励起子トランジスタの創成と励起子輸送の学理探求：情報担体へ進化する励起子

• Project/Area Number: 23K20953
• Project/Area Number (Other): 21H01372 (2021-2023)
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund (2024); Single-year Grants (2021-2023)
• Section: 一般
• Review Section: Basic Section 21050:Electric and electronic materials-related
• Research Institution: Kyushu University
• Principal Investigator: 板垣 奈穂 九州大学, システム情報科学研究院, 教授 (60579100)
• Co-Investigator(Kenkyū-buntansha): 白谷 正治 九州大学, システム情報科学研究院, 教授 (90206293)
• Project Period (FY): 2021-04-01 – 2025-03-31
• Project Status: Declined (Fiscal Year 2024)
• Budget Amount: ¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000); Fiscal Year 2024: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2023: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2022: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2021: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
• Keywords: 励起子トランジスタ / スパッタリング / ZION / 結晶成長 / 励起子輸送 / 酸窒化物半導体 / 量子構造

Outline of Research at the Start

励起子は電子と正孔がクーロン相互作用で結合した準粒子であり，半導体の光物性と光機能を担う中核として長年にわたり膨大な研究がなされてきた．一方でマクロスケールでは電気的に中性とみなされる励起子が，電界などの外場中でどのように輸送されるかの議論は殆どなされていない．本研究の最終目的は，外場中での励起子輸送メカニズムを解明し，励起子を情報担体へと進化させることである．
本課題ではまず，その進化の鍵となる非局在型の室温・長寿命励起子をオリジナル材料ZAIONを用いて実現する．そしてこれを外場による励起子輸送の機構解明の場とするとともに，励起子のドリフト輸送を利用した励起子トランジスタを作製する．

Outline of Annual Research Achievements

本研究では、光―電気信号変換器としての励起子トランジスタを、代表者が開発した新材料 ZIONにより実現するとともに，現在ブラックボックスとなっている励起子輸送の機構解明を行うことを目的とした．実用化に耐え得る励起子トランジスタ実現のためには，当然，デバイスグレードの材料を用意する必要がある．本研究では，励起子研究の初期段階としてまずは高品質プロセス技術の確立が重要との思想のもと，高精度フラックス制御を用いたスパッタエピタキシー法を開発するとともに，励起子輸送については，外場がない場合の拡散過程からそのメカニズム解明に着手した．成果としては，ターゲットからの各種原子の蒸発レート、基板の面極性、表面モフォロジ―、基板温度、等各種キーパラメータの精密制御により，①原子レベルで急峻なZION/ZnOヘテロ界面の形成，②ZION/ZnO 歪量子井戸の形成，③励起子トランジスタにおけるゲートへの光照射によるスイッチング，という目標を達成した．さらに、当初の目標であった、10^17 cm^-3以下の低残留キャリア密度も実現した。これはデバイス実用化に向けた大きな成果と言える。励起子の拡散機構については，電気極性ならびに質量の異なる粒子が同方向に移動する「プラズマ中での両極性拡散」に着目し，この物理が励起子の拡散過程に適用可能かの検証を行った．その結果，ZION中では，伝導帯の電子有効質量が価電子帯の正孔有効質量に比べ小さく，外場が存在しない場合，両極性拡散における粒子輸送に類似したキャリア輸送が行われていることが分かった．

Research Progress Status

令和5年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

令和5年度が最終年度であるため、記入しない。

Research Products

• [Int'l Joint Research] Fraunhofer Institute/Group Manager/Dr. Alexander Hinz(ドイツ)
• [Int'l Joint Research] National Research Centre (NRC)(エジプト)
• [Journal Article] Prediction by a hybrid machine learning model for high-mobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method (2023)
  • Author(s): Kamataki Kunihiro、Ohtomo Hirohi、Itagaki Naho、Lesly Chawarambawa Fadzai、Yamashita Daisuke、Okumura Takamasa、Yamashita Naoto、Koga Kazunori、Shiratani Masaharu
  • Journal Title: Journal of Applied Physics Volume: 134 Issue: 16 Pages: 163301-163301
  • DOI: 10.1063/5.0160228
  • Peer Reviewed
• [Journal Article] Control of inhomogeneity and magnetic properties of ZnO:Co films grown by magnetron sputtering using nitrogen (2023)
  • Author(s): Agusutrisno M.N.、Narishige Ryota、Kamataki Kunihiro、Okumura Takamasa、Itagaki Naho、Koga Kazunori、Shiratani Masaharu、Yamashita Naoto
  • Journal Title: Materials Science in Semiconductor Processing Volume: 162 Pages: 107503-107503
  • DOI: 10.1016/j.mssp.2023.107503
  • Peer Reviewed
• [Journal Article] Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO-InN alloy films on ZnO substrates (2022)
  • Author(s): Narishige Ryota、Yamashita Naoto、Kamataki Kunihiro、Okumura Takamasa、Koga Kazunori、Shiratani Masaharu、Yabuta Hisato、Itagaki Naho
  • Journal Title: Journal of Materials Research Volume: 38 Issue: 7 Pages: 1803-1812
  • DOI: 10.1557/s43578-022-00827-4
  • Peer Reviewed
• [Journal Article] Amorphous In-Ga-Mg-O Thin Films Formed by RF Magnetron Sputtering: Optical, Electrical Properties and Thin-Film-Transistor Characteristics (2022)
  • Author(s): Yabuta Hisato、Itagaki Naho、Ekino Toshikazu、Shigesato Yuzo
  • Journal Title: IEEE Open Journal of Nanotechnology Volume: 3 Pages: 149-152
  • DOI: 10.1109/ojnano.2022.3222850
  • Peer Reviewed
• [Journal Article] Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light (2022)
  • Author(s): Putri Tika E.、Chawarambwa Fadzai L.、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: MRS Advances Volume: - Issue: 21 Pages: 427-432
  • DOI: 10.1557/s43580-022-00270-x
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode (2022)
  • Author(s): Chawarambwa Fadzai Lesley、Putri Tika Erna、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: Advanced Engineering Forum Volume: 45 Pages: 1-13
  • DOI: 10.4028/p-6l16rl
  • Peer Reviewed
• [Journal Article] Epitaxial growth of Zn1-xMgxO films on sapphire substrates via inverted Stranski-Krastanov mode using magnetron sputtering (2022)
  • Author(s): Takahashi Daichi、Yamashita Naoto、Yamashita Daisuke、Okumura Takamasa、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
  • Journal Title: MRS Advances Volume: - Issue: 20 Pages: 415-419
  • DOI: 10.1557/s43580-022-00234-1
  • Peer Reviewed
• [Journal Article] Nanostructured Ge and GeSn films by high-pressure He plasma sputtering for high-capacity Li ion battery anodes (2022)
  • Author(s): Giichiro Uchida, Kenta Nagai, Yuma Habu, Junki Hayashi, Yumiko Ikebe, Mineo Hiramatsu, Ryota Narishige, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara
  • Journal Title: Scientifc Reports Volume: 12 Issue: 1 Pages: 17421-12
  • DOI: 10.1038/s41598-022-05579-z
  • Peer Reviewed / Open Access
• [Journal Article] Performances of Carbon Black-Titanium nitrate and Carbon Black-Titanium/Triton X-100 Composite Polymer Counter Electrodes for Dye-Sensitized Solar Cells (2022)
  • Author(s): Chawarambwa Fadzai Lesley、Putri Tika Erna、Pankaj Attri、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: Advanced Materials Research Volume: 1168 Pages: 35-47
  • DOI: 10.4028/www.scientific.net/amr.1168.35
  • Peer Reviewed
• [Journal Article] Improved luminescence performance of Yb3+-Er3+-Zn2+: Y2O3 phosphor and its application to solar cells (2022)
  • Author(s): Chawarambwa Fadzai Lesley、Putri Tika Erna、Hwang Sung-Hwa、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakamura Daisuke、Shiratani Masaharu
  • Journal Title: Optical Materials Volume: 123 Pages: 111928-111928
  • DOI: 10.1016/j.optmat.2021.111928
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Morphological control of nanostructured Ge films in high Ar-gas-pressure plasma sputtering process for Li ion batteries (2021)
  • Author(s): Junki Hayashi, Kenta Nagai, Yuma Habu, Yumiko Ikebe, Mineo Hiramatsu, Ryota Narishige, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara, Giichiro Uchida
  • Journal Title: Japanese Journal of Applied Physics Volume: 61 Issue: SA Pages: SA1002-SA1002
  • DOI: 10.35848/1347-4065/ac2b7b
  • Peer Reviewed
• [Journal Article] Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System (2021)
  • Author(s): Putri Tika E.、Chawarambwa Fadzai L.、Son Min-Kyu、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: ACS Applied Energy Materials Volume: 4 Issue: 12 Pages: 13410-13414
  • DOI: 10.1021/acsaem.1c02774
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Effects of concentrated light on the performance and stability of a quasi-solid electrolyte in dye-sensitized solar cells (2021)
  • Author(s): Chawarambwa Fadzai Lesley、Putri Tika Erna、Attri Pankaj、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: Chemical Physics Letters Volume: 781 Pages: 138986-138986
  • DOI: 10.1016/j.cplett.2021.138986
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer (2021)
  • Author(s): Nunomura Shota、Sakata Isao、Sato Aiko、Lozac'h Mickael、Misawa Tatsuya、Itagaki Naho、Shiratani Masaharu
  • Journal Title: Journal of Physics and Chemistry of Solids Volume: 156 Pages: 110127-110127
  • DOI: 10.1016/j.jpcs.2021.110127
  • Peer Reviewed / Open Access
• [Journal Article] Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films (2021)
  • Author(s): Hwang Sung-Hwa、Iwamoto Ryosuke、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakatani Tatsuyuki、Shiratani Masaharu
  • Journal Title: Thin Solid Films Volume: 729 Pages: 138701-138701
  • DOI: 10.1016/j.tsf.2021.138701
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Sputtering Growth of Metal Oxynitride Semiconductors for Excitonic Devices (2021)
  • Author(s): Narishige Ryota、Itagaki Naho、Shiratani Masaharu
  • Journal Title: Proc. 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Volume: - Pages: 1-3
  • DOI: 10.1109/edtm50988.2021.9420921
  • Peer Reviewed
• [Presentation] Sputtering deposition of low resistive 30-nm-thick ZnO:Al films on seed layers grown via solid phase crystallization of fractionally crystallized ZnON films (2024)
  • Author(s): Y. Wada, S. Zhiyuan, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: ISPlasma
  • Int'l Joint Research
• [Presentation] スパッタだからできる薄膜の結晶性・モフォロジー制御 (2023)
  • Author(s): 板垣奈穂
  • Organizer: 化学工学会第54回秋季大会
  • Invited
• [Presentation] Fabrication of ZnO based transparent conducting oxides by sputtering combined with solid phase crystallization : a way to meet the future demand for transparent electrodes (2023)
  • Author(s): N. Itagaki, Y. Wada, H. Yabuta, M. Shiratani
  • Organizer: AAPPS-DPP2023
  • Int'l Joint Research / Invited
• [Presentation] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization (2023)
  • Author(s): N. Itagaki, Z. Shen, Y. Wada, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani
  • Organizer: MRM2023/IUMRS-ICA2023
  • Int'l Joint Research
• [Presentation] 逆 Stranski-Krastanov モードを利用した異なるオフ角を有するサファイア基板上への(ZnO)x(InN)1-x 膜の成長 (2023)
  • Author(s): 中野祐太郎，成重椋太，山下尚人，鎌滝晋礼，奥村賢直，古閑一憲，白谷正治，木山治樹，板垣奈穂
  • Organizer: プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会
• [Presentation] 逆 Stranski-Krastanov モードによるサファイア基板上への(ZnO)x(InN)1-x 膜のエピタキシャル成長:バッファー層のモフォロジーの影響 (2023)
  • Author(s): 畑昌太朗，中野祐太郎，成重椋太，山下尚人，鎌滝晋礼，奥村賢直，古閑一憲，白谷正治，木山治樹，板垣奈穂
  • Organizer: プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会
• [Presentation] Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of thickness of 3D island buffer layer (2023)
  • Author(s): H. Otsuyama, R. Mitsuishi, T. Yunoue, K. Yataka, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference
  • Int'l Joint Research
• [Presentation] 逆Stranski-Krastanovモードによる格子不整合基板上への原子平坦 (ZnO)x(InN)1-x 膜の成長 (2023)
  • Author(s): 中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 薮田久人, 板垣奈穂
  • Organizer: 第84回応用物理学会秋季学術講演会
• [Presentation] ZnOおよびScAlMgO4ステップ基板上への(ZnO)x(InN)1-x膜の室温エピタキシャル成長 (2023)
  • Author(s): 成重椋太, 中野祐太朗, 山下尚人, 鎌滝晋礼, 奥村賢直, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂
  • Organizer: 第84回応用物理学会秋季学術講演会
• [Presentation] サファイア基板上への原子ステップを有するZn1-xMgxO薄膜の形成：3次元島バッファー層の形成温度の影響 (2023)
  • Author(s): 矢高功太郎, 湯上貴文, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第84回応用物理学会秋季学術講演会
• [Presentation] 逆Stranski-Krastanovモードを用いたサファイア基板上へのZnO単結晶膜成長：MgOバッファー層の効果 (2023)
  • Author(s): 湯上貴文, 矢高功太郎, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第84回応用物理学会秋季学術講演会
• [Presentation] ZnON膜からの固相結晶化ZnO膜の形成と透明導電膜シード層としての効果：ZnON膜の結晶化度の影響 (2023)
  • Author(s): 和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第84回応用物理学会秋季学術講演会
• [Presentation] Sputter epitaxy of atomically flat (ZnO)x(InN)1-x films on sapphire substrates using ZnO(N) buffer layers fabricated by Ar/N2 discharges (2023)
  • Author(s): Y. Nakano, R. Narishige, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: ICPIG2023
  • Int'l Joint Research
• [Presentation] Sputter deposition of low resistive 30-nm-thick ZnO:Al films using ZnO seed layers grown via solid-phase crystallization (2023)
  • Author(s): Y. Wada, Z. Shen, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: ICPIG2023
  • Int'l Joint Research
• [Presentation] Pseudomorphic growth of (ZnO)x(InN)1-x films on ZnO substrates by magnetron sputtering using Ar/N2/O2 discharges (2023)
  • Author(s): R. Narishige, Y. Nakano, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
  • Organizer: ICPIG2023
  • Int'l Joint Research
• [Presentation] Sputter epitaxy of Zn1-xMgxO films on lattice-mismatched sapphire substrates utilizing ZnO(N)/MgO buffer layers fabricated by Ar/N2 and Ar/O2 discharges (2023)
  • Author(s): T. Yunoue, K. Yataka, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
  • Organizer: ICPIG2023
  • Int'l Joint Research
• [Presentation] Structural Control of Sputter Deposited Films Using Impurities (2023)
  • Author(s): Naho Itagaki
  • Organizer: International C+Nano Convergence Technology Symposium (ICTS)
  • Int'l Joint Research / Invited
• [Presentation] A Study of Solid-phase Crystallization of Amorphous ZnON Films (2023)
  • Author(s): Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode (2023)
  • Author(s): N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering (2023)
  • Author(s): R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate (2023)
  • Author(s): K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] サファイア基板上への Zn1-xMgxO 膜のスパッタエピタキシー：ZnON/MgO バッファー層の効果 (2022)
  • Author(s): 湯上貴文, 矢高功太郎, 三石遼, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲，白谷正治, 薮田久人, 板垣奈穂
  • Organizer: プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会
• [Presentation] 固相結晶成長した ZnO シード層上への ZnO:Al 膜のスパッタリング成膜 (2022)
  • Author(s): 和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲，白谷正治, 板垣奈穂
  • Organizer: プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会
• [Presentation] 不純物でスパッタ膜のモフォロジーを制御する～アモルファスからエピ膜まで～ (2022)
  • Author(s): 板垣奈穂
  • Organizer: 第78回CVD研究会
  • Invited
• [Presentation] Sputtering Growth of Single-Crystalline ZnO Based Semiconducting Films on Large Lattice-Mismatched Substrates (2022)
  • Author(s): Naho Itagaki
  • Organizer: International Workshop on Magnetron Sputter Epitaxy (IWMSE)
  • Int'l Joint Research / Invited
• [Presentation] Sputter epitaxy of (ZnO)x(InN)1-x films on sapphire substrates using ZnON buffer layers (2022)
  • Author(s): Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki
  • Organizer: The 7th Asian Applied Physics Conference
  • Int'l Joint Research
• [Presentation] Sputtering deposition of ZnO:Al Transparent Conducting Films on Seed Layers Crystallized via Thermal Annealing of Amorphous ZnON Films (2022)
  • Author(s): Z. Shen, H. Yabuta, Y. Wada, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Kiyama, N. Itagaki
  • Organizer: The 7th Asian Applied Physics Conference
  • Int'l Joint Research
• [Presentation] Structural Control of Sputter Deposited Films beyond the Thornton Diagram Using Impurities (keynote) (2022)
  • Author(s): Naho Itagaki
  • Organizer: AAPPS-DPP 2022
  • Int'l Joint Research / Invited
• [Presentation] 固相結晶化シード層上へのZnO:Al透明導電膜のスパッタリング成膜：固相結晶化温度の影響 (2022)
  • Author(s): 沈志遠, 薮田久人, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] スパッタエピタキシー法による(ZnO)x(InN)1-x単結晶薄膜の室温成膜 (2022)
  • Author(s): 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] 格子不整合サファイア基板上への単結晶ZnO膜のスパッタリング成膜: ZnONバッファー層の効果 (2022)
  • Author(s): 三石遼, 矢高功太郎, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] 異なるMg組成を有する単結晶ZnO1-xMgxO膜成長におけるZnONバッファー層の効果 (2022)
  • Author(s): 矢高功太郎, 高橋大智, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] サファイア基板上の単結晶ZnO薄膜作製におけるバッファー層評価指標 (2022)
  • Author(s): 山下尚人, 中村優太, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] Fabrication of Low-Resistive Amorphous In2O3 :Sn Films at 600°C by Magnetron Sputtering Using Nitrogen (2022)
  • Author(s): N. Itagaki, Y. Mido, Z. Shen, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani
  • Organizer: 9th International Symposium on Control of Semiconductor Interfaces
  • Int'l Joint Research
• [Presentation] Control of Crystal Structure and Magnetic Properties of ZnO: Co Films Grown by Magnetron Sputtering Using Nitrogen (2022)
  • Author(s): A. M. Nurut, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 9th International Symposium on Control of Semiconductor Interfaces
  • Int'l Joint Research
• [Presentation] Effects of surface polarity of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated at room temperature (2022)
  • Author(s): R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 9th International Symposium on Control of Semiconductor Interfaces
  • Int'l Joint Research
• [Presentation] 逆Stranski-Krastanovモードによる単結晶ZnO薄膜のスパッタリング成膜:窒素流量の影響 (2022)
  • Author(s): 三石遼, 山下尚人, 矢高功太郎, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 2022年度日本表面真空学会 九州支部学術講演会
• [Presentation] Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering (2022)
  • Author(s): R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N.Itagaki
  • Organizer: MRS spring meeting 2022
  • Int'l Joint Research
• [Presentation] Key parameters for single crystalline ZnO film growth by magnetron sputtering via inverted Stranski-Krastanov mode (2022)
  • Author(s): N. Yamashita, Y. Nakamura, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: MRS spring meeting 2022
  • Int'l Joint Research
• [Presentation] Epitaxial Growth of Single-Crystalline ZnO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode by Low-Power Magnetron Sputtering (2022)
  • Author(s): R. Mitsuishi, N. Yamashita, D.Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: MRS spring meeting 2022
  • Int'l Joint Research
• [Presentation] A Study of Solid-phase Crystallization of Amorphous ZnON Films (2022)
  • Author(s): Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode (2022)
  • Author(s): N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Effects of RF powers on the crystal quality and surface morphology of single crystalline ZnO films deposited by magnetron sputtering (2022)
  • Author(s): R. Mitsuishi, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering (2022)
  • Author(s): R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate (2022)
  • Author(s): K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: 7th International Conference on Advances in Functional Materials(AFM-2022)
  • Int'l Joint Research
• [Presentation] Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures (2021)
  • Author(s): N. Itagaki
  • Organizer: MRS fall meeting 2021
  • Int'l Joint Research / Invited
• [Presentation] Development of New Oxynitride Semiconductors with Tunable Band Gaps Using Magnetron Sputtering (2021)
  • Author(s): N. Itagaki
  • Organizer: aterials Research Meeting 2021 (MRM2021）
  • Int'l Joint Research / Invited
• [Presentation] Inverted Stranski-Krastanov Growth of ZnO Based Semiconductors for Excitonic Devices(Invited) (2021)
  • Author(s): N. Itagaki
  • Organizer: Materials Research Meeting 2021 (MRM2021）
  • Int'l Joint Research / Invited
• [Presentation] Sputter epitaxy of ZnO based oxide/oxynitride semiconductors for excitonic transistors(Invited) (2021)
  • Author(s): N. Itagaki
  • Organizer: 5th Asia-Pacific Conference on Plasma Physics
  • Int'l Joint Research / Invited
• [Presentation] 非晶質ZnON膜からの固相結晶化ZnO膜の形成とシード層としての効果(招待講演) (2021)
  • Author(s): 板垣奈穂, 沈志遠, 御堂雄大, 薮田久人
  • Organizer: 第82回応用物理学会秋季学術講演会
  • Invited
• [Presentation] 逆 Stranski-Krastanov モードを利用した単結晶 ZnMgO 薄膜のスパッタリング成膜 (2021)
  • Author(s): 矢髙功太郎, 山下尚人, 髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会
• [Presentation] Solid-phase Crystallization of Sputter-deposited ZnON Films and Their Impacts as Seed Layers for ZnO:Al Transparent Conducting Oxides (2021)
  • Author(s): Z. Shen, N. Yamashita, Y. Mido, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会
• [Presentation] Inverted Stranski-Krastanov Growth of Single-Crystalline Zn Mg O Films on Sapphire Substrates using Magnetron Sputtering (2021)
  • Author(s): D. Takahashi, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: MRS fall meeting 2021
  • Int'l Joint Research
• [Presentation] Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering (2021)
  • Author(s): R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: MRS fall meeting 2021
  • Int'l Joint Research
• [Presentation] High-temperature Growth of Amorphous In O :Sn Films by Magnetron Sputtering using Nitrogen (2021)
  • Author(s): Y. Mido, K. Takeda, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, M. Hori, N. Itagaki
  • Organizer: MRS fall meeting 2021
  • Int'l Joint Research
• [Presentation] Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of RF power (2021)
  • Author(s): R. Mitsuishi, D. Takahashi, D. Yamashita, T. Okumura, N. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: The 6th Asian Applied Physics Conference (Asian-APC)
  • Int'l Joint Research
• [Presentation] Epitaxial growth of (ZnO)X(InN)1-X films by magnetron sputtering: effects of surface polarity of ZnO substrates (2021)
  • Author(s): R. Narishige, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
  • Organizer: Plathinium 2021
  • Int'l Joint Research
• [Presentation] 窒素添加スパッタ法による高移動度アモルファスIn2O3:Sn薄膜の高温成膜 (2021)
  • Author(s): 御堂雄大, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第82回応用物理学会秋季学術講演会
• [Presentation] ZnONバッファー層を用いたサファイア基板上への単結晶Zn1-xMgxO薄膜の成長 (2021)
  • Author(s): 高橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 第82回応用物理学会秋季学術講演会
• [Presentation] マグネトロンスパッタリング法で作製した(ZnO)x(InN)1-x膜の表面モフォロジーに及ぼす基板極性の影響 (2021)
  • Author(s): 成重椋太, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣 奈穂
  • Organizer: 第82回応用物理学会秋季学術講演会
• [Presentation] スパッタ法によるサファイア基板上への原子平坦なZnMgO薄膜の作製 (2021)
  • Author(s): 髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 令和３年度日本表面真空学会九州支部学術講演会
• [Presentation] (ZnO)x (InN)1-x 膜のスパッタエピタキシーに及ぼす基板表面極性の影響 (2021)
  • Author(s): 成重椋太, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 令和３年度日本表面真空学会九州支部学術講演会
• [Presentation] 窒素添加スパッタ法による高移動度アモルファス In2 O3 :Sn 薄膜の作製 (2021)
  • Author(s): 御堂雄大, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
  • Organizer: 令和３年度日本表面真空学会九州支部学術講演会
• [Remarks] 九州大学 板垣研究室Website
  • URL: https://plasma.ed.kyushu-u.ac.jp/~inorganic/index.html