| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
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| Outline of Final Research Achievements |
The piezoelectric vibration sensor suitable for a MEMS structure is required for application to the attitude control and navigation systems of moving objects such as vehicles or robots. As such a sensor, the new vibration sensor composed of the frequency-change-type two-axis acceleration sensor and the one-axis angular velocity sensor was proposed by the author. As the sensor can detect two output signals of acceleration and angular velocity individually, the interference between both signals is not observed and therefore signal-processing becomes quite easily.
In this study, the new two-axis acceleration sensor using a right-angled bending vibrator connected to the center of gravity of mass is proposed to reduce cross-axis sensitivity caused by rotation of mass of the sensor. The sensor characteristics with very small cross-axis sensitivity were realized and confirmed experimentally using the sample of trail production. The sensor is designed using the finite element analysis.
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