Production of meter-scale high density microwave plasma and elucisation of its physical mechanism

• Project/Area Number: 25286079
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Plasma electronics
• Research Institution: Nagoya University
• Principal Investigator: Toyoda Hirotaka 名古屋大学, 工学(系)研究科(研究院), 教授 (70207653)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000); Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2013: ¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
• Keywords: 大気圧プラズマ / マイクロ波 / 長尺プラズマ / 高密度プラズマ / 表面処理

Outline of Final Research Achievements

High density atmospheric pressure plasma with long scale is required for high-throughput surface treatment device of glass or polymer films.　　This study challenged to produce high density microwave plasma in a long scale slot using loop-structured cavity resonator without standing wave.　　Plasma production mechanism in the slot is clarified through this study and stable, uniform, long scale high density microwave plasma using molecular gas is successfully realized.

Research Products

• [Journal Article] Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave (2015)
  • Author(s): Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
  • Journal Title: Jpn. J. Appl. Phys. Volume: 55 Issue: 1S Pages: 01AH09-01AH09
  • DOI: 10.7567/jjap.55.01ah09
  • NAID: 210000146006
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] New line plasma source excited by 2.45 GHz microwave at atmospheric pressure (2015)
  • Author(s): Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
  • Journal Title: Appl. Phys. Express Volume: 8
  • NAID: 210000137441
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A Development of Atmospheric Pressure Plasma Equipment and Its Applications for Treatment of Ag Films Formed from Nano-Particle Ink (2013)
  • Author(s): H. Itoh, Y. Kubota, Y. Kashiwagi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, H. Toyoda and M. Hori
  • Journal Title: Journal of Physics : ConferenceSeries Volume: 441 Pages: 12019-12019
  • DOI: 10.1088/1742-6596/441/1/012019
  • Peer Reviewed
• [Presentation] スロット内生成マイクロ波プラズマを用いた高速プラズマCVD (2016)
  • Author(s): 山本 匡毅、鈴木 陽香、豊田 浩孝
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 （東京都目黒区）
  • Year and Date: 2016-03-19
• [Presentation] 大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性 (2015)
  • Author(s): 鈴木陽香, 中野優, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
  • Organizer: 第32回プラズマ・核融合学会 年会
  • Place of Presentation: 名古屋大学（愛知県・名古屋市）
  • Year and Date: 2015-11-26
• [Presentation] Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process (2015)
  • Author(s): HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HIROTAKA TOYODA
  • Organizer: 9th International Conference on Reactive Plasmas / 68rd Gaseous Electronics Conference / 33th Symposium on Plasma Processing
  • Place of Presentation: Hawaii Convention Center, Honolulu, Hawaii (U.S.A.)
  • Year and Date: 2015-10-14
  • Int'l Joint Research
• [Presentation] スロット内生成マイクロ波プラズマの基礎的検討 (2015)
  • Author(s): 山本 匡毅，鈴木 陽香，豊田 浩孝
  • Organizer: 平成27年度電気・電子・情報関係学会東海支部連合大会
  • Place of Presentation: 名古屋工業大学（愛知県・名古屋市）
  • Year and Date: 2015-09-29
• [Presentation] Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma (2015)
  • Author(s): Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県・名古屋市）
  • Year and Date: 2015-09-15
• [Presentation] Gas Temperature Measurement in Atmospheric-Pressure Microwave Line Plasmas (2015)
  • Author(s): HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
  • Organizer: ISPlasma2015/IC-PLANTS2015
  • Place of Presentation: Nagoya University (Nagoya, Japan)
  • Year and Date: 2015-03-30
• [Presentation] 大気圧マイクロ波ラインプラズマにおけるプラズマ挙動シミュレーション (2015)
  • Author(s): 鈴木 陽香，中野 優，伊藤 仁，関根誠，堀 勝，豊田 浩孝
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学 湘南キャンパス （神奈川県平塚市）
  • Year and Date: 2015-03-12
• [Presentation] 狭ギャップスロットアンテナを用いた大気圧ラインプラズマ生成 (2014)
  • Author(s): 中野優, 鈴木陽香, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
  • Organizer: Plasma Conference 2014
  • Place of Presentation: Toki Messe (Niigata, Japan)
  • Year and Date: 2014-11-19
• [Presentation] Plasma Science for Future Nanotechnology (2014)
  • Author(s): Hirotaka Toyoda
  • Organizer: The GRDC Symposium 2014
  • Place of Presentation: Konkuk University (Seoul, Korea)
  • Year and Date: 2014-11-11
  • Invited
• [Presentation] Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure (2014)
  • Author(s): Hirotaka Toyoda, Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine and Masaru Hori
  • Organizer: 67th Annual Gaseous Electronics Conference
  • Place of Presentation: Marriott City Center and Raleigh Convention Center (Raleigh, North Carolina, USA)
  • Year and Date: 2014-11-07
• [Presentation] プラズマ技術とその産業応用 (2014)
  • Author(s): 豊田 浩孝
  • Organizer: プラズマ技術講演会 第51回プラズマが拓くものづくり研究会
  • Place of Presentation: ポートメッセなごや（愛知県・名古屋市）
  • Year and Date: 2014-10-23
  • Invited
• [Presentation] Plasma movement mechanism in pseudo-continuous meter-scale atmospheric-pressure line plasma (2014)
  • Author(s): Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
  • Organizer: 第75回応用物理学会秋季学術講演会
  • Place of Presentation: 北海道大学（北海道・札幌市）
  • Year and Date: 2014-09-17
• [Presentation] Absorption Spectroscopy of Atomic Metal in Atmospheric-pressure Plasma with Electrolyte Solution Electrode
  • Author(s): H. Suzuki, T. Takaba, N. Takada and H. Toyoda
  • Organizer: Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
  • Place of Presentation: Sungkyunkwan University (Suwon, Korea)
• [Presentation] Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure
  • Author(s): H. Suzuki, S. Nakano, H. Itoh, M. Sekine, M. Hori, H. Toyoda
  • Organizer: 66th Annual Gaseous Electronics Conference
  • Place of Presentation: Westin Hotel (Princeton, New Jersey, USA)
• [Presentation] Meter-Scale Atmospheric-Pressure Microwave Plasma Using Sub-Millimeter-Gap Slot
  • Author(s): HIROTAKA TOYODA
  • Organizer: 66th Annual Gaseous Electronics Conference
  • Place of Presentation: Westin Hotel (Princeton, New Jersey, USA)
  • Invited
• [Presentation] Meter -Scale Production of Atmospheric Pressure Microwave Plasma by Travelling Waveby
  • Author(s): Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
  • Organizer: ICRP-8/SPP-3
  • Place of Presentation: Fukuoka Convention Center (Fukuoka, Japan)
• [Presentation] Production of high-density meter-length plasma with metal-covered slot antenna
  • Author(s): N. Takada, S. Kondo, S. Nakano, K. Sasai and H. Toyoda
  • Organizer: ICRP-8/SPP-3
  • Place of Presentation: Fukuoka Convention Center (Fukuoka, Japan)
• [Presentation] Production of High-Uniform Microwave Line Plasma at Atmospheric Pressure
  • Author(s): HARUKA SUZUKI, SUGURU NAKANO,HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
  • Organizer: ISPlasma2014/IC-PLANTS2014
  • Place of Presentation: Meijo University (Nagoya, Japan)
• [Presentation] Design of Meter-Scale Compact Microwave Antenna Structure by Electromagnetic Simulation
  • Author(s): SHOGO KONDO, KENSUKE SASAI, NORIHARU TAKADA AND HIROTAKA TOYODA
  • Organizer: ISPlasma2014/IC-PLANTS2014
  • Place of Presentation: Meijo University (Nagoya, Japan)
• [Presentation] Spatiotemporal Resolved Investigations of Atmospheric Pressure Line Plasma
  • Author(s): SUGURU NAKANO, HARUKA SUZUKI, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
  • Organizer: ISPlasma2014/IC-PLANTS2014
  • Place of Presentation: Meijo University (Nagoya, Japan)