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Hydrogen gas sensors having high sensitivity achieved by control of chemical states of adsorbed oxygen species

Research Project

Project/Area Number 24241025
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Environmental technology/Environmental materials
Research InstitutionKochi University of Technology

Principal Investigator

YAMAMOTO Tetsuya  高知工科大学, 公私立大学の部局等, 教授 (30320120)

Co-Investigator(Kenkyū-buntansha) SONG Huaping  高知工科大学, 公私立大学の部局等, 助教 (00611831)
MAKINO Hisao  高知工科大学, 公私立大学の部局等, 准教授 (40302210)
KISHIMOTO Seiichi  高知工業高等専門学校, その他部局等, その他 (90177816)
NOMOTO Junichi  高知工科大学, 公私立大学の部局等, 助教 (30711288)
Co-Investigator(Renkei-kenkyūsha) KOBAYASHI Keisuke  高知工科大学, 公私立大学の部局等, 客員教授 (50372149)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥26,130,000 (Direct Cost: ¥20,100,000、Indirect Cost: ¥6,030,000)
Fiscal Year 2014: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2013: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
Fiscal Year 2012: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Keywordsグリーンケミストリ / 水素センサー / 半導体センサー / 酸化物半導体 / 酸化亜鉛 / 導電性薄膜 / 半導体式センサー / t90 / 吸着酸素 / peroxide / superoxide / 酸化物半導体式 / 応答時間 / 起動時間 / スーパーオキシドアニオン / 活性酸素 / 化学吸着 / 環境材料 / 表面・界面物性 / 水素 / プラズマ加工 / 電子・電気材料
Outline of Final Research Achievements

In this study, we achieved hydrogen gas sensors based on oxide semiconductors which operate at a temperature of 170 ℃; their performance is a response time within almost 1 s with current changes of 0.1 mA. 50-nm-thick conductive ZnO polycrystalline films were used as gas sensing materials. With regard to the operating temperatures, significant reduction in temperature is realized when compared with the prior technologies (the typical temperature is 300 ℃). The value of the response time is found to be very short, compared to that of conventional semiconductor-based sensors, typically 20 s.Note that the feature of the hydrogen gas sensors that have been achieved in this study is applicable to both DC source and AC source (patents application already).

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (54 results)

All 2015 2014 2013 2012 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 2 results) Presentation (36 results) (of which Invited: 16 results) Book (3 results) Remarks (4 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk2015

    • Author(s)
      Junichi Nomoto, Hisao Makino and Tetsuya Yamamoto
    • Journal Title

      Journal of Applied Physics

      Volume: 117 Issue: 4

    • DOI

      10.1063/1.4906353

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge2014

    • Author(s)
      Seiichi Kishimoto, S. Akamatsu, Huaping Song, Junichi Nomoto, Hisao Makino and Tetsuya Yamamoto
    • Journal Title

      Journal of Sensors and Sensor Systems

      Volume: 3 Issue: 2 Pages: 331-334

    • DOI

      10.5194/jsss-3-331-2014

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Influences of oxygen gas flow rate on electrical properties of Ga-doped ZnO thin films deposited on glass and sapphire substrates2014

    • Author(s)
      Hisao Makino, Huaping Song and Tetsuya Yamamoto
    • Journal Title

      Thin Solid Films

      Volume: 559 Pages: 78-82

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carrier transport and photoluminescence properties of Ga-doped ZnO films grown by ion-plating and by atmospheric-pressure CVD2013

    • Author(s)
      Tomoaki Terasako, Y. Ogura, S. Fujimoto, Huaping Song, Hisao Makino, M. Yagi, Sho Shirakata, Tetsuya Yamamoto
    • Journal Title

      Thin Solid Films

      Volume: 549 Pages: 12-17

    • DOI

      10.1016/j.tsf.2013.06.039

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of grain boundary scattering on carrier transport of highly transparent conductive Ga-doped ZnO polycrystalline films2013

    • Author(s)
      Tetsuya Yamamoto, Huaping Song and Hisao Makino
    • Journal Title

      Phys. Status Solidi C

      Volume: 10 Issue: 4 Pages: 603-606

    • DOI

      10.1002/pssc.201200683

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion-plating with DC arc discharge2013

    • Author(s)
      Tomoaki Terasako, Huaping Song, Hisao Makino, Sho Shirakata and Tetsuya Yamamoto
    • Journal Title

      Thin Solid Films

      Volume: 528 Pages: 19-25

    • DOI

      10.1016/j.tsf.2012.07.140

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of grain boundary scattering on carrier transport of highly transparent conductive Ga-doped ZnO polycrystalline films2013

    • Author(s)
      Tetsuya Yamamoto
    • Journal Title

      Physica Status Solidi (C)

      Volume: 10 Pages: 603-606

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Characteristics of n-type-doped ZnO films for future optoelectric devices2015

    • Author(s)
      山本哲也、野本淳一、牧野久雄
    • Organizer
      第25回日本MRS年次大会
    • Place of Presentation
      横浜市開港記念会館
    • Year and Date
      2015-12-08 – 2015-12-10
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Carrier transport of Al or Ga-doped ZnO films for wide applications2015

    • Author(s)
      山本哲也
    • Organizer
      14th International Union of Materials Research Societies-International Conference on Advanced Materials (IUMRS-ICAM 2015)
    • Place of Presentation
      Jeju International Convention Center, Jeju, Korea
    • Year and Date
      2015-10-25 – 2015-10-29
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Characteritics of carrier transport of highly transparent conductive Al or Ga-doped ZnO films for wide applications; electrodes, plasmonics and chemical sensors2015

    • Author(s)
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Organizer
      Collaborative Conference on 3D and Materials Research (CC3DMR) 2015
    • Place of Presentation
      Busan, South Korea
    • Year and Date
      2015-06-15 – 2015-06-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Characteristics of carrier transport of Al- or Ga-doped ZnO highly transparent conductive films: Theory and Experimental2015

    • Author(s)
      山本哲也、野本淳一、牧野久雄
    • Organizer
      International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies
    • Place of Presentation
      The Fraunhofer Institute for Ceramic Technologies and Systems IKTS
    • Year and Date
      2015-04-20 – 2015-04-23
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 酸化亜鉛透明導電膜を感ガス材とした 高速高出力電流水素センサ2015

    • Author(s)
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] ワイドバンドギャップ酸化亜鉛における 価電子メタモルフォロジ2015

    • Author(s)
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Organizer
      第62回応用物理学会春季学術講演会 シンポジウム:合同セッションK ワイドギャップ酸化物半導体材料・デバイス
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Characteristics of Carrier Transport of Highly Transparent Conductive Ga-Doped ZnO Polycrystalline Films: Theory and Experimental2014

    • Author(s)
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Organizer
      E-MRS/MRS-J Bilateral Symposia
Materials Frontier for Transparent Advanced Electronics
    • Place of Presentation
      Yokohama Port Opening Plaza
    • Year and Date
      2014-12-10 – 2014-12-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Materials Design of Wide Band Gap ZnO for Wide Applications2014

    • Author(s)
      山本哲也
    • Organizer
      5th Int. Sym. on Transparent Conductive Oxides/Materials
    • Place of Presentation
      Platanias-Chania, Crete, Greece
    • Year and Date
      2014-10-12 – 2014-10-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 酸化亜鉛透明導電膜: 低温成膜技術の現状と課題2014

    • Author(s)
      山本哲也
    • Organizer
      スパッタリングおよびプラズマプロセス技術部会(SP部会) 第139回定例研究会
    • Place of Presentation
      機械振興会館
    • Year and Date
      2014-08-28
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Materials Design of Wide Band Gap ZnO for Wide Applications2014

    • Author(s)
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Organizer
      The Collaborative Conference on 3D Materials Research
    • Place of Presentation
      Incheon/Seou, South Korea Songdo Convensia
    • Year and Date
      2014-06-23 – 2014-06-27
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Hydrogen-gas sensing characteristics for highly transparent conductive 50-nm-thick heavily Ga-doped ZnO films2014

    • Author(s)
      岸本誠一、野本淳一、牧野久雄、山本哲也
    • Organizer
      IUMRS-ICEM 2014
    • Place of Presentation
      TWTC Nangang Exhibition Hall, Taipei, TAIWAN
    • Year and Date
      2014-06-10 – 2014-06-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] 酸化亜鉛: ニーズに対応した機能開発、  応用から基礎へ2014

    • Author(s)
      山本哲也
    • Organizer
      公益社団法人日本技術士会 CPD実行委員 5月度技術士 CPD 中央講座
    • Place of Presentation
      機械振興会館
    • Year and Date
      2014-05-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 高周波重畳直流スパッタAl添加ZnO透明電導電膜 の電気特性に対する成膜電力の最適化2014

    • Author(s)
      野本淳一、宋華平、牧野久雄、岸本誠一、山本哲也
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 酸化亜鉛透明導電膜を感ガス材とした高出力電流水素センサー2014

    • Author(s)
      山本哲也、岸本誠一、宋華平、野本淳一、牧野久雄
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 酸化物半導体の物性・材料設計:秩序と混沌2014

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] X線光電子分光法によるZnO透明導電膜の極性評価2014

    • Author(s)
      牧野久雄、宋華平、野本淳一、山本哲也
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Sensing characteristics of highly conductive 50-nm-thcik Ga-doped ZnO films as hydrogen gas sensor2014

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Organizer
      E-MRS
    • Place of Presentation
      Congress Center - Lille, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Hydrogen-Gas Sensing Characteristics for Highly Transparent Conductive 50-nm-thcik Heavily Ga-doped ZnO Films2014

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Organizer
      IUMRS-ICEM 2014
    • Place of Presentation
      TWTC Nangang Exhibition Hall, taipei, Taiwan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Al添加ZnO透明電導電膜の特性に及ぼす 高周波重畳直流スパッタリング法の効果2013

    • Author(s)
      野本淳一、宋華平、牧野久雄、岸本誠一、山本哲也
    • Organizer
      応用物理学会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Smart Materials Design of Wide Bandgap ZnO: Functional C2013

    • Author(s)
      山本哲也
    • Organizer
      The International Conference on Metallurgical Coatings and Thin Films (ICMCTF)
    • Place of Presentation
      Town & Country Hotel, San Diego, CA, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Characterization of chemical states in near surface region of Ga-doped ZnO thin films by x-ray photoemission spectroscopy2013

    • Author(s)
      牧野久雄、宋華平、野本淳一、宋華平、山本哲也
    • Organizer
      E-MRS 2013 Spring Meeting
    • Place of Presentation
      Congress Center - Strasbourg, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Control of Moisture Resistant Properties of Highly Transparent Conductive Ga-Doped ZnO Films2013

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄、岸本誠一
    • Organizer
      E-MRS 2013 Spring Meeting
    • Place of Presentation
      Congress Center - Strasbourg, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Characteristics of Carrier Transport in Highly Transparent Conductive Ga-Doped ZnO Films2013

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄、岸本誠一
    • Organizer
      3) The 16th Int. Conf. on II-VI Compounds and Related Materials (II-VI 2013)
    • Place of Presentation
      長浜ロイヤルホテル
    • Related Report
      2013 Annual Research Report
  • [Presentation] Weakly Bounded Zn Atoms in Polycrystalline ZnO Thin Films caused by Ga Doping2013

    • Author(s)
      牧野久雄、宋華平、野本淳一、山本哲也
    • Organizer
      The AVS 60th International Symposium and Exhibition
    • Place of Presentation
      Long Beach Convention Center, CA, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Sustainable Moisture Resistant Carrier Transport of Highly Transparent Conductive Ga-Doped ZnO Films Controlled by dc arc Plasma Technique2013

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Organizer
      the 8th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-8)
    • Place of Presentation
      National Chiao Tung University (NCTU), Hsinchu, Taiwan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ga 添加酸化亜鉛透明導電膜の耐湿熱特性制御2013

    • Author(s)
      山本哲也
    • Organizer
      応用物理学会
    • Place of Presentation
      神奈川工科大
    • Related Report
      2012 Annual Research Report
  • [Presentation] GaドープZnO薄膜の表面近傍の化学状態評価2013

    • Author(s)
      牧野久雄
    • Organizer
      応用物理学会
    • Place of Presentation
      神奈川工科大
    • Related Report
      2012 Annual Research Report
  • [Presentation] 直流アークプラズマを用いたGa添加 ZnO 透明導電膜:機能とその持続性2013

    • Author(s)
      山本哲也
    • Organizer
      プラズマ研究会
    • Place of Presentation
      茨城大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Materials Smart Design of Wide Bandgap ZnO: Functional Core2013

    • Author(s)
      Tetsuya Yamamoto
    • Organizer
      The International Conference on Metallurgical Coatings and Thin Films (ICMCTF)
    • Place of Presentation
      Town & Country Hotel, San Diego, CA, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Moisture Resistant Ga-Doped ZnO Films with Highly Transparent Conductivity for Use in Window Layers of Thin-Film Solar Cells2013

    • Author(s)
      Huaping Song
    • Organizer
      2013 MRS Meeting, San Francisco
    • Place of Presentation
      Moscone West Convention Center
    • Related Report
      2012 Annual Research Report
  • [Presentation] The Optimization of Indium Codoping Concentration in 100-nm-thick GZO Films for Low Resistivity and High Humidity Resistance Properties2013

    • Author(s)
      Huaping Song
    • Organizer
      The International Conference on Metallurgical Coatings and Thin Films (ICMCTF)
    • Place of Presentation
      Town & Country Hotel, San Diego, CA, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Control of Moisture-resistant Properties of Highly Transparent Conductive Ga-Doped ZnO films2013

    • Author(s)
      Tetsuya Yamamoto
    • Organizer
      European MRS (E-MRS)
    • Place of Presentation
      Congress Center - Strasbourg, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] Multiple Deposition of Ga-Doped ZnO Highly Transparent Conductive Films on Polymer Substrates2013

    • Author(s)
      Tetsuya Yamamoto
    • Organizer
      PACRIM10-FUL-022-2013
    • Place of Presentation
      Hotel Del Coronado
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Characterization of chemical states in near surface region of Ga-doped ZnO thin films by x-ray photoemission spectroscopy2013

    • Author(s)
      Hisao Makino
    • Organizer
      European MRS (E-MRS)
    • Place of Presentation
      Congress Center - Strasbourg, France
    • Related Report
      2012 Annual Research Report
  • [Presentation] ここまできた酸化物材料科学:創造と成功の本質2012

    • Author(s)
      山本哲也
    • Organizer
      応用物理学会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ポリマー基板上酸化亜鉛透明導電膜の現状と展望2012

    • Author(s)
      山本哲也
    • Organizer
      有機デバイス研究会
    • Place of Presentation
      静岡大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Book] 工業材料2014

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Total Pages
      4
    • Publisher
      日刊工業出版
    • Related Report
      2013 Annual Research Report
  • [Book] スマートプロセス学会誌2013

    • Author(s)
      山本哲也、宋華平、野本淳一、牧野久雄、岸本誠一、長田実
    • Total Pages
      9
    • Publisher
      一般社団法人 スマートプロセス学会
    • Related Report
      2013 Annual Research Report
  • [Book] 透明導電膜2012

    • Author(s)
      山本哲也
    • Total Pages
      309
    • Publisher
      情報機構
    • Related Report
      2012 Annual Research Report
  • [Remarks] 高知工科大学 山本哲也

    • URL

      http://www.ele.kochi-tech.ac.jp/yamateko/index0.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] T. YAMATEKO HOME PAGE

    • URL

      http://www.ele.kochi-tech.ac.jp/yamateko/index.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] 高知工科大学 総合研究所

    • URL

      http://www.kochi-tech.ac.jp/kut_J/activities/sougou.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] Tetsuya YAMAMOTO Home Page

    • URL

      http://www.ele.kochi-tech.ac.jp/yamateko/index0.html

    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 酸化亜鉛多結晶薄膜を用いたガスセンサ2014

    • Inventor(s)
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Industrial Property Rights Holder
      山本哲也、岸本誠一、野本淳一、牧野久雄
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-07-15
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 透明導電性酸化亜鉛薄膜2013

    • Inventor(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Industrial Property Rights Holder
      山本哲也、宋華平、野本淳一、牧野久雄
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-08-19
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 酸化亜鉛多結晶薄膜を用いたガスセンサ2013

    • Inventor(s)
      山本哲也、宋華平、野本淳一、牧野久雄
    • Industrial Property Rights Holder
      山本哲也、宋華平、野本淳一、牧野久雄
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-08-22
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 透明導電性酸化亜鉛薄膜2013

    • Inventor(s)
      山本哲也、宋華平、牧野久雄
    • Industrial Property Rights Holder
      山本哲也、宋華平、牧野久雄
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-051053
    • Filing Date
      2013-03-12
    • Related Report
      2012 Annual Research Report

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Published: 2013-05-15   Modified: 2019-07-29  

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