Vector tactile sensing with single MEMS sensor using resonant frequencyshift
| Project/Area Number |
23656239
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Electron device/Electronic equipment
|
|---|
| Research Institution | Kyoto Institute of Technology |
|---|
Principal Investigator |
YAMASHITA Kaoru 京都工芸繊維大学, 工芸科学研究科, 准教授 (40263230)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
NODA Minoru 京都工芸繊維大学, 工芸科学研究科, 教授 (20294168)
|
|---|
| Research Collaborator |
YANG Yi 京都工芸繊維大学, 工芸科学研究科, 前期課程大学院生
TANAKA Hikaru 京都工芸繊維大学, 工芸科学研究科, 博士
KII Hirotoshi 京都工芸繊維大学, 工芸科学部, 4年生
|
|---|
| Project Period (FY) |
2011 – 2012
|
| Project Status |
Completed (Fiscal Year 2012)
|
| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
|
|---|
| Keywords | 触覚 / 共振 / 圧電 / MEMS |
|---|
| Research Abstract |
A new technique for vector tactile sensing with MEMS devices was proposed. While tactile vectors had been conventionally measured with a combination of plural sensor elements each of which detected force in only one direction, the proposed technique enabled a single sensor element to measure a tactile vector based on resonant frequency shift of a vibratory microcantilever. The principle was confirmed in finite element analysis and the cantilever sensors were fabricated and evaluated. It was found that nonlinearity in the frequency response of the sensors drastically affected the tactile vector estimation, and an improved sensor structure to reduce the nonlinearity was designed and fabricated.
|
Report
(3 results)
Research Products
(11 results)
