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Study of interface passivation effect on band alignment at metal/semiconductor interface

Research Project

Project/Area Number 22760244
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionThe University of Tokyo

Principal Investigator

NISHIMURA Tomonori  東京大学, 大学院・工学系研究科, 技術専門職員 (10396781)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2010: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywords電子デバイス・集積回路 / フェルミレベルピンニング
Research Abstract

The pinning level at metal/Ge interface is sensitive to the non metal element bonded to interface Ge and to the bond structure of Ge close to the interface. Whereas, the alleviation of Fermi level pinning depends on the inserting film, which is difficult to be explained only by simple models of interface level or by wave function penetration from metal.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (14 results)

All 2011 2010 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (12 results) Remarks (1 results)

  • [Journal Article] High-Electron-Mobility Ge n-Channel Metal-Oxide-Semiconductor Field-Effect Transistors with High-Pressure Oxidized Y_2O_32011

    • Author(s)
      T.Nishimura, C.H.Lee, T.Tabata, S.K.Wang, K.Nagashio, K.Kita, A.Toriumi
    • Journal Title

      Applied Physics Express

      Volume: 4 Issue: 6 Pages: 064201-064201

    • DOI

      10.1143/apex.4.064201

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Presentation] MIGS-metal layer formation model at metal/Ge Schottky barrier diode interface2011

    • Author(s)
      T. Nishimura and A. Toriumi
    • Organizer
      2011 IEEE 42nd Semiconductor Interface Specialists Conference(SISC)
    • Place of Presentation
      Arlington
    • Year and Date
      2011-12-02
    • Related Report
      2011 Final Research Report
  • [Presentation] GS-metal layer formation model at metal/Ge Schottky barrier diode interfa2011

    • Author(s)
      T.Nishimura, A.Toriumi
    • Organizer
      2011 IEEE 42nd Semiconductor Interface Specialists Conference (SISC)
    • Place of Presentation
      米国,Arlington
    • Year and Date
      2011-12-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] A Study of Fermi-level Pinning in Ge Schottky and MIS Tunnel Junctions2011

    • Author(s)
      T. Nishimura, K. Nagashio, K. Kita and A. Toriumi
    • Organizer
      International Conference on Solid State Devices and Materials(SSDM)
    • Place of Presentation
      Nagoya
    • Year and Date
      2011-09-29
    • Related Report
      2011 Final Research Report
  • [Presentation] A Study of Fermi-level Pinning in Ge Schottky and MIS Tunnel Junctions2011

    • Author(s)
      T.Nishimura, K.Nagashio, K.Kita, A.Toriumi
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM)
    • Place of Presentation
      名古屋
    • Year and Date
      2011-09-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] 金属/Ge界面に導入した酸化膜と硫化膜がFermi-level pinningに与える影響の比較2011

    • Author(s)
      西村知紀, 李忠賢, 長汐晃輔, 喜多浩之, 鳥海明
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      (震災の影響で予稿集のみ)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] High-k/GeMOSFETにおける移動度特性の向上2011

    • Author(s)
      西村知紀,李忠賢,王盛凱,田畑俊行,長汐晃輔,喜多浩之,鳥海明
    • Organizer
      第16回ゲートスタック研究会-材料・プロセス・評価の物理-
    • Place of Presentation
      Tokyo
    • Year and Date
      2011-01-27
    • Related Report
      2011 Final Research Report
  • [Presentation] High-k/Ge MOSFETにおける移動度特性の向上2011

    • Author(s)
      西村知紀, 李忠賢, 王盛凱, 田畑俊行, 長汐晃輔, 喜多浩之, 鳥海明
    • Organizer
      第16回ゲートスタック研究会-材料・プロセス・評価の物理-
    • Place of Presentation
      東京(東工大)
    • Year and Date
      2011-01-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] 金属/Ge界面に導入した酸化膜と硫化膜がFermi-level pinningに与える影響の比較2011

    • Author(s)
      西村知紀,李忠賢,長汐晃輔,喜多浩之,鳥海明
    • Organizer
      2011年春季第58回応用物理学関係
    • Related Report
      2011 Final Research Report
  • [Presentation] Electoron Mobility in High-k Ge MISFETs Goes up to Higher2010

    • Author(s)
      T. Nishimura, C. H. Lee, S. K. Wang, T. Tabata, K. Kita, K. Nagashio, and A. Toriumi
    • Organizer
      2010 Symposiaon VLSI Technology and
    • Place of Presentation
      Honolulu
    • Year and Date
      2010-06-17
    • Related Report
      2011 Final Research Report
  • [Presentation] Electoron Mobility in High-k Ge MISFETs Goes up to Higher2010

    • Author(s)
      T.Nishimura, C.H.Lee, S.K.Wang, T.Tabata, K.Kita, K.Nagashio, A.Toriumi
    • Organizer
      2010 Symposia on VLSI Technology and Circuits
    • Place of Presentation
      米国,Honolulu
    • Year and Date
      2010-06-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Long Range Pinning Interaction in Ultra-thin Insulator-inserted Metal/Germanium Junctions2010

    • Author(s)
      T. Nishimura, K. Kita, K. Nagashio, and A. Toriumi
    • Organizer
      2010 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2010-06-13
    • Related Report
      2011 Final Research Report
  • [Presentation] Long Range Pinning Interaction in Ultra-thin Insulator-inserted Metal/Germanium Junctions2010

    • Author(s)
      T.Nishimura, K.Kita, K.Nagashio, A.Toriumi
    • Organizer
      2010 Silicon Nanoelectronics Workshop
    • Place of Presentation
      米国,Honolulu
    • Year and Date
      2010-06-13
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.adam.t.u-tokyo.ac.jp

    • Related Report
      2011 Final Research Report

URL: 

Published: 2010-08-23   Modified: 2016-04-21  

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