• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of efficient water window x-ray band-emission source by high-Z highly ionized ions

Research Project

Project/Area Number 24560038
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionUtsunomiya University

Principal Investigator

HIGASHIGUCHI Takeshi  宇都宮大学, 工学(系)研究科(研究院), 准教授 (80336289)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2012: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Keywords水の窓軟X線光源 / 重元素 / 多価イオン / レーザー生成プラズマ / 軟X線 / EUV / 水の窓 / レーザー / プラズマ / スペクトル / 高Z
Outline of Final Research Achievements

We study the efficient EUV & soft x-ray sources for lithography and bio-imaging applications based on laser-produced high-Z ions. In order to produce the high-power emission, the mid-IR laser pulse for high-Z plasmas is one of key technology. Recent progress has been showed the laser development and discuss the experimental data to achieve the lab-scale table-top, efficiency, high-brightness high-Z plasma EUV-soft x-ray sources for in vivo bio-imaging applications.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (99 results)

All 2015 2014 2013 2012 Other

All Journal Article (23 results) (of which Peer Reviewed: 23 results,  Acknowledgement Compliant: 6 results,  Open Access: 1 results) Presentation (74 results) (of which Invited: 21 results) Book (2 results)

  • [Journal Article] Determination of the polarization states of an arbitrary polarized terahertz beam: Vectorial vortex analysis2015

    • Author(s)
      Toshitaka Wakayama, Takeshi Higashiguchi, Hiroki Oikawa, Kazuyuki Sakaue, Masakazu Washio, Motoki Yonemura, Toru Yoshizawa, J. Scott Tyo, and Yukitoshi Otani
    • Journal Title

      Scientific Reports

      Volume: 5 Issue: 1 Pages: 9416-9416

    • DOI

      10.1038/srep09416

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Density and x-ray emission profile relationships in highly ionized high-Z laser-produced plasmas2015

    • Author(s)
      K. Yoshida, S. Fujioka, T. Higashiguchi, T. Ugomori, N. Tanaka, M. Kawasaki, Y Suzuki, C. Suzuki, K. Tomita, R. Hirose, T. Ejima, H. Ohashi, M. Nishikino, A. Sunahara, B. Li, P. Dunne, G. O’sullivan, T. Yanagida, H. Azechi, and H. Nishimura
    • Journal Title

      Applied Physics Letters

      Volume: 106 Issue: 12 Pages: 121109-121109

    • DOI

      10.1063/1.4916395

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions2014

    • Author(s)
      H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki
    • Journal Title

      Applied Physics Letters

      Volume: 104 Issue: 23

    • DOI

      10.1063/1.4883475

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Efficient extreme ultraviolet emission from multiple laser-produced one-dimensional spherical plasmas2014

    • Author(s)
      Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, et al.
    • Journal Title

      Applied Physics Express

      Volume: 7 Issue: 8 Pages: 086202-086202

    • DOI

      10.7567/apex.7.086202

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source2014

    • Author(s)
      Amitava Roy, Goki Arai, Hiroyuki Hara, Takeshi Higashiguchi, Hayato Ohashi, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Taisuke Miura, Tomas Mocek, and Akira Endo
    • Journal Title

      Applied Physics Letters

      Volume: 105 Issue: 7 Pages: 074103-074103

    • DOI

      10.1063/1.4893611

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Enhancement of the extreme ultraviolet emission from a potassium plasma by dual laser irradiation2014

    • Author(s)
      Takeshi Higashiguchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Nagata, Hayato Ohashi, Bowen Li, Rebekah D'Arcy, Padraig Dunne, and Gerry O'Sullivan
    • Journal Title

      Review of Scientific Instruments

      Volume: 85 Issue: 9

    • DOI

      10.1063/1.4894384

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] EUV spectroscopy of highly charged high Z ions in the Large Helical Device plasmas2014

    • Author(s)
      Chihiro Suzuki, Fumihiro Koike, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Hiroyuki Sakaue, Nobuyuki Nakamura, Shigeru Morita, Motoshi Goto, Daiji Kato, Tomohide Nakano, Takeshi Higashiguchi, Colm Harte, and Gerry O'Sullivan
    • Journal Title

      Physica Scripta

      Volume: 89 Issue: 11 Pages: 114009-114009

    • DOI

      10.1088/0031-8949/89/11/114009

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source2014

    • Author(s)
      Thanh-Hung Dinh, Yuhei Suzuki, Ryouichi Hirose, Hiroyuki Hara, Hayato Ohashi, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara, and Takeshi Higashiguchi
    • Journal Title

      Review of Scientific Instruments

      Volume: 85 Issue: 11

    • DOI

      10.1063/1.4901934

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] EUV露光光源の研究開発の現状2014

    • Author(s)
      東口 武史,藤岡 慎介,砂原 淳,柳田 達哉,溝口 計
    • Journal Title

      レーザー研究

      Volume: 42 Pages: 14-22

    • NAID

      130007897471

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Tuning extreme ultraviolet emission for optimum coupling with multilayer mirrors for future lithography through control of ionic charge states2014

    • Author(s)
      H. Ohashi, T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, T. Kanehara, Y. Aida, S. Torii, T. Makimura, W. Jiang, P. Dunne, G. O’Sullivan, and N. Nakamura
    • Journal Title

      Journal of Applied Physics

      Volume: 115 Issue: 3 Pages: 33302-33302

    • DOI

      10.1063/1.4862441

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Analysis of laser produced plasmas of gold in the 1-7 nm region2014

    • Author(s)
      Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Padraig Dunne, Deirdre Kilbane, Emma Sokell, and Gerry O'Sullivan
    • Journal Title

      Journal of Physics B : Atomic, Molecular, and Optical Physics

      Volume: 47 Issue: 7 Pages: 75001-75001

    • DOI

      10.1088/0953-4075/47/7/075001

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] EUV光源開発の現状2013

    • Author(s)
      東口 武史,遠藤 彰,溝口 計
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 89 Pages: 341-348

    • NAID

      110009612748

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Recent progress in source development for lithography at 6.x nm2013

    • Author(s)
      Gerry O’Sullivan, Thomas Cummins, Padraig Dunne, Akira Endo, Paddy Hayden, Takeshi Higashiguchi, Deirdre Kilbane, Bowen Li, Colm O’Gorman, Takamitsu Otsuka, Emma Sokell, and Noboru Yugami
    • Journal Title

      Physica Scripta

      Volume: T156 Pages: 14105-14105

    • DOI

      10.1088/0031-8949/2013/t156/014105

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] 6.x nm 領域における希土類プラズマ極端紫外光源2013

    • Author(s)
      大塚 崇光,東口 武史,湯上 登
    • Journal Title

      電気学会論文誌A(基礎・材料・共通部門誌)

      Volume: 133 Pages: 526-531

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Efficient “water window” soft x-ray high-Z plasma source2013

    • Author(s)
      Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 463 Pages: 12024-12024

    • DOI

      10.1088/1742-6596/463/1/012024

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] プラズマと量子ビームによる短波長光源2013

    • Author(s)
      東口 武史,大塚 崇光,鵜篭 照之,藤岡 慎介,西村 博明,鈴木 千尋,坂上 和之,鷲尾 方一,遠藤 彰
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 89 Pages: 669-676

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas2013

    • Author(s)
      T. Makimura, 他14名
    • Journal Title

      Optics Express

      Volume: vol.21 Issue: 26 Pages: 31837-31845

    • DOI

      10.1364/oe.21.031837

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm2012

    • Author(s)
      Colm O’Gorman, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Thomas Cummins, Padraig Dunne, Emma Sokell, Gerry OSullivan, and Takeshi Higashiguchi
    • Journal Title

      APPLIED PHYSICS LETTERS

      Volume: 100 Issue: 14 Pages: 141108-141108

    • DOI

      10.1063/1.3701593

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Characteristics of argon plasma waveguide produced by alumina capillary discharge for short wavelength laser application2012

    • Author(s)
      Takeshi Higashiguchi, Nadezhda Bobrova, Pavel Sasorov, Shohei Sakai, Yasuhiko Sentoku, Ryosuke Kodama and Noboru Yugami
    • Journal Title

      JOURNAL OF APPLIED PHYSICS

      Volume: 093302 Issue: 9 Pages: 93302-93302

    • DOI

      10.1063/1.4712038

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Investigation of Gd and Tb Plasmas for Beyond Extreme Ultraviolet Lithography Based on Multilayer Mirror Performance2012

    • Author(s)
      B. Li, T. Otsuka, T. Higashiguchi, N. Yugami, W. Jiang, A. Endo, P. Dunne, and G. O'Sullivanl
    • Journal Title

      Applied Physics Letters

      Volume: 101 Issue: 1 Pages: 13112-13112

    • DOI

      10.1063/1.4732791

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Analysis of tungsten laser produced plasmas in the extreme ultraviolet (EUV) spectral region2012

    • Author(s)
      Colm S Harte
    • Journal Title

      JOURNAL OF PHYSICS B : ATOMIC, MOLECULAR AND OPTICAL PHYSICS

      Volume: 45 Issue: 20 Pages: 205002-205002

    • DOI

      10.1088/0953-4075/45/20/205002

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] XUV spectra of laser-produced zirconium plasma2012

    • Author(s)
      Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
    • Journal Title

      Journal of Physics B

      Volume: 45 Issue: 24 Pages: 245004-245004

    • DOI

      10.1088/0953-4075/45/24/245004

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] "Water window" sources : Selection based on the interplay of spectral properties and multilayer reflection bandwidth2012

    • Author(s)
      Bowen Li
    • Journal Title

      APPLIED PHYSICS LETTERS

      Volume: 102 Issue: 4

    • DOI

      10.1063/1.4789982

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 光パラメトリック中赤外レーザーの開発2015

    • Author(s)
      川崎 将人,ヂン タンフン,笹沼 淳史,藤井 雄介,三浦 泰祐,東口 武史
    • Organizer
      第15回レーザー学会東京支部研究会
    • Place of Presentation
      東海大学高輪キャンパス
    • Year and Date
      2015-03-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高効率EUV光源のための短パルスCO2レーザーの開発2015

    • Author(s)
      笹沼 淳史,ヂン タンフン,荒居 剛己,藤井 雄介,南都 健一郎,中村 大輔,髙橋 昭彦,岡田 龍雄,三浦 泰祐,東口 武史
    • Organizer
      第15回レーザー学会東京支部研究会
    • Place of Presentation
      東海大学高輪キャンパス
    • Year and Date
      2015-03-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] レーザー生成マイクロプラズマによる高輝度EUV光源の放射特性2015

    • Author(s)
      荒居 剛己,原 広行,ヂン タンフン,砂原 淳,三浦 泰祐,遠藤 彰,東口 武史
    • Organizer
      第15回レーザー学会東京支部研究会
    • Place of Presentation
      東海大学高輪キャンパス
    • Year and Date
      2015-03-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] プラズマEUV光源の高効率化とその応用 (Efficient plasma EUV source and its applicatio2014

    • Author(s)
      東口 武史 (Takeshi Higashiguchi)
    • Organizer
      Plasma Conference 2014 (Plasma 2014
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2014-11-21
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] LHDプラズマを用いた高Z元素多価イオンのEUV分光と原子モデルの構築 (EUV Spectroscopy and Atomic Model of Highly Charged Ions of High Z Elements Using LHD Plasmas)2014

    • Author(s)
      鈴木 千尋,村上 泉,小池 文博,田村 直樹,須藤 滋,坂上 裕之,中村 信行,森田 繁,後藤 基志,加藤 太治,仲野 友英,東口 武史,Colm S. Harte,Gerry O'Sullivan
    • Organizer
      Plasma Conference 2014 (Plasma 2014
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2014-11-21
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Welcome and Overview of recent work on soft-ray emission spectroscopy2014

    • Author(s)
      Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
    • Organizer
      ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Tunable extreme ultraviolet and soft x-ray narrowband sources with laser produced high-Z plasmas2014

    • Author(s)
      Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Nobuyuki Nakamura, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
    • Organizer
      ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Recent progress in Utsunomiya University: Development of compact, 10-Hz short pulse CO2 laser system for EUV & soft x-ray sources2014

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Sources for Water Window Imaging2014

    • Author(s)
      Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-05
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Efficient EUV sources by short CO2 laser-produced plasmas2014

    • Author(s)
      Reiho Amano, Thanh Hung Dinh, Masato Kawasaki, Atsushi Sasanuma, Yuhei Suzuki, Takeshi Higashiguchi, and Taisuke Miura
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] A microplasma high-brightness EUV source at 13.5 nm2014

    • Author(s)
      Goki Arai, Hiroyuki Hara, Yuhei Suzuki, Thanh Hung Dinh, and Takeshi Higashiguchi
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] Radiation hydrodynamic simulation of a high-brightness 13.5-nm EUV microplasma2014

    • Author(s)
      Hiroyuki Haya, Goki Arai, Takanori Miyazaki, Thanh-Hung Dinh, Takeshi Higashiguchi, and Atsushi Sunahara
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] Quasi-Moseley’s law for UTA spectra in high-Z highly ion charge states for high power EUV & soft x-ray sources2014

    • Author(s)
      Yuhei Suzuki, Goki Arai, Takanori Miyazaki, Thanh-Hung Dinh, and Takeshi Higashiguchi
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] Possibility of high-Z plasma water window sources2014

    • Author(s)
      Takanori Miyazaki, Yuhei Suzuki, Thanh Hung Dinh, and Takeshi Higashiguchi
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] Characteristics of soft x-ray emission from optically thin high-Z plasmas in Large Helical Device2014

    • Author(s)
      Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
    • Organizer
      2014 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Year and Date
      2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] Systematic observation of EUV spectra from heavy ions in optically thin and thick plasmas2014

    • Author(s)
      Chihiro Suzuki, Fumihiro Koike, Takeshi Higashiguchi, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Elgiva White, John Sheil, Elaine Long, Fergal O’Reilly, Emma Sokell, Padraig Dunne, and Gerard O’Sullivan
    • Organizer
      9th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA)
    • Place of Presentation
      University of Jena
    • Year and Date
      2014-09-22
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Sources for beyond extreme ultraviolet lithography and water window imaging2014

    • Author(s)
      Gerry O'Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasania, Elaine Long, Hayato Ohashi, Fergal O'Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
    • Organizer
      9th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA)
    • Place of Presentation
      University of Jena
    • Year and Date
      2014-09-22
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 重元素プラズマによるEUV・軟X線光源開発2014

    • Author(s)
      東口 武史
    • Organizer
      2014年度 原子分子データ応用フォーラムセミナ
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2014-09-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Tunable narrowband soft x-ray sources with laser-produced high-Z plasmas2014

    • Author(s)
      Hayato Ohashi, Hiroaki Ito, Yuhei Suzuki, Goki Arai, Bowen Li, Gerry O’Sullivan, Fumihiro Koike, Chihiro Suzuki, and Takeshi Higashiguchi
    • Organizer
      5th Euro-Arian Pulsed Power Conference (EAPPC 2014)
    • Place of Presentation
      Kumamoto University
    • Year and Date
      2014-09-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] 重元素による高効率EUV・軟X線プラズマ光源とその応用2014

    • Author(s)
      東口 武史
    • Organizer
      「プラズマ科学のフロンティア」研究会
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2014-08-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 高輝度EUV光源プラズマの放射流体数値解析2014

    • Author(s)
      原 広行,荒居 剛己,鈴木 悠平,廣瀬 僚一,三浦 泰祐,遠藤 彰,ROY Amitava, MOCEK Tomas, 東口 武史,砂原 淳
    • Organizer
      「プラズマ科学のフロンティア」研究会
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2014-08-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] 重元素プラズマUTA光源の原子番号依存性2014

    • Author(s)
      鈴木 悠平,大橋 隼人,荒居 剛己,宮崎 孝基,LI Bowen,DUNNE Padraig,O’SULLIVAN Gerry,鈴木 千尋,田村 直樹,須藤 滋,坂上 裕之,加藤 大治,村上 泉,小池 文博,東口 武史
    • Organizer
      「プラズマ科学のフロンティア」研究会
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2014-08-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] 光パラメトリック法によるサブナノ秒中赤外レーザーの開発2014

    • Author(s)
      川崎 将人,笹沼 淳史,藤井 雄介,天野 玲保,三浦 泰祐,遠藤 彰,MOCEK Tomas,東口 武史
    • Organizer
      「プラズマ科学のフロンティア」研究会
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2014-08-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高効率EUV光源用炭酸ガスレーザー再生増幅器の開発2014

    • Author(s)
      DINH Thanh Hung,天野 玲保,笹沼 淳史,川崎 将人,藤井 雄介,高橋 昭彦,中村 大輔,岡田 龍雄,三浦 泰祐,遠藤 彰,MOCEK Tomas,東口 武史
    • Organizer
      「プラズマ科学のフロンティア」研究会
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2014-08-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Laser-produced multi-charged heavy ions as efficent soft x-ray sources2014

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      The 5th China-Japan-Korea Joint Seminar on Atomic and Molecular Processes in Plasma (AMPP2014)
    • Place of Presentation
      Northwest Normal University
    • Year and Date
      2014-07-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 『水の窓』波長域のレーザー生成プラズマ光源の開発2014

    • Author(s)
      東口 武史
    • Organizer
      「軟X線による細胞内形態解析」研究会
    • Place of Presentation
      宮城蔵王ロイヤルホテル
    • Year and Date
      2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] 重元素によるレーザー生成多価イオンプラズマ光源とその応用2014

    • Author(s)
      東口 武史
    • Organizer
      多摩シンポジウム~Tokyo-EBIT 20周年に向けて~
    • Place of Presentation
      電気通信大学
    • Year and Date
      2014-07-05
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Radiation hydrodynamic simulation of a high-brightness 13.5-nm EUV microplasma by use of a dot target2014

    • Author(s)
      Hiroyuki Hara, Goki Arai, Yuhei Suzuki, Hayato Ohashi, Takeshi Higashiguchi, and Atsushi Sunahara
    • Organizer
      Photomask Japan 2014
    • Place of Presentation
      Pacifico Yokohama
    • Year and Date
      2014-04-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Beyond extreme ultraviolet sources for next generation lithography2014

    • Author(s)
      Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Goki Arai, and Hayato Ohashi
    • Organizer
      Photomask Japan 2014
    • Place of Presentation
      Pacifico Yokohama
    • Year and Date
      2014-04-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation of laser produced high-Z plasma soft X-ray sources2013

    • Author(s)
      Takamitsu Otsuka, Padraig Dunne, Gerry O’Sullivan, Takeshi Higashiguchi, and Noboru Yugami
    • Organizer
      IEEE Pulsed Power & Plasma Science
    • Place of Presentation
      Hyatt Regency, San Francisco, California
    • Related Report
      2013 Research-status Report
  • [Presentation] Recent progress in source development in the extreme ultraviolet for lithography and water window imaging2013

    • Author(s)
      Gerry O’Sullivan, Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Bowen Li, Imam Kambali, Akira Endo, Fergal O’Reilly, and Deirdre Kilbane
    • Organizer
      11th EUROPEAN CONFERENCE ON ATOMS, MOLECULES AND PHOTONS (ECAMP11)
    • Place of Presentation
      Aarhus University, Aarhus, Denmark
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] EUV spectroscopy of highly charged high Z ions in the Large Helical Device plasmas2013

    • Author(s)
      C. Suzuki, F. Koike, I. Murakami, N. Tamura, S. Sudo, H. A. Sakaue, N. Nakamura, S. Morita, M. Goto, D. Kato, T. Nakano, T. Higashiguchi, C. S. Harte, G. O’Sullivan
    • Organizer
      11th International Colloquium on Atomic Spectra and Oscillator Strengths for Astrophysical and Laboratory Plasmas (ASOS-11)
    • Place of Presentation
      University of Mons, Mons, Belgium
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] パルスエネルギーによるBEUV~水の窓軟X線光源2013

    • Author(s)
      東口 武史
    • Organizer
      核融合科学研究所研究会「パルスパワー技術による高エネルギー密度プラズマ」
    • Place of Presentation
      核融合科学研究所
    • Related Report
      2012 Research-status Report
  • [Presentation] 高原子番号元素による軟X線光源の放射特性2013

    • Author(s)
      東口 武史,大塚 崇光,Padraig Dunne, Gerry O’Sullivan
    • Organizer
      電気学会,プラズマ パルスパワー 放電 合同研究会
    • Place of Presentation
      まちなかキャンパス長岡
    • Related Report
      2012 Research-status Report
  • [Presentation] Dynamics of the ultrashort laser pulse in a capillary discharge-preformed argon plasma channel2012

    • Author(s)
      Takeshi Higashiguchi, Nadezhda Bobrova, Shohei Sakai, Noboru Yugami, Yasuhiko Sentoku, and Ryosuke Kodama
    • Organizer
      International Conference on High Energy Density Sciences 2012 (HEDS2012)
    • Place of Presentation
      Pacifico Yokohama
    • Related Report
      2012 Research-status Report
  • [Presentation] Fundamental Property of 6.X-nm EUV Emission2012

    • Author(s)
      Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Thomas Cummins, Colm O’Gorman, Bowen Li, Deirdre Kilbane, Padraig Dunne, Gerry O’Sullivan, Weihua Jiang, and Akira Endo
    • Organizer
      2012 International Workshop on EUV Lithography
    • Place of Presentation
      Sheraton Maui Resort
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] Investigating the Effects of Laser Power Density, Pulse Duration and Viewing Angle on a 6.7nm BEUV Source2012

    • Author(s)
      Colm O'Gorman, Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, and Takeshi Higashiguchi
    • Organizer
      2012 International Workshop on EUV Lithography
    • Place of Presentation
      Sheraton Maui Resort
    • Related Report
      2012 Research-status Report
  • [Presentation] 次世代リソグラフィーのためのBeyond EUV 光源2012

    • Author(s)
      大塚 崇光,東口 武史,湯上 登,江 偉華,遠藤 彰,DUNNE Padraig,O’SULLIVAN Gerry
    • Organizer
      次世代リソグラフィー技術研究会
    • Place of Presentation
      東京工業大学蔵前会館
    • Related Report
      2012 Research-status Report
  • [Presentation] Efficient “water window” soft x-ray high-Z plasma source2012

    • Author(s)
      Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
    • Organizer
      The 11th International Conference on X-ray Microscopy (XRM2012)
    • Place of Presentation
      The Hope Hotel (Shanghai, China)
    • Related Report
      2012 Research-status Report
  • [Presentation] レーザー生成プラズマ極端紫外(EUV)光源の放射特性2012

    • Author(s)
      東口 武史
    • Organizer
      2012年秋季 第73回応用物理学会学術講演会シンポジウム「高強度XUV~X線ビームの発生とその応用」
    • Place of Presentation
      愛媛大学城北地区
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] 高原子番号物質を用いる極端紫外光源の研究2012

    • Author(s)
      大塚 崇光,東口 武史, 江 偉華,遠藤 彰,湯上 登,DUNNE Padraig,O’SULLIVAN Gerry
    • Organizer
      2012年秋季 第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学城北地区
    • Related Report
      2012 Research-status Report
  • [Presentation] 多価イオンからの軟 X 線放射2012

    • Author(s)
      大塚 崇光,東口 武史,江 偉華,湯上 登,遠藤 彰,DUNNE Padraig, O'Sullivan Gerry
    • Organizer
      レーザー学会,第432回研究会
    • Place of Presentation
      足利まちなか遊学館
    • Related Report
      2012 Research-status Report
  • [Presentation] Characteristics of 6.X-nm Beyond EUV sources2012

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      2012 International Symposium on Extreme Ultraviolet Lithography
    • Place of Presentation
      SQUARE Brussels Meeting Centre
    • Related Report
      2012 Research-status Report
  • [Presentation] Possibility of High-Z Plasma Water Window Sources2012

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      2012 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Related Report
      2012 Research-status Report
  • [Presentation] Plasma-based UTA Emission in BEUV & Water Window Spectral Regions2012

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      2012 International Workshop on EUV and Soft X-Ray Sources
    • Place of Presentation
      University College Dublin
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] 高原子番号物質プラズマによるUTA EUV光源2012

    • Author(s)
      東口 武史
    • Organizer
      2012年度 原子分子データ応用フォーラムセミナー
    • Place of Presentation
      核融合科学研究所
    • Related Report
      2012 Research-status Report
  • [Presentation] 高原子番号元素による軟X線光源の放射特性

    • Author(s)
      東口 武史,大塚 崇光,Padraig Dunne, Gerry O’Sullivan
    • Organizer
      電気学会,プラズマ パルスパワー 放電 合同研究会
    • Place of Presentation
      まちなかキャンパス長
    • Related Report
      2013 Research-status Report
  • [Presentation] Progress in Laser-Plasma Sources - 13.5 nm & Beyond

    • Author(s)
      Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Bowen Li, Colm O’Gorman, Thomas Cummings, Patrick Hayden, Tony Donnelly, Fergal O’Reilly, and Gerry O’Sullivan
    • Organizer
      2013 International Workshop on EUV Lithography
    • Place of Presentation
      Makena Beach Golf Resort, Maui, Hawaii
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Beyond Extreme Ultra Violet (BEUV) Radiation from Spherically symmetrical High-Z plasmas

    • Author(s)
      Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryouichi Hirose, Takeo Ejima, Hayato Ohashi, Masaharu Nishikino, Enda Scally, Hiroaki Nshimura, Hiroshi Azechi, and Gerard O’Sullivan
    • Organizer
      The Eighth International Conference on Inertial Fusion Sciences and Applications (IFSA2013)
    • Place of Presentation
      Nara Prefectural New PublicHall, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Characteristics of extreme ultraviolet emission from high-Z plasmas

    • Author(s)
      Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Chihiro Suzuki, Kentaro Tomita, Masaharu Nishikino, Shinsuke Fujioka, Akira Endo, Bowen Li, Takamitsu Otsuka, Padraig Dunne, and Gerry O’Sullivan
    • Organizer
      The Eighth International Conference on Inertial Fusion Sciences and Applications (IFSA2013)
    • Place of Presentation
      Nara Prefectural New PublicHall, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] 高輝度EUV光源用ドットターゲットの開発

    • Author(s)
      東口 武史,廣瀬 僚一,鈴木 悠平,川崎 将人,砂原 淳,遠藤 彰
    • Organizer
      2013年秋季 第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 水の窓・炭素の窓領域のレーザー生成プラズマ軟X線光源の放射特性

    • Author(s)
      東口 武史,鈴木 悠平,川崎 将人,大谷 幸利,谷田貝 豊彦,Bowen Li,Padraig Dunne,Gerry O'sullivan
    • Organizer
      2013年秋季 第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 球対称BEUV放射プラズマの電子密度計測

    • Author(s)
      鵜篭 照之,吉田 健祐,錦野 将元,藤岡 慎介,西村 博明,東口 武史,江島 丈雄,富田 健太郎,鈴木 千尋,大橋 隼人,田中 のぞみ,疇地 宏,鈴木 悠平,川崎 将人,廣瀬 僚一
    • Organizer
      2013年秋季 第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 球対称ガドリニウムプラズマからのB-EUV放射特性とスペクトル特性

    • Author(s)
      吉田 健祐,藤岡 慎介,鵜篭 照之,田中 のぞみ,西村 博明,東口 武史,鈴木 悠平,川崎 将人,江島 丈雄,廣瀬 僚一,富田 健太郎,鈴木 千尋,大橋 隼人,錦野 将元,疇地 宏
    • Organizer
      2013年秋季 第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] Characteristics of 6.X-nm Beyond EUV sources

    • Author(s)
      Takeshi Higashiguchi, Takamitsu Otsuka, Thomas Cummins, Colm O’Gorman, Bowen Li, Deirdre Kilbane, Padraig Dunne, Gerry O'Sullivan, Weihua Jiang, and Akira Endo
    • Organizer
      2013 International Symposium on Extreme Ultraviolet Lithography
    • Place of Presentation
      Toyama International Conference Center
    • Related Report
      2013 Research-status Report
  • [Presentation] Fundamental properties of the beyond EUV source

    • Author(s)
      Takeshi Higashiguchi, Hayato Ohashi, Yuhei Suzuki, Masato Kawasaki, Bowen Li, Deirdre Kilbane, Padraig Dunne, Gerry O’Sullivan, Weihua Jiang, and Akira Endo
    • Organizer
      2013 International Symposium on Extreme Ultraviolet Lithography
    • Place of Presentation
      Toyama International Conference Center
    • Related Report
      2013 Research-status Report
  • [Presentation] Microplasma high-brightness EUV source at 13.5 nm

    • Author(s)
      Takeshi Higashiguchi, Yoichi Hirose, Hayato Ohashi, Yuhei Suzuki, Masato Kawasaki, Hiroyuki Hara, Atsushi Sunahara, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
    • Organizer
      2013 International Symposium on Extreme Ultraviolet Lithography
    • Place of Presentation
      Toyama International Conference Center
    • Related Report
      2013 Research-status Report
  • [Presentation] Optimising emission from EUV sources

    • Author(s)
      Gerry O’Sullivan, Bowen Li, Takeshi Higashiguchi, Thomas Cummins, Padraig Dunne, Paddy Hayden, Deirdre Kilbane, Imam Kambali, Colm O’Gorman, Hayato Ohashi, Takamitsu Otsuka, Chihiro Suzuki, Emma Sokell, Noboru Yugami, Sergey Zakharov, Vasily Zakharov
    • Organizer
      レーザー学会,第450回研究会
    • Place of Presentation
      早稲田大学西早稲田キャンパス
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 球対称プラズマを用いたBEUV光源データベースの構築

    • Author(s)
      吉田 健祐,藤岡 慎介,東口 武史,鵜篭 照之,田中 のぞみ,川崎 将人,鈴木 悠平,鈴木 千尋,富田 健太郎,廣瀬 僚一,江島 丈雄,大橋 隼人,錦野 将元,Enda Scally, Gerard O'Sullivan,西村 博明,畦地 宏
    • Organizer
      レーザー学会,第450回研究会
    • Place of Presentation
      早稲田大学西早稲田キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 重元素プラズマによる短波長光源

    • Author(s)
      東口 武史
    • Organizer
      レーザー学会,第450回研究会
    • Place of Presentation
      早稲田大学西早稲田キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 電子ビームイオントラップを用いたプラズマ光源関連イオンのEUV分光

    • Author(s)
      大橋 隼人,東口 武史,坂上 裕之,中村 信行
    • Organizer
      レーザー学会,第450回研究会
    • Place of Presentation
      早稲田大学西早稲田キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] Homework for table-top, efficiency, high-brightness high-Z plasma EUV-soft x-ray sources for in vivo bio-imaging applications

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      Ireland Japan Collaboration Workshop
    • Place of Presentation
      University College Dublin
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Observations of EUV Spectra from Highly Charged Heavy Ions in Optically Thin Plasmas for Benchmarking of Models

    • Author(s)
      Chihiro Suzuki, Fumihiro Koike, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Takeshi Higashiguchi, Gerry O'Sullivan
    • Organizer
      2013 International Workshop on EUV and Soft X-Ray Sources,
    • Place of Presentation
      University College Dublin
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Fundamental Atomic Process in Source Development for Beyond EUV Lithography and “Water Window” Imaging

    • Author(s)
      Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Emma Sokell, Padraig Dunne, and Gerry O’Sullivan
    • Organizer
      2013 International Workshop on EUV and Soft X-Ray Sources,
    • Place of Presentation
      University College Dublin
    • Related Report
      2013 Research-status Report
  • [Presentation] Efficient Light Sources at BEUV & Water Window Soft X-ray Wavelengths

    • Author(s)
      Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Hayato Ohashi 他
    • Organizer
      2013 International Workshop on EUV and Soft X-Ray Sources,
    • Place of Presentation
      University College Dublin
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] プラズマ光源関連イオンの EBIT による分光測定

    • Author(s)
      金原達彦,岸良子文,大橋隼人,東口武史,中村信行
    • Organizer
      原子衝突学会第38回年会
    • Place of Presentation
      理化学研究所 (和光) 鈴木梅太郎記念ホール
    • Related Report
      2013 Research-status Report
  • [Presentation] Feasibility study of efficient high-Z plasma soft x-ray sources

    • Author(s)
      Takeshi Higashiguchi
    • Organizer
      The 12th Symposium on X-ray Imaging Optics
    • Place of Presentation
      Osaka University Nakanoshima Center
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 球対称プラズマを用いたBEUV光源データベースの構築

    • Author(s)
      吉田 健祐,藤岡 慎介,東口 武史,鵜篭 照之,田中 のぞみ,大橋 隼人,川崎 将人,鈴木 悠平,鈴木 千尋,富田 健太郎,廣瀬 僚一,江島 丈雄,錦野 将元,Enda Scally,西村 博明,疇地 宏,Gerard O’Sullivan
    • Organizer
      レーザー励起X線源とその応用研究会
    • Place of Presentation
      日本原子力研究開発機構敦賀本部アトムホール
    • Related Report
      2013 Research-status Report
  • [Presentation] レーザー生成プラズマEUV光源プラズマの放射特性

    • Author(s)
      東口 武史,鈴木 悠平,川崎 将人,大橋 隼人
    • Organizer
      レーザー学会,第455回研究会
    • Place of Presentation
      日本原子力研究開発機構敦賀本部アトムホール
    • Related Report
      2013 Research-status Report
  • [Presentation] 重元素プラズマ軟X線光源の放射特性

    • Author(s)
      東口 武史,大橋 隼人,鈴木 悠平,川崎 将人
    • Organizer
      レーザー学会,第456回研究会
    • Place of Presentation
      大阪大学レーザーエネルギー学研究センター
    • Related Report
      2013 Research-status Report
  • [Presentation] 炭酸ガスレーザー生成希土類プラズマ光源の放射特性

    • Author(s)
      東口 武史,鈴木 悠平,川崎 将人,大橋 隼人,中村 大輔,髙橋 昭彦,岡田 龍雄,鳥井 周一,牧村 哲也
    • Organizer
      レーザー学会創立40周年記念学術講演会 第34回年次大会
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2013 Research-status Report
  • [Presentation] 水の窓軟X線光源としての重元素希薄プラズマの放射特性

    • Author(s)
      大橋 隼人,鈴木 悠平,川崎 将人,荒居 剛己,東口 武史,大谷 幸利,谷田貝 豊彦,鈴木 千尋,村上 泉,田村 直樹,須藤 滋,小池 文博,Gerry O'Sullivan
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] 球対称プラズマを用いたBEUV光源データベースの構築

    • Author(s)
      吉田 健祐,藤岡 慎介,東口 武史,江島 丈雄,錦野 将元,Enda Scally,鈴木 悠平,大橋 隼人,鈴木 千尋,富田 健太郎,廣瀬 僚一,鵜篭 照之,田中 のぞみ,川崎 将人,Gerard O'Sullivan,西村 博明,疇地 宏
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Research-status Report
  • [Presentation] レーザー生成プラズマUTA 放射光源の原子番号依存性

    • Author(s)
      鈴木悠平,大橋隼人,荒居剛己,東口武史
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Research-status Report
  • [Book] Extreme Ultraviolet Emission from Multi-Charged State Ions in Potassium Plasmas2015

    • Author(s)
      T. Higashiguchi, B. Li, R D'Arcy, P. Dunne and Gerry O'Sullivan
    • Total Pages
      10
    • Publisher
      Royal Society of Chemistry
    • Related Report
      2014 Annual Research Report
  • [Book] 普及版「EUV光源の開発と応用」2013

    • Author(s)
      東口 武史,窪寺 昌一
    • Total Pages
      273
    • Publisher
      シーエムシー出版
    • Related Report
      2012 Research-status Report

URL: 

Published: 2013-05-31   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi