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Development of surface nanoprocessing techniques with femtosecond laser pulses

Research Project

Project/Area Number 24686011
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Applied optics/Quantum optical engineering
Research InstitutionTokyo University of Agriculture and Technology (2013-2014)
Kyoto University (2012)

Principal Investigator

MIYAJI Godai  東京農工大学, 工学(系)研究科(研究院), 准教授 (30378905)

Research Collaborator MIYAZAKI Kenzo  京都大学, 名誉教授 (50293957)
YASUMARU Naoki  福井工業高等専門学校, 機械工学科, 教授 (90158006)
KAPLAN Alexander E.  ジョンズホプキンス大学, 教授
REIF Jürgen  ブランデンブルグ工科大学, 教授
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥27,170,000 (Direct Cost: ¥20,900,000、Indirect Cost: ¥6,270,000)
Fiscal Year 2014: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2013: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2012: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Keywords光プロセッシング / フェムト秒レーザー / レーザーアブレーション / 表面プラズモンポラリトン / 光近接場 / レーザー加工 / ナノ構造 / 窒化ガリウム / 近接場
Outline of Final Research Achievements

I have studied the fundamental research on the control of the nanostructure formation on solid surfaces induced with femtosecond laser pulses, resulting in the formation of homogeneous nanograting with the size of 25 nm. The simple two-step ablation process has been developed to control the surface plasmon polaritons and the intense near fields on the target surfaces with the femtosecond laser pulses.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (42 results)

All 2015 2014 2013 2012

All Journal Article (11 results) (of which Peer Reviewed: 11 results,  Open Access: 1 results) Presentation (31 results) (of which Invited: 4 results)

  • [Journal Article] Periodic nanostructures on titanium dioxide film produced using femtosecond laser with wavelengths of 388 and 775 nm2014

    • Author(s)
      T. Shinonaga, M. Tsukamoto and G. Miyaji
    • Journal Title

      Optics Express

      Volume: Vol. 22, No. 12 Issue: 12 Pages: 14696-14704

    • DOI

      10.1364/oe.22.014696

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] フェムト秒レーザブレーションによる表面ナノ格子の作製2014

    • Author(s)
      宮地悟代, 宮崎健創
    • Journal Title

      レーザ加工学会誌

      Volume: 21 Pages: 74-79

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] フェムト秒レーザブレーションによる表面ナノ格子の作製2014

    • Author(s)
      宮地悟代,宮崎健創
    • Journal Title

      レーザ加工学会誌

      Volume: 印刷中

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanism and control of periodic surface nanostructure formation with femtosecond laser pulses2014

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Journal Title

      Appl. Phys. A

      Volume: Vol.114, No.1 Issue: 1 Pages: 177-185

    • DOI

      10.1007/s00339-013-8130-4

    • NAID

      120005587811

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Role of multiple shots of femtosecond laser pulses in periodic surface nanoablation2013

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Appl. Phys. Lett.

      Volume: Vol.103, No.7 Issue: 7

    • DOI

      10.1063/1.4818818

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanograting formation through surface plasmon fields induced by femtosecond laser pulses2013

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Journal Title

      J. Appl. Phys.

      Volume: Vol.114, No.15 Issue: 15

    • DOI

      10.1063/1.4826078

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultrafast Dynamic Processes for Periodic Surface Nanostructure Formation Induced with Femtosecond Laser Pulses2013

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Rev. Laser Eng.(Jpn)

      Volume: 41 Pages: 816-820

    • NAID

      130007897371

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] "Mechanism of femtosecondlaser - induced periodic nanostructure formation on crystalline silicon surface immersed in water2012

    • Author(s)
      G.Miyaji, K.Miyazaki, K.Zhang, T.Yoshifuji, and J.Fujita
    • Journal Title

      Opt. Express

      Volume: Vol.20, No.14 Issue: 14 Pages: 14848-14856

    • DOI

      10.1364/oe.20.014848

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanostructuring of Silicon Surfaces with Femtosecond-Laser-Induced Near-field2012

    • Author(s)
      G. Miyaji, K.Zhang, J. Fujita, and K. Miyazaki
    • Journal Title

      J. Laser Micro/Nanoengineering

      Volume: 7 Pages: 198-201

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Periodic nanostructure formation on silicon irradiated with multiple low-fluence femtosecond laser pulses in water2012

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Journal Title

      Phys. Proc.

      Volume: Vol.39 Pages: 674-682

    • DOI

      10.1016/j.phpro.2012.10.088

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanograting fabricated with femtosecond laser pulses2012

    • Author(s)
      G. Miyaji and K. Miyazaki
    • Journal Title

      SPIE Newsroom

      Volume: 24 October Pages: 1-3

    • DOI

      10.1117/2.1201210.004516

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] フェムト秒レーザーの非熱的相互作用によるSi表面でのナノ周期構造形成2015

    • Author(s)
      宮地 悟代,宮崎健創
    • Organizer
      第82回レーザ加⼯学会講演会
    • Place of Presentation
      産業技術総合研究所 臨海副都心センター
    • Year and Date
      2015-01-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] フェムト秒レーザー誘起表面ナノ周期構造生成の超高速ダイナミクス2015

    • Author(s)
      宮地 悟代,宮崎健創
    • Organizer
      レーザー学会学術講演会第35回年次大会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-01-11
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Controlling Periodic Nanostructure Formation on Metal Surfaces with Femtosecond Laser Pulses2014

    • Author(s)
      K.Miyazaki, G.Miyaji, and T.Inoue
    • Organizer
      ICPEPA-9
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      2014-10-01
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabrication of Nanograting with Plasmonic Near-field induced by Ultraviolet Femtosecond Laser Pulses2014

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Organizer
      ICPEPA-9
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      2014-09-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] フェムト秒レーザー誘起表面プラズモンポラリトンによる金属表面のナノ格子形成2014

    • Author(s)
      宮地 悟代,井上俊茂,宮崎 健創
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] フェムト秒レーザーアブレーションによるナノ格子創製2014

    • Author(s)
      宮崎 健創,宮地 悟代
    • Organizer
      LSJ第465回研究会「レーザー応用」&九州支部学生講演会
    • Place of Presentation
      休暇村 指宿
    • Year and Date
      2014-09-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] Nanograting Formation with Ultraviolet Femtosecond Laser Ablation2014

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Organizer
      LPM2014
    • Place of Presentation
      Vilnius, Lithuania
    • Year and Date
      2014-06-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Mechanism of Femtosecond-Laser-Induced Periodic Nanostructure Formation on Metal Surface2014

    • Author(s)
      K.Miyazaki, G.Miyaji, and T.Inoue
    • Organizer
      LPM2014
    • Place of Presentation
      Vilnius, Lithuania
    • Year and Date
      2014-06-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] フェムト秒レーザー誘起表面プラズモンポラリトンによるナノ格子生成2014

    • Author(s)
      宮地悟代,宮崎健創
    • Organizer
      レーザー学会学術講演会第34回年次大会
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] フェムト秒レーザーアブレーションによる金属表面のナノ格子形成過程2014

    • Author(s)
      井上俊茂,宮地 悟代,宮崎健創
    • Organizer
      レーザー学会学術講演会第34回年次大会
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2013 Annual Research Report
  • [Presentation] CEP制御サイクルレーザーパルスによる 高次高調波発生特性2014

    • Author(s)
      木村 誠,宮地 悟代,宮崎 健創
    • Organizer
      レーザー学会学術講演会第34回年次大会
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2013 Annual Research Report
  • [Presentation] フェムト秒レーザーアプレーションによるGaN表面のナノ格子形成過程2013

    • Author(s)
      宮地悟代, 宮崎健創
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-29
    • Related Report
      2012 Annual Research Report
  • [Presentation] Role of Multiple Shots of Femtosecond Laser Pulses in Periodic Nanostructure Formation on Silicon Surface2013

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Organizer
      CLEO Europe-EQEC 2013
    • Place of Presentation
      Munich, Germany
    • Related Report
      2013 Annual Research Report
  • [Presentation] Nanograting Imprinted with Femtosecond-Laser-Induced Plasmonic Near-Field2013

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Organizer
      CLEO Europe-EQEC 2013
    • Place of Presentation
      Munich, Germany
    • Related Report
      2013 Annual Research Report
  • [Presentation] Patterning of a homogeneous periodic nanostructure with femtosecond laser pulses2013

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Organizer
      International Symposium on Nanoscale Pattern Formation at Surfaces
    • Place of Presentation
      Copenhagen, Denmark
    • Related Report
      2013 Annual Research Report
  • [Presentation] Imprinting of a Homogeneous Nanograting with Femtosecond Laser Ablation2013

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Organizer
      CLEO-PR 2013
    • Place of Presentation
      京都国際会館
    • Related Report
      2013 Annual Research Report
  • [Presentation] Effect of Superimposed Multiple Shots of Femtosecond Laser Pulses on Periodic Surface Nanoablation2013

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Organizer
      CLEO-PR 2013
    • Place of Presentation
      京都国際会館
    • Related Report
      2013 Annual Research Report
  • [Presentation] Effect of Multiple Shots of Femtosecond Laser Pulses on Periodic Surface Nanostructuring2013

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Organizer
      LAMP2013
    • Place of Presentation
      朱鷺メッセ, 新潟
    • Related Report
      2013 Annual Research Report
  • [Presentation] Imprinting of Nanogratings with Femtosecond-Laser-Induced Surface Plasmon Polaritons2013

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Organizer
      LAMP2013
    • Place of Presentation
      朱鷺メッセ, 新潟
    • Related Report
      2013 Annual Research Report
  • [Presentation] Role of Multiple Shots of Low-fluence Pulses in Femtosecond-laser-induced Periodic Surface Nanostruture Formation2013

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Organizer
      PIERS2013
    • Place of Presentation
      Stockholm, Sweden
    • Related Report
      2013 Annual Research Report
  • [Presentation] Direct Patterning of a Nanograting with Femtosecond Laser Pulses2013

    • Author(s)
      K.Miyazaki and G.Miyaji
    • Organizer
      PIERS2013
    • Place of Presentation
      Stockholm, Sweden
    • Related Report
      2013 Annual Research Report
  • [Presentation] 紫外フェムト秒レーザーアブレーションによるナノ格子形成2013

    • Author(s)
      宮地悟代,宮崎健創
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] フェムト秒レーザーアブレーションによるステンレス鋼表面の ナノ格子形成過程2013

    • Author(s)
      井上俊茂,宮地悟代,宮崎健創
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] CEP安定化5 fsレーザーパルスによる高次高調波発生2013

    • Author(s)
      木村誠,宮地悟代,野口恭史,宮崎健創
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] フェムト秒レーザーアブレーションによるGaN表面のナノ格子生成2013

    • Author(s)
      宮地悟代,宮崎健創
    • Organizer
      第80回レーザ加⼯学会講演会
    • Place of Presentation
      東京大学生産研
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Periodic nanostructures formed on silicon surface with femtosecond laser pulses2012

    • Author(s)
      K. Miyazaki and G. Miyaji
    • Organizer
      LANE 2012
    • Place of Presentation
      Stadthalle Filrth (ドイツ)(招待講演)
    • Year and Date
      2012-11-15
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ultrafast Dynamics of Periodic Nano-pattern Formation with Femtosecond Laser Pulses2012

    • Author(s)
      K. Miyazaki and G. Miyaji
    • Organizer
      IUMRS-ICEM 2012
    • Place of Presentation
      パシフィコ横浜(神奈川県)(招待講演)
    • Year and Date
      2012-09-13
    • Related Report
      2012 Annual Research Report
  • [Presentation] フェムト秒レーザーによるGaN表面のナノ格子生成2012

    • Author(s)
      宮地悟代, 宮崎健創
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2012-09-12
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fabrication of Nanograting on GaN Surface with Femtosecond Laser Ablation2012

    • Author(s)
      G. Miyaji and K. Miyazaki
    • Organizer
      The 13th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      The Catholic University of America (Washirlgton, D.C., USA)
    • Year and Date
      2012-06-15
    • Related Report
      2012 Annual Research Report
  • [Presentation] Periodic Nanopattern Formation on Si with Femtosecond- Laser-Induced Surface Plasmon Polaritons2012

    • Author(s)
      K. Miyazaki and G. Miyaji
    • Organizer
      The 13th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      The Catholic University of America (Washirlgton, D.C., USA)
    • Year and Date
      2012-06-15
    • Related Report
      2012 Annual Research Report
  • [Presentation] Femtosecond-laser-induced Nanostructure Formed on Stainless Steel2012

    • Author(s)
      N.Yasumaru, E.Sentoku, K.Miyazaki, G.Miyaji, and J. Kiuchi
    • Organizer
      The 13th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      The Catholic University of America (Washirlgton, D.C., USA)
    • Year and Date
      2012-06-14
    • Related Report
      2012 Annual Research Report

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Published: 2012-04-24   Modified: 2019-07-29  

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