| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
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| Outline of Final Research Achievements |
Confronting divergent magnetic fields (CDMFs) divide an inductively coupled processing plasma into two parts of high and low plasma densities by suppressing electron diffusion. This effect was analyzed by computer simulations of electron motion.
The electron confinement by the separatrix of the CDMFs was confirmed to occur with electron capture by magnetic flux lines. In addition, it was found that a significant electron energy gain by the electron cyclotron resonance occurred even in a region far from the radio-frequency (rf) antenna used to drive the plasma.
The electron confinement worked well under strong magnetic fields, and the electron passage across the separatrix was energy-dependent. That across the outer separatrix tended to occur for high-energy electrons. On the other hand, that via the weak magnetic field (a magnetic aperture) inside the rf-resonant region was allowed even for low-energy electrons. An application of the separatrix as a magnetic shutter was proposed.
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