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Development of Multi-functional Biological Scanning Probe Microscope for Imaging of Cellular Functions in Living Cells

Research Project

Project/Area Number 24240070
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Biomedical engineering/Biological material science
Research InstitutionToyohashi University of Technology

Principal Investigator

SHIBATA TAKAYUKI  豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (10235575)

Co-Investigator(Kenkyū-buntansha) HAYASHI Terutake  九州大学, 大学院工学研究院, 准教授 (00334011)
KIMURA Tsuyoshi  東京医科歯科大学, 生体材料工学研究所, 准教授 (10393216)
Co-Investigator(Renkei-kenkyūsha) KAWASHIMA Takahiro  豊橋技術科学大学, 大学院工学研究科, 准教授 (50378270)
NAGAI Moeto  豊橋技術科学大学, 大学院工学研究科, 助教 (00580557)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥47,320,000 (Direct Cost: ¥36,400,000、Indirect Cost: ¥10,920,000)
Fiscal Year 2014: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
Fiscal Year 2013: ¥12,740,000 (Direct Cost: ¥9,800,000、Indirect Cost: ¥2,940,000)
Fiscal Year 2012: ¥25,480,000 (Direct Cost: ¥19,600,000、Indirect Cost: ¥5,880,000)
Keywords走査型プローブ顕微鏡 / 原子間力顕微鏡(AFM) / 細胞機能解析 / 細胞操作 / 細胞内デリバリー / チップ増強ラマン分光(TERS) / バイオMEMS
Outline of Final Research Achievements

In order to achieve spatial and temporal imaging of cellular functions in single living cells, we have developed a newly designed probe for atomic force microscope (AFM), named “bioprobe. As a fundamental study of conventional AFM functions, we demonstrated the ability of the bioprobe to capture AFM images of living cells. We proposed a vibration-assisted insertion method to give a high degree of probability of penetrating the cell membrane. We also proposed a novel intracellular delivery method based on electrokinetically driven flow. The method has the potential to enable the quantitative introduction of biomolecules and the extraction of an extremely small number of biomolecules or cellular components. Moreover, a study of the feasibility of intracellular imaging based on tip-enhanced Raman scattering (TERS) was performed with a homemade Raman system. The result will allow us to add TERS functionality to the bioprobe for the dynamic functional analysis of living cells.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (55 results)

All 2015 2014 2013 2012 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (43 results) (of which Invited: 6 results) Book (1 results) Remarks (4 results)

  • [Journal Article] Development and Characterization of Hollow Microprobe Array as a Potential Tool for Versatile and Massively Parallel Manipulation of Single Cells2015

    • Author(s)
      M. Nagai, K. Oohara, K. Kato, T. Kawashima, T. Shibata
    • Journal Title

      Biomedical Microdevices

      Volume: 17 Issue: 2 Pages: 41-41

    • DOI

      10.1007/s10544-015-9943-z

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Intracellular Delivery Method Based on a Combination of Electrokinetic Forces and Vibration-Assisted Cell Membrane Perforation2014

    • Author(s)
      T. Shibata, Y. Ito, T. Ozawa, M. Nagai, T. Kawashima
    • Journal Title

      AIP Conference Proceedings

      Volume: 1585 Pages: 45-52

    • DOI

      10.1063/1.4866617

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Characterization of Hollow Needle Array for Electrokinetic Intracellular Delivery of Biomolecules2014

    • Author(s)
      M. Nagai, T. Miyamoto, T. Kawashima, T. Shibata
    • Journal Title

      AIP Conference Proceedings

      Volume: 1585 Pages: 117-122

    • DOI

      10.1063/1.4866628

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Characterization of Bioprobe Integrated with Hollow Nanoneedle for Novel AFM Applications in Cellular Function Analysis2013

    • Author(s)
      T. Shibata, K. Nakamura, S. Horiike, M. Nagai, T. Kawashima, T. Mineta, E. Makino
    • Journal Title

      Microelectronic Engineering

      Volume: 111 Pages: 325-331

    • DOI

      10.1016/j.mee.2013.02.051

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrokinetic Delivery of Biomolecules into Living Cells for Analysis of Cellular Regulation2013

    • Author(s)
      M. Nagai, T. Torimoto, T. Miyamoto, T. Kawashima, T. Shibata
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 4R Pages: 047002-047002

    • DOI

      10.7567/jjap.52.047002

    • NAID

      210000141964

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Cell Culture Microdevice Integrated with Piezoelectric Thin Film Actuator for On-Chip Regulation of Cell2012

    • Author(s)
      T. Kawashima, Y. Yamada, Y. Matsuzawa, M. Nagai, T. Shibata, T. Masuzawa, T. Kimura, A. Kishida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 10R Pages: 107201-107201

    • DOI

      10.1143/jjap.51.107201

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of hollow SiO_2 nanoneedle array and characterization of simultaneous multi-site ion-conductance recordings for cell morphology imaging2012

    • Author(s)
      Takahiro Kawashima, Tomoya Matsugase, Kazumasa Tanaka, Moeto Nagai, Takayuki Shibata, Takashi Mineta, Eiji Makino
    • Journal Title

      Microelectronic Engineering

      Volume: 98 Pages: 663-667

    • DOI

      10.1016/j.mee.2012.07.014

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Toward Innovation in Life Science and Biotechnology(仮題)2015

    • Author(s)
      T. Shibata
    • Organizer
      The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN 2015)
    • Place of Presentation
      Harbin, China
    • Year and Date
      2015-08-15 – 2015-08-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 細胞を基軸とした精密工学の新たな展開2015

    • Author(s)
      柴田隆行
    • Organizer
      にいがたナノ基盤技術実践会
    • Place of Presentation
      にいがた産業創造機構(新潟県長岡市)
    • Year and Date
      2015-05-29
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 細胞機能解析のためのナノニードル搭載型バイオプローブの開発(第11報)-段付き中空ニードル探針の一体形成プロセスの検討-2015

    • Author(s)
      伴野元紀,永井萌土,川島貴弘,沼野利佳,柴田隆行
    • Organizer
      2015年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学白山キャンパス(東京都文京区)
    • Year and Date
      2015-03-17 – 2015-03-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development of Novel Scanning Probe Microscopy Techniques for Cellular Function Analysis2014

    • Author(s)
      T. Shibata, M. Banno, Y. Ito, M. Nagai
    • Organizer
      International Conference of Global Network for Innovative Technology (IGNITE-2014)
    • Place of Presentation
      Penang, Malaysia
    • Year and Date
      2014-12-15 – 2014-12-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] 最新の超精密加工(MEMS)技術2014

    • Author(s)
      柴田隆行
    • Organizer
      日本機械学会東北支部特別講演会
    • Place of Presentation
      八戸工業大学(青森県八戸市)
    • Year and Date
      2014-11-21
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Characterization of Electrokinetic DNA Ejection through Stepped-Hollow-Nanoneedle-Tip for Biological Scanning Probe Microscope2014

    • Author(s)
      M. Banno, M. Nagai, T. Kawashima, T. Shibata
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference 2014 (Irago 2014)
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2014-11-06 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 超並列細胞内デリバリーのためのナノニードルアレイの先端形状制御2014

    • Author(s)
      宮本篤真,永井萌土,川島貴弘,柴田隆行
    • Organizer
      第6回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      くにいびきメッセ(島根県松江市)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] Minimally Invasive Intracellular Delivery Based on Electrokinetic Forces Combined with Vibration-Assisted Cell Membrane Perforation2014

    • Author(s)
      T. Shibata, Y. Ito, M. Nagai, T. Kawashima
    • Organizer
      The 40th International Conference on Micro and Nano Engineering 2014 (MNE 2014)
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-09-22 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] 細胞機能解析のためのナノニードル搭載型バイオプローブの開発(第10報)-段付き中空ニードル探針の作製プロセスの検討-2014

    • Author(s)
      伴野元紀,永井萌土,川島貴弘,柴田隆行
    • Organizer
      2014年度精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取大学鳥取キャンパス(鳥取県鳥取市)
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 電場駆動力を利用した生体分子の細胞内デリバリー技術の開発(第4報)-チップ増強型ラマン分光法による生体分子イメージングの基礎的検討-2014

    • Author(s)
      伊藤康治,永井萌土,川島貴弘,柴田隆行
    • Organizer
      2014年度精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取大学鳥取キャンパス(鳥取県鳥取市)
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Design and Development of Hollow-Nanoneedle-Based AFM Probe for Functional Analysis of Living Cells2014

    • Author(s)
      T. Shibata, Y. Ito, M. Banno, M. Nagai, T. Kawashima
    • Organizer
      The 9th International Conference on Micro Manufacturing (ICOMM 2014)
    • Place of Presentation
      Singapore
    • Related Report
      2013 Annual Research Report
  • [Presentation] 細胞機能解析のためのナノニードル搭載型バイオプローブの開発(第9報)-細胞内表面増強ラマン散乱イメージングの基礎的検討-2014

    • Author(s)
      小澤辰也,伴野元紀,伊藤康治,永井萌土,川島貴弘,柴田隆行
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電場駆動力を利用した生体分子の細胞内デリバリー技術の開発(第3報)-細胞膜穿孔確率およびバイアビリティの評価-2014

    • Author(s)
      伊藤康治,小澤辰也,永井萌土,川島貴弘,柴田隆行
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] Electrokinetic Intracellular Delivery Combined with Vibration-Assisted Cell Membrane Perforation2013

    • Author(s)
      T. Ozawa, M. Nagai, Kawashima, T. Shibata
    • Organizer
      IEEE International Symposium on Micro-NanoMechatronics and Human Science 2013 (MHS 2013)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Mechanical Characterization of Biological Cells Using Bioprobe Integrated with Hollow Nanoneedle2013

    • Author(s)
      M. Banno, Y. Ito, M. Nagai, T. Kawashima, T. Shibata
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference 2013 (Irago 2013)
    • Place of Presentation
      Tahara, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication and Characterization of Hollow Needle Array for Electrokinetic Intracellular Delivery of Biomolecules2013

    • Author(s)
      M. Nagai, T. Miyamoto, T. Kawashima, T. Shibata
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference 2013 (Irago 2013)
    • Place of Presentation
      Tahara, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Intracellular Delivery Method Based on a Combination of Electrokinetic Forces and Vibration-Assisted Cell Membrane Perforation2013

    • Author(s)
      Y. Ito, T. Ozawa, M. Nagai, T. Kawashima, T. Shibata
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference 2013 (Irago 2013)
    • Place of Presentation
      Tahara, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Novel Approach for Intracellular Delivery of Biomolecules Using Bioprobe Integrated with Hollow Nanoneedle2013

    • Author(s)
      T. Shibata, M. Banno, Y. Ito, M. Nagai, T. Kawashima, T. Mineta, E. Makino
    • Organizer
      The 39th International Conference on Micro and Nano Engineering 2013 (MNE 2013)
    • Place of Presentation
      London, UK
    • Related Report
      2013 Annual Research Report
  • [Presentation] 細胞機能イメージングのための多機能走査型バイオプローブ顕微鏡の開発-振動援用細胞膜穿孔と電場駆動力を利用した低侵襲細胞内デリバリー-2013

    • Author(s)
      伴野元紀,伊藤康治,永井萌土,川島貴弘,柴田隆行
    • Organizer
      第5回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] 細胞機能解析用MEMSプラットフォームの開発2013

    • Author(s)
      柴田隆行
    • Organizer
      2013年度精密工学会秋季大会シンポジウム「マイクロニードル-作製法とアプリケーション-」
    • Place of Presentation
      吹田
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 電場駆動力を利用した生体分子の細胞内デリバリー技術の開発(第2報)-振動援用による低侵襲細胞膜穿孔の基礎的検討-2013

    • Author(s)
      伊藤康治,小澤辰也,永井萌土,川島貴弘,柴田隆行
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      吹田
    • Related Report
      2013 Annual Research Report
  • [Presentation] 細胞機能解析のための電場駆動力を利用した細胞内デリバリー技術の開発2013

    • Author(s)
      小澤辰也,宮本篤真,永井萌土,川島貴弘,柴田隆行
    • Organizer
      日本機械学会2013年度年次大会
    • Place of Presentation
      金沢
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電場駆動力を利用した細胞内デリバリー技術の開発-中空ニードルアレイを用いた超並列操作の基礎的検討-2013

    • Author(s)
      宮本篤真,永井萌土,川島貴弘,柴田隆行
    • Organizer
      平成25年度電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] 細胞機能制御のための電場駆動力を用いた細胞内デリバリー2013

    • Author(s)
      永井萌土,鳥本達郎,宮本篤真,川島貴弘,柴田隆行
    • Organizer
      ロボティクス・メカトロニクス講演会2013
    • Place of Presentation
      つくば
    • Related Report
      2013 Annual Research Report
  • [Presentation] 細胞機能解析のためのナノニードル搭載型バイオプローブの開発(第7報)-プローブ形状および作製プロセスの最適化-2013

    • Author(s)
      中村健志,伴野元紀,永井萌土,川島貴弘,柴田隆行,峯田 貴,牧野英司
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] 中空マイクロプローブアレイを用いた細胞操作性能の評価2013

    • Author(s)
      大原清孝,永井萌土,加藤啓太,川島貴弘,柴田隆行
    • Organizer
      平成25年度電気学会「バイオ・マイクロシステム研究会」
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞機能イメージングのための多機能走査型バイオプローブ顕微鏡の開発2013

    • Author(s)
      中村健志,伴野元紀,永井萌土,川島貴弘,柴田隆行,峯田 貴,牧野英司
    • Organizer
      第22回ライフサポート学会フロンティア講演会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of Bioprobe for Novel AFM Applications in Cellular Functions of Single Living Cells2012

    • Author(s)
      T. Ozawa, K. Nakamura, M. Nagai, T. Kawashima, T. Shibata
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference 2012 (AP-IRC 2012)
    • Place of Presentation
      田原
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electrical Detection of Single-Cell Trapping for Manipulation in an Array-based Format2012

    • Author(s)
      M. Nagai, K. Kato, K. Oohara, T. Torimoto, T. Kawashima, T. Shibata
    • Organizer
      IEEE International Symposium on Micro-NanoMechatronics and Human Science 2012 (MHS 2012)
    • Place of Presentation
      名古屋
    • Related Report
      2012 Annual Research Report
  • [Presentation] Characteristics of Electrokinetic Flow through Nano Pipette for Cellular Delivery2012

    • Author(s)
      M. Nagai, T. Torimoto, T. Miyamoto, T. Kawashima, T. Shibata
    • Organizer
      IEEE International Symposium on Micro-NanoMechatronics and Human Science 2012 (MHS 2012)
    • Place of Presentation
      名古屋
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fabrication and Characterization of Bioprobe Integrated with Hollow Nanoneedle for Novel AFM Applications in Cellular Function Analysis2012

    • Author(s)
      T. Shibata, K. Nakamura, S. Horiike, M. Nagai, T. Kawashima, T. Mineta, E. Makino
    • Organizer
      The 38th International Conference on Micro and Nano Engineering 2021 (MNE 2012)
    • Place of Presentation
      Toulouse, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electrokinetic Delivery of Biomolecules into Living Cells for Analysis of Cellular Regulation2012

    • Author(s)
      M. Nagai, T. Torimoto, T. Kawashima, T. Shibata
    • Organizer
      The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012)
    • Place of Presentation
      Nanjing, China
    • Related Report
      2012 Annual Research Report
  • [Presentation] Characterization of Cell Culture Microdevice Integrated with Piezoelectric Thin Film Actuator for On-Chip Regulation of Cell Functions2012

    • Author(s)
      T. Kawashima, Y. Yamada, G. Umegaki, T. Shibata, M. Nagai, T. Masuzawa, T. Kimura, A. Kishida
    • Organizer
      The 9th International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA 2012)
    • Place of Presentation
      弘前
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞機能イメージングのための多機能走査型バイオプローブ顕微鏡の開発2012

    • Author(s)
      中村健志,小澤辰也,永井萌土,川島貴弘,柴田隆行
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞操作用マイクロノズルアレイの性能評価2012

    • Author(s)
      大原清孝,永井萌土,加藤啓太,川島貴弘,柴田隆行
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロノズルを用いた単一細胞操作と検出2012

    • Author(s)
      永井萌土,加藤啓太,大原清孝,鳥本達郎,川島貴弘,柴田隆行
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州
    • Related Report
      2012 Annual Research Report
  • [Presentation] ナノニードルと電場駆動流を用いた細胞内へのDNA導入2012

    • Author(s)
      鳥本達郎,永井萌土,宮本篤真,川島貴弘,柴田隆行
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞機能イメージングのためのナノニードル搭載型バイオプローブの開発2012

    • Author(s)
      中村健志,小澤辰也,永井萌土,川島貴弘,柴田隆行
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞形態イメージングのための多点同時計測イオンコンダクタンス顕微鏡の開発2012

    • Author(s)
      川島貴弘,田中一匡,永井萌土,柴田隆行,峯田 貴,牧野英司
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞マニピュレーションのための単一細胞の電気的検出2012

    • Author(s)
      加藤啓太,永井萌土,大原清孝,鳥本達郎,川島貴弘,柴田隆行
    • Organizer
      平成24年度電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      京都
    • Related Report
      2012 Annual Research Report
  • [Presentation] 細胞操作用マイクロマニピュレータアレイの細胞捕獲・脱離過程の高効率化2012

    • Author(s)
      加藤啓太,大原清孝,永井萌土,川島貴弘,柴田隆行
    • Organizer
      ロボティクス・メカトロニクス講演会2012
    • Place of Presentation
      浜松
    • Related Report
      2012 Annual Research Report
  • [Presentation] マスクレス微細加工技術と細胞機能解析用MEMSプラットフォーム2012

    • Author(s)
      柴田隆行
    • Organizer
      第31回マイクロファブリケーションシンポジウム
    • Place of Presentation
      和光
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] MEMS技術を究めナノとバイオへの架け橋を築く ~異分野融合ものづくり技術への挑戦2012

    • Author(s)
      柴田隆行
    • Organizer
      日本機械学会北海道支部主催 特別講演会
    • Place of Presentation
      札幌
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Book] 注射剤・経口製剤に代わる新しい薬剤投与デバイスの開発-先端傾斜マイクロニードルの作製と穿刺性能評価-2014

    • Author(s)
      (分担)柴田隆行,永井萌土,川島貴弘
    • Total Pages
      363
    • Publisher
      技術情報協会
    • Related Report
      2014 Annual Research Report
  • [Remarks] 豊橋技術科学大学 機械工学系 マイクロ・ナノ機械システム研究室ホームページ

    • URL

      http://mems.me.tut.ac.jp/index.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 豊橋技術科学大学 教員紹介ホームページ

    • URL

      http://www.tut.ac.jp/university/faculty/me/64.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 豊橋技術科学大学 マイクロ・ナノ機械システム研究室ホームページ

    • URL

      http://mems.me.tut.ac.jp/

    • Related Report
      2013 Annual Research Report
  • [Remarks] 豊橋技術科学大学 マイクロ・ナノ機械システム研究室ホームページ

    • URL

      http://mems.me.tut.ac.jp/r_c_bioprobe.html

    • Related Report
      2012 Annual Research Report

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Published: 2013-05-15   Modified: 2019-07-29  

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