| Budget Amount *help |
¥27,300,000 (Direct Cost: ¥21,000,000、Indirect Cost: ¥6,300,000)
Fiscal Year 2014: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2013: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2012: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2011: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
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| Outline of Final Research Achievements |
In this research, the applicant attemped to realize an energy autonomous, which means that harvesting energy in nature to electricity, water striding microrobot. The research was inspired by water-striding tiny insects in nature, and attempted to realize cooperative functions by independent tiny agents. The new philosophical contribution by the research is the idea of autonomous distibuted system by self-moving micro agents. By means of such "top-down" research, a critical advancement in VLSI integrated MEMS technology was achieved. The device technology proven by this Kakenhi research includes a VLSI on-chip high-voltage generating solar cells, that produces high voltage which is beyond the physical limit of Silicon material, thanks to CMOS-MEMS post-process. A new energy and information transfer scheme was also demonstrated with CMOS integrated MEMS devices.
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