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Influence of strain on the Intermixing in the hetero-epitaxial growth

Research Project

Project/Area Number 24560031
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionYokohama City University

Principal Investigator

SHIGETA YUKICHI  横浜市立大学, 生命ナノシステム科学研究科, 教授 (70106293)

Co-Investigator(Kenkyū-buntansha) TOSAKA Aki  横浜市立大学, 大学院生命ナノシステム科学研究科, 助教 (20436166)
Research Collaborator ISHII Takuya  
NAKATA Junya  
YOSHIDA Ryuuma  
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords薄膜成長 / インターミキシング / 歪み半導体 / 走査トンネル顕微鏡 / 角度分解光電子分光 / 表面伝導バンド
Outline of Final Research Achievements

The influence of strain on the intermixing in the hetero-epitaxial growth is very important in the developing of new materials. We have get two important results about it: (1) In the hetero-epitaxial growth of Si layer on the Ge(111) surface annealed at 450℃, the intermixing of Ge atoms in the Si layer is observed at the thickness over 2 bilayer; (2) In the solid phase epitaxial growth of the Ge/Si(111), we propose a decision rule whether the Ge and Si atoms are mixed or not from the change of the surface morphology after the solid phase epitaxial growth.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (17 results)

All 2015 2014 2013 2012 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (12 results) Remarks (3 results)

  • [Journal Article] Influence of step morphology on the structural phase transition of the α-Al2O3(0001) surface2014

    • Author(s)
      Aki Tosaka, Tatsuya Kitamura, Takuhiro Sugiyama, Koji Koyama, and Yukichi Shigeta
    • Journal Title

      Appl. Phys. Lett.

      Volume: 104 Issue: 22 Pages: 221601-3

    • DOI

      10.1063/1.4881334

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Strain induced intermixing of Ge atoms in Si epitaxial layer on Ge(111)2013

    • Author(s)
      Aki Tosaka, Izumi Mochizuki, Ryota Negishi and Yukichi Shigeta
    • Journal Title

      JOURNAL OF APPLIED PHYSICS

      Volume: 113 Issue: 7

    • DOI

      10.1063/1.4792503

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Si(111)表面上のGe膜の固相エピタキシー成長に伴う形状変化2015

    • Author(s)
      吉田竜馬、松岡理香、戸坂亜希、重田諭吉
    • Organizer
      日本物理学会第70回年次大会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2015-03-21 – 2015-03-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] 反射高速電子回折による菊池線を用いたSi(111)表面歪みの測定2015

    • Author(s)
      萩原 裕人、戸坂 亜希、重田 諭吉
    • Organizer
      日本物理学会第70回年次大会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2015-03-21 – 2015-03-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] 反射高速電子線回折法によるAl2O3(0001)√31×√31 R9°構造の解析2015

    • Author(s)
      戸坂亜希、杉山卓嘉、小山浩二、重田諭吉
    • Organizer
      日本物理学会第70回年次大会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2015-03-21 – 2015-03-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] Measurement of Strain in GaN(0001) Substrate by using Kikuchi line of RHEED2014

    • Author(s)
      Y. SHIGETA , J. NAKATA, A.TOSAKA and K.KOYAMA
    • Organizer
      The13th European Vacuum Congress
    • Place of Presentation
      Avairo, Portugal
    • Year and Date
      2014-09-08 – 2014-09-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Quasi-two-dimensional Electron Gas State of Strained Si (111) √3×√3-Ag System2014

    • Author(s)
      A. TOSAKA, T. ISHII, and Y. SHIGETA
    • Organizer
      The13th European Vacuum Congress
    • Place of Presentation
      Avairo, Portugal
    • Year and Date
      2014-09-08 – 2014-09-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] 歪み制御Si(111)√3×√3-Ag 表面上の金属状態2014

    • Author(s)
      石井 卓也 ,戸坂 亜希 ,重田 諭吉
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 化学機械研磨処理したGaN(0001)表面の菊池線を用いた格子歪み評価2014

    • Author(s)
      中田 淳也,小山 浩司, 戸坂 亜希 ,重田 諭吉
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] Relationship between Strain and Effective Mass in the Metallic Surface State of the √3×√3-Ag Structure on Si(111) epitaxial layer2013

    • Author(s)
      Y. Shigeta, T. Ishii, A. Tosaka
    • Organizer
      19th International Vacuum Congress
    • Place of Presentation
      Paris, France
    • Related Report
      2013 Research-status Report
  • [Presentation] Strain induced intermixing of Ge into Si epitaxial layer on Ge (111) surface2012

    • Author(s)
      Yukichi SHIGETA, Aki TOSAKA, Izumi MOCHIZUKI, and Ryota NEGISHI
    • Organizer
      第29回表面科学ヨーロッパ会議(ECOSS-29)
    • Place of Presentation
      エジンバラ、英国
    • Related Report
      2012 Research-status Report
  • [Presentation] Structure of GaN (0001) surface prepared by CMP observed with RHEED2012

    • Author(s)
      Junya Nakata, Takuhiro Sugiyama, Kouji Koyama, Aki Tosaka, Yukichi Shigeta
    • Organizer
      The 10th Russia-Japan Seminar on Semiconductor Surfaces
    • Place of Presentation
      東京大学 小柴ホール
    • Related Report
      2012 Research-status Report
  • [Presentation] 化学機械研磨処理したGaN(0001)表面の昇温による構造変化の反射高速電子線回折法による研究

    • Author(s)
      中田淳也,杉山卓嘉,小山浩司,戸坂亜希,重田諭吉
    • Organizer
      日本物理学会2012年秋期大会
    • Place of Presentation
      横浜国立大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 大気中前処理温度条件によるα-Al2O3(0001)面の構造変化

    • Author(s)
      杉山卓嘉,小山浩司,戸坂亜希,重田諭吉
    • Organizer
      日本物理学会2012年秋期大会
    • Place of Presentation
      横浜国立大学
    • Related Report
      2012 Research-status Report
  • [Remarks] Shigeta and Tosaka Laboratory

    • URL

      http://surface.sci.yokohama-cu.ac.jp/index2.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 重田・戸坂 研究室 ホームページ

    • URL

      http://surface.sci.yokohama-cu.ac.jp/

    • Related Report
      2013 Research-status Report
  • [Remarks] 重田・戸坂 研究室 ホームページ

    • URL

      http://surface.sci.yokohama-cu.ac.jp/

    • Related Report
      2012 Research-status Report

URL: 

Published: 2013-05-31   Modified: 2019-07-29  

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