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Development of fundamental crystal growth technology of In-based nitride alloy semiconductors

Research Project

Project/Area Number 25706020
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Crystal engineering
Research InstitutionKogakuin University

Principal Investigator

Yamaguchi Tomohiro  工学院大学, 先進工学部, 准教授 (50454517)

Project Period (FY) 2013-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥23,400,000 (Direct Cost: ¥18,000,000、Indirect Cost: ¥5,400,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2014: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Fiscal Year 2013: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Keywords結晶成長 / 窒化物半導体 / InGaN / 分子線エピタキシー(MBE) / エピタキシャル成長 / 電子・電気材料 / 半導体物性 / MBE、エピタキシャル
Outline of Final Research Achievements

This research was focused on high-In composition In-based nitride semiconductors, and the development of fundamental crystal growth technologies, including the fabrication of high-quality crystal and the control of surface band structure, of these materials was carried out.
The pn-InGaN LED was fabricated utilizing growth technologies we obtained. Based on the problems of the characteristics of this LED, the growth mechanism of InGaN was further understood by introducing a novel monitoring technology during growth. The development of the fabrication technology of the buffer layer for the growth of InGaN, which is universal for entire alloy composition, was challengingly carried out. The comprehensive studies including physical properties for the InGaN films with entire alloy compositions we obtained were also carried out.

Report

(5 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (63 results)

All 2016 2015 2014 2013 Other

All Int'l Joint Research (1 results) Journal Article (2 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (56 results) (of which Int'l Joint Research: 13 results,  Invited: 19 results) Remarks (4 results)

  • [Int'l Joint Research] ジャウメ・アルメーラ研究所(スペイン)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Fabrication of Ag dispersed ZnO films by molecular precursor method and application in GaInN blue LED2016

    • Author(s)
      D. Taka, T. Onuma, T. Shibukawa, H. Nagai, T. Yamaguchi, J.-S. Jang, M. Sato, and T.Honda
    • Journal Title

      Physica Status Solidi (a)

      Volume: 214 Issue: 3 Pages: 16005981-5

    • DOI

      10.1002/pssa.201600598

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Effect of (GaN/AlN) alternating-source-feeding buffer layer in GaN growth on Al2O3 and silicon by RF-MBE2013

    • Author(s)
      T. Yamaguchi, D. Tajimi, M. Hayashi, T. Igaki, Y. Sugiura and T. Honda
    • Journal Title

      Physica Status Solidi C

      Volume: 11 Issue: 11 Pages: 1549-1552

    • DOI

      10.1002/pssc.201300399

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Growth and characterization of In2O3 on various substrates by mist CVD2016

    • Author(s)
      T. Kobayashi, K. Tanuma, T. Yamaguchi, T. Onuma, T. Honda
    • Organizer
      2016 Materials Research Society Fall Meeting & Exhibit(2016 MRS Fall Meeting)
    • Place of Presentation
      Boston, MA, USA
    • Year and Date
      2016-11-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-situ monitoring in RF-MBE growth of In-based nitrides2016

    • Author(s)
      T. Yamaguchi, T. Sasaki, M. Takahasi, T. Araki, T. Onuma, T. Honda, Y. Nanishi
    • Organizer
      The 15th International Symposium on Advanced Technology (ISAT-15)
    • Place of Presentation
      Taiwan
    • Year and Date
      2016-11-10
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Mist CVD Growth of IN2O32016

    • Author(s)
      T. Yamaguchi, T. Kobayashi, K. Tanuma, H. Nagai, T. Onuma, M. Sato, T. Honda
    • Organizer
      2016 international Symposium on Novel and Sustainable Technology (2016ISNST)
    • Place of Presentation
      Taiwan
    • Year and Date
      2016-10-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Surface and Bulk Electronic Structures of Heavily Mg-Doped InN Epilayer by Hard X-Ray Photoelectron Spectroscopy2016

    • Author(s)
      M. Imura, S. Tsuda, T. Nagata, A. Yang, Y. Yamashita, H. Yoshikawa, Y. Koide, K. Kobayashi, T. Yamaguchi, M. Kaneko, N. Uematsu, K. Wang, T. Araki, Y. Nanishi
    • Organizer
      International Workshop on Nitride Semiconductors (IWN 2016)
    • Place of Presentation
      Orlando, Florida, USA
    • Year and Date
      2016-10-02
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] RF-MBE Growth of InGaN Ternary Alloys Using in-situ Monitoring Techniques2016

    • Author(s)
      T. Yamaguchi, T. Sasaki, M. Takahasi, T. Araki, T. Onuma, T. Honda, Y. Nanishi
    • Organizer
      2016 International Conference on Solid State Devices and Materials (SSDM2016)
    • Place of Presentation
      Tsukuba, Ibaraki, Japan
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Mist-CVD-Grown Crystalline In2O3 Thin-Film Transistors with Low Off-State Current2016

    • Author(s)
      S. Aikawa, K. Tanuma, T. Kobayashi, T. Yamaguchi, T. Onuma, T. Honda
    • Organizer
      The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18)
    • Place of Presentation
      Nagoya, Aichi, Japan
    • Year and Date
      2016-08-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Strain Relaxation Analysis Using In-situ X-ray Reciprocal Space Mapping Measurements in RF-MBE Growth of GaInN2016

    • Author(s)
      T. Yamaguchi, T. Sasaki, M. Takahasi, T. Onuma, T. Honda, Y. Nanishi
    • Organizer
      The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18)
    • Place of Presentation
      Nagoya, Aichi, Japan
    • Year and Date
      2016-08-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mist CVD growth of In2O3 films on (0001)alfa-Al2O3 substrates and (0001)GaN templates2016

    • Author(s)
      T. Kobayashi, K. Tanuma, T. Yamaguchi, T. Onuma, T. Honda
    • Organizer
      International Conference on Light-Emitting Devices and Thier Industrial Applications '16 (LEDIA '16)
    • Place of Presentation
      Yokohama, Kanagawa, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Epitaxial growth of GaInN by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy2015

    • Author(s)
      T. Yamaguchi, T. Honda, T. Onuma, T. Sasaki, M. Takahasi, T. Araki and Y. Nanishi
    • Organizer
      第25回日本MRS年次大会
    • Place of Presentation
      横浜、神奈川
    • Year and Date
      2015-12-09
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] ICP-RIEによるGaN,GaInN,InNエッチングとGaInN系LED製作への応用2015

    • Author(s)
      鳴谷建人, 山口智広, 荒木努, 名西憓之, 尾沼猛儀, 本田徹
    • Organizer
      第4回結晶工学未来塾
    • Place of Presentation
      東京
    • Year and Date
      2015-10-29
    • Related Report
      2015 Annual Research Report
  • [Presentation] In-situ X-ray Reciprocal Space Mapping Measurements in GaInN Growth on GaN by RF-MBE2015

    • Author(s)
      T. Yamaguchi, T. Sasaki, K. Narutani, M. Sawada, R. Deki, T. Onuma, T. Honda, M. Takahasi, and Y. Nanishi
    • Organizer
      The 31st North American Conference on Molecular Beam Epitaxy (NAMBE 2015)
    • Place of Presentation
      Mayan Riviera, Mexico
    • Year and Date
      2015-10-07
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comprehensive study on inductively coupled plasma reactive ion etching of GaN and InN2015

    • Author(s)
      K. Narutani, T. Yamaguchi, T. Araki, Y. Nanishi, T. Onuma, and T. Honda
    • Organizer
      The 31st North American Conference on Molecular Beam Epitaxy (NAMBE 2015)
    • Place of Presentation
      Mayan Riviera, Mexico
    • Year and Date
      2015-10-07
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] RF-MBE法によるGaN上GaInN成長におけるその場X線逆格子マッピング測定2015

    • Author(s)
      澤田 匡崇, 山口 智広, 佐々木 拓生, 鳴谷 建人, 出来 亮太, 尾沼 猛儀, 本田 徹, 高橋 正光, 名西 憓之
    • Organizer
      2015年秋季応用物理学会
    • Place of Presentation
      名古屋、愛知
    • Year and Date
      2015-09-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] α-Ga2O3 and α-(AlGa)2O3 Buffer Layers in Growth of GaN2015

    • Author(s)
      T. Yamaguchi, T. Hatakeyama, K. Tanuma, T. Hirasaki, H. Murakami, T. Onuma and T. Honda
    • Organizer
      11th International Conference On Nitride Semiconductors (ICNS-11)
    • Place of Presentation
      Beijing, China
    • Year and Date
      2015-09-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of Group-III Oxides by Mist Chemical Vapor Deposition and Discussion on Thier Growth Mechanisms2015

    • Author(s)
      T. Yamaguchi, K. Tanuma, H. Nagai, T. Onuma, T. Honda, and M. Sato
    • Organizer
      22nd International Society of Pure & Applied Coordination Chemistry Symposium (SPACC 22)
    • Place of Presentation
      Namibia
    • Year and Date
      2015-08-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Inductively coupled plasma reactive ion etching of GaN and InN2015

    • Author(s)
      K. Narutani, T. Yamaguchi, T. Araki, Y. Nanishi, T. Onuma, and T. Honda
    • Organizer
      34th Electronic Materials Symposium
    • Place of Presentation
      守山、滋賀
    • Year and Date
      2015-07-16
    • Related Report
      2015 Annual Research Report
  • [Presentation] Growth mechanisms of InN and its alloys using droplet elimination by radical beam irradiation2015

    • Author(s)
      T. Yamaguchi, T. Araki, T. Onuma,, T. Honda, Y. Nanishi
    • Organizer
      EMN droplet
    • Place of Presentation
      Phuket, Thailand
    • Year and Date
      2015-05-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 誘導結合型プラズマ反応性イオンエッチングによるInN エッチング2015

    • Author(s)
      鳴谷建人, 山口智広, 荒木努, 名西憓之, 尾沼猛儀, 本田徹
    • Organizer
      第7回窒化物半導体結晶成長講演会
    • Place of Presentation
      仙台、宮城
    • Year and Date
      2015-05-07
    • Related Report
      2015 Annual Research Report
  • [Presentation] ミストCVDによるalpha-(AlGa)2O3混晶成長の基礎検討 -alpha-Ga2O3と比較したalpha-Al2O3の成長速度の検討-2015

    • Author(s)
      高橋 幹夫, 畠山 匠, 尾沼 猛儀, 山口 智広, 本田 徹
    • Organizer
      第62回応用物理学会春季講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth and doping of In-based nitride semiconductors using DERI method2015

    • Author(s)
      T. Yamaguchi, T. Araki, T. Onuma, T. Honda and Y. Nanishi
    • Organizer
      The 2015 Materials Challenges in Alternative and Renewable Energy Conference (MCARE 2015)
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2015-02-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Progress in InGaN growth by RF-MBE and development to optical device fabrication2015

    • Author(s)
      T. Yamaguchi, T. Araki, T. Onuma, T. Honda and Y. Nanishi
    • Organizer
      SPIE Photonic West 2015
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2015-02-09
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Fabrication of alpha-(AlGa)2O3 on sapphire substrate by mist CVD2014

    • Author(s)
      T. Hatakeyama, K. Tanuma, S. Osawa, Y. Sugiura, T. Onuma, T. Hirasaki, H. Murakami, T. Yamaguchi and T. Honda
    • Organizer
      10th International Symposium on Semiconductor Light Emitting Devices (ISSLED 2014)
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2014-12-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth and characterization of Ga-In-O by mist CVD2014

    • Author(s)
      K. Tanuma, T. Hatakeyama, R. Goto, T. Onuma, T. Yamaguchi and T. Honda
    • Organizer
      The 13th International Symposium on Advanced Technology (ISAT-13)
    • Place of Presentation
      Danang, Vietnam
    • Year and Date
      2014-11-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth of oxide thin films by mist chemical vapor deposition – Application of corundum-structured oxides for growth of GaN -2014

    • Author(s)
      T. Hatakeyama, K. Tanuma, S. Osawa, Y. Sugiura, T. Onuma, T. Yamaguchi and T. Honda
    • Organizer
      The 13th International Symposium on Advanced Technology (ISAT-13)
    • Place of Presentation
      Danang, Vietnam
    • Year and Date
      2014-11-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] RF-MBE growth of InGaN alloys and fabrication of optical device structures2014

    • Author(s)
      T. Yamaguchi, T. Araki, T. Onuma, T. Honda and Y. Nanishi
    • Organizer
      The Corroborative Conference on Crystal Growth (3CG)
    • Place of Presentation
      Phuket, Tailand
    • Year and Date
      2014-11-05
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Mist chemical vapor deposition growth of group-III oxides and its growth mechanism2014

    • Author(s)
      T. Yamaguchi, T. Hatakeyama, K. Tanuma, M. Sugimoto, H. Nagai, T. Onuma, M. Sato and T. Honda
    • Organizer
      The 21st International SPACC (The Society of Pure and Applied Coordination Chemistry) Symposium (SPACC 21)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2014-11-01
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Growth of InGaN alloys using DERI method and fabrication of LED structures2014

    • Author(s)
      T. Yamaguchi, T. Araki, T. Onuma, T. Honda and Y. Nanishi
    • Organizer
      Energy Materials Nanotechnology open access week (EMN open access week)
    • Place of Presentation
      Chengdu, China
    • Year and Date
      2014-09-24
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Mist CVD法を用いて製作したalpha-Al2O3基板上Ga-In-O薄膜の評価2014

    • Author(s)
      田沼 圭亮, 畠山 匠, 尾沼 猛儀, 山口 智広, 窪谷 茂幸, 片山 竜二, 松岡 隆志, 本田 徹
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth of alpha-Ga2O3 on alpha-Al2O3 substrate by mist CVD and growth of GaN on alpha-Ga2O3 buffer layer by RF-MBE2014

    • Author(s)
      T. Yamaguchi, T. Hatakeyama, Y. Sugiura, T. Onuma and T. Honda
    • Organizer
      18th International Conference on Molecular Beam Epitaxy (ICMBE 2014)
    • Place of Presentation
      Arizona, USA
    • Year and Date
      2014-09-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth of pn-GaInN structures by RF-MBE and fabrication of homojunction-type light emitting diodes2014

    • Author(s)
      K. Narutani, T. Yamaguchi, K. Wang, T .Araki, Y. Nanishi, L. Sang, M. Sumiya, S. Fujioka, T. Onuma and T. Honda
    • Organizer
      18th International Conference on Molecular Beam Epitaxy (ICMBE 2014)
    • Place of Presentation
      Arizona, USA
    • Year and Date
      2014-09-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Kelvin force microscopic study on GaN layers grown on (111)Al templates by RF-MBE2014

    • Author(s)
      T. Honda, T. Yamaguchi, Y. Sugiura, D. Isono, Y. Watanabe, S. Osawa, D. Tajimi, T. Iwabuchi, S. Kuboya, T. Tanikawa, R. Katayama and T. Matsuoka
    • Organizer
      18th International Conference on Molecular Beam Epitaxy (ICMBE 2014)
    • Place of Presentation
      Arizona, USA
    • Year and Date
      2014-09-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Optical properties of GaInN p-n homojunction blue-green light-emitting-diodes2014

    • Author(s)
      T. Onuma, K. Narutani, S. Fujioka, T. Yamaguchi, K. Wang, T. Araki, Y. Nanishi, L. Sang, M. Sumiya, T. Honda
    • Organizer
      International Union of Materials Research Societies, International Conference in Asia 2014 (IUMRS-ICA 2014)
    • Place of Presentation
      Fujuoka, Japan
    • Year and Date
      2014-08-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] RF-MBE growth of GaInN films using DERI method and fabrication of p-n homojunction blue-green light-emitting diodes2014

    • Author(s)
      T. Yamaguchi, K. Narutani, T. Onuma, T. Araki, T. Honda and Y. Nanishi
    • Organizer
      The 6th International Symposium on Functional Materials (ISFM 2014)
    • Place of Presentation
      Singapore
    • Year and Date
      2014-08-07
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] RF-MBE法によるGaInN厚膜成長とpnホモ接合型LEDの製作2014

    • Author(s)
      鳴谷 建人, 山口 智広, Ke Wang, 荒木 努, 名西やすし, Liwen Sang, 角谷 正友, 藤岡 秀平, 尾沼 猛儀, 本田 徹
    • Organizer
      第6回窒化物半導体結晶成長講演会
    • Place of Presentation
      愛知
    • Year and Date
      2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation of Ga-In-O films grown on alpha-Al2O3 substrates by mist CVD2014

    • Author(s)
      K. Tanuma, T. Hatakeyama, T. Onuma, T. Yamaguchi and T. Honda
    • Organizer
      The 33rd Electronic Materials Symposium
    • Place of Presentation
      静岡
    • Year and Date
      2014-07-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Blue-green light emitting diodes using pn-GaInN homojunction type-structure2014

    • Author(s)
      K. Narutani, T. Yamaguchi, K. Wang, T. Araki, Y. Nanishi, L. Sang, M. Sumiya, S. Fujioka, T. Onuma and T. Honda
    • Organizer
      The 33rd Electronic Materials Symposium
    • Place of Presentation
      静岡
    • Year and Date
      2014-07-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] RF-MBE growth of group-III nitrides and mist CVD growth of group-III oxides2014

    • Author(s)
      T. Yamaguchi, T. Onuma, H. Nagai, C. Mochizuki, M. Sato, T. Honda, T. Araki and Y. Nanishi
    • Organizer
      Third International Conference on Materials Energy and Environments (ICMEE 2014)
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2014-07-03
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Mist CVD growth of Ga-In-O films grown on alpha-Al2O3 substrates2014

    • Author(s)
      K. Tanuma, T. Hatakeyama, T. Onuma, T. Yamaguchi, T. Honda
    • Organizer
      International Union of materials Research Societies-International Conference on Electronic Materials 2014 (IUMRS-ICEM 2014)
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2014-06-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Mist Chemical Vapor Deposition Growth of Ga2O3, In2O3 and Their Alloys2014

    • Author(s)
      T. Yamaguchi, K. Tanuma, T. Hatakeyama, T. Onuma and T. Honda
    • Organizer
      The 41st International Symposium on Compound Semiconductor (ISCS 2014)
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2014-05-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] RF-MBE growth of GaInN ternary alloys using DERI method and fabrication of pn-GaInN LEDs2014

    • Author(s)
      T. Yamaguchi, K. Narutani, T. Onuma, T. Honda, T. Araki and Y. Nanishi
    • Organizer
      2014 International Workshop on Future Energy Materials and Devices (IWFEMD 2014)
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2014-05-02
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] InN および In-rich InGaN をベースとした窒化物半導体による長波長発光デバイス開発への挑戦

    • Author(s)
      名西やすし、山口智広、荒木努
    • Organizer
      LED総合フォーラム2013in徳島
    • Place of Presentation
      徳島
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 表面酸化物によるGaN表面フェルミ準位に及ぼす影響

    • Author(s)
      網谷良介、多次見大樹、杉浦洋平、山口智広、本田徹
    • Organizer
      日本結晶成長学会ナノ構造・エピタキシャル成長分科会 第5回 窒化物半導体結晶成長講演会
    • Place of Presentation
      大阪
    • Related Report
      2013 Annual Research Report
  • [Presentation] DERI法を応用したRF-MBEによるInGaN成長と評価

    • Author(s)
      荒木努、山口智広、名西やすし
    • Organizer
      日本結晶成長学会ナノ構造・エピタキシャル成長分科会 第5回 窒化物半導体結晶成長講演会
    • Place of Presentation
      大阪
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Influence of native surface oxide on GaN surface band bending

    • Author(s)
      R. Amiya, Y. Sugiura, D. Tajimi, T. Yamaguchi, T. Honda
    • Organizer
      32nd Electronic Materials Symposium (EMS-32)
    • Place of Presentation
      滋賀
    • Related Report
      2013 Annual Research Report
  • [Presentation] RF-MBE growth of GaN films on alpha-Ga2O3/sapphire template

    • Author(s)
      T. Hatakeyama, T. Yamaguchi, D. Tajimi, Y. Sugiura, T. Honda
    • Organizer
      32nd Electronic Materials Symposium (EMS-32)
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] RF-MBE growth of GaN films on nitridated alpha-Ga2O3 buffer layer

    • Author(s)
      T. Yamaguchi, T. Hatakeyama, D. Tajimi, Y. Sugiura, T. Onuma, T. Honda
    • Organizer
      17th International Conference on Crystal Growth and Epitaxy (ICCGE-17)
    • Place of Presentation
      Warsaw, Poland
    • Related Report
      2013 Annual Research Report
  • [Presentation] RF-MBE Growth of InGaN Ternally Alloys: Advantage of DERI method

    • Author(s)
      T. Yamaguchi, K. Wang, T. Honda, E. Yoon, T. Araki, Y. Nanishi
    • Organizer
      The 16th Canadian Semiconductor Science and Technology Conference (CSSTC2013)
    • Place of Presentation
      Thunder Bay, Canada
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] RF-MBE Growth and Characterization of GaN Films on alpha-Ga203/Sapphire Template

    • Author(s)
      T. Hatakeyama, T. Yamaguchi, D. Tajimi, Y. Sugiura, T. Honda
    • Organizer
      10th International Conference on Nitride Semiconductors 2013 (ICNS-10)
    • Place of Presentation
      Washington D.C., U.S.A.
    • Related Report
      2013 Annual Research Report
  • [Presentation] 表面酸化物のGaN表面フェルミ準位と表面バンド曲がりに及ぼす影響

    • Author(s)
      網谷良介、多次見大樹、杉浦洋平、山口智広、本田徹
    • Organizer
      2013年秋季 第74回 応用物理学会学術講演会
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] ミストCVD法を用いたGaN基板上へのGa2O3成長

    • Author(s)
      多次見大樹、奥秋良隆、畠山匠、金子健太郎、藤田静雄、尾沼猛儀、山口智広、本田徹
    • Organizer
      2013年秋季 第74回 応用物理学会学術講演会
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] MBE Growth of Thick InN and InGaN Films using DERI Method

    • Author(s)
      T. Araki, T. Yamaguchi, E. Yoon, Y. Nanishi
    • Organizer
      2013 JSPS-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ga2O3上GaN成長とGaN上Ga2O3成長

    • Author(s)
      山口智広、畠山匠、多次見大樹、尾沼猛儀、本田徹
    • Organizer
      第43回結晶成長国内会議
    • Place of Presentation
      長野
    • Related Report
      2013 Annual Research Report
  • [Presentation] Growth of InN and Related Alloys using DERI Method toward Fabrication of Optoelectronics Devices

    • Author(s)
      T. Yamaguchi, K. Wang, T. Honda, E. Yoon, T. Araki, Y. Nanishi
    • Organizer
      The 2nd International Conference on Advanced Electromaterials (ICAE2013)
    • Place of Presentation
      Juju, Korea
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Impact of Native Surface Oxide on GaN Layers for their Surface Band Bending

    • Author(s)
      R. Amiya, Y. Sugiura, D. Tajimi, T. Yamaguchi, T. Honda
    • Organizer
      The 2nd International Conference on Advanced Electromaterials (ICAE2013)
    • Place of Presentation
      Juju, Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] DERI Method; Possible Approach to Green, Red and IR Light Emitters Based on Nitride Semiconductors

    • Author(s)
      Y. Nanishi, T. Yamaguchi, T. Araki and E. Yoon
    • Organizer
      SPIE Photonics West 2014
    • Place of Presentation
      San Francisco, U.S.A.
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] GaInNのRF-MBE成長とpn ホモ接合型青緑色LEDの製作

    • Author(s)
      鳴谷建人,山口智広,Ke Wang,荒木努,名西やすし,Liwen Sang,角谷正友,藤岡秀平,尾沼猛儀,本田徹
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Annual Research Report
  • [Remarks] 研究室HP

    • URL

      http://www.ns.kogakuin.ac.jp/~ct13354/

    • Related Report
      2014 Annual Research Report
  • [Remarks] 工学院大学教員プロフィール

    • URL

      http://er-web.sc.kogakuin.ac.jp/Profiles/10/0000905/profile.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] デバイスマテリアルズ研究室HP (工学院大学 工学部 情報通信工学科 山口(智)研)

    • URL

      http://www.ns.kogakuin.ac.jp/~ct13354/index.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] 教員プロフェール (工学院大学 工学部 情報通信工学科 山口(智))

    • URL

      http://er-web.sc.kogakuin.ac.jp/Profiles/10/0000905/profile.html

    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2019-07-29  

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