国大会
• [Presentation] ガラス転移点温度の異なる2種類の形状記憶ポリマーを用いて変形・回復を行うアクチュエータ
  • Author(s): 今井郷充
  • Organizer: 精密工学会2012秋季大会
• [Presentation] A MEMS actuator using two kinds of shape memory polymers to activate only by heating and cooling
  • Author(s): 今井郷充
  • Organizer: Proc. of IWPMA 2012 (International Workshop on Piezoelectric Materials and applications)
• [Presentation] 薄膜形状記憶ポリマーを用いた梁型MEMSアクチュエータの動作特性
  • Author(s): 今井郷充
  • Organizer: 日本機械学会2011年次大会
• [Presentation] 形状記憶ポリマーを用いたMEMSアクチュエータの構造と加工法
  • Author(s): 今井郷充
  • Organizer: 日本機械学会IIP2010情報・知能・精密機器部門講演論文集,B-2.