CO2 Sensor using Quartz Crystal Microbalance Coated with Sensitive Membrane

• Project/Area Number: 23560514
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: Osaka Institute of Technology
• Principal Investigator: MURAOKA Shigenobu 大阪工業大学, 工学部, 教授 (40097994)
• Co-Investigator(Renkei-kenkyūsha): HIGASHIMOTO Shinya 大阪工業大学, 工学部, 准教授 (70368140)
• Project Period (FY): 2011 – 2013
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000); Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2012: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2011: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
• Keywords: CO2センサ / 水晶振動子 / 感応膜 / QCM

Research Abstract

QCMs coated with an acrylonitrile-styrene copolymer (AS) were fabricated. QCMs are sensors which can be used to measure the local CO2 concentration in real time. The following characteristics of the QCMs were obtained. (1)The QCMs are sensitive to CO2 and humidity but insensitive to O2 and Ar. (2)The QCM can be used to measure the concentration of damp CO2 gas as well as dry CO2 gas when the sensitivity is corrected for the influence of humidity. (3)The sensitivity to damp CO2 gas corrected for the influence of humidity is almost identical to the sensitivity to dry CO2 gas. (4)The sensitivity to CO2 concentration and humidity tends to increase with the thickness of the AS membrane.It was revealed that a QCM coated with an AS membrane can be used to measure the local concentration of CO2 in real time. The CO2 concentration sensor has a sensitivity up to around 20 Hz/% and a resolution of around 0.1 %.

Research Products

• [Journal Article] A CO2 Sensor Using a Quartz Crystal Microbalance Coated with a Sensitive Membrane (2014)
  • Author(s): S. Muraoka, Y. Kiyohara, H. Oue and S.Higashimoto
  • Journal Title: Electronics and Communications in Japan Volume: 97-2 Pages: 60-66
  • NAID: 210000173290
  • Peer Reviewed
• [Journal Article] 感応膜を修飾したQCMによるCO_2濃度センサ (2013)
  • Author(s): 村岡茂信,清原裕弥,大植弘義,東本慎也
  • Journal Title: 電気学会論文誌E Volume: 133-1 Pages: 20-25
  • NAID: 10031142493
  • Peer Reviewed
• [Journal Article] 感応膜を修飾したQCMによるCO2濃度センサ (2013)
  • Author(s): 村岡茂信，清原裕弥，大植弘義，東本 慎也
  • Journal Title: 電気学会論文誌E， Volume: VOL.133 No.1 Pages: 20-25
  • Peer Reviewed
• [Presentation] 感応膜を修飾したQCMによるCO_2濃度と湿度の検出 (2012)
  • Author(s): 清原裕弥,村岡茂信,大植弘義,東本慎也
  • Organizer: 第29回センシングフォーラム(計測自動制御学会計測部門)
  • Place of Presentation: 東京工業大学
  • Year and Date: 2012-09-27
• [Presentation] 感応膜を修飾したQCMのCO_2濃度センサへの応用-CO_2濃度感度の感応膜(アクリロニトリルスチレン)厚依存性- (2012)
  • Author(s): 清原裕弥,村岡茂信,大植弘義,東本慎也
  • Organizer: 日本機械学会関西支部第87期定時総会講演会
  • Place of Presentation: 関西大学
  • Year and Date: 2012-03-17
• [Presentation] 感応膜を修飾したＱＣＭのCO2濃度センサへの応用 (2012)
  • Author(s): 清原裕弥，村岡茂信，大植弘義，東本慎也，他２名
  • Organizer: 日本機械学会 関西支部 大８７期定時総会講演会
  • Place of Presentation: 関西大学
• [Presentation] 感応膜を修飾した水晶振動子によるCO_2濃度の検出 (2011)
  • Author(s): 清原裕弥,村岡茂信,大植弘義,東本慎也,北條崇行,木下大輔
  • Organizer: 第28回センシングフォーラム(計測自動制御学会計測部門)
  • Place of Presentation: 慶應義塾大学
  • Year and Date: 2011-10-13
• [Presentation] 感応膜を修飾した水晶振動子によるCO2濃度の検出 (2011)
  • Author(s): 清原裕弥，村岡茂信，大植弘義，東本慎也，他２名
  • Organizer: 計測自動制御学会 第２８回センシングフォーラム
  • Place of Presentation: 慶応義塾大学
• [Presentation] 感応膜を修飾したQCMによるCO2濃度と湿度の検出
  • Author(s): 清原裕弥，村岡茂信，大植弘義，東本慎也
  • Organizer: 第29回センシングフォーラム（計測自動制御学会計測部門）
  • Place of Presentation: 東京工業大学（東京都）