In Situ Transmission Electron Microscopy of Phenomena in Liquid using MEMS Liquid Cell

• Project/Area Number: 26246009
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nano/Microsystems
• Research Institution: The University of Tokyo
• Principal Investigator: Fujita Hiroyuki 東京大学, 生産技術研究所, 教授 (90134642)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥41,730,000 (Direct Cost: ¥32,100,000、Indirect Cost: ¥9,630,000); Fiscal Year 2016: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000); Fiscal Year 2015: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000); Fiscal Year 2014: ¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
• Keywords: マイクロマシン / 電子顕微鏡 / その場観察 / マイクロ加工技術 / バイオテクノロジー / 液体セル

Outline of Final Research Achievements

We have developed MEMS-based liquid cells for TEM (transmission electron microscope) in-situ observation, which enabled nano-scale real-time imaging of reactions in liquid. Very high resolution imaging down to 4 nm was achieved by the liquid cell with graphene membranes for a TEM observation window. Also a monolithic liquid cell using a suspended SiN-covered-nano channel allowed the objective detection of water in the channel by EELS measurement as well as an easy and quick encapsulation of the liquid sample. Furthermore, it was possible to raise the sample liquid temperature up to 85 degree C by the integration of a micro heater and a temperature sensor in the liquid cell. Finally, reaction of bio molecules were visualized through the motion of metal nano-particles attached to target molecules. Antibody-antigen binding and aggregation of protein molecules by calixarene were observed in liquid.

Research Products

• [Journal Article] 真実接触点のその場観察について (2017)
  • Author(s): 佐藤 隆昭, 藤田 博之
  • Journal Title: 表面科学会 Volume: 38 Pages: 105-110
  • NAID: 130005475389
  • Peer Reviewed
• [Journal Article] An experimental system combined with a micromachine and double-tilt TEM holder (2016)
  • Author(s): T. Sato, E. Tochigi, T. Mizoguchi, Y. Ikuhara, H. Fujita
  • Journal Title: Microelectronic Engineering Volume: 164 Pages: 43-47
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Time-Lapse Nanoscopy of Friction in the Non-Amontons and Non-Coulomb Regime (2015)
  • Author(s): T. Ishida, T. Sato, T. Ishikawa, M. Oguma, N. Itamura, K. Goda, N. Sasaki and H. Fujita
  • Journal Title: Nano Letters Volume: 15 Pages: 1476-1480
  • DOI: 10.1021/nl5032502
  • Peer Reviewed
• [Journal Article] 固体潤滑の機構解明を目指すナノせん断破壊の実時間TEM観察 (2015)
  • Author(s): 佐藤 隆昭
  • Journal Title: トライボロジスト Volume: 60 Pages: 98-104
  • Peer Reviewed
• [Journal Article] 見るは知るにつながる! 摩擦界面のその場観察 (2014)
  • Author(s): 佐藤隆昭, 鍋屋信介, 石田忠, 高山由貴, 藤田博之
  • Journal Title: 高分子 Volume: 63 Pages: 299-301
  • Peer Reviewed
• [Presentation] Real-time TEM observation of single nano-asperity friction (2017)
  • Author(s): Hiroyuki Fujita
  • Organizer: ナノトライボロジー研究センター開設シンポジウム
  • Place of Presentation: University of Electro-Communications, Chofu, Tokyo
  • Invited
• [Presentation] 固体潤滑の機構解明に迫るためのナノ接点の実時間TEM観察 (2016)
  • Author(s): 立川冴子、佐藤隆昭、藤田博之
  • Organizer: トライボロジー会議2016秋
  • Place of Presentation: 朱鷺メッセ、新潟市、新潟県
  • Year and Date: 2016-10-12
• [Presentation] Overview of MEMS/NEMS Research (2016)
  • Author(s): Hiroyuki Fujita
  • Organizer: 10th NAMIS international Autumn school 2016
  • Place of Presentation: University of Tokyo, Meguro, Tokyo
  • Year and Date: 2016-08-29
  • Invited
• [Presentation] ULTRA-THIN NANOCHANNEL-BASED LIQUID TEM CELL FOR EELS ANALYSIS AND HIGH RESOLUTION IMAGING (2016)
  • Author(s): Y.B. Arik, R. Matsui, E. Sarajlic, Y. Takayama, B.A. Boom, E. Berenschot, S. Le Gac, N.R. Tas, H. Fujita
  • Organizer: The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)
  • Place of Presentation: Shanghai, China
  • Year and Date: 2016-01-24
  • Int'l Joint Research
• [Presentation] BioMEMS towards Medical Diagnosis (2016)
  • Author(s): Hiroyuki Fujita
  • Organizer: The 22nd World Micromachine Summit
  • Place of Presentation: Hyatt regency, Shinjyuku, Japan
  • Int'l Joint Research / Invited
• [Presentation] Thoughts on Industry-Academia Relation (2016)
  • Author(s): Hiroyuki Fujita
  • Organizer: APCOT 2016
  • Place of Presentation: Kanazawa, Ishikawa, Japan
  • Int'l Joint Research / Invited
• [Presentation] In-situ TEM observation of formation and breakage at real point of contact (2016)
  • Author(s): Hiroyuki Fujita, Takaaki Sato
  • Organizer: NaTRS (UEC Nanotribology Research Station) International Colloquium
  • Place of Presentation: University of Electro-Communications, Chofu, Tokyo
  • Invited
• [Presentation] SiN 製薄膜ナノチャネルによる液中の金ナノ粒子のTEM観察 (2015)
  • Author(s): 松井遼平, 高山由貴, 久米村百子, 藤田博之
  • Organizer: 化学とマイクロ・ナノシステム学会 第32回研究会 32nd
  • Place of Presentation: 福岡, 北九州国際会議場
  • Year and Date: 2015-11-26
• [Presentation] "In Situ"Tem ovservation usir actuators and sensors (2015)
  • Author(s): Hiroyuki Fujita
  • Organizer: JUNTE 2015
  • Place of Presentation: Lyon, France
  • Year and Date: 2015-11-19
  • Int'l Joint Research / Invited
• [Presentation] 水中生体分子の高分解能アクティブ観察に向けたグラフェン隔壁を持つTEM用MEMSリキッドセル (2015)
  • Author(s): 松井遼平, 高山由貴, Laurent Jalabert, 佐藤隆昭, 藤田博之
  • Organizer: 平成 27 年電気学会センサ・マイクロマシン部門大会 第 32 回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 新潟, 朱鷺メッセ
  • Year and Date: 2015-10-28
• [Presentation] Toward Real Time Visualization of DNA and Gold Nanoparticle Hybridization Events using Heater-Integrated Liquid Cells in TEM (2015)
  • Author(s): メノン ヴィヴェーク，Jalabert Laurent，久米村 百子，藤田 博之
  • Organizer: 平成 27 年電気学会センサ・マイクロマシン部門大会 第 32 回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 新潟, 朱鷺メッセ
  • Year and Date: 2015-10-28
• [Presentation] MEMSの昨日、今日、明日 (2015)
  • Author(s): 藤田博之
  • Organizer: 電気学会第３２回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 新潟, 朱鷺メッセ
  • Year and Date: 2015-10-28
  • Invited
• [Presentation] Experimental system combined with a micromachine and double-tilt TEM holder (2015)
  • Author(s): T. Sato, E. Tochigi, T. Mizoguchi, Y. Ikuhara, H. Fujita
  • Organizer: MNE2015
  • Place of Presentation: Hague, Netherlands
  • Year and Date: 2015-09-21
  • Int'l Joint Research
• [Presentation] Study of Viscous Deformation of SiO2 by Nanoscale Tensile Test under In-Situ Observation (2014)
  • Author(s): Y. Takayama, T. Ishida, T. Sato, L. Jalabert and H. Fujita
  • Organizer: 27th International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Toyama International Conference Center, Toyama, Japan
  • Year and Date: 2014-11-10 – 2014-11-13
• [Presentation] MEMS と TEM を組み合わせた実験系による単接点 Pt ナノ摩擦のリアルタイム観察 (2014)
  • Author(s): 佐藤 隆昭, Jalabert Laurent, 高山 由貴, 藤田 博之
  • Organizer: 第31回センサシンポジウム
  • Place of Presentation: くにびきめっせ、松枝、島根
  • Year and Date: 2014-10-20 – 2014-10-22
• [Presentation] マイクロ流体バルブを集積したTEM観察のための液体セル (2014)
  • Author(s): ヴァレ ゴッドフォア、ジャラベール ロラン、久米村百子、髙山由貴、佐藤隆昭、藤田博之
  • Organizer: 電気学会 センサ・マイクロマシン部門主催 第３１回「センサ・マイクロマシンと応用システム」シンポジウム 31st Sensor Symposium
  • Place of Presentation: くにびきめっせ、松枝、島根
  • Year and Date: 2014-10-20 – 2014-10-22
• [Presentation] Real-time TEM observation of single-asperity nanofriction (2014)
  • Author(s): Takaaki Sato, Laurent Jalabert, Yuki Takayama, Hiroyuki Fujita
  • Organizer: Gordon research conference (tribology)
  • Place of Presentation: Waltham, MA, USA
  • Year and Date: 2014-07-20 – 2014-07-22
• [Presentation] In-Situ STEM Observation of Tribology and Electrical Measurement on Ru and Ruo2 Nano Contact for Probe-based Data Storage (2014)
  • Author(s): S. Nabeya, T. Akao, Y. Takayama, T. Sato, L. Jalabert and H. Fujita
  • Organizer: The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
  • Place of Presentation: Daegu Exhibition & Convention Center, Daegu, South Korea
  • Year and Date: 2014-06-29 – 2014-07-02
• [Presentation] Thermal conductivity of single DLC nanowire (2014)
  • Author(s): L. Jalabert, T. Sato, G. Valet, D. Guo, R. Kometani, H. Fujita, S. Volz
  • Organizer: E-MRS
  • Place of Presentation: Congress Center, Lille, France
  • Year and Date: 2014-05-26 – 2014-05-30
• [Presentation] 単一接点摩擦のリアルタイムTEM観察 (2014)
  • Author(s): 佐藤 隆昭, Laurent Jalabert, 高山由貴, 藤田 博之
  • Organizer: トライボロジー会議2014春東京
  • Place of Presentation: 国立オリンピック記念青少年総合センター, 代々木, 東京
  • Year and Date: 2014-05-19 – 2014-05-21