|Budget Amount *help
¥45,240,000 (Direct Cost: ¥34,800,000、Indirect Cost: ¥10,440,000)
Fiscal Year 2015: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000)
Fiscal Year 2014: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Fiscal Year 2013: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2012: ¥14,300,000 (Direct Cost: ¥11,000,000、Indirect Cost: ¥3,300,000)
|Outline of Final Research Achievements
The purpose of this study was to develop the optical circuit platform by combining Si and GaN photonics on the basis of micromachining. To realize the functional optical circuits combining GaN active waveguide and Si passive waveguide, the fundamental technologies were developed. In the concrete, bonding a silicon-on-insulator wafer and a Si wafer on which GaN crystal was grown, the optical circuit coupling a GaN microring waveguide and a Si straight waveguide was fabricated, and the optical modulations using an electro-optic effect and other effect were demonstrated. One of the bases for opt-electronic hybrid integration was established.