Development of functional surface with electro-adhesive effect and the application to fixture element in vacuum and high-temperature environment
| Project/Area Number |
24246029
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Keio University |
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Principal Investigator |
Aoyama Tojiro 慶應義塾大学, 理工学部, 教授 (70129302)
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| Co-Investigator(Kenkyū-buntansha) |
KAKINUMA Yasuhiro 慶應義塾大学, 理工学部, 准教授 (70407146)
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| Project Period (FY) |
2012-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥45,890,000 (Direct Cost: ¥35,300,000、Indirect Cost: ¥10,590,000)
Fiscal Year 2015: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2014: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2013: ¥19,760,000 (Direct Cost: ¥15,200,000、Indirect Cost: ¥4,560,000)
Fiscal Year 2012: ¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
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| Keywords | 機能性表目 / 機能性材料 / トライボロジー / 機能性表面 / 半導体製造プロセス / 精密位置決め / 機能性エラストマ / 保持機構 / 電気粘着効果 |
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| Outline of Final Research Achievements |
For a fixture device of wafer in semiconductor process under vacuum and high- temperature condition, we worked on development of a functional electro-adhesive surface with micro texture in this study. By impregnating three dimensional micro-mesh structure with an adhesive elastomer, an electro-adhesive surface (EAS) regularly generating numerous adhesive spots on the surface according to applied electric field was successfully developed. From the experiment, it is clear that EAS with one-sided patterned electrodes is able to fix a Si wafer with electro-adhesive effect and works in high-vacuum environment. In addition, the performance of EAS is enhanced at high temperature up to 150 degree Celsius. These results represents high applicability of EAS to a fixture device in high-vacuum and high-temperature process.
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Report
(5 results)
Research Products
(16 results)
