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Micro hydraulic power sources having high output power density using electro-conjugate fluid (ECF)

Research Project

Project/Area Number 24246030
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionTokyo Institute of Technology

Principal Investigator

YOKOTA Shinichi  東京工業大学, 精密工学研究所, 教授 (10092579)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Kazuhiro  東京工業大学, 精密工学研究所, 准教授 (00220632)
KIM Joon-wan  東京工業大学, 精密工学研究所, 准教授 (40401517)
EOM Sang In  東京工業大学, 精密工学研究所, 助教 (20551576)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥45,890,000 (Direct Cost: ¥35,300,000、Indirect Cost: ¥10,590,000)
Fiscal Year 2014: ¥12,350,000 (Direct Cost: ¥9,500,000、Indirect Cost: ¥2,850,000)
Fiscal Year 2013: ¥20,670,000 (Direct Cost: ¥15,900,000、Indirect Cost: ¥4,770,000)
Fiscal Year 2012: ¥12,870,000 (Direct Cost: ¥9,900,000、Indirect Cost: ¥2,970,000)
Keywordsマイクロ液圧源 / 電界共役流体 / MEMS / マイクロポンプ / ソフトマイクロアクチュエータ
Outline of Final Research Achievements

An electro-conjugate fluid (ECF) is a kind of functional fluid. A strong and active jet flow of ECF can be generated between electrodes surrounded by ECF, when high DC voltage is applied to the electrodes. In order to realize the micro hydraulic pressure source having the highest output power density in the world, we integrated the ECF jet effect as a driving mechanism and MEMS technology as its fabrication. We investigated the characteristics of the ECF micro hydraulic sources. Based on the characteristic evaluation, we applied our ECF micropumps to the cooling electronic chips and various tiny soft actuators. The study proved that ECF micro hydraulic power sources are very effective.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (63 results)

All 2014 2013 2012

All Journal Article (9 results) (of which Peer Reviewed: 7 results) Presentation (54 results) (of which Invited: 1 results)

  • [Journal Article] Micro inchworm robot using electro-conjugate fluid2014

    • Author(s)
      Shohei Ueno, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 216 Pages: 36-42

    • DOI

      10.1016/j.sna.2014.04.032

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A review on micropumps from the viewpoint of volumetric power density2014

    • Author(s)
      Shinichi YOKOTA
    • Journal Title

      Mechanical Engineering Reviews

      Volume: 1 Issue: 2 Pages: DSM0014-DSM0014

    • DOI

      10.1299/mer.2014dsm0014

    • NAID

      130004647530

    • ISSN
      2187-9753
    • Related Report
      2014 Annual Research Report
  • [Journal Article] Mixing device for Droplet μTAS using electro-conjugate fluid2014

    • Author(s)
      小林紀穂, 倉科佑太, 竹村研治郎, 横田眞一, 枝村一弥
    • Journal Title

      Transactions of the JSME (in Japanese)

      Volume: 80 Issue: 819 Pages: MN0332-MN0332

    • DOI

      10.1299/transjsme.2014mn0332

    • NAID

      130004716715

    • ISSN
      2187-9761
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Droplet μTAS using Electro-conjugate Fluid - feedback position control of multiple droplets in flow channel matrix2013

    • Author(s)
      Yoko Abe, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 198 Pages: 1-7

    • DOI

      10.1016/j.sna.2013.04.017

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Applications of Electro-Conjugate Fluids and Electro-Rheological Fluids2013

    • Author(s)
      横田 眞一 , 吉田 和弘
    • Journal Title

      Journal of the Robotics Society of Japan

      Volume: 31 Issue: 5 Pages: 461-464

    • DOI

      10.7210/jrsj.31.461

    • NAID

      10031175933

    • ISSN
      0289-1824, 1884-7145
    • Related Report
      2013 Annual Research Report
  • [Journal Article] Active Flow Channel Matrix using Electro-conjugate Fluid for μTAS application2012

    • Author(s)
      Yoko Abe, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      JFPS International Journal of Fluid Power System

      Volume: Vol. 5, No. 1 Pages: 11-15

    • NAID

      130003330302

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Robot Finger Using Electro-conjugate Fluid2012

    • Author(s)
      Akihiro Yamaguchi, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      Advanced Robotics

      Volume: Vol. 26

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Concept of a Focus-Tunable ECF Microlens and Fabrication of a Large Model Prototype2012

    • Author(s)
      Joon-wan Kim, Takashi Yoshimoto, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol. 6, No. 4 Pages: 476-481

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Control of a novel flexible finger using electro-conjugate fluid with built-in angle sensor2012

    • Author(s)
      Kento Mori, Akihiro Yamaguchi, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: Volume 183 Pages: 75-83

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] 3-TRIANGULAR PRISM ELECTRODES DESIGN FOR ELECTRO-CONJUGATE FLUID MICROPUMP2014

    • Author(s)
      Hongri GU , Joon-wan KIM , Shinichi YOKOTA , Kazuya EDAMURA
    • Organizer
      the 9th JFPS International Symposium on Fluid Power Matsue 2014
    • Place of Presentation
      Matsue-city, Shimane
    • Year and Date
      2014-10-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] EFFECT OF ELECTRODE MATERIALS ON ELECTRO-CONJUGATE FLUID FLOW GENERATION2014

    • Author(s)
      Mika NARAKI , Kenjiro TAKEMURA , Shinichi YOKOTA , Kazuya EDAMURA
    • Organizer
      the 9th JFPS International Symposium on Fluid Power Matsue 2014
    • Place of Presentation
      Matsue-city, Shimane
    • Year and Date
      2014-10-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] Miniaturization of braille cells by utilizing ECF micro actuators2014

    • Author(s)
      Kazuyoshi Kondo , Joon-wan Kim , Shinichi Yokota , Kazuya Edamura
    • Organizer
      ICMT2014 The 18th International Conference on Mechatronics Technology
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2014-10-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS技術による五角柱電極アレイ形ECFマイクロポンプ2014

    • Author(s)
      金俊完 , 三栗野功大 , 横田眞一 , 枝村一弥
    • Organizer
      山梨講演会2014
    • Place of Presentation
      山梨大学(山梨県)
    • Year and Date
      2014-10-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS技術を用いた集積化によるECFマイクロポンプの高圧化2014

    • Author(s)
      古木星哉 , 金俊完 , 横田眞一 , 枝村一弥
    • Organizer
      山梨講演会2014
    • Place of Presentation
      山梨大学(山梨県)
    • Year and Date
      2014-10-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] オンサガー効果によるECFジェットのシミュレーション2014

    • Author(s)
      田邊勇典 , 金俊完 , 横田眞一 , 枝村一弥
    • Organizer
      山梨講演会2014
    • Place of Presentation
      山梨大学(山梨県)
    • Year and Date
      2014-10-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] 点字表示セル用ECFマイクロアクチュエータ2014

    • Author(s)
      近藤一由 , 金俊完 , 横田眞一 , 枝村一弥
    • Organizer
      山梨講演会2014
    • Place of Presentation
      山梨大学(山梨県)
    • Year and Date
      2014-10-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] マイクロ液圧と機能性流体ECFを用いたマイクロ液圧源2014

    • Author(s)
      横田 眞一 , 金 俊完
    • Organizer
      第24回フルードパワー国際見本市
    • Place of Presentation
      東京ビックサイト(東京都)
    • Year and Date
      2014-09-17 – 2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 機能性流体による高機能メカトロシステムのデザイン2014

    • Author(s)
      田中 豊 , 神戸 晴夏 , 林田 直之 , 横田 眞一 , 枝村 一弥
    • Organizer
      第24回フルードパワー国際見本市
    • Place of Presentation
      東京ビックサイト(東京都)
    • Year and Date
      2014-09-17 – 2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] ECF MICROPUMP-INTEGRATED MICRO HAND BY MEMS TECHNOLOGY2014

    • Author(s)
      Joon-wan Kim , Shinichi Yokota , Masaya Satoh , Kazuya Edamura
    • Organizer
      Bath/ASME symposium on fluid power and motion control (FPMC 2014)
    • Place of Presentation
      Bath, UK
    • Year and Date
      2014-09-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] ECF Micro Hydraulic Power Source by MEMS-Fabricated Pentagonal Prism Electrode Arrays2014

    • Author(s)
      Joon-wan Kim , Koudai Mikurino , Shinichi Yokota , Kazuya Edamura
    • Organizer
      World Automation Congress 2014(WAC2014)
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2014-08-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] Micropump-Integrated Eccentric Tube Type Microactuator by Electro-Conjugate Fluid2014

    • Author(s)
      J.-W. Kim , Masaya Satoh , S. Yokota , K. Edamura
    • Organizer
      14th International Conference on New Actuators (Actuator2014)
    • Place of Presentation
      Bremen, Germany
    • Year and Date
      2014-06-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] 偏心チューブ形アクチュエータを用いたECFマイクロハンドの提案2014

    • Author(s)
      横田 眞一 , 佐藤 政哉 , 金 俊完 , 枝村 一弥
    • Organizer
      平成26年春季フルードパワーシステム講演会
    • Place of Presentation
      機械振興会館(東京都)
    • Year and Date
      2014-05-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] 五角柱電極アレイを用いた高出力ECF マイクロポンプの提案2014

    • Author(s)
      三栗野 功大 , 横田 眞一 , 金 俊完 , 枝村 一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2014 in Toyama
    • Place of Presentation
      富山国際会議場(富山県)
    • Year and Date
      2014-05-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] 点字表示器用ECF マイクロアクチュエータ2014

    • Author(s)
      金俊完 , 近藤一由 , 横田眞一 , 枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2014 in Toyama
    • Place of Presentation
      富山国際会議場(富山県)
    • Year and Date
      2014-05-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS 技術を用いた集積化による高圧ECF マイクロポンプ2014

    • Author(s)
      古木星哉 , 金俊完 , 横田眞一 , 枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2014 in Toyama
    • Place of Presentation
      富山国際会議場(富山県)
    • Year and Date
      2014-05-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] 三角柱-テーパースリット電極対を用いたECFマイクロポンプ2014

    • Author(s)
      GU Hongri , 金 俊完 , 横田 眞一 , 枝村 一弥
    • Organizer
      第14回 日本機械学会 機素潤滑設計部門講演会
    • Place of Presentation
      信州松代ロイヤルホテル(長野県)
    • Year and Date
      2014-04-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Flexible Microgripper by Integrating Balloon-type Microactuators with Built-in ECF Micropumps2013

    • Author(s)
      Joon-wan Kim,Satoru Yamasita,Shinichi Yokota,Kazuya Edamura
    • Organizer
      The 12th International Symposium on Fluid Control, Measurement and Visualization (FLUCOME 2013)
    • Place of Presentation
      Nara
    • Related Report
      2013 Annual Research Report
  • [Presentation] An Inchworm Robot using Electro-conjugate Fluid2013

    • Author(s)
      Shohei Ueno,Kenjiro Takemura,Shinichi Yokota,Kazuya Edamura
    • Organizer
      The 12th International Symposium on Fluid Control, Measurement and Visualization (FLUCOME 2013)
    • Place of Presentation
      Nara
    • Related Report
      2013 Annual Research Report
  • [Presentation] Understanding of Electro-conjugate Fluid Flow through Flow Visualization Experiments2013

    • Author(s)
      K. Nakagawa,T. Okada,Kenjiro Takemura,Shinichi Yokota,Kazuya Edamura
    • Organizer
      The 12th International Symposium on Fluid Control, Measurement and Visualization (FLUCOME 2013)
    • Place of Presentation
      Nara
    • Related Report
      2013 Annual Research Report
  • [Presentation] 機能性流体ECF を用いたマイクロポンプモジュール(小形化と高出力化のための一提案)2013

    • Author(s)
      田中豊,横田眞一,枝村一弥
    • Organizer
      平成25年秋季フルードパワーシステム講演会
    • Place of Presentation
      兵庫県
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電界共役流体を用いたDroplet μTAS のための液滴混合デバイス(複数液滴の自律的混合)2013

    • Author(s)
      小林紀穂,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      平成25年秋季フルードパワーシステム講演会
    • Place of Presentation
      兵庫県
    • Related Report
      2013 Annual Research Report
  • [Presentation] ECF マイクロポンプ組込偏心チューブ形マイクロアクチュエータに関する研究2013

    • Author(s)
      佐藤政哉,金俊完,横田眞一,枝村一弥
    • Organizer
      平成25年秋季フルードパワーシステム講演会
    • Place of Presentation
      兵庫県
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電界共役流体を用いたマイクロロボットハンド2013

    • Author(s)
      上野将平,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      平成25年秋季フルードパワーシステム講演会
    • Place of Presentation
      兵庫県
    • Related Report
      2013 Annual Research Report
  • [Presentation] ECFジェット駆動偏心チューブマイクロアクチュエータの特性評価2013

    • Author(s)
      佐藤政哉,金俊完,横田眞一,枝村一弥
    • Organizer
      日本機械学会関東支部/精密工学会共催山梨講演会2013
    • Place of Presentation
      山梨県
    • Related Report
      2013 Annual Research Report
  • [Presentation] Study on Output Characteristics of downsized ECF micropump2013

    • Author(s)
      Hongri Gu,Joon-wan Kim,Shinichi Yokota,Kazuya Edamura
    • Organizer
      17th International Conference on Mechatronics Technology (ICMT2013)
    • Place of Presentation
      JEJU ISLAND
    • Related Report
      2013 Annual Research Report
  • [Presentation] A silicone rubber bimorph actuator driven by bidirectional ECF jet generator2013

    • Author(s)
      Sang In Eom,Shinichi Yokota,Joon-wan Kim,Kazuhiro Yoshida,Kazuya Edamura
    • Organizer
      17th International Conference on Mechatronics Technology (ICMT2013)
    • Place of Presentation
      JEJU ISLAND
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電極対のマイクロ化によるECF効果に関する研究2013

    • Author(s)
      グホンリ,金俊完,横田眞一,枝村一弥
    • Organizer
      日本機械学会 2013年度年次大会
    • Place of Presentation
      岡山県
    • Related Report
      2013 Annual Research Report
  • [Presentation] MEMS技術を用いた針-円筒スリット形ECFマイクロ液圧源2013

    • Author(s)
      金俊完,近藤一由,横田眞一,枝村一弥
    • Organizer
      日本機械学会 2013年度年次大会
    • Place of Presentation
      岡山県
    • Related Report
      2013 Annual Research Report
  • [Presentation] 両方向ECFマイクロポンプによるマイクロアクチュエータの駆動2013

    • Author(s)
      嚴祥仁,横田眞一,金俊完,枝村一弥
    • Organizer
      日本機械学会 2013年度年次大会
    • Place of Presentation
      岡山県
    • Related Report
      2013 Annual Research Report
  • [Presentation] 多層化による高アスペクト比電極対を用いたECFマイクロポンプ2013

    • Author(s)
      金俊完,山田嘉穂,横田眞一,枝村一弥
    • Organizer
      平成25年春季フルードパワーシステム講演会
    • Place of Presentation
      東京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] Micropump-Integrated Balloon Type Microactuators2013

    • Author(s)
      Joon-wan Kim,Satoru Yamasita,Shinichi Yokota,Kazuya Edamura
    • Organizer
      The 5th International Conference on Manufacturing, Machine Design and Tribology(ICMDT2013 )
    • Place of Presentation
      Busan
    • Related Report
      2013 Annual Research Report
  • [Presentation] ECFマイクロポンプ組み込み可変焦点形液体レンズに関する研究2013

    • Author(s)
      佐藤政哉,金俊完,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2013
    • Place of Presentation
      茨城県
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電界共役流体を用いたシャクトリムシ型ロボット2013

    • Author(s)
      野将平,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2013
    • Place of Presentation
      茨城県
    • Related Report
      2013 Annual Research Report
  • [Presentation] 電界共役流体を用いたタンク・ポンプ一体型3関節ロボットフィンガ2013

    • Author(s)
      小林紀穂,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2013
    • Place of Presentation
      茨城県
    • Related Report
      2013 Annual Research Report
  • [Presentation] High Performance ECF Micropump by the 3D Integration of MEMS-fabricated Eectrodes2013

    • Author(s)
      Joon-wan Kim,Yoshiho Yamada,Shinichi Yokota,Kazuya Edamura
    • Organizer
      The 8th International Conference on Fluid Power Transmission and Control (ICFP 2013)
    • Place of Presentation
      Hangzhou
    • Related Report
      2013 Annual Research Report
  • [Presentation] Micro Hydraulics Using Functional Fluid ECF2013

    • Author(s)
      Shinichi Yokota
    • Organizer
      The 8th International Conference on Fluid Power Transmission and Control (ICFP 2013)
    • Place of Presentation
      Hangzhou
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 電界共役流体を用いたDroplet μTASのためのアクティブ流路マトリクス:複数液滴の位置制御2012

    • Author(s)
      安部 陽子,竹村研治郎,佐藤 克成,横田眞一,枝村一弥
    • Organizer
      平成24年秋季フルードパワーシステム講演会
    • Place of Presentation
      福岡工業大学(福岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] New Design of an Electrode for ECF Jet Micro Cylinder2012

    • Author(s)
      Sang In Eom, Shinichi Yokota, Joon-wan Kim, Kazuya Edamura
    • Organizer
      16th International Conference on Mechatronics Technology
    • Place of Presentation
      Tianjin, China
    • Related Report
      2012 Annual Research Report
  • [Presentation] ECF Micropump by the 3D Integration of MEMS-fabricated Triangular Prism and Slit (TPS) Electrode Pairs2012

    • Author(s)
      Yoshiho Yamada, Joon-wan Kim, Shinichi Yokota, Kazuya Edamura
    • Organizer
      16th International Conference on Mechatronics Technology
    • Place of Presentation
      Tianjin, China
    • Related Report
      2012 Annual Research Report
  • [Presentation] Study on Closed Loop ECF Micro Devices for Cooling a Micro Chip2012

    • Author(s)
      Joon-wan Kim, Yuji Miyagawa, Shinichi Yokota, Kazuya Edamura
    • Organizer
      16th International Conference on Mechatronics Technology
    • Place of Presentation
      Tianjin, China
    • Related Report
      2012 Annual Research Report
  • [Presentation] ECFジェット駆動バルーン形マイクロアクチュエータ2012

    • Author(s)
      山下悟,金俊完,横田眞一,枝村一弥
    • Organizer
      山梨講演会
    • Place of Presentation
      山梨大学(山梨県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] MEMS 技術によるECF マイクロレートジャイロの開発と性能評価2012

    • Author(s)
      今村恒彦,グェン ヴィンソン タン,金俊完,横田眞一,枝村一弥
    • Organizer
      日本機械学会 2012年度年次大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロチップ冷却用環状ECFマイクロデバイスの特性評価2012

    • Author(s)
      金俊完,宮川裕史,横田眞一,枝村一弥
    • Organizer
      日本機械学会 2012年度年次大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電界共役流体を駆動源とした衝突形マイクロ流体素子―駆動原理の確認および流路形状の検討―2012

    • Author(s)
      中川 慶,森 健人,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2012
    • Place of Presentation
      アクトシティ(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電界共役流体を用いた小型壁面移動ロボット2012

    • Author(s)
      上野 将平,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2012
    • Place of Presentation
      アクトシティ(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電界共役流体を応用したタービン型モータ2012

    • Author(s)
      楢木美香,竹村研治郎,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2012
    • Place of Presentation
      アクトシティ(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電界共役流体を用いたμTAS用次世代アクティブ流路マトリクス2012

    • Author(s)
      阿部陽子,竹村研治郎,佐藤 克成,横田眞一,枝村一弥
    • Organizer
      平成24年春季フルードパワーシステム講演会
    • Place of Presentation
      機械振興会館(東京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 三角柱-スリット形電極を用いたECF マイクロポンプの立体集積化2012

    • Author(s)
      金俊完,山田嘉穂,横田眞一,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2012
    • Place of Presentation
      アクトシティ(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] ECFジェット駆動マイクロ液圧用シリンダ2012

    • Author(s)
      嚴祥仁,増田弘樹,横田眞一,吉田和弘,枝村一弥
    • Organizer
      ロボティクス・メカトロニクス講演会2012
    • Place of Presentation
      アクトシティ(静岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] ECF マイクロシリンダ2012

    • Author(s)
      嚴祥仁,増田弘樹,横田眞一,吉田和弘,枝村一弥
    • Organizer
      第24回「電磁力関連のダイナミクス」シンポジウム
    • Place of Presentation
      富山大学(富山県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Active Flow Channel Matrix Using Electro-conjugate Fluid for μTAS Application2012

    • Author(s)
      Yoko Abe, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Organizer
      The 2nd Japan-China Joint Workshop on Fluid Power
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] MEMS技術を用いたECF三角柱-スリット形電極対の性能評価2012

    • Author(s)
      金俊完,王海波,横田眞一,枝村一弥
    • Organizer
      第12回機素潤滑設計部門講演会
    • Place of Presentation
      愛媛県県民文化会館(愛媛県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 三角柱-スリット形電極対の三次元集積化によるECFマイクロポンプ2012

    • Author(s)
      金俊完,山田嘉穂,横田眞一,枝村一弥
    • Organizer
      第12回機素潤滑設計部門講演会
    • Place of Presentation
      愛媛県県民文化会館(愛媛県)
    • Related Report
      2012 Annual Research Report

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Published: 2013-05-15   Modified: 2019-07-29  

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