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Formation of nano-porous structures on Ge surfaces and development of surface modification processes of such surfaces as a catalytic function

Research Project

Project/Area Number 24510179
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionThe University of Shiga Prefecture

Principal Investigator

Yanagisawa Junichi  滋賀県立大学, 工学部, 教授 (60239803)

Project Period (FY) 2012-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Keywordsナノ多孔構造 / ナノ突起構造 / 集束イオンビーム / 半導体基板表面 / ゲルマニウム / インジウムアンチモン / プラズマ酸化 / 接触角 / ナノ微細構造 / チタン / 酸化チタン / イオン照射 / シリコン / ガリウムアンチモン / 光触媒 / 表面修飾
Outline of Final Research Achievements

Control of formation of anomalous nano-structures on semiconductor surfaces, such as nano-porous structures on Ge and nano-cone structures on InSb surfaces, using focused ion beam (FIB) irradiations was studied in the present work. Knowledge that those structures are affected by FIB irradiation parameters was also obtained. On the other hand, we have proposed the oxidation process of metallic Ti thin films, which are formed by a sputtering method, using oxygen plasma. Using this plasma oxidation process to Ti films formed on nano-structured surfaces, we have obtained the results which suggest the improvement of the photocatalytic effects of such materials.

Report

(5 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (4 results)

All 2016 2015 2014

All Presentation (4 results)

  • [Presentation] 酸素プラズマを用いた金属チタンの酸化による光触媒材料の形成2016

    • Author(s)
      山田将司, 柳沢 淳一
    • Organizer
      応用物理学会関西支部平成27年度第3回講演会
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2016-02-05
    • Related Report
      2015 Annual Research Report
  • [Presentation] シリコンおよび窒化シリコン膜表面への低エネルギーガリウムイオン照射効果2015

    • Author(s)
      山田将司, 松井 祐斗, 山田逸成, 柳沢 淳一
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Control of Size and Shape of Nano-Porous Structure Formed on Ge (110) Surface by High –Energy Focused Ga Ion Beam Irradiation2014

    • Author(s)
      M. Yamada and J. Yanagisawa
    • Organizer
      2014 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Fukuoka
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Research-status Report
  • [Presentation] Gaイオン照射した窒化シリコン薄膜へのGaN成長におけるイオン照射エネルギーの影響(II)2014

    • Author(s)
      松井 祐斗, アザマト オシュラフノフ, 柳沢 淳一
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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