Development of hard deformable focusing mirror for general-purpose hard X-ray optics.
Project/Area Number |
23860001
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Research Category |
Grant-in-Aid for Research Activity Start-up
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Allocation Type | Single-year Grants |
Research Field |
Production engineering/Processing studies
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Research Institution | Hokkaido University |
Principal Investigator |
KIMURA Takashi 北海道大学, 電子科学研究所, 助教 (50531472)
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Project Period (FY) |
2011 – 2012
|
Project Status |
Completed (Fiscal Year 2012)
|
Budget Amount *help |
¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
|
Keywords | X 線光学 / 超精密加工 / 超精密計測 / 計測工学 / X線集光 / X線ミラー / 補償光学 / 波面制御 / 収差補正 / 形状可変ミラー / 圧電素子 |
Research Abstract |
In order to realize diffraction-limited focusing of hard X-rays with a size less than several hundreds of nanometers, a deformable mirror which can be bent into an aspherical shape with a depth of several micrometers and an accuracy better than a few nanometers was developed. The accuracy of the mirror surface shape was guaranteed and maintained by a feedback system with a Fizeau interferometer. Hard X-ray focusing performance of the mirror was tested at the BL29XUL of SPring-8. We confirmed that beam size was controllable in a range from micrometer to nanometer scale under diffraction-limited focusing condition.
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Report
(3 results)
Research Products
(27 results)
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[Presentation] Development of Deformable Mirror for Hard X-rays Diffraction Limited Focusing with Controllable Spot Size2012
Author(s)
T. Kimura, S. Matsuyama, H.Mimura, H. Nakamori, S. Imai, H. Yokoyama, Y. Komura, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, K. Yamauchi
Organizer
11th International Conference on Synchrotron Radiation
Place of Presentation
Lyon ConventionCentre (France)
Year and Date
2012-07-09
Related Report
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[Presentation] Development of wavefront characterization method for nearly diffraction-limited focused hard X-ray nanobeam2012
Author(s)
T. Kimura, H. Mimura, H.Yumoto, S. Imai, S. Matsuyama, Y. Sano, K. Tamasaku, Y. Komura, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi
Organizer
4th international workshop on Metrology for X-ray Optics, Mirror Design, and Fabrication
Place of Presentation
Investigadors Residence Hall(Spain).
Year and Date
2012-07-04
Related Report
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[Presentation] Development of an ultra-precise deformable mirror for x-ray focusing2012
Author(s)
H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
Organizer
4th international workshop on Metrology for X-ray Optics, Mirror Design, and Fabrication
Place of Presentation
Investigadors Residence Hall(Spain).
Year and Date
2012-07-04
Related Report
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[Presentation] Development of piezoelectric deformable mirror for hard X-ray nanofocusing2012
Author(s)
S. Matsuyama, T. Kimura, H.Nakamori, S. Imai, H. Yokoyama, J. Kim, R. Fukui, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
Organizer
SPIE Optics+Photonics
Place of Presentation
San DiegoConvention Center (USA)
Related Report
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[Presentation] Single-nanometer focusing of hard x-rays using novel adaptive optical system2011
Author(s)
K. Yamauchi, H. Mimura, T.Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, H. Nakamori, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa
Organizer
ACTOP11
Place of Presentation
Diamond Light Source (UK).
Related Report
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