| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2014: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
|
|---|
| Outline of Final Research Achievements |
Aiming at realization of diamond wafers with a size larger than 1-inch size, I conducted numerical simulation of the plasma for the actual apparatus under the adopted growth conditions, which could give information about plasmas to grow such large size diamond with good uniformity as well as high growth rate. I found insufficiency in a conventional model to predict distribution of the growth rate. I modified the model and succeed in explaining the uniformity/non-uniformity of the growth rates. As a result of studying effects of small amount of nitrogen in the gas phase and preparation of the substrates, a 2-inch size mosaic diamond wafer was realized. For realization of further higher growth rate over larger area, effect of the rare gas was studied. I found that the introduction of the rare gas could realize improved growth rates with maintaining of uniformity.
|
