Development of efficient water window x-ray band-emission source by high-Z highly ionized ions

• Project/Area Number: 24560038
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: Utsunomiya University
• Principal Investigator: HIGASHIGUCHI Takeshi 宇都宮大学, 工学(系)研究科(研究院), 准教授 (80336289)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000); Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2012: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
• Keywords: 水の窓軟X線光源 / 重元素 / 多価イオン / レーザー生成プラズマ / 軟X線 / EUV / 水の窓 / レーザー / プラズマ / スペクトル / 高Z

Outline of Final Research Achievements

We study the efficient EUV & soft x-ray sources for lithography and bio-imaging applications based on laser-produced high-Z ions. In order to produce the high-power emission, the mid-IR laser pulse for high-Z plasmas is one of key technology. Recent progress has been showed the laser development and discuss the experimental data to achieve the lab-scale table-top, efficiency, high-brightness high-Z plasma EUV-soft x-ray sources for in vivo bio-imaging applications.

Research Products

• [Journal Article] Determination of the polarization states of an arbitrary polarized terahertz beam: Vectorial vortex analysis (2015)
  • Author(s): Toshitaka Wakayama, Takeshi Higashiguchi, Hiroki Oikawa, Kazuyuki Sakaue, Masakazu Washio, Motoki Yonemura, Toru Yoshizawa, J. Scott Tyo, and Yukitoshi Otani
  • Journal Title: Scientific Reports Volume: 5 Pages: 9416-9416
  • DOI: 10.1038/srep09416
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Density and x-ray emission profile relationships in highly ionized high-Z laser-produced plasmas (2015)
  • Author(s): K. Yoshida, S. Fujioka, T. Higashiguchi, T. Ugomori, N. Tanaka, M. Kawasaki, Y Suzuki, C. Suzuki, K. Tomita, R. Hirose, T. Ejima, H. Ohashi, M. Nishikino, A. Sunahara, B. Li, P. Dunne, G. O’sullivan, T. Yanagida, H. Azechi, and H. Nishimura
  • Journal Title: Appl. Phys. Lett. Volume: 106 Pages: 121109-121109
  • DOI: 10.1063/1.4916395
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions (2014)
  • Author(s): H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki
  • Journal Title: Applied Physics Letters Volume: 104
  • DOI: 10.1063/1.4883475
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Efficient extreme ultraviolet emission from multiple laser-produced one-dimensional spherical plasmas (2014)
  • Author(s): Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, et al.
  • Journal Title: Appl. Phys. Express Volume: 7 Issue: 8 Pages: 086202-086202
  • DOI: 10.7567/apex.7.086202
  • ISSN: 1882-0778, 1882-0786
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source (2014)
  • Author(s): Amitava Roy, Goki Arai, Hiroyuki Hara, Takeshi Higashiguchi, Hayato Ohashi, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Taisuke Miura, Tomas Mocek, and Akira Endo
  • Journal Title: Applied Physics Letters Volume: 105
  • DOI: 10.1063/1.4893611
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Enhancement of the extreme ultraviolet emission from a potassium plasma by dual laser irradiation (2014)
  • Author(s): Takeshi Higashiguchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Nagata, Hayato Ohashi, Bowen Li, Rebekah D'Arcy, Padraig Dunne, and Gerry O'Sullivan
  • Journal Title: Review of Scientific Instruments Volume: 85
  • DOI: 10.1063/1.4894384
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] EUV spectroscopy of highly charged high Z ions in the Large Helical Device plasmas (2014)
  • Author(s): Chihiro Suzuki, Fumihiro Koike, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Hiroyuki Sakaue, Nobuyuki Nakamura, Shigeru Morita, Motoshi Goto, Daiji Kato, Tomohide Nakano, Takeshi Higashiguchi, Colm Harte, and Gerry O'Sullivan
  • Journal Title: Physica Scripta Volume: 89
  • DOI: 10.1088/0031-8949/89/11/114009
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source (2014)
  • Author(s): Thanh-Hung Dinh, Yuhei Suzuki, Ryouichi Hirose, Hiroyuki Hara, Hayato Ohashi, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara, and Takeshi Higashiguchi
  • Journal Title: Review of Scientific Instruments Volume: 85
  • DOI: 10.1063/1.4901934
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] EUV露光光源の研究開発の現状 (2014)
  • Author(s): 東口 武史，藤岡 慎介，砂原 淳，柳田 達哉，溝口 計
  • Journal Title: レーザー研究 Volume: 42 Pages: 14-22
  • Peer Reviewed
• [Journal Article] Tuning extreme ultraviolet emission for optimum coupling with multilayer mirrors for future lithography through control of ionic charge states (2014)
  • Author(s): H. Ohashi, T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, T. Kanehara, Y. Aida, S. Torii, T. Makimura, W. Jiang, P. Dunne, G. O’Sullivan, and N. Nakamura
  • Journal Title: Journal of Applied Physics Volume: 115 Pages: 33302-33302
  • DOI: 10.1063/1.4862441
  • Peer Reviewed
• [Journal Article] Analysis of laser produced plasmas of gold in the 1-7 nm region (2014)
  • Author(s): Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Padraig Dunne, Deirdre Kilbane, Emma Sokell, and Gerry O'Sullivan
  • Journal Title: Journal of Physics B Volume: 47 Pages: 75001-75001
  • DOI: 10.1088/0953-4075/47/7/075001
  • Peer Reviewed
• [Journal Article] EUV光源開発の現状 (2013)
  • Author(s): 東口 武史，遠藤 彰，溝口 計
  • Journal Title: プラズマ・核融合学会誌 Volume: 89 Pages: 341-348
  • NAID: 110009612748
  • Peer Reviewed
• [Journal Article] Recent progress in source development for lithography at 6.x nm (2013)
  • Author(s): Gerry O’Sullivan, Thomas Cummins, Padraig Dunne, Akira Endo, Paddy Hayden, Takeshi Higashiguchi, Deirdre Kilbane, Bowen Li, Colm O’Gorman, Takamitsu Otsuka, Emma Sokell, and Noboru Yugami
  • Journal Title: Physica Scripta Volume: T156 Pages: 14105-14105
  • DOI: 10.1088/0031-8949/2013/t156/014105
  • Peer Reviewed
• [Journal Article] 6.x nm 領域における希土類プラズマ極端紫外光源 (2013)
  • Author(s): 大塚 崇光，東口 武史，湯上 登
  • Journal Title: 電気学会論文誌A（基礎・材料・共通部門誌） Volume: 133 Pages: 526-531
  • Peer Reviewed
• [Journal Article] Efficient “water window” soft x-ray high-Z plasma source (2013)
  • Author(s): Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
  • Journal Title: Journal of Physics: Conference Series Volume: 463 Pages: 12024-12024
  • DOI: 10.1088/1742-6596/463/1/012024
  • Peer Reviewed
• [Journal Article] プラズマと量子ビームによる短波長光源 (2013)
  • Author(s): 東口 武史，大塚 崇光，鵜篭 照之，藤岡 慎介，西村 博明，鈴木 千尋，坂上 和之，鷲尾 方一，遠藤 彰
  • Journal Title: プラズマ・核融合学会誌 Volume: 89 Pages: 669-676
  • Peer Reviewed
• [Journal Article] Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas (2013)
  • Author(s): T. Makimura, 他14名
  • Journal Title: Optics Express Volume: vol.21 Pages: 31837-31845
  • DOI: 10.1364/oe.21.031837
  • Peer Reviewed
• [Journal Article] "Water window" sources : Selection based on the interplay of spectral properties and multilayer reflection bandwidth (2013)
  • Author(s): Bowen Li
  • Journal Title: Applied Physics Letters Volume: 102
  • DOI: 10.1063/1.4789982
  • Peer Reviewed
• [Journal Article] The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm (2012)
  • Author(s): Colm O’Gorman, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Thomas Cummins, Padraig Dunne, Emma Sokell, Gerry OSullivan, and Takeshi Higashiguchi
  • Journal Title: Applied Physics Letters Volume: 100 Pages: 141108-141108
  • DOI: 10.1063/1.3701593
  • Peer Reviewed
• [Journal Article] Characteristics of argon plasma waveguide produced by alumina capillary discharge for short wavelength laser application (2012)
  • Author(s): Takeshi Higashiguchi, Nadezhda Bobrova, Pavel Sasorov, Shohei Sakai, Yasuhiko Sentoku, Ryosuke Kodama and Noboru Yugami
  • Journal Title: Journal of Applied Physics Volume: 093302 Pages: 93302-93302
  • DOI: 10.1063/1.4712038
  • Peer Reviewed
• [Journal Article] Investigation of Gd and Tb Plasmas for Beyond Extreme Ultraviolet Lithography Based on Multilayer Mirror Performance (2012)
  • Author(s): B. Li, T. Otsuka, T. Higashiguchi, N. Yugami, W. Jiang, A. Endo, P. Dunne, and G. O'Sullivanl
  • Journal Title: Applied Physics Letters Volume: 101 Pages: 13112-13112
  • DOI: 10.1063/1.4732791
  • Peer Reviewed
• [Journal Article] Analysis of tungsten laser produced plasmas in the extreme ultraviolet (EUV) spectral region (2012)
  • Author(s): Colm S Harte
  • Journal Title: Journal of Physics B Volume: 45
  • DOI: 10.1088/0953-4075/45/20/205002
  • Peer Reviewed
• [Journal Article] XUV spectra of laser-produced zirconium plasma (2012)
  • Author(s): Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
  • Journal Title: Journal of Physics B Volume: 45
  • DOI: 10.1088/0953-4075/45/24/245004
  • Peer Reviewed
• [Presentation] 光パラメトリック中赤外レーザーの開発 (2015)
  • Author(s): 川崎 将人，ヂン タンフン，笹沼 淳史，藤井 雄介，三浦 泰祐，東口 武史
  • Organizer: 第15回レーザー学会東京支部研究会
  • Place of Presentation: 東海大学高輪キャンパス
  • Year and Date: 2015-03-05
• [Presentation] 高効率EUV光源のための短パルスCO2レーザーの開発 (2015)
  • Author(s): 笹沼 淳史，ヂン タンフン，荒居 剛己，藤井 雄介，南都 健一郎，中村 大輔，髙橋 昭彦，岡田 龍雄，三浦 泰祐，東口 武史
  • Organizer: 第15回レーザー学会東京支部研究会
  • Place of Presentation: 東海大学高輪キャンパス
  • Year and Date: 2015-03-05
• [Presentation] レーザー生成マイクロプラズマによる高輝度EUV光源の放射特性 (2015)
  • Author(s): 荒居 剛己，原 広行，ヂン タンフン，砂原 淳，三浦 泰祐，遠藤 彰，東口 武史
  • Organizer: 第15回レーザー学会東京支部研究会
  • Place of Presentation: 東海大学高輪キャンパス
  • Year and Date: 2015-03-05
• [Presentation] プラズマEUV光源の高効率化とその応用 (Efficient plasma EUV source and its applicatio (2014)
  • Author(s): 東口 武史 (Takeshi Higashiguchi)
  • Organizer: Plasma Conference 2014 (Plasma 2014
  • Place of Presentation: 朱鷺メッセ
  • Year and Date: 2014-11-21
  • Invited
• [Presentation] LHDプラズマを用いた高Z元素多価イオンのEUV分光と原子モデルの構築 (EUV Spectroscopy and Atomic Model of Highly Charged Ions of High Z Elements Using LHD Plasmas) (2014)
  • Author(s): 鈴木 千尋，村上 泉，小池 文博，田村 直樹，須藤 滋，坂上 裕之，中村 信行，森田 繁，後藤 基志，加藤 太治，仲野 友英，東口 武史，Colm S. Harte，Gerry O'Sullivan
  • Organizer: Plasma Conference 2014 (Plasma 2014
  • Place of Presentation: 朱鷺メッセ
  • Year and Date: 2014-11-21
  • Invited
• [Presentation] Welcome and Overview of recent work on soft-ray emission spectroscopy (2014)
  • Author(s): Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
  • Organizer: ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-06
  • Invited
• [Presentation] Tunable extreme ultraviolet and soft x-ray narrowband sources with laser produced high-Z plasmas (2014)
  • Author(s): Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Nobuyuki Nakamura, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
  • Organizer: ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-06
• [Presentation] Recent progress in Utsunomiya University: Development of compact, 10-Hz short pulse CO2 laser system for EUV & soft x-ray sources (2014)
  • Author(s): Takeshi Higashiguchi
  • Organizer: ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-06
  • Invited
• [Presentation] Sources for Water Window Imaging (2014)
  • Author(s): Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-05
  • Invited
• [Presentation] Efficient EUV sources by short CO2 laser-produced plasmas (2014)
  • Author(s): Reiho Amano, Thanh Hung Dinh, Masato Kawasaki, Atsushi Sasanuma, Yuhei Suzuki, Takeshi Higashiguchi, and Taisuke Miura
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] A microplasma high-brightness EUV source at 13.5 nm (2014)
  • Author(s): Goki Arai, Hiroyuki Hara, Yuhei Suzuki, Thanh Hung Dinh, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Radiation hydrodynamic simulation of a high-brightness 13.5-nm EUV microplasma (2014)
  • Author(s): Hiroyuki Haya, Goki Arai, Takanori Miyazaki, Thanh-Hung Dinh, Takeshi Higashiguchi, and Atsushi Sunahara
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Quasi-Moseley’s law for UTA spectra in high-Z highly ion charge states for high power EUV & soft x-ray sources (2014)
  • Author(s): Yuhei Suzuki, Goki Arai, Takanori Miyazaki, Thanh-Hung Dinh, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Possibility of high-Z plasma water window sources (2014)
  • Author(s): Takanori Miyazaki, Yuhei Suzuki, Thanh Hung Dinh, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Characteristics of soft x-ray emission from optically thin high-Z plasmas in Large Helical Device (2014)
  • Author(s): Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Systematic observation of EUV spectra from heavy ions in optically thin and thick plasmas (2014)
  • Author(s): Chihiro Suzuki, Fumihiro Koike, Takeshi Higashiguchi, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Elgiva White, John Sheil, Elaine Long, Fergal O’Reilly, Emma Sokell, Padraig Dunne, and Gerard O’Sullivan
  • Organizer: 9th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA)
  • Place of Presentation: University of Jena
  • Year and Date: 2014-09-22
  • Invited
• [Presentation] Sources for beyond extreme ultraviolet lithography and water window imaging (2014)
  • Author(s): Gerry O'Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasania, Elaine Long, Hayato Ohashi, Fergal O'Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
  • Organizer: 9th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA)
  • Place of Presentation: University of Jena
  • Year and Date: 2014-09-22
  • Invited
• [Presentation] 重元素プラズマによるEUV・軟X線光源開発 (2014)
  • Author(s): 東口 武史
  • Organizer: 2014年度 原子分子データ応用フォーラムセミナ
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-09-12
• [Presentation] Tunable narrowband soft x-ray sources with laser-produced high-Z plasmas (2014)
  • Author(s): Hayato Ohashi, Hiroaki Ito, Yuhei Suzuki, Goki Arai, Bowen Li, Gerry O’Sullivan, Fumihiro Koike, Chihiro Suzuki, and Takeshi Higashiguchi
  • Organizer: 5th Euro-Arian Pulsed Power Conference (EAPPC 2014)
  • Place of Presentation: Kumamoto University
  • Year and Date: 2014-09-10
• [Presentation] 重元素による高効率EUV・軟X線プラズマ光源とその応用 (2014)
  • Author(s): 東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
  • Invited
• [Presentation] 高輝度EUV光源プラズマの放射流体数値解析 (2014)
  • Author(s): 原 広行，荒居 剛己，鈴木 悠平，廣瀬 僚一，三浦 泰祐，遠藤 彰，ROY Amitava, MOCEK Tomas, 東口 武史，砂原 淳
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] 重元素プラズマUTA光源の原子番号依存性 (2014)
  • Author(s): 鈴木 悠平，大橋 隼人，荒居 剛己，宮崎 孝基，LI Bowen，DUNNE Padraig，O’SULLIVAN Gerry，鈴木 千尋，田村 直樹，須藤 滋，坂上 裕之，加藤 大治，村上 泉，小池 文博，東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] 光パラメトリック法によるサブナノ秒中赤外レーザーの開発 (2014)
  • Author(s): 川崎 将人，笹沼 淳史，藤井 雄介，天野 玲保，三浦 泰祐，遠藤 彰，MOCEK Tomas，東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] 高効率EUV光源用炭酸ガスレーザー再生増幅器の開発 (2014)
  • Author(s): DINH Thanh Hung，天野 玲保，笹沼 淳史，川崎 将人，藤井 雄介，高橋 昭彦，中村 大輔，岡田 龍雄，三浦 泰祐，遠藤 彰，MOCEK Tomas，東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] Laser-produced multi-charged heavy ions as efficent soft x-ray sources (2014)
  • Author(s): Takeshi Higashiguchi
  • Organizer: The 5th China-Japan-Korea Joint Seminar on Atomic and Molecular Processes in Plasma (AMPP2014)
  • Place of Presentation: Northwest Normal University
  • Year and Date: 2014-07-31
  • Invited
• [Presentation] 『水の窓』波長域のレーザー生成プラズマ光源の開発 (2014)
  • Author(s): 東口 武史
  • Organizer: 「軟X線による細胞内形態解析」研究会
  • Place of Presentation: 宮城蔵王ロイヤルホテル
  • Year and Date: 2014-07-26
• [Presentation] 重元素によるレーザー生成多価イオンプラズマ光源とその応用 (2014)
  • Author(s): 東口 武史
  • Organizer: 多摩シンポジウム～Tokyo-EBIT 20周年に向けて～
  • Place of Presentation: 電気通信大学
  • Year and Date: 2014-07-05
  • Invited
• [Presentation] Radiation hydrodynamic simulation of a high-brightness 13.5-nm EUV microplasma by use of a dot target (2014)
  • Author(s): Hiroyuki Hara, Goki Arai, Yuhei Suzuki, Hayato Ohashi, Takeshi Higashiguchi, and Atsushi Sunahara
  • Organizer: Photomask Japan 2014
  • Place of Presentation: Pacifico Yokohama
  • Year and Date: 2014-04-15
• [Presentation] Beyond extreme ultraviolet sources for next generation lithography (2014)
  • Author(s): Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Goki Arai, and Hayato Ohashi
  • Organizer: Photomask Japan 2014
  • Place of Presentation: Pacifico Yokohama
  • Year and Date: 2014-04-15
• [Presentation] Investigation of laser produced high-Z plasma soft X-ray sources (2013)
  • Author(s): Takamitsu Otsuka, Padraig Dunne, Gerry O’Sullivan, Takeshi Higashiguchi, and Noboru Yugami
  • Organizer: IEEE Pulsed Power & Plasma Science
  • Place of Presentation: Hyatt Regency, San Francisco, California
• [Presentation] Recent progress in source development in the extreme ultraviolet for lithography and water window imaging (2013)
  • Author(s): Gerry O’Sullivan, Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Bowen Li, Imam Kambali, Akira Endo, Fergal O’Reilly, and Deirdre Kilbane
  • Organizer: 11th EUROPEAN CONFERENCE ON ATOMS, MOLECULES AND PHOTONS (ECAMP11)
  • Place of Presentation: Aarhus University, Aarhus, Denmark
  • Invited
• [Presentation] EUV spectroscopy of highly charged high Z ions in the Large Helical Device plasmas (2013)
  • Author(s): C. Suzuki, F. Koike, I. Murakami, N. Tamura, S. Sudo, H. A. Sakaue, N. Nakamura, S. Morita, M. Goto, D. Kato, T. Nakano, T. Higashiguchi, C. S. Harte, G. O’Sullivan
  • Organizer: 11th International Colloquium on Atomic Spectra and Oscillator Strengths for Astrophysical and Laboratory Plasmas (ASOS-11)
  • Place of Presentation: University of Mons, Mons, Belgium
  • Invited
• [Presentation] パルスエネルギーによるBEUV～水の窓軟X線光源 (2013)
  • Author(s): 東口 武史
  • Organizer: 核融合科学研究所研究会「パルスパワー技術による高エネルギー密度プラズマ」
  • Place of Presentation: 核融合科学研究所
• [Presentation] 高原子番号元素による軟X線光源の放射特性 (2013)
  • Author(s): 東口 武史，大塚 崇光，Padraig Dunne, Gerry O’Sullivan
  • Organizer: 電気学会，プラズマ パルスパワー 放電 合同研究会
  • Place of Presentation: まちなかキャンパス長岡
• [Presentation] Dynamics of the ultrashort laser pulse in a capillary discharge-preformed argon plasma channel (2012)
  • Author(s): Takeshi Higashiguchi, Nadezhda Bobrova, Shohei Sakai, Noboru Yugami, Yasuhiko Sentoku, and Ryosuke Kodama
  • Organizer: International Conference on High Energy Density Sciences 2012 (HEDS2012)
  • Place of Presentation: Pacifico Yokohama
• [Presentation] Fundamental Property of 6.X-nm EUV Emission (2012)
  • Author(s): Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Thomas Cummins, Colm O’Gorman, Bowen Li, Deirdre Kilbane, Padraig Dunne, Gerry O’Sullivan, Weihua Jiang, and Akira Endo
  • Organizer: 2012 International Workshop on EUV Lithography
  • Place of Presentation: Sheraton Maui Resort
  • Invited
• [Presentation] Investigating the Effects of Laser Power Density, Pulse Duration and Viewing Angle on a 6.7nm BEUV Source (2012)
  • Author(s): Colm O'Gorman, Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, and Takeshi Higashiguchi
  • Organizer: 2012 International Workshop on EUV Lithography
  • Place of Presentation: Sheraton Maui Resort
• [Presentation] 次世代リソグラフィーのためのBeyond EUV 光源 (2012)
  • Author(s): 大塚 崇光，東口 武史，湯上 登，江 偉華，遠藤 彰，DUNNE Padraig，O’SULLIVAN Gerry
  • Organizer: 次世代リソグラフィー技術研究会
  • Place of Presentation: 東京工業大学蔵前会館
• [Presentation] Efficient “water window” soft x-ray high-Z plasma source (2012)
  • Author(s): Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
  • Organizer: The 11th International Conference on X-ray Microscopy (XRM2012)
  • Place of Presentation: The Hope Hotel (Shanghai, China)
• [Presentation] レーザー生成プラズマ極端紫外（EUV）光源の放射特性 (2012)
  • Author(s): 東口 武史
  • Organizer: 2012年秋季 第73回応用物理学会学術講演会シンポジウム「高強度XUV～X線ビームの発生とその応用」
  • Place of Presentation: 愛媛大学城北地区
  • Invited
• [Presentation] 高原子番号物質を用いる極端紫外光源の研究 (2012)
  • Author(s): 大塚 崇光，東口 武史， 江 偉華，遠藤 彰，湯上 登，DUNNE Padraig，O’SULLIVAN Gerry
  • Organizer: 2012年秋季 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学城北地区
• [Presentation] 多価イオンからの軟 X 線放射 (2012)
  • Author(s): 大塚 崇光，東口 武史，江 偉華，湯上 登，遠藤 彰，DUNNE Padraig, O'Sullivan Gerry
  • Organizer: レーザー学会，第432回研究会
  • Place of Presentation: 足利まちなか遊学館
• [Presentation] Characteristics of 6.X-nm Beyond EUV sources (2012)
  • Author(s): Takeshi Higashiguchi
  • Organizer: 2012 International Symposium on Extreme Ultraviolet Lithography
  • Place of Presentation: SQUARE Brussels Meeting Centre
• [Presentation] Possibility of High-Z Plasma Water Window Sources (2012)
  • Author(s): Takeshi Higashiguchi
  • Organizer: 2012 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
• [Presentation] Plasma-based UTA Emission in BEUV & Water Window Spectral Regions (2012)
  • Author(s): Takeshi Higashiguchi
  • Organizer: 2012 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Invited
• [Presentation] 高原子番号物質プラズマによるUTA EUV光源 (2012)
  • Author(s): 東口 武史
  • Organizer: 2012年度 原子分子データ応用フォーラムセミナー
  • Place of Presentation: 核融合科学研究所
• [Presentation] 高原子番号元素による軟X線光源の放射特性
  • Author(s): 東口 武史，大塚 崇光，Padraig Dunne, Gerry O’Sullivan
  • Organizer: 電気学会，プラズマ パルスパワー 放電 合同研究会
  • Place of Presentation: まちなかキャンパス長
• [Presentation] Progress in Laser-Plasma Sources - 13.5 nm & Beyond
  • Author(s): Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Bowen Li, Colm O’Gorman, Thomas Cummings, Patrick Hayden, Tony Donnelly, Fergal O’Reilly, and Gerry O’Sullivan
  • Organizer: 2013 International Workshop on EUV Lithography
  • Place of Presentation: Makena Beach Golf Resort, Maui, Hawaii
  • Invited
• [Presentation] Beyond Extreme Ultra Violet (BEUV) Radiation from Spherically symmetrical High-Z plasmas
  • Author(s): Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryouichi Hirose, Takeo Ejima, Hayato Ohashi, Masaharu Nishikino, Enda Scally, Hiroaki Nshimura, Hiroshi Azechi, and Gerard O’Sullivan
  • Organizer: The Eighth International Conference on Inertial Fusion Sciences and Applications (IFSA2013)
  • Place of Presentation: Nara Prefectural New PublicHall, Japan
• [Presentation] Characteristics of extreme ultraviolet emission from high-Z plasmas
  • Author(s): Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Chihiro Suzuki, Kentaro Tomita, Masaharu Nishikino, Shinsuke Fujioka, Akira Endo, Bowen Li, Takamitsu Otsuka, Padraig Dunne, and Gerry O’Sullivan
  • Organizer: The Eighth International Conference on Inertial Fusion Sciences and Applications (IFSA2013)
  • Place of Presentation: Nara Prefectural New PublicHall, Japan
• [Presentation] 高輝度EUV光源用ドットターゲットの開発
  • Author(s): 東口 武史，廣瀬 僚一，鈴木 悠平，川崎 将人，砂原 淳，遠藤 彰
  • Organizer: 2013年秋季 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学京田辺キャンパス
• [Presentation] 水の窓・炭素の窓領域のレーザー生成プラズマ軟X線光源の放射特性
  • Author(s): 東口 武史，鈴木 悠平，川崎 将人，大谷 幸利，谷田貝 豊彦，Bowen Li，Padraig Dunne，Gerry O'sullivan
  • Organizer: 2013年秋季 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学京田辺キャンパス
• [Presentation] 球対称BEUV放射プラズマの電子密度計測
  • Author(s): 鵜篭 照之，吉田 健祐，錦野 将元，藤岡 慎介，西村 博明，東口 武史，江島 丈雄，富田 健太郎，鈴木 千尋，大橋 隼人，田中 のぞみ，疇地 宏，鈴木 悠平，川崎 将人，廣瀬 僚一
  • Organizer: 2013年秋季 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学京田辺キャンパス
• [Presentation] 球対称ガドリニウムプラズマからのB-EUV放射特性とスペクトル特性
  • Author(s): 吉田 健祐，藤岡 慎介，鵜篭 照之，田中 のぞみ，西村 博明，東口 武史，鈴木 悠平，川崎 将人，江島 丈雄，廣瀬 僚一，富田 健太郎，鈴木 千尋，大橋 隼人，錦野 将元，疇地 宏
  • Organizer: 2013年秋季 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学京田辺キャンパス
• [Presentation] Characteristics of 6.X-nm Beyond EUV sources
  • Author(s): Takeshi Higashiguchi, Takamitsu Otsuka, Thomas Cummins, Colm O’Gorman, Bowen Li, Deirdre Kilbane, Padraig Dunne, Gerry O'Sullivan, Weihua Jiang, and Akira Endo
  • Organizer: 2013 International Symposium on Extreme Ultraviolet Lithography
  • Place of Presentation: Toyama International Conference Center
• [Presentation] Fundamental properties of the beyond EUV source
  • Author(s): Takeshi Higashiguchi, Hayato Ohashi, Yuhei Suzuki, Masato Kawasaki, Bowen Li, Deirdre Kilbane, Padraig Dunne, Gerry O’Sullivan, Weihua Jiang, and Akira Endo
  • Organizer: 2013 International Symposium on Extreme Ultraviolet Lithography
  • Place of Presentation: Toyama International Conference Center
• [Presentation] Microplasma high-brightness EUV source at 13.5 nm
  • Author(s): Takeshi Higashiguchi, Yoichi Hirose, Hayato Ohashi, Yuhei Suzuki, Masato Kawasaki, Hiroyuki Hara, Atsushi Sunahara, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
  • Organizer: 2013 International Symposium on Extreme Ultraviolet Lithography
  • Place of Presentation: Toyama International Conference Center
• [Presentation] Optimising emission from EUV sources
  • Author(s): Gerry O’Sullivan, Bowen Li, Takeshi Higashiguchi, Thomas Cummins, Padraig Dunne, Paddy Hayden, Deirdre Kilbane, Imam Kambali, Colm O’Gorman, Hayato Ohashi, Takamitsu Otsuka, Chihiro Suzuki, Emma Sokell, Noboru Yugami, Sergey Zakharov, Vasily Zakharov
  • Organizer: レーザー学会，第450回研究会
  • Place of Presentation: 早稲田大学西早稲田キャンパス
  • Invited
• [Presentation] 球対称プラズマを用いたBEUV光源データベースの構築
  • Author(s): 吉田 健祐，藤岡 慎介，東口 武史，鵜篭 照之，田中 のぞみ，川崎 将人，鈴木 悠平，鈴木 千尋，富田 健太郎，廣瀬 僚一，江島 丈雄，大橋 隼人，錦野 将元，Enda Scally, Gerard O'Sullivan，西村 博明，畦地 宏
  • Organizer: レーザー学会，第450回研究会
  • Place of Presentation: 早稲田大学西早稲田キャンパス
• [Presentation] 重元素プラズマによる短波長光源
  • Author(s): 東口 武史
  • Organizer: レーザー学会，第450回研究会
  • Place of Presentation: 早稲田大学西早稲田キャンパス
• [Presentation] 電子ビームイオントラップを用いたプラズマ光源関連イオンのEUV分光
  • Author(s): 大橋 隼人，東口 武史，坂上 裕之，中村 信行
  • Organizer: レーザー学会，第450回研究会
  • Place of Presentation: 早稲田大学西早稲田キャンパス
• [Presentation] Homework for table-top, efficiency, high-brightness high-Z plasma EUV-soft x-ray sources for in vivo bio-imaging applications
  • Author(s): Takeshi Higashiguchi
  • Organizer: Ireland Japan Collaboration Workshop
  • Place of Presentation: University College Dublin
  • Invited
• [Presentation] Observations of EUV Spectra from Highly Charged Heavy Ions in Optically Thin Plasmas for Benchmarking of Models
  • Author(s): Chihiro Suzuki, Fumihiro Koike, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Takeshi Higashiguchi, Gerry O'Sullivan
  • Organizer: 2013 International Workshop on EUV and Soft X-Ray Sources,
  • Place of Presentation: University College Dublin
  • Invited
• [Presentation] Fundamental Atomic Process in Source Development for Beyond EUV Lithography and “Water Window” Imaging
  • Author(s): Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Emma Sokell, Padraig Dunne, and Gerry O’Sullivan
  • Organizer: 2013 International Workshop on EUV and Soft X-Ray Sources,
  • Place of Presentation: University College Dublin
• [Presentation] Efficient Light Sources at BEUV & Water Window Soft X-ray Wavelengths
  • Author(s): Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Hayato Ohashi 他
  • Organizer: 2013 International Workshop on EUV and Soft X-Ray Sources,
  • Place of Presentation: University College Dublin
  • Invited
• [Presentation] プラズマ光源関連イオンの EBIT による分光測定
  • Author(s): 金原達彦，岸良子文，大橋隼人，東口武史，中村信行
  • Organizer: 原子衝突学会第38回年会
  • Place of Presentation: 理化学研究所 (和光) 鈴木梅太郎記念ホール
• [Presentation] Feasibility study of efficient high-Z plasma soft x-ray sources
  • Author(s): Takeshi Higashiguchi
  • Organizer: The 12th Symposium on X-ray Imaging Optics
  • Place of Presentation: Osaka University Nakanoshima Center
  • Invited
• [Presentation] 球対称プラズマを用いたBEUV光源データベースの構築
  • Author(s): 吉田 健祐，藤岡 慎介，東口 武史，鵜篭 照之，田中 のぞみ，大橋 隼人，川崎 将人，鈴木 悠平，鈴木 千尋，富田 健太郎，廣瀬 僚一，江島 丈雄，錦野 将元，Enda Scally，西村 博明，疇地 宏，Gerard O’Sullivan
  • Organizer: レーザー励起X線源とその応用研究会
  • Place of Presentation: 日本原子力研究開発機構敦賀本部アトムホール
• [Presentation] レーザー生成プラズマEUV光源プラズマの放射特性
  • Author(s): 東口 武史，鈴木 悠平，川崎 将人，大橋 隼人
  • Organizer: レーザー学会，第455回研究会
  • Place of Presentation: 日本原子力研究開発機構敦賀本部アトムホール
• [Presentation] 重元素プラズマ軟X線光源の放射特性
  • Author(s): 東口 武史，大橋 隼人，鈴木 悠平，川崎 将人
  • Organizer: レーザー学会，第456回研究会
  • Place of Presentation: 大阪大学レーザーエネルギー学研究センター
• [Presentation] 炭酸ガスレーザー生成希土類プラズマ光源の放射特性
  • Author(s): 東口 武史，鈴木 悠平，川崎 将人，大橋 隼人，中村 大輔，髙橋 昭彦，岡田 龍雄，鳥井 周一，牧村 哲也
  • Organizer: レーザー学会創立40周年記念学術講演会 第34回年次大会
  • Place of Presentation: 北九州国際会議場
• [Presentation] 水の窓軟X線光源としての重元素希薄プラズマの放射特性
  • Author(s): 大橋 隼人，鈴木 悠平，川崎 将人，荒居 剛己，東口 武史，大谷 幸利，谷田貝 豊彦，鈴木 千尋，村上 泉，田村 直樹，須藤 滋，小池 文博，Gerry O'Sullivan
  • Organizer: 第61回応用物理学関係連合講演会
  • Place of Presentation: 青山学院大学相模原キャンパス
• [Presentation] 球対称プラズマを用いたBEUV光源データベースの構築
  • Author(s): 吉田 健祐，藤岡 慎介，東口 武史，江島 丈雄，錦野 将元，Enda Scally，鈴木 悠平，大橋 隼人，鈴木 千尋，富田 健太郎，廣瀬 僚一，鵜篭 照之，田中 のぞみ，川崎 将人，Gerard O'Sullivan，西村 博明，疇地 宏
  • Organizer: 第61回応用物理学関係連合講演会
  • Place of Presentation: 青山学院大学相模原キャンパス
• [Presentation] レーザー生成プラズマUTA 放射光源の原子番号依存性
  • Author(s): 鈴木悠平，大橋隼人，荒居剛己，東口武史
  • Organizer: 第61回応用物理学関係連合講演会
  • Place of Presentation: 青山学院大学相模原キャンパス
• [Book] Extreme Ultraviolet Emission from Multi-Charged State Ions in Potassium Plasmas (2015)
  • Author(s): T. Higashiguchi, B. Li, R D'Arcy, P. Dunne and Gerry O'Sullivan
  • Total Pages: 10
  • Publisher: Royal Society of Chemistry
• [Book] 普及版「EUV光源の開発と応用」 (2013)
  • Author(s): 東口 武史，窪寺 昌一
  • Total Pages: 273
  • Publisher: シーエムシー出版