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Study on the characterization and grinding technology of "soft-brittle" functional materials

Research Project

Project/Area Number 23360062
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionIbaraki University

Principal Investigator

ZHOU Libo  茨城大学, 工学部, 教授 (90235705)

Co-Investigator(Kenkyū-buntansha) SHIMIZU Jun  茨城大学, 工学部, 教授 (40292479)
ONUKI Teppei  茨城大学, 工学部, 准教授 (70400447)
OJIMA Hirotaka  茨城大学, 工学部, 講師 (90375361)
YAMAMOTO Takeyuki  茨城大学, 工学部, 技術専門職員 (40396594)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2013: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2012: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2011: ¥12,220,000 (Direct Cost: ¥9,400,000、Indirect Cost: ¥2,820,000)
Keywords軟脆材料 / 硬脆材料 / 単結晶 / 機械化学融合加工 / 焦電効果 / 圧電効果 / 研削加工 / 研削熱の影響 / “軟脆”材料 / “硬脆”材料 / 機械特性 / 物理特性 / "硬脆"材料 / "軟脆"材料 / インデンテーション実験 / 分子動力学シミュレーション
Research Abstract

New functional materials has been developed to meet the requirements from semiconductor and optical industries recently. Most of those materials are made in single crystal and present "soft-and-brittle" characteristic in their mechanical property, thus are very difficult to be machined.
As a typical multi-functional single crystal material, Lithium tantalate (LiTaO3 or LT) exhibits its excellent electro-optical, pyroelectric and piezoelectric properties, and has now been widely applied into many applications, especially in the telecommunication field. However, its mechanical and physical properties and the influence on the grinding performance are still not fully understood. This research project aims to establishment of a fixed abrasive process for LT wafers to achieve both high geometry accuracy and surface integrity, via discovery of influence of the mechanical and physical properties of "soft-and-brittle" materials, especially, its pyroelectric effect and piezoelectric effect.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (79 results)

All 2014 2013 2012 2011 Other

All Journal Article (42 results) (of which Peer Reviewed: 42 results) Presentation (34 results) Remarks (3 results)

  • [Journal Article] Mirror surface finishing of silicon wafer edge by UF-CMP (ultrasonic assisted fixed-abrasive CMP)2013

    • Author(s)
      Yongbo Wu, Weiping Yang, Mas akazu Fujimoto and Libo Zhou
    • Journal Title

      Int. J. of Automation Technology

      Volume: Vol.7, 6 Pages: 663-670

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study on the mechanical properties of lithium tantalate and the influence on its machinability2013

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu, Julong Yuan and Takeyuki Yamamoto
    • Journal Title

      Int. J. of Automation Technology

      Volume: Vol.7, 6 Pages: 644-653

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013

    • Author(s)
      Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: Vol.797 Pages: 549-554

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study on thermal influence of grinding process on LiTaO_32013

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu and Julong Yuan
    • Journal Title

      Advanced Materials Research

      Volume: Vol. 797 Pages: 252-257

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 大口径Si ウエハ表面形状の計測評価技術に関する研究-第2報:ウェーブレット変換を用いたノイズ除去手法の適用-2013

    • Author(s)
      尾嶌裕隆,周立波,清水淳
    • Journal Title

      精密工学会誌

      Volume: Vol.79, 7 Pages: 677-681

    • NAID

      130003385012

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] A robust procedure of data anal ysis for micro/nano indentation2013

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu and Ju long Yuan
    • Journal Title

      Precision E ngineering

      Volume: Vol.37, 2 Pages: 408-414

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mirror surface finishing of silicon wafer edge by UF-CMP (ultrasonic assisted fixed-abrasive CMP)2013

    • Author(s)
      Yongbo Wu, Weiping Yang, Mas akazu Fujimoto and Libo Zhou
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol. 7, No. 6 Pages: 663-670

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on the mechanical properties of lithium tantalate and the influence on its machinability2013

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu, Julong Yuan and Takeyuki Yamamoto
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol. 7, No. 6 Pages: 644-653

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Surface Profile Evaluation for Large Si Wafer Measurement2013

    • Author(s)
      尾嶌裕隆,周立波,清水淳
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 79 Issue: 7 Pages: 677-681

    • DOI

      10.2493/jjspe.79.677

    • NAID

      130003385012

    • ISSN
      0912-0289, 1882-675X
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on thermal influence of grinding process on LiTaO32013

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu and Julong Yuan
    • Journal Title

      Advanced Materials Research

      Volume: 797 Pages: 252-257

    • DOI

      10.4028/www.scientific.net/amr.797.252

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A robust procedure of data analysis for micro/nano indentation2013

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu and Julong Yuan
    • Journal Title

      Precision Engineering

      Volume: 37 Pages: 408-414

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-Scale Stick-Slip Phenomenon2013

    • Author(s)
      Jun Shimizu, Libo Zhou and Takeyuki Yamamoto
    • Journal Title

      Tribology Online

      Volume: 8 Pages: 38-43

    • NAID

      130003368294

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deformation and removal characteristics of LiTaO_3 single crystals in nanoindentation and nanoscratch2012

    • Author(s)
      Anshun He, Han Huang and Libo Zhou
    • Journal Title

      Int. J. of Abrasive Technology

      Volume: Vol.5, 3 Pages: 258-269

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] A study on the diamond grinding of ultra-thin silicon wafers2012

    • Author(s)
      Libo Zhou, Yebing Tian, Han Huang, Hisashi Sato and Jun Shimizu
    • Journal Title

      Proc IMechE, Part B : J.of Engineering Manufacture

      Volume: Vol.226, 1 Pages: 66-75

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration2012

    • Author(s)
      Y. Li, Y. Wu, L. Zhou, H. Guo, J. Cao, M. Fujimoto and M. Kenmochi
    • Journal Title

      Key Engineering Materials

      Volume: Vol. 523-524 Pages: 155-160

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study on micro/nano-indentation of typical soft-brittle materials2012

    • Author(s)
      Wei Hang, Libo Zhou, Jun Shimizu, Takeyuki Yamamoto and Julong Yuan
    • Journal Title

      Key Engineering Materials

      Volume: Vol. 523-524

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Research on digital filters for Si wafer surface profile measurement2012

    • Author(s)
      Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
    • Journal Title

      Advanced Materials Research

      Volume: Vol.565 Pages: 656-661

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on grinding process ing of sapphire wafer2012

    • Author(s)
      Yutaro Ebina, Wei Hang, Libo Zhou, Jun S himizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
    • Journal Title

      Advanced Materials Research

      Volume: Vol.565 Pages: 22-27

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mech anical Properties and Deformation of LiTaO 3 Single Crystals Characterised by Nanoind entation and Nanoscratch2012

    • Author(s)
      Anshun He, Han Huang, Libo Zhou
    • Journal Title

      Advanced Materi als Research

      Volume: Vol.565 Pages: 564-569

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Deformation and removal characteristics of LiTaO3 single crystals in nanoindentation and nanoscratch2012

    • Author(s)
      Anshun He, Han Huang and Libo Zhou
    • Journal Title

      Int. J. of Abrasive Technology

      Volume: 5 Pages: 258-269

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration2012

    • Author(s)
      Yaguo Li, Yongbo Wu, Libo Zhou, Huiru Guo, Jianguo Cao, Masakazu Fujimoto, Masaaki Kemmochi
    • Journal Title

      Key Engineering Materials

      Volume: 523-524 Pages: 155-160

    • DOI

      10.4028/www.scientific.net/kem.523-524.155

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on micro/nano-indentation of typical soft-brittle materials2012

    • Author(s)
      W. Hang, L. Zhou, J. Shimizu, T. Yamamoto, J. Yuan
    • Journal Title

      Key Engineering Materials

      Volume: Vols.523-524 Pages: 7-12

    • DOI

      10.4028/www.scientific.net/kem.523-524.7

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on grinding processing of sapphire wafer2012

    • Author(s)
      Yutaro Ebina, Wei Hang, Libo Zhou, Jun Shimizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
    • Journal Title

      Advanced Materials Research

      Volume: 565 Pages: 22-27

    • DOI

      10.4028/www.scientific.net/amr.565.22

    • NAID

      130005031327

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical Properties and Deformation of LiTaO3 Single Crystals Characterised by Nanoindentation and Nanoscratch2012

    • Author(s)
      Anshun He, Han Huang, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: 565 Pages: 564-569

    • DOI

      10.4028/www.scientific.net/amr.565.564

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measurement2012

    • Author(s)
      Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
    • Journal Title

      Key Engineering Materials

      Volume: 615 Pages: 332-336

    • DOI

      10.4028/www.scientific.net/kem.516.332

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A study on the diamond grinding of ultra-thin silicon wafers2012

    • Author(s)
      L.Zhou, Y.Tian, H.Huang, H.Sato, J.Shimizu
    • Journal Title

      Part B : Journal of Engineering Manufacture

      Volume: 226 Issue: 1 Pages: 66-76

    • DOI

      10.1177/0954405411414768

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film2012

    • Author(s)
      J. Shimizu, G. Kobayashi, N. Hasegawa, T. Yamamoto, H. Ojima, T. Onuki, L. Zhou
    • Journal Title

      Materials Science Forum

      Volume: Vols.706-709 Pages: 2646-2651

    • DOI

      10.4028/www.scientific.net/msf.706-709.2646

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011

    • Author(s)
      小貫哲平,小野龍典,尾嶌隆裕,清水淳,周立波
    • Journal Title

      砥粒加工学会誌

      Volume: Vol.55, 12 Pages: 729-732

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 大 口径Siウエハ表面形状の計測評価技術に関 する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011

    • Author(s)
      周立波,小野真志,尾嶌裕隆,清水淳
    • Journal Title

      精密工学会誌

      Volume: Vol.77, 12 Pages: 1165-1169

    • NAID

      130002121500

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
    • Journal Title

      砥粒加工学会

      Volume: Vol.55, 11 Pages: 662-667

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Finite element analysis of deflection and residual stress on machined ultra-thin silicon wafers2011

    • Author(s)
      Y.B.Tian, L.Zhou, Z.W. Zhong, H.Sato, J.Shimizu
    • Journal Title

      Semiconductor Science and Technology

      Volume: Vol.26, 10 Pages: 1-7

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Performan ce improvement of chemo-mechanical grindi ng in single crystal silicon machining by th e assistance of elliptical ultrasonic vibration2011

    • Author(s)
      Yongbo Wu and Yaguo Li, Zhenzhong Wan g and Wei Yang and Libo Zhou
    • Journal Title

      Int. J. Abrasive Technology

      Volume: Vol.4, 2 Pages: 117-131

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process2011

    • Author(s)
      Yuki Mikami, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro, Sumio Kamiya
    • Journal Title

      Advanced Material Research

      Volume: Vol.325 Pages: 678-683

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Spectroscopic measurements of silicon wafer thickness for backgrinding process2011

    • Author(s)
      Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Advanced Material Research

      Volume: Vol.325 Pages: 672-677

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウェハの厚さ計測法2011

    • Author(s)
      小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 729-732

    • NAID

      10030194515

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 大口径Siウェハ表面形状の計測評価技術に関する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011

    • Author(s)
      周立波, 小野真志, 尾嶌裕隆, 清水淳
    • Journal Title

      精密工学会誌

      Volume: 77 Pages: 1165-1169

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Siウェハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳, 周立波, 小貫哲平,尾嶌裕隆, 山本武幸, 鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 662-667

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Finite element analysis of deflection and residual stress on machined ultra-thin silicon wafers2011

    • Author(s)
      Y.B.Tian, L.Zhou, Z.W.Zhong, H.Sato, J.Shimizu
    • Journal Title

      Semiconductor Science and Technology

      Volume: 26 Issue: 10 Pages: 1-7

    • DOI

      10.1088/0268-1242/26/10/105002

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanogrinding of multi-layered thin film amorphous Si solar panels2011

    • Author(s)
      Taro Sumitomo, Han Huang, Libo Zhou, Jun Shimizu
    • Journal Title

      International Journal of Machine Tools and Manufacture

      Volume: 51 Pages: 797-805

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deformation and material removal in a nanoscale multi-layer thin film solar panel using nanoscratch2011

    • Author(s)
      Taro Sumitomo, Han Huang, Libo Zhou
    • Journal Title

      International Journal of Machine Tools and Manufacture

      Volume: 51 Pages: 182-189

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spectroscopic Measurements of Silicon Wafer Thickness for Backgrinding Process2011

    • Author(s)
      Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: 325 Pages: 672-677

    • DOI

      10.4028/www.scientific.net/amr.325.672

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process2011

    • Author(s)
      Yuki Mikami, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro, Sumio Kamiya
    • Journal Title

      Advanced Materials Research

      Volume: 325 Pages: 678-683

    • DOI

      10.4028/www.scientific.net/amr.325.678

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] 固定砥粒ダイヤモンド砥石構造のモデル化2014

    • Author(s)
      蛯名雄太郎, 周 立波, 清水 淳, 小貫哲平, 尾嶌裕隆
    • Organizer
      2014年度精密工学会春季大会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] 脆性強誘電材料(LiNbO_3)への非熱的レーザアブレーション微細加工技術2013

    • Author(s)
      村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
    • Organizer
      第14回高エネ研メカ・ワークショップ
    • Place of Presentation
      筑波
    • Year and Date
      2013-04-12
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013

    • Author(s)
      Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
    • Organizer
      Proceedings of 6th LEM21
    • Place of Presentation
      Sendai/Japan (査読有,79-84)
    • Related Report
      2013 Final Research Report
  • [Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013

    • Author(s)
      Teppei ONUKI, Ippei MURAYAMA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
    • Organizer
      Proceedings of 7th LEM21
    • Place of Presentation
      Sendai/Japan (査読有,67-70)
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of fixed diamond abrasive pellet for final finishing of monocrystallined sapphire wafers2013

    • Author(s)
      Yoshiaki TASHIRO, Libo ZHOU, Jun SHIMIZU, Noriaki SHINODA, Yoshinori MITSUI
    • Organizer
      Proceedings of 7th LEM21
    • Place of Presentation
      Sendai/Japan (査読有,298-301)
    • Related Report
      2013 Final Research Report
  • [Presentation] 化学作用援用研削の分子動力学シミュレーション-シリコンウエハ/砥粒間の凝着の影響-2013

    • Author(s)
      清水淳, 周立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
    • Organizer
      砥粒加工学会,ABTEC2013
    • Place of Presentation
      日本大学
    • Related Report
      2013 Final Research Report
  • [Presentation] ダイヤモンドペレットによる単結晶サファイアウェーハの平坦加工技術に関する研究2013

    • Author(s)
      田代芳章, 周立波, 清水淳, 三井義則, 篠田知顕
    • Organizer
      砥粒加工学会,ABTEC2013
    • Place of Presentation
      日本大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 4H-SiC ウエハの鏡面研削加工技術2013

    • Author(s)
      蛯名雄太郎, 周立波, 清水淳, 成田 潔
    • Organizer
      砥粒加工学会,ABTEC2013
    • Place of Presentation
      日本大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 高品位サファイアウエハの研削加工技術2013

    • Author(s)
      蛯名雄太郎,周立波, 清水淳
    • Organizer
      砥粒加工学会,ABTEC2013
    • Place of Presentation
      日本大学
    • Related Report
      2013 Final Research Report
  • [Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013

    • Author(s)
      蛯名雄太郎,杭偉,周立波,清水淳,小貫哲平,尾嶌裕隆,山本武幸,渡辺拓也
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of Areal Wavelet Transform applying to 2D image2013

    • Author(s)
      鈴木泰樹,尾嶌裕隆,周立波,清水淳,小貫哲平
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Related Report
      2013 Final Research Report
  • [Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013

    • Author(s)
      村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013

    • Author(s)
      Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
    • Organizer
      日本機械学会,6th Int’l Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of fixed diamond abrasive pellet for final finishing of mono-crystallined sapphire wafers2013

    • Author(s)
      Yoshiaki TASHIRO, Libo ZHOU, Jun SHIMIZU, Noriaki SHINODA, Yoshinori MITSUI
    • Organizer
      日本機械学会,6th Int’l Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] 脆性強誘電体材料(LiNbO3)への非熱的レーザアブレーション微細加工技術2013

    • Author(s)
      村山一平, 小貫哲平, 尾嶌裕隆, 清水 淳, 周 立波
    • Organizer
      第14回高エネ研メカ・ワークショップ
    • Place of Presentation
      筑波
    • Related Report
      2013 Annual Research Report
  • [Presentation] 化学作用援用研削の分子動力学シミュレーション-シリコンウエハ-砥粒間の凝着の影響-2013

    • Author(s)
      清水 淳, 周 立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
    • Organizer
      砥粒加工学会、ABTEC2013
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] ダイヤモンドペレットによる単結晶サファイアウェーハの平坦加工技術に関する研究 遊離砥粒方式に代替する新たなソリューションの提供2013

    • Author(s)
      田代芳章, 周 立波, 清水 淳, 三井義則, 篠田知顕
    • Organizer
      砥粒加工学会、ABTEC2013
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] 4H-SiC ウエハの鏡面研削加工技術2013

    • Author(s)
      蛯名雄太郎, 周 立波, 清水 淳, 成田 潔
    • Organizer
      砥粒加工学会、ABTEC2013
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高品位サファイアウエハの研削加工技術2013

    • Author(s)
      蛯名雄太郎, 周立 波, 清水 淳
    • Organizer
      砥粒加工学会、ABTEC2013
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013

    • Author(s)
      蛯名雄太郎,杭偉,周立波,清水淳小貫哲平,尾嶌裕隆,山本武幸,渡辺拓也
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of Areal Wavelet Transform applying to 2D image2013

    • Author(s)
      鈴木泰樹,尾嶌裕隆,周立波,清水淳,小貫哲平
    • Organizer
      2013年度精密工学会春季学術講演会国際フォーラム
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013

    • Author(s)
      村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] 固定砥粒によるシリコンウエハの薄片化に関する加工技術2012

    • Author(s)
      谷口博則,周立波,清水淳,小貫哲平,尾嶌裕隆,呉天旭
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学
    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Presentation] ナノインデンテーションにおけるデータの解析手法2012

    • Author(s)
      杭偉,周立波,清水淳,山本武幸
    • Organizer
      砥粒加工学会,ABTEC2012
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Final Research Report
  • [Presentation] Si ウエハ仕上げ加工に及ぼす加工変質層の影響2012

    • Author(s)
      清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      砥粒加工学会,ABTEC2012
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Final Research Report
  • [Presentation] ナノインデンテーションにおけるデータ解析手法2012

    • Author(s)
      杭偉,周立波,清水淳,山本武幸
    • Organizer
      2012年度砥粒加工学会(ABTEC2012)
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響2012

    • Author(s)
      清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,高野巧一郎
    • Organizer
      2012年度砥粒加工学会(ABTEC2012)
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si wafer thinning processes : grinding, stress relief and SD evaluation2011

    • Author(s)
      Libo Zhou
    • Organizer
      Keynote speech in 16th Chinese Conference of Abrasive Technology
    • Place of Presentation
      XinJiang/China
    • Related Report
      2013 Final Research Report
  • [Presentation] Image based defect detection Algorithm by use of wavelet transformation2011

    • Author(s)
      Kaoru TAKAMORI, Hirotaka OJIMA, Libo ZHOU, Teppei ONUKI, Jun SHIMIZU and Takeyuki YAMAMOTO
    • Organizer
      Proceedings of 6thLEM21
    • Place of Presentation
      Saitama/Japan (CD-ROM)
    • Related Report
      2013 Final Research Report
  • [Presentation] Manufacturing Industry in Japan & Strategic Plan for Science and Technology Promotion2011

    • Author(s)
      Libo Zhou (plenary Lecture)
    • Organizer
      The first Global Chinese manufacturing professors forum (plenary Lecture)
    • Place of Presentation
      Harbin, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] Si wafer thinning processes : grinding, stress relief and SD evaluation2011

    • Author(s)
      Libo Zhou
    • Organizer
      16th Chinese Conference of Abrasive Technology (Keynote speech)
    • Place of Presentation
      Xinjiang, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] Image based defect detection Algorithm by use of wavelet transformation2011

    • Author(s)
      K.TAKAMORI, H.OJIMA, L.ZHOU, T.ONUKI, J.SHIMIZU, T.YAMAMOTO
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011

    • Author(s)
      J.SHIMIZU, W.OHSONE, H.OJIMA, T.ONUKI, L.ZHOU, T.YAMAMOTO
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011

    • Author(s)
      J.Shimizu, L.Zhou, Takeyuki Yamamoto
    • Organizer
      Int'l Tribology Conference 2011
    • Place of Presentation
      Hiroshima, Japan
    • Related Report
      2011 Annual Research Report
  • [Remarks] Nano-Engineering Laboratory

    • URL

      https://sites.google.com/site/nlabibarakiuniv/

    • Related Report
      2013 Annual Research Report
  • [Remarks] Nano-Engineering Laboratory

    • URL

      https://sites.google.com/site/nlabibarakitest/?pli=1

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://nlab.ise.ibaraki.ac.jp/nLabTOP.html

    • Related Report
      2011 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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