| Project/Area Number |
23360065
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
MATSUMURA Takashi 東京電機大学, 工学部, 教授 (20199855)
UMEHARA Noritsugu 名古屋大学, 大学院工学研究科, 教授 (70203586)
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| Co-Investigator(Renkei-kenkyūsha) |
YAMAMOTO Takatoki 東京工業大学, 大学院理工学研究科, 准教授 (20322688)
YAMANAKA Akinori 東京農工大学, 大学院工学府, 准教授 (50542198)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2012: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2011: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
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| Keywords | マイクロナノデバイス / 機械工作・生産工学 / 先端機能デバイス / ナノ材料 / 精密部品加工 / 自己組織化 / 光学特性 / マイクロ・ナノデバイス / 機械加工 / 超精密加工 / 光学機能 / マイクロアレイ / ナノインプリント / 薄膜モールド / ナノ・マイクロ加工 / ナノドット / 塑性加工 / ナノデバイス / 局在表面プラズモン共鳴 / インプリンティング / 薄膜 |
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| Research Abstract |
This project aimed to develop efficient processes at a low cost to produce the gold nano dot array having 10nm level. The conclusions obtained from the project is the following three.
Nano-dot arrays with a diameter of smaller than 100nm can be produced by a combination process of patterning by the nano plastic forming and self-organization by annealing.
It is efficient to employ the nanoimprinting process to groove grid patterning in order to improve productivity of nano dot arrays. It was shown that nanodot arrays exhibit unique optical properties, and the potential for industrial applications as biosensors was shown.
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