|Budget Amount *help
¥29,900,000 (Direct Cost: ¥23,000,000、Indirect Cost: ¥6,900,000)
Fiscal Year 2018: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2017: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2016: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2015: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2014: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
|Outline of Final Research Achievements
In the next-generation manufacturing, in order to improve the shape accuracy of parts to be manufactured, three-dimensional shape measurement at nanoscale is indispensable.
In this research, we systematized the uncertainty estimation theory using error separation and self-calibration. This was applied to the uncertainty analysis of a three-dimensional measuring machine and a semiconductor measuring device, and the effectiveness was confirmed by experimental verification. Furthermore, the uncertainty estimation method was applied to the optical three-dimensional measurement system, and it was experimentally demonstrated that shape measurement can be performed with sub-nanometer uncertainty by self-calibration.
As described above, the uncertainty estimation method has been put to practical use to improve the accuracy of the next generation three-dimensional shape in precision measurement.