半導体製作工程におけるばらつき見える化教材の検討

• Project/Area Number: 25H00194
• Research Category: Grant-in-Aid for Encouragement of Scientists
• Allocation Type: Single-year Grants
• Review Section: 2150:Electrical and electronic engineering and related fields
• Research Institution: Toyohashi University of Technology
• Principal Investigator: 飛沢 健 豊橋技術科学大学, 高度専門員
• Project Period (FY): 2025-04-01 – 2026-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥460,000 (Direct Cost: ¥460,000); Fiscal Year 2025: ¥460,000 (Direct Cost: ¥460,000)