Time-resolved local-stress measurement of MEMS resonating structure using micro Raman spectroscopy
| Project/Area Number |
24656087
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Kyoto University |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 動的局所応力計測 / シリコン / 顕微ラマン分光 / 光チョッパー / 静電アクチュエータ / 振動子 / 時間分解応力測定 / 共振子 / マイクロマシン / 光チョッパ |
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| Research Abstract |
A pull-in type electrostatic optical chopper using silicon-on-glass (SOG) wafer was proposed, fabricated, and tested to develop time-resolved micro-Raman spectroscopy for measuring local dynamic stress of silicon micro-electro-mechanical system (MEMS) resonators. The moving mass of electrostatic actuator made of the silicon device layer of SOG wafer is used as an optical chopper. The silicon mass has many slits where the incident laser light penetrates. At the OFF-state, the penetrated light terminated at aluminum shields on the glass substrate. By actuating the mass by electrostatic parallel plate electrodes, the penetrated light goes through the chopper (ON-state). Inserting the chopper to the micro Raman spectroscope, time-resolved analysis will be realized. The mechanical and optical responses of the chopper were measured. The double-side-drive type of chopper has a response time of around 50 us, which is good enough for the application.
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Report
(3 results)
Research Products
(9 results)
