• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

In Situ Transmission Electron Microscopy of Phenomena in Liquid using MEMS Liquid Cell

Research Project

Project/Area Number 26246009
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Nano/Microsystems
Research InstitutionThe University of Tokyo

Principal Investigator

Fujita Hiroyuki  東京大学, 生産技術研究所, 教授 (90134642)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥41,730,000 (Direct Cost: ¥32,100,000、Indirect Cost: ¥9,630,000)
Fiscal Year 2016: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
Fiscal Year 2015: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
Fiscal Year 2014: ¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
Keywordsマイクロマシン / 電子顕微鏡 / その場観察 / マイクロ加工技術 / バイオテクノロジー / 液体セル
Outline of Final Research Achievements

We have developed MEMS-based liquid cells for TEM (transmission electron microscope) in-situ observation, which enabled nano-scale real-time imaging of reactions in liquid. Very high resolution imaging down to 4 nm was achieved by the liquid cell with graphene membranes for a TEM observation window. Also a monolithic liquid cell using a suspended SiN-covered-nano channel allowed the objective detection of water in the channel by EELS measurement as well as an easy and quick encapsulation of the liquid sample. Furthermore, it was possible to raise the sample liquid temperature up to 85 degree C by the integration of a micro heater and a temperature sensor in the liquid cell. Finally, reaction of bio molecules were visualized through the motion of metal nano-particles attached to target molecules. Antibody-antigen binding and aggregation of protein molecules by calixarene were observed in liquid.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (25 results)

All 2017 2016 2015 2014

All Journal Article (5 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 5 results,  Acknowledgement Compliant: 1 results) Presentation (20 results) (of which Int'l Joint Research: 5 results,  Invited: 7 results)

  • [Journal Article] 真実接触点のその場観察について2017

    • Author(s)
      佐藤 隆昭, 藤田 博之
    • Journal Title

      表面科学会

      Volume: 38 Pages: 105-110

    • NAID

      130005475389

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An experimental system combined with a micromachine and double-tilt TEM holder2016

    • Author(s)
      T. Sato, E. Tochigi, T. Mizoguchi, Y. Ikuhara, H. Fujita
    • Journal Title

      Microelectronic Engineering

      Volume: 164 Pages: 43-47

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Time-lapse nanoscopy of friction in the non-Amontons and non-Coulomb regime2015

    • Author(s)
      T. Ishida, T. Sato, T. Ishikawa, M. Oguma, N. Itamura, K. Goda, N. Sasaki and H. Fujita
    • Journal Title

      Nano Lett.

      Volume: 15 Issue: 3 Pages: 1476-1480

    • DOI

      10.1021/nl5032502

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 固体潤滑の機構解明を目指すナノせん断破壊の実時間TEM観察2015

    • Author(s)
      佐藤 隆昭
    • Journal Title

      トライボロジスト

      Volume: 60 Pages: 98-104

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 見るは知るにつながる! 摩擦界面のその場観察2014

    • Author(s)
      佐藤隆昭, 鍋屋信介, 石田忠, 高山由貴, 藤田博之
    • Journal Title

      高分子

      Volume: 63 Pages: 299-301

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Presentation] Real-time TEM observation of single nano-asperity friction2017

    • Author(s)
      Hiroyuki Fujita
    • Organizer
      ナノトライボロジー研究センター開設シンポジウム
    • Place of Presentation
      University of Electro-Communications, Chofu, Tokyo
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 固体潤滑の機構解明に迫るためのナノ接点の実時間TEM観察2016

    • Author(s)
      立川冴子、佐藤隆昭、藤田博之
    • Organizer
      トライボロジー会議2016秋
    • Place of Presentation
      朱鷺メッセ、新潟市、新潟県
    • Year and Date
      2016-10-12
    • Related Report
      2016 Annual Research Report
  • [Presentation] Overview of MEMS/NEMS Research2016

    • Author(s)
      Hiroyuki Fujita
    • Organizer
      10th NAMIS international Autumn school 2016
    • Place of Presentation
      University of Tokyo, Meguro, Tokyo
    • Year and Date
      2016-08-29
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] ULTRA-THIN NANOCHANNEL-BASED LIQUID TEM CELL FOR EELS ANALYSIS AND HIGH RESOLUTION IMAGING2016

    • Author(s)
      Y.B. Arik, R. Matsui, E. Sarajlic, Y. Takayama, B.A. Boom, E. Berenschot, S. Le Gac, N.R. Tas, H. Fujita
    • Organizer
      The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2016-01-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] BioMEMS towards Medical Diagnosis2016

    • Author(s)
      Hiroyuki Fujita
    • Organizer
      The 22nd World Micromachine Summit
    • Place of Presentation
      Hyatt regency, Shinjyuku, Japan
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thoughts on Industry-Academia Relation2016

    • Author(s)
      Hiroyuki Fujita
    • Organizer
      APCOT 2016
    • Place of Presentation
      Kanazawa, Ishikawa, Japan
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] In-situ TEM observation of formation and breakage at real point of contact2016

    • Author(s)
      Hiroyuki Fujita, Takaaki Sato
    • Organizer
      NaTRS (UEC Nanotribology Research Station) International Colloquium
    • Place of Presentation
      University of Electro-Communications, Chofu, Tokyo
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] SiN 製薄膜ナノチャネルによる液中の金ナノ粒子のTEM観察2015

    • Author(s)
      松井遼平, 高山由貴, 久米村百子, 藤田博之
    • Organizer
      化学とマイクロ・ナノシステム学会 第32回研究会 32nd
    • Place of Presentation
      福岡, 北九州国際会議場
    • Year and Date
      2015-11-26
    • Related Report
      2015 Annual Research Report
  • [Presentation] "In Situ"Tem ovservation usir actuators and sensors2015

    • Author(s)
      Hiroyuki Fujita
    • Organizer
      JUNTE 2015
    • Place of Presentation
      Lyon, France
    • Year and Date
      2015-11-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 水中生体分子の高分解能アクティブ観察に向けたグラフェン隔壁を持つTEM用MEMSリキッドセル2015

    • Author(s)
      松井遼平, 高山由貴, Laurent Jalabert, 佐藤隆昭, 藤田博之
    • Organizer
      平成 27 年電気学会センサ・マイクロマシン部門大会 第 32 回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      新潟, 朱鷺メッセ
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] Toward Real Time Visualization of DNA and Gold Nanoparticle Hybridization Events using Heater-Integrated Liquid Cells in TEM2015

    • Author(s)
      メノン ヴィヴェーク,Jalabert Laurent,久米村 百子,藤田 博之
    • Organizer
      平成 27 年電気学会センサ・マイクロマシン部門大会 第 32 回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      新潟, 朱鷺メッセ
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] MEMSの昨日、今日、明日2015

    • Author(s)
      藤田博之
    • Organizer
      電気学会第32回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      新潟, 朱鷺メッセ
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Experimental system combined with a micromachine and double-tilt TEM holder2015

    • Author(s)
      T. Sato, E. Tochigi, T. Mizoguchi, Y. Ikuhara, H. Fujita
    • Organizer
      MNE2015
    • Place of Presentation
      Hague, Netherlands
    • Year and Date
      2015-09-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study of Viscous Deformation of SiO2 by Nanoscale Tensile Test under In-Situ Observation2014

    • Author(s)
      Y. Takayama, T. Ishida, T. Sato, L. Jalabert and H. Fujita
    • Organizer
      27th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2014-11-10 – 2014-11-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS と TEM を組み合わせた実験系による単接点 Pt ナノ摩擦のリアルタイム観察2014

    • Author(s)
      佐藤 隆昭, Jalabert Laurent, 高山 由貴, 藤田 博之
    • Organizer
      第31回センサシンポジウム
    • Place of Presentation
      くにびきめっせ、松枝、島根
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] マイクロ流体バルブを集積したTEM観察のための液体セル2014

    • Author(s)
      ヴァレ ゴッドフォア、ジャラベール ロラン、久米村百子、髙山由貴、佐藤隆昭、藤田博之
    • Organizer
      電気学会 センサ・マイクロマシン部門主催 第31回「センサ・マイクロマシンと応用システム」シンポジウム 31st Sensor Symposium
    • Place of Presentation
      くにびきめっせ、松枝、島根
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] Real-time TEM observation of single-asperity nanofriction2014

    • Author(s)
      Takaaki Sato, Laurent Jalabert, Yuki Takayama, Hiroyuki Fujita
    • Organizer
      Gordon research conference (tribology)
    • Place of Presentation
      Waltham, MA, USA
    • Year and Date
      2014-07-20 – 2014-07-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] In-Situ STEM Observation of Tribology and Electrical Measurement on Ru and Ruo2 Nano Contact for Probe-based Data Storage2014

    • Author(s)
      S. Nabeya, T. Akao, Y. Takayama, T. Sato, L. Jalabert and H. Fujita
    • Organizer
      The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu Exhibition & Convention Center, Daegu, South Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] Thermal conductivity of single DLC nanowire2014

    • Author(s)
      L. Jalabert, T. Sato, G. Valet, D. Guo, R. Kometani, H. Fujita, S. Volz
    • Organizer
      E-MRS
    • Place of Presentation
      Congress Center, Lille, France
    • Year and Date
      2014-05-26 – 2014-05-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] 単一接点摩擦のリアルタイムTEM観察2014

    • Author(s)
      佐藤 隆昭, Laurent Jalabert, 高山由貴, 藤田 博之
    • Organizer
      トライボロジー会議2014春東京
    • Place of Presentation
      国立オリンピック記念青少年総合センター, 代々木, 東京
    • Year and Date
      2014-05-19 – 2014-05-21
    • Related Report
      2014 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi