Development of Scanning Thermal Microscopy with sub-nanometer lateral resolution
| Project/Area Number |
23310068
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Nanostructural science
|
|---|
| Research Institution | National Institute for Materials Science |
|---|
Principal Investigator |
CUSTANCE Oscar 独立行政法人物質・材料研究機構, 極限計測ユニット, グループリーダー (00444555)
|
|---|
| Project Period (FY) |
2011-04-01 – 2014-03-31
|
| Project Status |
Completed (Fiscal Year 2013)
|
| Budget Amount *help |
¥19,890,000 (Direct Cost: ¥15,300,000、Indirect Cost: ¥4,590,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
|
|---|
| Keywords | ナノプローブ / 走査型熱顕微鏡 / 原子分解能原子間力顕微鏡 / 原子間力顕微鏡 |
|---|
| Research Abstract |
Scanning thermal microscopy (SThM) is a variant of atomic force microscopy (AFM) that uses a heat-sensing cantilever probe. The heat generated by this cantilever probe can be used to study the thermal resistivity of surfaces and devices at the nano scale, as well as for the fabrication of masks of a few nanometers half-pitch that can be used for the patterning semiconductor substrates and prototype device fabrication. The main goal of this project was to combine the heating cantilever probe technology developed by IBM for the "millipede project" with our expertise in the development of instrumentation for atomic resolution AFM to push the resolution limits of SThM. We reached our goal of developing a high-resolution SThM operative in UHV environment.
|
Report
(4 results)
Research Products
(11 results)
